JP2012037352A5 - - Google Patents

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Publication number
JP2012037352A5
JP2012037352A5 JP2010177062A JP2010177062A JP2012037352A5 JP 2012037352 A5 JP2012037352 A5 JP 2012037352A5 JP 2010177062 A JP2010177062 A JP 2010177062A JP 2010177062 A JP2010177062 A JP 2010177062A JP 2012037352 A5 JP2012037352 A5 JP 2012037352A5
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JP
Japan
Prior art keywords
ray
rays
detected
optical element
dividing
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JP2010177062A
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English (en)
Japanese (ja)
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JP2012037352A (ja
JP5646906B2 (ja
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Priority claimed from JP2010177062A external-priority patent/JP5646906B2/ja
Priority to JP2010177062A priority Critical patent/JP5646906B2/ja
Priority to CN2011800379169A priority patent/CN103052876A/zh
Priority to EP11746328.1A priority patent/EP2601516A1/en
Priority to US13/809,335 priority patent/US9234856B2/en
Priority to PCT/JP2011/068000 priority patent/WO2012018129A1/en
Publication of JP2012037352A publication Critical patent/JP2012037352A/ja
Publication of JP2012037352A5 publication Critical patent/JP2012037352A5/ja
Publication of JP5646906B2 publication Critical patent/JP5646906B2/ja
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Expired - Fee Related legal-status Critical Current
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JP2010177062A 2010-08-06 2010-08-06 Ｘ線装置およびｘ線測定方法 Expired - Fee Related JP5646906B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010177062A JP5646906B2 (ja) 2010-08-06 2010-08-06 Ｘ線装置およびｘ線測定方法
PCT/JP2011/068000 WO2012018129A1 (en) 2010-08-06 2011-08-01 X-ray phase contrast imaging using a grating with unequal slit widths
EP11746328.1A EP2601516A1 (en) 2010-08-06 2011-08-01 X-ray phase contrast imaging using a grating with unequal slit widths
US13/809,335 US9234856B2 (en) 2010-08-06 2011-08-01 X-ray apparatus and X-ray measuring method
CN2011800379169A CN103052876A (zh) 2010-08-06 2011-08-01 使用具有不等的狭缝宽度的光栅的x射线相衬成像

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010177062A JP5646906B2 (ja) 2010-08-06 2010-08-06 Ｘ線装置およびｘ線測定方法

Publications (3)

Publication Number Publication Date
JP2012037352A JP2012037352A (ja) 2012-02-23
JP2012037352A5 true JP2012037352A5 (enExample) 2013-09-12
JP5646906B2 JP5646906B2 (ja) 2014-12-24

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ID=44584552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010177062A Expired - Fee Related JP5646906B2 (ja) 2010-08-06 2010-08-06 Ｘ線装置およびｘ線測定方法

Country Status (5)

Country Link
US (1) US9234856B2 (enExample)
EP (1) EP2601516A1 (enExample)
JP (1) JP5646906B2 (enExample)
CN (1) CN103052876A (enExample)
WO (1) WO2012018129A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201119257D0 (en) * 2011-11-08 2011-12-21 Eshtech Ltd X-ray detection apparatus
WO2013160153A1 (de) * 2012-04-24 2013-10-31 Siemens Aktiengesellschaft Röntgenvorrichtung
WO2013187012A1 (en) * 2012-06-15 2013-12-19 Canon Kabushiki Kaisha X-ray apparatus and x-ray measurement method
CN102768931B (zh) * 2012-07-30 2015-05-06 深圳大学 用于大视场x射线相衬成像的x射线源
WO2014132347A1 (ja) * 2013-02-27 2014-09-04 株式会社日立製作所 X線分析方法及びx線撮像装置
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
JP6292988B2 (ja) 2014-06-12 2018-03-14 キヤノン株式会社 物体情報取得方法及び物体情報取得装置
JP6667215B2 (ja) * 2014-07-24 2020-03-18 キヤノン株式会社 Ｘ線遮蔽格子、構造体、トールボット干渉計、ｘ線遮蔽格子の製造方法
US10393890B2 (en) * 2015-04-09 2019-08-27 Shimadzu Corporation X-ray imaging device
DE102015208084A1 (de) * 2015-04-30 2016-11-03 Carl Zeiss Microscopy Gmbh Verfahren zum Generieren eines Kontrastbildes einer Objektbeschaffenheit und diesbezügliche Vorrichtungen
US10234402B2 (en) 2017-01-05 2019-03-19 Kla-Tencor Corporation Systems and methods for defect material classification
TWI637166B (zh) * 2017-11-14 2018-10-01 國立臺灣大學 微分相位對比顯微系統與方法
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051061A1 (en) * 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
CN109273847B (zh) * 2018-12-18 2019-08-13 瑞声光电科技(常州)有限公司 天线系统及通讯终端
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
US11391679B2 (en) 2020-02-07 2022-07-19 The Board Of Trustees Of The Leland Stanford Junior University Holographic x-ray detection
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
US11549895B2 (en) 2020-09-17 2023-01-10 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
WO2022126071A1 (en) 2020-12-07 2022-06-16 Sigray, Inc. High throughput 3d x-ray imaging system using a transmission x-ray source
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
WO2023215204A1 (en) 2022-05-02 2023-11-09 Sigray, Inc. X-ray sequential array wavelength dispersive spectrometer
US12209977B2 (en) 2023-02-16 2025-01-28 Sigray, Inc. X-ray detector system with at least two stacked flat Bragg diffractors
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
US12431256B2 (en) 2024-02-15 2025-09-30 Sigray, Inc. System and method for generating a focused x-ray beam

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPN201295A0 (en) * 1995-03-28 1995-04-27 Commonwealth Scientific And Industrial Research Organisation Simplified conditions and configurations for phase-contrast imaging with hard x-rays
JP2001212127A (ja) * 2000-02-03 2001-08-07 Ge Yokogawa Medical Systems Ltd Ｘ線ｃｔシステム及びその制御方法及び記憶媒体
JP2002102215A (ja) * 2000-09-27 2002-04-09 Konica Corp 乳房ｘ画像撮影装置
JP2006058279A (ja) * 2004-07-23 2006-03-02 Osaka Industrial Promotion Organization Ｘ線シアリング干渉計
EP1731099A1 (en) * 2005-06-06 2006-12-13 Paul Scherrer Institut Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source
DE102006063048B3 (de) 2006-02-01 2018-03-29 Siemens Healthcare Gmbh Fokus/Detektor-System einer Röntgenapparatur zur Erzeugung von Phasenkontrastaufnahmen
DE102006017290B4 (de) 2006-02-01 2017-06-22 Siemens Healthcare Gmbh Fokus/Detektor-System einer Röntgenapparatur, Röntgen-System und Verfahren zur Erzeugung von Phasenkontrastaufnahmen
DE102006037282B4 (de) * 2006-02-01 2017-08-17 Siemens Healthcare Gmbh Fokus-Detektor-Anordnung mit röntgenoptischem Gitter zur Phasenkontrastmessung
EP1879020A1 (en) * 2006-07-12 2008-01-16 Paul Scherrer Institut X-ray interferometer for phase contrast imaging
GB2441578A (en) * 2006-09-08 2008-03-12 Ucl Business Plc Phase Contrast X-Ray Imaging
JP4512660B2 (ja) * 2008-03-12 2010-07-28 キヤノン株式会社 Ｘ線撮像装置、ｘ線撮像方法、ｘ線撮像装置の制御方法
JP4847568B2 (ja) * 2008-10-24 2011-12-28 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
GB2479329B (en) * 2009-01-15 2013-08-14 Canon Kk X-ray imaging apparatus and method of X-ray imaging
WO2010082688A2 (en) 2009-01-15 2010-07-22 Canon Kabushiki Kaisha X-ray imaging apparatus and method of x-ray imaging
JP2010177062A (ja) 2009-01-30 2010-08-12 Hitachi Ltd リチウム二次電池
JP2010249533A (ja) * 2009-04-10 2010-11-04 Canon Inc タルボ・ロー干渉計用の線源格子
JP5675169B2 (ja) 2009-06-18 2015-02-25 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
JP5697370B2 (ja) 2009-07-24 2015-04-08 キヤノン株式会社 Ｘ線撮像装置
JP5269041B2 (ja) 2009-12-04 2013-08-21 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
JP2013116270A (ja) * 2011-12-05 2013-06-13 Canon Inc Ｘ線撮像装置

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