JP2012216452A5 - - Google Patents
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- Publication number
- JP2012216452A5 JP2012216452A5 JP2011081553A JP2011081553A JP2012216452A5 JP 2012216452 A5 JP2012216452 A5 JP 2012216452A5 JP 2011081553 A JP2011081553 A JP 2011081553A JP 2011081553 A JP2011081553 A JP 2011081553A JP 2012216452 A5 JP2012216452 A5 JP 2012216452A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- optical semiconductor
- emitting layer
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 15
- 230000003287 optical effect Effects 0.000 claims 14
- 230000004888 barrier function Effects 0.000 claims 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 10
- 229910052710 silicon Inorganic materials 0.000 claims 10
- 239000010703 silicon Substances 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 4
- 238000005229 chemical vapour deposition Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- -1 oxygen radicals Chemical class 0.000 claims 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 150000002831 nitrogen free-radicals Chemical class 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 150000003254 radicals Chemical class 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011081553A JP2012216452A (ja) | 2011-04-01 | 2011-04-01 | 光半導体装置およびその製造方法 |
| TW101109488A TW201301606A (zh) | 2011-04-01 | 2012-03-20 | 光半導體裝置及該製造方法 |
| KR1020120029220A KR101366449B1 (ko) | 2011-04-01 | 2012-03-22 | 광 반도체 장치 및 그 제조 방법 |
| US13/432,678 US20120248422A1 (en) | 2011-04-01 | 2012-03-28 | Optical semiconductor device and manufacturing method thereof |
| CN2012100974368A CN102738408A (zh) | 2011-04-01 | 2012-03-30 | 光半导体装置及其制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011081553A JP2012216452A (ja) | 2011-04-01 | 2011-04-01 | 光半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012216452A JP2012216452A (ja) | 2012-11-08 |
| JP2012216452A5 true JP2012216452A5 (enExample) | 2014-02-13 |
Family
ID=46926025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011081553A Pending JP2012216452A (ja) | 2011-04-01 | 2011-04-01 | 光半導体装置およびその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20120248422A1 (enExample) |
| JP (1) | JP2012216452A (enExample) |
| KR (1) | KR101366449B1 (enExample) |
| CN (1) | CN102738408A (enExample) |
| TW (1) | TW201301606A (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8921842B2 (en) * | 2012-11-14 | 2014-12-30 | Lg Display Co., Ltd. | Organic light emitting display device and method of manufacturing the same |
| KR101410102B1 (ko) * | 2012-11-20 | 2014-06-27 | 삼성디스플레이 주식회사 | 유기발광 표시장치 |
| US9692010B2 (en) | 2012-11-20 | 2017-06-27 | Samsung Display Co., Ltd. | Organic light emitting display device |
| KR101502206B1 (ko) | 2012-11-20 | 2015-03-12 | 삼성디스플레이 주식회사 | 발광효율이 향상된 유기발광 표시장치 |
| US9349988B2 (en) | 2012-11-20 | 2016-05-24 | Samsung Display Co., Ltd. | Organic light emitting display device |
| KR102092557B1 (ko) * | 2012-12-12 | 2020-03-24 | 엘지디스플레이 주식회사 | 유기 발광 장치 및 유기 발광 장치 제조 방법 |
| JP6054763B2 (ja) | 2013-02-12 | 2016-12-27 | 株式会社ジャパンディスプレイ | 有機el表示装置 |
| TWI578592B (zh) * | 2013-03-12 | 2017-04-11 | 應用材料股份有限公司 | 有機發光二極體元件及包括其之封裝結構的沉積方法 |
| CN105720207B (zh) * | 2013-06-29 | 2017-09-15 | 艾克斯特朗欧洲公司 | 用于高性能涂层的沉积的方法以及封装的电子器件 |
| US20150014663A1 (en) * | 2013-07-11 | 2015-01-15 | Korea Institute Of Science And Technology | Organic light emitting display apparatus and the method for manufacturing the same |
| KR101588298B1 (ko) * | 2013-07-11 | 2016-02-12 | 한국과학기술연구원 | 유기 발광 표시 장치 및 이의 제조 방법 |
| KR102136790B1 (ko) * | 2013-11-15 | 2020-07-23 | 삼성디스플레이 주식회사 | 플렉서블 디스플레이 장치와, 이의 제조 방법 |
| DE102014102565B4 (de) * | 2014-02-27 | 2019-10-24 | Osram Oled Gmbh | Optoelektronisches Bauelement und Verfahren zum Herstellen eines optoelektronischen Bauelements |
| KR102203910B1 (ko) * | 2014-10-22 | 2021-01-14 | 엘지디스플레이 주식회사 | 롤러블 유기 발광 표시 장치 |
| WO2016024742A1 (en) | 2014-08-09 | 2016-02-18 | LG Display Co.,Ltd. | Rollable organic light emitting diode display device |
| KR20160036722A (ko) * | 2014-09-25 | 2016-04-05 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| CN105679787B (zh) * | 2014-11-18 | 2018-09-25 | 群创光电股份有限公司 | 有机发光二极管显示装置及其制造方法 |
| TWI595692B (zh) * | 2014-11-18 | 2017-08-11 | 群創光電股份有限公司 | 有機發光二極體顯示裝置及其製造方法 |
| KR102392604B1 (ko) * | 2014-12-05 | 2022-04-28 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
| US9450203B2 (en) | 2014-12-22 | 2016-09-20 | Apple Inc. | Organic light-emitting diode display with glass encapsulation and peripheral welded plastic seal |
| CN104752441B (zh) * | 2015-03-20 | 2018-03-16 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板和显示装置 |
| KR102330331B1 (ko) * | 2015-07-17 | 2021-11-25 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| JP2017105013A (ja) * | 2015-12-08 | 2017-06-15 | 株式会社リコー | ガスバリア性積層体、半導体装置、表示素子、表示装置、システム |
| DE102016109485B4 (de) * | 2016-05-24 | 2025-12-04 | Pictiva Displays International Limited | Verfahren zum herstellen eines optoelektronischen bauelements, optoelektronisches bauelement und schutzschicht |
| WO2018085715A2 (en) * | 2016-11-06 | 2018-05-11 | Orbotech LT Solar, LLC. | Method and apparatus for encapsulation of an organic light emitting diode |
| CN109427992B (zh) * | 2017-08-28 | 2019-10-18 | 昆山国显光电有限公司 | 薄膜封装结构及具有其的显示装置 |
| JP6663400B2 (ja) * | 2017-09-11 | 2020-03-11 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
| US10134709B1 (en) * | 2017-12-21 | 2018-11-20 | Industrial Technology Research Institute | Substrateless light emitting diode (LED) package for size shrinking and increased resolution of display device |
| KR102659437B1 (ko) * | 2018-07-24 | 2024-04-23 | 삼성디스플레이 주식회사 | 디스플레이 장치 제조 방법 및 디스플레이 장치 제조 시스템 |
| CN208722925U (zh) * | 2018-08-16 | 2019-04-09 | 京东方科技集团股份有限公司 | 一种显示器件的封装结构、显示装置 |
| CN109326738B (zh) | 2018-09-30 | 2020-02-11 | 云谷(固安)科技有限公司 | 显示面板、显示装置及显示面板的制造方法 |
| KR102343148B1 (ko) * | 2019-04-29 | 2021-12-27 | 삼성디스플레이 주식회사 | 디스플레이 장치 및 그 제조방법 |
| CN114365263A (zh) * | 2019-09-10 | 2022-04-15 | 应用材料公司 | 用于显示封装应用的高密度等离子体cvd |
| US12439744B2 (en) * | 2019-12-23 | 2025-10-07 | Ams-Osram Ag | Semiconductor device with a bond pad and a sandwich passivation layer and manufacturing method thereof |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4171258B2 (ja) * | 2002-07-25 | 2008-10-22 | 三洋電機株式会社 | 有機elパネル |
| JP4138672B2 (ja) * | 2003-03-27 | 2008-08-27 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
| US20080171184A9 (en) * | 2003-04-17 | 2008-07-17 | Minoru Komada | Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film |
| JP2005267984A (ja) * | 2004-03-17 | 2005-09-29 | Sanyo Electric Co Ltd | 有機el表示装置 |
| JP4631683B2 (ja) * | 2005-01-17 | 2011-02-16 | セイコーエプソン株式会社 | 発光装置、及び電子機器 |
| JP4763400B2 (ja) * | 2005-09-22 | 2011-08-31 | 株式会社巴川製紙所 | 粘土薄膜基板、電極付き粘土薄膜基板、及びそれらを用いた表示素子 |
| JP4600254B2 (ja) * | 2005-11-22 | 2010-12-15 | セイコーエプソン株式会社 | 発光装置および電子機器 |
| ES2624177T3 (es) * | 2006-07-07 | 2017-07-13 | University Of Miami | Plataformas de cultivo celular potenciadas en oxigeno |
| JP2008153004A (ja) * | 2006-12-15 | 2008-07-03 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンス素子 |
| JP2008288012A (ja) * | 2007-05-17 | 2008-11-27 | Seiko Epson Corp | エレクトロルミネッセンス装置とその製造方法 |
| CN101697343B (zh) * | 2009-10-27 | 2011-06-15 | 苏州纳科显示技术有限公司 | 一种薄膜封装方法 |
| US20110244128A1 (en) * | 2010-03-31 | 2011-10-06 | Tokyo Electron Limited | Flow plate utilization in filament assisted chemical vapor deposition |
| US9299956B2 (en) * | 2012-06-13 | 2016-03-29 | Aixtron, Inc. | Method for deposition of high-performance coatings and encapsulated electronic devices |
-
2011
- 2011-04-01 JP JP2011081553A patent/JP2012216452A/ja active Pending
-
2012
- 2012-03-20 TW TW101109488A patent/TW201301606A/zh unknown
- 2012-03-22 KR KR1020120029220A patent/KR101366449B1/ko not_active Expired - Fee Related
- 2012-03-28 US US13/432,678 patent/US20120248422A1/en not_active Abandoned
- 2012-03-30 CN CN2012100974368A patent/CN102738408A/zh active Pending
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