JP2012513899A5 - - Google Patents
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- Publication number
- JP2012513899A5 JP2012513899A5 JP2011544602A JP2011544602A JP2012513899A5 JP 2012513899 A5 JP2012513899 A5 JP 2012513899A5 JP 2011544602 A JP2011544602 A JP 2011544602A JP 2011544602 A JP2011544602 A JP 2011544602A JP 2012513899 A5 JP2012513899 A5 JP 2012513899A5
- Authority
- JP
- Japan
- Prior art keywords
- flexible web
- cleaning layer
- major surface
- particles
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 77
- 239000000758 substrate Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 229920000642 polymer Polymers 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 230000007547 defect Effects 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 80
- 238000000034 method Methods 0.000 description 39
- 239000002861 polymer material Substances 0.000 description 11
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000007711 solidification Methods 0.000 description 5
- 230000008023 solidification Effects 0.000 description 5
- 229920001169 thermoplastic Polymers 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229920002633 Kraton (polymer) Polymers 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920006132 styrene block copolymer Polymers 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000004634 thermosetting polymer Substances 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14197308P | 2008-12-31 | 2008-12-31 | |
| US61/141,973 | 2008-12-31 | ||
| PCT/US2009/069803 WO2010078414A2 (en) | 2008-12-31 | 2009-12-30 | Method of producing a component of a device, and the resulting components and devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012513899A JP2012513899A (ja) | 2012-06-21 |
| JP2012513899A5 true JP2012513899A5 (https=) | 2013-02-21 |
| JP5551713B2 JP5551713B2 (ja) | 2014-07-16 |
Family
ID=42310597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011544602A Expired - Fee Related JP5551713B2 (ja) | 2008-12-31 | 2009-12-30 | デバイスのコンポーネントの製造方法、及びその結果として得られるコンポーネント及びデバイス |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US8753712B2 (https=) |
| EP (1) | EP2382650B1 (https=) |
| JP (1) | JP5551713B2 (https=) |
| KR (1) | KR101597860B1 (https=) |
| CN (1) | CN102326233B (https=) |
| BR (1) | BRPI0923756A2 (https=) |
| WO (1) | WO2010078414A2 (https=) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8753712B2 (en) * | 2008-12-31 | 2014-06-17 | 3M Innovative Properties Company | Method of producing a component of a device, and the resulting components and devices |
| KR101147988B1 (ko) * | 2010-07-13 | 2012-05-24 | 포항공과대학교 산학협력단 | 물리적 박리 방법을 이용한 플렉서블 전자소자의 제조방법, 플렉서블 전자소자 및 플렉서블 기판 |
| DE102013000400B4 (de) * | 2013-01-11 | 2015-07-16 | Curt Niebling | Verfahren und Vorrichtung zur Transferlaminierung |
| JP6023737B2 (ja) * | 2014-03-18 | 2016-11-09 | 信越化学工業株式会社 | ウエハ加工体、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 |
| US10190004B2 (en) * | 2014-03-27 | 2019-01-29 | Skudo Group Pty Ltd | Peelable coating |
| GB201407956D0 (en) * | 2014-05-06 | 2014-06-18 | Isis Innovation | Vacuum deposited modification of polymer surfaces |
| JP6426936B2 (ja) * | 2014-07-31 | 2018-11-21 | 東京エレクトロン株式会社 | 基板洗浄方法および記憶媒体 |
| JP6371253B2 (ja) * | 2014-07-31 | 2018-08-08 | 東京エレクトロン株式会社 | 基板洗浄システム、基板洗浄方法および記憶媒体 |
| DE112015004366A5 (de) * | 2014-09-26 | 2017-06-08 | Heliatek Gmbh | Verfahren zum aufbringen einer schutzschicht, schutzschicht selbst und halbfabrikat mit einer schutzschicht |
| US10276469B2 (en) * | 2015-04-17 | 2019-04-30 | Taiwan Semiconductor Manufacturing Co., Ltd | Method for forming semiconductor device structure |
| US11242198B2 (en) * | 2015-11-10 | 2022-02-08 | Simplehuman, Llc | Household goods with antimicrobial coatings and methods of making thereof |
| KR101905560B1 (ko) * | 2016-03-08 | 2018-11-21 | 현대자동차 주식회사 | 연료전지용 막-전극 어셈블리의 제조장치 및 방법 |
| IL262529B2 (en) | 2016-05-30 | 2023-06-01 | Landa Labs 2012 Ltd | A method for creating a multi-layered product |
| GB201609463D0 (en) * | 2016-05-30 | 2016-07-13 | Landa Labs 2012 Ltd | Method of manufacturing a multi-layer article |
| CN107618693A (zh) * | 2016-07-15 | 2018-01-23 | 戴宇 | 对表面产生效应的装置、方法及其批量应用的装置和方法 |
| DE102017108496B4 (de) * | 2017-04-21 | 2023-06-29 | Windmöller & Hölscher Kg | Verfahren und Vorrichtungen sowie System zum Auf- und Abwickeln eines Wickels |
| JP2021514827A (ja) * | 2018-02-23 | 2021-06-17 | インターナショナル テスト ソリューションズ， インコーポレイテッド | フレキシブル電子回路ウェブロールを自動的に清浄化するための新規材料及びハードウエア |
| CN108941061B (zh) * | 2018-05-18 | 2021-02-05 | 中国人民解放军国防科技大学 | 光学元件的定量化清洁装置及方法 |
| JP7227758B2 (ja) * | 2018-05-31 | 2023-02-22 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法および基板処理装置 |
| CN108910141B (zh) * | 2018-08-27 | 2024-01-12 | 广东利元亨智能装备股份有限公司 | 一种抚平装置 |
| CN110045866A (zh) * | 2019-03-06 | 2019-07-23 | 苏州蓝沛光电科技有限公司 | 刮涂残留物的去除方法 |
| KR102723091B1 (ko) * | 2019-12-19 | 2024-10-29 | 에프. 호프만-라 로슈 아게 | 복수의 분석 테스트 스트립을 제조하는 방법 및 시스템 |
| WO2022118289A1 (en) * | 2020-12-04 | 2022-06-09 | 3M Innovative Properties Company | Laminates for cleaning substrate surfaces and methods of use thereof |
| EP4248272B1 (en) * | 2020-12-21 | 2024-02-28 | 3M Innovative Properties Company | Arrayed structured replication articles and methods |
| WO2023118185A1 (en) * | 2021-12-20 | 2023-06-29 | Nicoventures Trading Limited | A method of manufacturing a product comprising aerosol generating material |
| CN114497408A (zh) * | 2022-02-11 | 2022-05-13 | 吉林大学 | 一种纸基有机电致发光器件及其制备方法 |
Family Cites Families (47)
| Publication number | Priority date | Publication date | Assignee | Title |
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| DE1918382A1 (de) | 1969-04-11 | 1970-10-22 | Porsche Kg | Einrichtung an Brennkraftmaschinen zum Verhindern des Ausstroemens von Brennstoff aus dem Gemischbildungssystem in die Atmosphaere |
| US3711176A (en) | 1971-01-14 | 1973-01-16 | Dow Chemical Co | Highly reflective thermoplastic bodies for infrared, visible or ultraviolet light |
| DE2603290B2 (de) * | 1976-01-29 | 1978-04-20 | Claus 6000 Frankfurt Hilgenstock | Verfahren zum Reinigen von Metall-, Glas- oder Kunststoffoberflachen, insbesondere von Schallplatten |
| US4341687A (en) | 1979-09-25 | 1982-07-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Peelable film-forming urethane/isocyanate paints |
| US5120369A (en) | 1982-04-15 | 1992-06-09 | The United States Of America As Represented By The Secretary Of The Navy | Hazardous material removal using strippable coatings |
| JPH0268176A (ja) | 1988-08-31 | 1990-03-07 | Dainippon Printing Co Ltd | 剥離性保護コーティングフィルム |
| DE69126889T2 (de) * | 1990-06-08 | 1998-01-08 | Minnesota Mining & Mfg | Wiederverarbeitbarer klebstoff für elektronische anwendungen |
| US5103337A (en) | 1990-07-24 | 1992-04-07 | The Dow Chemical Company | Infrared reflective optical interference film |
| JPH04349984A (ja) * | 1991-05-27 | 1992-12-04 | Taiyo Kogyo Kk | 膜材の清掃方法 |
| US5262193A (en) | 1991-10-15 | 1993-11-16 | Minnesota Mining And Manufacturing Company | Ultrasonically assisted coating method |
| EP0627991A1 (en) | 1992-02-25 | 1994-12-14 | The Dow Chemical Company | All-polymeric ultraviolet reflecting film |
| JPH06225848A (ja) | 1993-02-01 | 1994-08-16 | Tootaru Service:Kk | 建造物外壁表面の清掃方法 |
| JPH06299321A (ja) | 1993-02-19 | 1994-10-25 | Toppan Printing Co Ltd | 金属あるいは金属酸化物被覆フィルムの製造装置 |
| US5411787A (en) * | 1993-10-19 | 1995-05-02 | Minnesota Mining And Manufacturing Company | Water based transparent image recording sheet |
| AU1866395A (en) | 1993-12-21 | 1995-07-10 | Minnesota Mining And Manufacturing Company | Multilayered optical film |
| US5882774A (en) | 1993-12-21 | 1999-03-16 | Minnesota Mining And Manufacturing Company | Optical film |
| JP2823813B2 (ja) | 1994-05-06 | 1998-11-11 | 鹿島建設株式会社 | 剥離性ポリマー膜による壁面汚れの剥離方法 |
| JP3046918B2 (ja) | 1994-10-17 | 2000-05-29 | クレオール株式会社 | 塗装面の洗浄方法 |
| JP3107030B2 (ja) | 1997-03-14 | 2000-11-06 | 鹿島建設株式会社 | 構造物表面の洗浄方法 |
| US5902678A (en) | 1997-04-01 | 1999-05-11 | Nitto Denko Corporation | Pressure-sensitive adhesive or pressure-sensitive adhesive tape for foreign-matter removal |
| US5753563A (en) | 1997-07-30 | 1998-05-19 | Chartered Semiconductor Manufacturing Ltd. | Method of removing particles by adhesive |
| US6071597A (en) | 1997-08-28 | 2000-06-06 | 3M Innovative Properties Company | Flexible circuits and carriers and process for manufacture |
| US20010008169A1 (en) * | 1998-06-30 | 2001-07-19 | 3M Innovative Properties Company | Fine pitch anisotropic conductive adhesive |
| JP2000042470A (ja) * | 1998-07-31 | 2000-02-15 | Teijin Ltd | プラスチックフィルムの製造方法及びその装置 |
| US6086798A (en) | 1998-12-17 | 2000-07-11 | Abante Corporation | Method for removing contaminant from surface of mold die |
| US6492738B2 (en) * | 1999-09-02 | 2002-12-10 | Micron Technology, Inc. | Apparatus and methods of testing and assembling bumped devices using an anisotropically conductive layer |
| US6495266B1 (en) * | 1999-11-12 | 2002-12-17 | Exxonmobil Oil Corporation | Films with improved blocking resistance and surface properties |
| US7204890B2 (en) | 2000-01-31 | 2007-04-17 | Henkel Kommanditgesellschaft Auf Aktien | Process for removing fine particulate soil from hard surfaces |
| JP2001338441A (ja) * | 2000-05-25 | 2001-12-07 | Sony Corp | 光学記録媒体の製造方法および光学記録媒体の製造装置 |
| US6553689B2 (en) | 2000-09-24 | 2003-04-29 | 3M Innovative Properties Company | Vapor collection method and apparatus |
| US7143528B2 (en) | 2000-09-24 | 2006-12-05 | 3M Innovative Properties Company | Dry converting process and apparatus |
| US7032324B2 (en) | 2000-09-24 | 2006-04-25 | 3M Innovative Properties Company | Coating process and apparatus |
| EP1337349B1 (de) * | 2000-12-01 | 2011-03-09 | Henkel AG & Co. KGaA | Vorrichtung zum geregelten auftragen von kleb- und/oder dichtstoffen |
| US6436851B1 (en) | 2001-01-05 | 2002-08-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for spin coating a high viscosity liquid on a wafer |
| US6776171B2 (en) | 2001-06-27 | 2004-08-17 | International Business Machines Corporation | Cleaning of semiconductor wafers by contaminate encapsulation |
| US20030072948A1 (en) | 2001-10-03 | 2003-04-17 | 3M Innovative Properties Company | Dry-peelable temporary protective coatings |
| GB0208506D0 (en) | 2002-04-12 | 2002-05-22 | Dupont Teijin Films Us Ltd | Film coating |
| JP4383077B2 (ja) * | 2003-03-31 | 2009-12-16 | 大日本印刷株式会社 | ガスバリア性基板 |
| US7018713B2 (en) | 2003-04-02 | 2006-03-28 | 3M Innovative Properties Company | Flexible high-temperature ultrabarrier |
| US20070200147A1 (en) * | 2004-08-04 | 2007-08-30 | Fujifilm Corporation | Method For Manufacturing An Optical Film, Apparatus For Manufacturing The Same Optical Film, Polarizing Plate And Image Display Device |
| JP2006119186A (ja) | 2004-10-19 | 2006-05-11 | Hitachi Maxell Ltd | 画面保護シート |
| US20070126158A1 (en) * | 2005-12-01 | 2007-06-07 | 3M Innovative Properties Company | Method of cleaning polymeric mold |
| DE102006035644A1 (de) * | 2006-07-31 | 2008-02-14 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Reduzieren der Kontamination durch Vorsehen einer zu entfernenden Polymerschutzschicht während der Bearbeitung von Mikrostrukturen |
| JP2008135661A (ja) * | 2006-11-29 | 2008-06-12 | Hitachi High-Technologies Corp | 半導体処理装置の清浄化方法 |
| KR20080051961A (ko) | 2006-12-07 | 2008-06-11 | 한국전자통신연구원 | 플렉시블 기판의 세정 방법 |
| US8753712B2 (en) * | 2008-12-31 | 2014-06-17 | 3M Innovative Properties Company | Method of producing a component of a device, and the resulting components and devices |
| WO2010078233A2 (en) | 2008-12-31 | 2010-07-08 | 3M Innovative Properties Company | Substrate with planarizing coating and method of making same |
-
2009
- 2009-12-30 US US13/133,001 patent/US8753712B2/en not_active Expired - Fee Related
- 2009-12-30 BR BRPI0923756A patent/BRPI0923756A2/pt not_active IP Right Cessation
- 2009-12-30 CN CN2009801573277A patent/CN102326233B/zh not_active Expired - Fee Related
- 2009-12-30 JP JP2011544602A patent/JP5551713B2/ja not_active Expired - Fee Related
- 2009-12-30 KR KR1020117017687A patent/KR101597860B1/ko not_active Expired - Fee Related
- 2009-12-30 WO PCT/US2009/069803 patent/WO2010078414A2/en not_active Ceased
- 2009-12-30 EP EP09837157.8A patent/EP2382650B1/en not_active Not-in-force
-
2014
- 2014-05-01 US US14/266,958 patent/US20140230846A1/en not_active Abandoned
-
2019
- 2019-10-24 US US16/663,006 patent/US11335551B2/en active Active
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