JP2012186368A - 基板搬送装置、基板搬送方法及びその基板搬送方法を実行させるためのプログラムを記録した記録媒体 - Google Patents
基板搬送装置、基板搬送方法及びその基板搬送方法を実行させるためのプログラムを記録した記録媒体 Download PDFInfo
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Abstract
【解決手段】裏面同士が対向する2枚の基板がスペーサ部材を介して積層されてなる積層体を上下方向に複数保持する基板保持部に対して、積層体を搬送する基板搬送装置において、基板保持部との間で積層体を受け渡す第1のフォーク53と、第1のフォーク53の上方に、基板及びスペーサ部材を収容する収容部に進退可能かつ上下反転可能に設けられ、収容部と第1のフォーク53との間で基板又はスペーサ部材を受け渡す第2のフォーク54と、第2のフォーク54の一方の面54a側に設けられ、基板を上掴みする第1の掴み機構61と、第2のフォーク54の一方の面54aと同一面側に設けられ、スペーサ部材を上掴みする第2の掴み機構62とを有する。
【選択図】図8
Description
13、14 収納容器
24、24a、24b ボート
26 昇降機構
27 移載機構
35 スペーサ部材
36 複板ユニット
52 昇降機構
53 下側フォーク
54 上側フォーク
54a 面
58 先端部
60 基端部
61 第1の掴み機構
61a 第1の爪部
61b 第1の押し部
62 第2の掴み機構
62a 第2の爪部
62b 第2の押し部
Claims (15)
- 裏面同士が対向する2枚の基板がスペーサ部材を介して積層されてなる積層体を上下方向に所定の間隔で複数保持する基板保持部に対して、前記積層体を搬送する基板搬送装置において、
前記基板保持部に対して進退可能に設けられており、前記基板保持部との間で前記積層体を受け渡す第1のフォークと、
前記第1のフォークの上方に、前記基板及び前記スペーサ部材を収容する収容部に進退可能かつ上下反転可能に設けられており、前記収容部と前記第1のフォークとの間で前記基板又は前記スペーサ部材を受け渡す第2のフォークと、
前記第2のフォークの一方の面側に設けられており、前記基板を上掴みする第1の掴み機構と、
前記第2のフォークの前記一方の面と同一面側に設けられており、前記スペーサ部材を上掴みする第2の掴み機構と
を有する、基板搬送装置。 - 前記第1の掴み機構は、前記第2のフォークの先端部に固定されている第1の爪部と、前記第2のフォークの基端部側に前記第1の爪部に対して進退可能に設けられており、前記基板を前記第1の爪部側に押すことによって前記第1の爪部との間で前記基板を挟持する第1の押し部とを有し、
前記第2の掴み機構は、前記第2のフォークの前記先端部に固定されている第2の爪部と、前記第2のフォークの前記基端部側に前記第2の爪部に対して進退可能に設けられており、前記スペーサ部材を前記第2の爪部側に押すことによって前記第2の爪部との間で前記スペーサ部材を挟持する第2の押し部とを有する、請求項1に記載の基板搬送装置。 - 前記第2の掴み機構に支持されている前記スペーサ部材の中心位置が、前記第1の掴み機構に支持されている前記基板の中心位置と異なる位置に配置されている、請求項1又は請求項2に記載の基板搬送装置。
- 前記スペーサ部材は、リング形状を有するものである、請求項1から請求項3のいずれかに記載の基板搬送装置。
- 前記基板保持部は、裏面同士で対向して上下に隣り合う2枚の基板の間隔が、表面同士で対向して上下に隣り合う2枚の基板の間隔よりも狭くなるように、複数の前記積層体を保持するものである、請求項1から請求項4のいずれかに記載の基板搬送装置。
- 前記第1のフォークと前記第2のフォークとは、いずれか一方が他方に対して上下方向に移動可能に設けられている、請求項1から請求項5のいずれかに記載の基板搬送装置。
- 前記第1のフォークと前記第2のフォークとを一体に上下動させる昇降機構を有する、請求項1から請求項6のいずれかに記載の基板搬送装置。
- 裏面同士が対向する2枚の基板がスペーサ部材を介して積層されてなる積層体を上下方向に所定の間隔で複数保持する基板保持部に対して、前記積層体を搬送する基板搬送方法において、
第1のフォークの上方に設けられている第2のフォークの一方の面側に設けられた第1の掴み機構により、収容部に収容されている第1の基板を下掴みして受け取り、受け取った前記第1の基板を前記第2のフォークを上下反転させて前記第1のフォークに載置する第1の工程と、
前記第2のフォークの前記一方の面と同一面側に設けられた第2の掴み機構により、前記収容部に収容されているスペーサ部材を上掴みして受け取り、受け取った前記スペーサ部材を前記第1のフォークに載置された前記第1の基板上に載置する第2の工程と、
前記第1の掴み機構により前記収容部に収容されている第2の基板を上掴みして受け取り、受け取った前記第2の基板を前記第1のフォークに載置された前記スペーサ部材上に載置する第3の工程と
を有する、基板搬送方法。 - 前記第1の掴み機構は、前記第2のフォークの先端部に固定されている第1の爪部と、前記第2のフォークの基端部側に前記第1の爪部に対して進退可能に設けられている第1の押し部とを有し、
前記第2の掴み機構は、前記第2のフォークの前記先端部に固定されている第2の爪部と、前記第2のフォークの前記基端部側に前記第2の爪部に対して進退可能に設けられている第2の押し部とを有し、
前記第1の工程は、前記第1の押し部により、前記第1の基板を前記第1の爪部側に押すことによって、前記第1の爪部と前記第1の押し部との間で前記第1の基板を挟持するものであり、
前記第2の工程は、前記第2の押し部により、前記スペーサ部材を前記第2の爪部側に押すことによって、前記第2の爪部と前記第2の押し部との間で前記スペーサ部材を挟持するものであり、
前記第3の工程は、前記第1の押し部により、前記第2の基板を前記第1の爪部側に押すことによって、前記第1の爪部と前記第1の押し部との間で前記第2の基板を挟持するものである、請求項8に記載の基板搬送方法。 - 前記第2の工程は、前記第2の掴み機構に支持されている前記スペーサ部材の中心位置が、前記第1の掴み機構に支持されている前記基板の中心位置と異なる位置になるように、前記スペーサ部材を上掴みするものである、請求項8又は請求項9に記載の基板搬送方法。
- 前記スペーサ部材は、リング形状を有するものである、請求項8から請求項10のいずれかに記載の基板搬送方法。
- 前記基板保持部は、裏面同士で対向して上下に隣り合う2枚の基板の間隔が、表面同士で対向して上下に隣り合う2枚の基板の間隔よりも狭くなるように、複数の前記積層体を保持するものである、請求項8から請求項11のいずれかに記載の基板搬送方法。
- 前記第1のフォークと前記第2のフォークとは、いずれか一方が他方に対して上下方向に移動可能に設けられており、
前記基板又は前記スペーサ部材を前記第1のフォークに載置する際に、前記第1のフォークと前記第2のフォークとを相互に近接させる、請求項8から請求項12のいずれかに記載の基板搬送方法。 - 前記第1のフォークと前記第2のフォークとは、昇降機構により一体に上下動可能に設けられている、請求項8から請求項13のいずれかに記載の基板搬送方法。
- コンピュータに請求項8から請求項14のいずれかに記載の基板搬送方法を実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体。
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JP2011049195A JP5243569B2 (ja) | 2011-03-07 | 2011-03-07 | 基板搬送装置、基板搬送方法及びその基板搬送方法を実行させるためのプログラムを記録した記録媒体 |
US13/410,447 US9136152B2 (en) | 2011-03-07 | 2012-03-02 | Substrate transport apparatus, substrate transport method, and recording medium |
TW101107001A TWI571314B (zh) | 2011-03-07 | 2012-03-02 | 基板運送裝置、基板運送方法及記錄媒體 |
KR1020120022707A KR101533270B1 (ko) | 2011-03-07 | 2012-03-06 | 기판 반송 장치, 기판 반송 방법 및 그 기판 반송 방법을 실행시키기 위한 프로그램이 기록된 컴퓨터 판독가능 기록 매체 |
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JP2016023316A (ja) * | 2014-07-16 | 2016-02-08 | 東京エレクトロン株式会社 | スペーサ及びこれを用いた基板処理方法 |
US9679794B2 (en) | 2012-09-14 | 2017-06-13 | Tokyo Electron Limited | Spacer, spacer transferring method, processing method and processing apparatus |
JP2017228801A (ja) * | 2017-09-20 | 2017-12-28 | 株式会社東京精密 | ウェーハ受け渡し装置 |
CN111483809A (zh) * | 2019-01-28 | 2020-08-04 | 三星显示有限公司 | 基板翻转装置 |
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JP5779957B2 (ja) * | 2011-04-20 | 2015-09-16 | 東京エレクトロン株式会社 | ローディングユニット及び処理システム |
JP6000038B2 (ja) * | 2012-09-20 | 2016-09-28 | 東京エレクトロン株式会社 | スペーサ、スペーサの搬送容器、スペーサの搬送方法、処理方法、及び、処理装置 |
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TW201249543A (en) | 2012-12-16 |
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