FR2922350B1 - Sonde tomographique grand angle a haute resolution. - Google Patents

Sonde tomographique grand angle a haute resolution.

Info

Publication number
FR2922350B1
FR2922350B1 FR0707178A FR0707178A FR2922350B1 FR 2922350 B1 FR2922350 B1 FR 2922350B1 FR 0707178 A FR0707178 A FR 0707178A FR 0707178 A FR0707178 A FR 0707178A FR 2922350 B1 FR2922350 B1 FR 2922350B1
Authority
FR
France
Prior art keywords
angle tomographic
high resolution
tomographic probe
probe
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0707178A
Other languages
English (en)
Other versions
FR2922350A1 (fr
Inventor
Alain Bostel
Ludovic Renaud
Mikhail Yavor
Bernard Deconihout
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Priority to FR0707178A priority Critical patent/FR2922350B1/fr
Priority to EP08838185.0A priority patent/EP2198449B1/fr
Priority to US12/682,700 priority patent/US8074292B2/en
Priority to PCT/EP2008/063462 priority patent/WO2009047265A1/fr
Publication of FR2922350A1 publication Critical patent/FR2922350A1/fr
Application granted granted Critical
Publication of FR2922350B1 publication Critical patent/FR2922350B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0004—Imaging particle spectrometry

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR0707178A 2007-10-12 2007-10-12 Sonde tomographique grand angle a haute resolution. Expired - Fee Related FR2922350B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0707178A FR2922350B1 (fr) 2007-10-12 2007-10-12 Sonde tomographique grand angle a haute resolution.
EP08838185.0A EP2198449B1 (fr) 2007-10-12 2008-10-08 Sonde atomique tomographique grand angle a haute resolution
US12/682,700 US8074292B2 (en) 2007-10-12 2008-10-08 High resolution wide angle tomographic probe
PCT/EP2008/063462 WO2009047265A1 (fr) 2007-10-12 2008-10-08 Sonde tomographique grand angle a haute resolution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0707178A FR2922350B1 (fr) 2007-10-12 2007-10-12 Sonde tomographique grand angle a haute resolution.

Publications (2)

Publication Number Publication Date
FR2922350A1 FR2922350A1 (fr) 2009-04-17
FR2922350B1 true FR2922350B1 (fr) 2009-12-04

Family

ID=39167016

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0707178A Expired - Fee Related FR2922350B1 (fr) 2007-10-12 2007-10-12 Sonde tomographique grand angle a haute resolution.

Country Status (4)

Country Link
US (1) US8074292B2 (fr)
EP (1) EP2198449B1 (fr)
FR (1) FR2922350B1 (fr)
WO (1) WO2009047265A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2938963B1 (fr) * 2008-11-21 2010-11-12 Cameca Sonde atomique tomographique comportant un generateur electro-optique d'impulsions electriques haute tension.
CN103907171B (zh) * 2011-10-28 2017-05-17 莱克公司 静电离子镜
DE112015006478T5 (de) * 2015-04-21 2018-01-04 Cameca Instruments, Inc. Atomsonde mit weitem Sichtfeld
US10614995B2 (en) 2016-06-27 2020-04-07 Cameca Instruments, Inc. Atom probe with vacuum differential
WO2019152018A1 (fr) 2018-01-31 2019-08-08 Cameca Instruments, Inc. Entrée de faisceau d'énergie sur des échantillons de sonde atomique à partir de multiples angles
US11087956B2 (en) * 2018-06-29 2021-08-10 Taiwan Semiconductor Manufacturing Co., Ltd. Detection systems in semiconductor metrology tools

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1639618A2 (fr) * 2003-06-06 2006-03-29 Imago Scientific Instruments Sonde atomique haute resolution
JP4864501B2 (ja) * 2005-06-28 2012-02-01 富士通株式会社 ３次元アトムレベル構造観察装置
US20070073364A1 (en) * 2005-09-29 2007-03-29 Siemens Aktiengesellschaft Combined OCT catheter device and method for combined optical coherence tomography (OCT) diagnosis and photodynamic therapy (PDT)

Also Published As

Publication number Publication date
US8074292B2 (en) 2011-12-06
EP2198449B1 (fr) 2018-01-24
WO2009047265A1 (fr) 2009-04-16
US20100223698A1 (en) 2010-09-02
EP2198449A1 (fr) 2010-06-23
FR2922350A1 (fr) 2009-04-17

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Legal Events

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TQ Partial transmission of property
PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12

ST Notification of lapse

Effective date: 20200910