KR101366449B1 - 광 반도체 장치 및 그 제조 방법 - Google Patents

광 반도체 장치 및 그 제조 방법 Download PDF

Info

Publication number
KR101366449B1
KR101366449B1 KR1020120029220A KR20120029220A KR101366449B1 KR 101366449 B1 KR101366449 B1 KR 101366449B1 KR 1020120029220 A KR1020120029220 A KR 1020120029220A KR 20120029220 A KR20120029220 A KR 20120029220A KR 101366449 B1 KR101366449 B1 KR 101366449B1
Authority
KR
South Korea
Prior art keywords
film
organic
layer
barrier
vacuum ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020120029220A
Other languages
English (en)
Korean (ko)
Other versions
KR20120112056A (ko
Inventor
도시유끼 미네
마사아끼 후지모리
나오후미 오하시
Original Assignee
가부시키가이샤 히다치 고쿠사이 덴키
가부시키가이샤 히다치 하이테크놀로지즈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 히다치 고쿠사이 덴키, 가부시키가이샤 히다치 하이테크놀로지즈 filed Critical 가부시키가이샤 히다치 고쿠사이 덴키
Publication of KR20120112056A publication Critical patent/KR20120112056A/ko
Application granted granted Critical
Publication of KR101366449B1 publication Critical patent/KR101366449B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations
    • H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H05B33/04—Sealing arrangements, e.g. against humidity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/85—Arrangements for extracting light from the devices
    • H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020120029220A 2011-04-01 2012-03-22 광 반도체 장치 및 그 제조 방법 Expired - Fee Related KR101366449B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-081553 2011-04-01
JP2011081553A JP2012216452A (ja) 2011-04-01 2011-04-01 光半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
KR20120112056A KR20120112056A (ko) 2012-10-11
KR101366449B1 true KR101366449B1 (ko) 2014-02-25

Family

ID=46926025

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120029220A Expired - Fee Related KR101366449B1 (ko) 2011-04-01 2012-03-22 광 반도체 장치 및 그 제조 방법

Country Status (5)

Country Link
US (1) US20120248422A1 (enExample)
JP (1) JP2012216452A (enExample)
KR (1) KR101366449B1 (enExample)
CN (1) CN102738408A (enExample)
TW (1) TW201301606A (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8921842B2 (en) * 2012-11-14 2014-12-30 Lg Display Co., Ltd. Organic light emitting display device and method of manufacturing the same
KR101410102B1 (ko) * 2012-11-20 2014-06-27 삼성디스플레이 주식회사 유기발광 표시장치
US9692010B2 (en) 2012-11-20 2017-06-27 Samsung Display Co., Ltd. Organic light emitting display device
KR101502206B1 (ko) 2012-11-20 2015-03-12 삼성디스플레이 주식회사 발광효율이 향상된 유기발광 표시장치
US9349988B2 (en) 2012-11-20 2016-05-24 Samsung Display Co., Ltd. Organic light emitting display device
KR102092557B1 (ko) * 2012-12-12 2020-03-24 엘지디스플레이 주식회사 유기 발광 장치 및 유기 발광 장치 제조 방법
JP6054763B2 (ja) 2013-02-12 2016-12-27 株式会社ジャパンディスプレイ 有機ｅｌ表示装置
TWI578592B (zh) * 2013-03-12 2017-04-11 應用材料股份有限公司 有機發光二極體元件及包括其之封裝結構的沉積方法
CN105720207B (zh) * 2013-06-29 2017-09-15 艾克斯特朗欧洲公司 用于高性能涂层的沉积的方法以及封装的电子器件
US20150014663A1 (en) * 2013-07-11 2015-01-15 Korea Institute Of Science And Technology Organic light emitting display apparatus and the method for manufacturing the same
KR101588298B1 (ko) * 2013-07-11 2016-02-12 한국과학기술연구원 유기 발광 표시 장치 및 이의 제조 방법
KR102136790B1 (ko) * 2013-11-15 2020-07-23 삼성디스플레이 주식회사 플렉서블 디스플레이 장치와, 이의 제조 방법
DE102014102565B4 (de) * 2014-02-27 2019-10-24 Osram Oled Gmbh Optoelektronisches Bauelement und Verfahren zum Herstellen eines optoelektronischen Bauelements
KR102203910B1 (ko) * 2014-10-22 2021-01-14 엘지디스플레이 주식회사 롤러블 유기 발광 표시 장치
WO2016024742A1 (en) 2014-08-09 2016-02-18 LG Display Co.,Ltd. Rollable organic light emitting diode display device
KR20160036722A (ko) * 2014-09-25 2016-04-05 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
CN105679787B (zh) * 2014-11-18 2018-09-25 群创光电股份有限公司 有机发光二极管显示装置及其制造方法
TWI595692B (zh) * 2014-11-18 2017-08-11 群創光電股份有限公司 有機發光二極體顯示裝置及其製造方法
KR102392604B1 (ko) * 2014-12-05 2022-04-28 엘지디스플레이 주식회사 유기 발광 표시 장치 및 이의 제조 방법
US9450203B2 (en) 2014-12-22 2016-09-20 Apple Inc. Organic light-emitting diode display with glass encapsulation and peripheral welded plastic seal
CN104752441B (zh) * 2015-03-20 2018-03-16 京东方科技集团股份有限公司 一种阵列基板及其制备方法、显示面板和显示装置
KR102330331B1 (ko) * 2015-07-17 2021-11-25 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
JP2017105013A (ja) * 2015-12-08 2017-06-15 株式会社リコー ガスバリア性積層体、半導体装置、表示素子、表示装置、システム
DE102016109485B4 (de) * 2016-05-24 2025-12-04 Pictiva Displays International Limited Verfahren zum herstellen eines optoelektronischen bauelements, optoelektronisches bauelement und schutzschicht
WO2018085715A2 (en) * 2016-11-06 2018-05-11 Orbotech LT Solar, LLC. Method and apparatus for encapsulation of an organic light emitting diode
CN109427992B (zh) * 2017-08-28 2019-10-18 昆山国显光电有限公司 薄膜封装结构及具有其的显示装置
JP6663400B2 (ja) * 2017-09-11 2020-03-11 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置およびプログラム
US10134709B1 (en) * 2017-12-21 2018-11-20 Industrial Technology Research Institute Substrateless light emitting diode (LED) package for size shrinking and increased resolution of display device
KR102659437B1 (ko) * 2018-07-24 2024-04-23 삼성디스플레이 주식회사 디스플레이 장치 제조 방법 및 디스플레이 장치 제조 시스템
CN208722925U (zh) * 2018-08-16 2019-04-09 京东方科技集团股份有限公司 一种显示器件的封装结构、显示装置
CN109326738B (zh) 2018-09-30 2020-02-11 云谷（固安）科技有限公司 显示面板、显示装置及显示面板的制造方法
KR102343148B1 (ko) * 2019-04-29 2021-12-27 삼성디스플레이 주식회사 디스플레이 장치 및 그 제조방법
CN114365263A (zh) * 2019-09-10 2022-04-15 应用材料公司 用于显示封装应用的高密度等离子体cvd
US12439744B2 (en) * 2019-12-23 2025-10-07 Ams-Osram Ag Semiconductor device with a bond pad and a sandwich passivation layer and manufacturing method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040010370A (ko) * 2002-07-25 2004-01-31 산요덴키가부시키가이샤 유기 ｅｌ 패널
KR20070054116A (ko) * 2005-11-22 2007-05-28 세이코 엡슨 가부시키가이샤 발광 장치 및 전자 기기

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4138672B2 (ja) * 2003-03-27 2008-08-27 セイコーエプソン株式会社 電気光学装置の製造方法
US20080171184A9 (en) * 2003-04-17 2008-07-17 Minoru Komada Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film
JP2005267984A (ja) * 2004-03-17 2005-09-29 Sanyo Electric Co Ltd 有機ｅｌ表示装置
JP4631683B2 (ja) * 2005-01-17 2011-02-16 セイコーエプソン株式会社 発光装置、及び電子機器
JP4763400B2 (ja) * 2005-09-22 2011-08-31 株式会社巴川製紙所 粘土薄膜基板、電極付き粘土薄膜基板、及びそれらを用いた表示素子
ES2624177T3 (es) * 2006-07-07 2017-07-13 University Of Miami Plataformas de cultivo celular potenciadas en oxigeno
JP2008153004A (ja) * 2006-12-15 2008-07-03 Konica Minolta Holdings Inc 有機エレクトロルミネッセンス素子
JP2008288012A (ja) * 2007-05-17 2008-11-27 Seiko Epson Corp エレクトロルミネッセンス装置とその製造方法
CN101697343B (zh) * 2009-10-27 2011-06-15 苏州纳科显示技术有限公司 一种薄膜封装方法
US20110244128A1 (en) * 2010-03-31 2011-10-06 Tokyo Electron Limited Flow plate utilization in filament assisted chemical vapor deposition
US9299956B2 (en) * 2012-06-13 2016-03-29 Aixtron, Inc. Method for deposition of high-performance coatings and encapsulated electronic devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040010370A (ko) * 2002-07-25 2004-01-31 산요덴키가부시키가이샤 유기 ｅｌ 패널
KR20070054116A (ko) * 2005-11-22 2007-05-28 세이코 엡슨 가부시키가이샤 발광 장치 및 전자 기기

Also Published As

Publication number Publication date
US20120248422A1 (en) 2012-10-04
TW201301606A (zh) 2013-01-01
CN102738408A (zh) 2012-10-17
KR20120112056A (ko) 2012-10-11
JP2012216452A (ja) 2012-11-08

Similar Documents

Publication Publication Date Title
KR101366449B1 (ko) 광 반도체 장치 및 그 제조 방법
US7518142B2 (en) Encapsulation for organic device
JP6370816B2 (ja) 高性能コーティングの堆積装置
JP5675924B2 (ja) 有機光電子装置及び前記装置をカプセル化する方法
CN107546333B (zh) 有机发光显示装置
US20110042702A1 (en) Organic Light Emitting Device and Method for Manufacturing the Same
US9099627B2 (en) Method for producing group III nitride semiconductor light-emitting device
KR102325514B1 (ko) 표시 장치 및 표시 장치의 제조 방법
Park et al. High-performance thin H: SiON OLED encapsulation layer deposited by PECVD at low temperature
US20190221771A1 (en) Buffer layer for organic light emitting devices and method of making the same
TWI728979B (zh) 薄膜電晶體
CN110289365B (zh) 使用低折射率电介质的有机发光装置
TWI450650B (zh) 可撓式基材及可撓式電子裝置
CN111769206A (zh) 用于衬底和装置的薄膜渗透屏障系统和制造所述薄膜渗透屏障系统的方法
JP5241173B2 (ja) 有機ｅｌ素子の製造方法
JP4479249B2 (ja) 有機ｅｌ素子の製造方法
US11118266B2 (en) Method for depositing protection film of light-emitting element
KR101765183B1 (ko) 발광장치용 광추출층 및 그 형성방법
CN111463329B (zh) 一种led芯片及其制作方法
KR20150059884A (ko) 유기발광 표시장치 제조방법
KR102113605B1 (ko) 유기 발광 다이오드 표시 장치의 제조 방법
HO The Long-term Stability of SiNx Thin Film Encapsulation Layers and Their Effects on the Optical Property of Organic Light Emitting Diode

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20170218

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20170218

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301