CN103052876A - 使用具有不等的狭缝宽度的光栅的x射线相衬成像 - Google Patents

使用具有不等的狭缝宽度的光栅的x射线相衬成像 Download PDF

Info

Publication number
CN103052876A
CN103052876A CN2011800379169A CN201180037916A CN103052876A CN 103052876 A CN103052876 A CN 103052876A CN 2011800379169 A CN2011800379169 A CN 2011800379169A CN 201180037916 A CN201180037916 A CN 201180037916A CN 103052876 A CN103052876 A CN 103052876A
Authority
CN
China
Prior art keywords
ray
rays
optical element
intensity
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011800379169A
Other languages
English (en)
Chinese (zh)
Inventor
向出大平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN103052876A publication Critical patent/CN103052876A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)
CN2011800379169A 2010-08-06 2011-08-01 使用具有不等的狭缝宽度的光栅的x射线相衬成像 Pending CN103052876A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-177062 2010-08-06
JP2010177062A JP5646906B2 (ja) 2010-08-06 2010-08-06 Ｘ線装置およびｘ線測定方法
PCT/JP2011/068000 WO2012018129A1 (en) 2010-08-06 2011-08-01 X-ray phase contrast imaging using a grating with unequal slit widths

Publications (1)

Publication Number Publication Date
CN103052876A true CN103052876A (zh) 2013-04-17

Family

ID=44584552

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011800379169A Pending CN103052876A (zh) 2010-08-06 2011-08-01 使用具有不等的狭缝宽度的光栅的x射线相衬成像

Country Status (5)

Country Link
US (1) US9234856B2 (enExample)
EP (1) EP2601516A1 (enExample)
JP (1) JP5646906B2 (enExample)
CN (1) CN103052876A (enExample)
WO (1) WO2012018129A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106097288A (zh) * 2015-04-30 2016-11-09 卡尔蔡司显微镜有限公司 用于生成物体结构的衬度图像的方法及其相关的装置
CN109780993A (zh) * 2017-11-14 2019-05-21 骆远 微分相位对比显微系统与方法
CN109920577A (zh) * 2014-07-24 2019-06-21 佳能株式会社 结构体、其制造方法和塔尔博干涉仪

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201119257D0 (en) * 2011-11-08 2011-12-21 Eshtech Ltd X-ray detection apparatus
WO2013160153A1 (de) * 2012-04-24 2013-10-31 Siemens Aktiengesellschaft Röntgenvorrichtung
WO2013187012A1 (en) * 2012-06-15 2013-12-19 Canon Kabushiki Kaisha X-ray apparatus and x-ray measurement method
CN102768931B (zh) * 2012-07-30 2015-05-06 深圳大学 用于大视场x射线相衬成像的x射线源
WO2014132347A1 (ja) * 2013-02-27 2014-09-04 株式会社日立製作所 X線分析方法及びx線撮像装置
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
JP6292988B2 (ja) 2014-06-12 2018-03-14 キヤノン株式会社 物体情報取得方法及び物体情報取得装置
US10393890B2 (en) * 2015-04-09 2019-08-27 Shimadzu Corporation X-ray imaging device
US10234402B2 (en) 2017-01-05 2019-03-19 Kla-Tencor Corporation Systems and methods for defect material classification
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051061A1 (en) * 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
CN109273847B (zh) * 2018-12-18 2019-08-13 瑞声光电科技(常州)有限公司 天线系统及通讯终端
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
US11391679B2 (en) 2020-02-07 2022-07-19 The Board Of Trustees Of The Leland Stanford Junior University Holographic x-ray detection
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
US11549895B2 (en) 2020-09-17 2023-01-10 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
WO2022126071A1 (en) 2020-12-07 2022-06-16 Sigray, Inc. High throughput 3d x-ray imaging system using a transmission x-ray source
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
WO2023215204A1 (en) 2022-05-02 2023-11-09 Sigray, Inc. X-ray sequential array wavelength dispersive spectrometer
US12209977B2 (en) 2023-02-16 2025-01-28 Sigray, Inc. X-ray detector system with at least two stacked flat Bragg diffractors
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
US12431256B2 (en) 2024-02-15 2025-09-30 Sigray, Inc. System and method for generating a focused x-ray beam

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001212127A (ja) * 2000-02-03 2001-08-07 Ge Yokogawa Medical Systems Ltd Ｘ線ｃｔシステム及びその制御方法及び記憶媒体
CN101011254A (zh) * 2006-02-01 2007-08-08 西门子公司 用于产生相位对比图像的x射线装置的焦点/检测器系统
US20070183584A1 (en) * 2006-02-01 2007-08-09 Joachim Baumann Focus-detector arrangement with X-ray optical grating for phase contrast measurement
JP2007203063A (ja) * 2006-02-01 2007-08-16 Siemens Ag Ｘ線装置の焦点‐検出器システム
EP1879020A1 (en) * 2006-07-12 2008-01-16 Paul Scherrer Institut X-ray interferometer for phase contrast imaging
WO2008029107A2 (en) * 2006-09-08 2008-03-13 Ucl Business Plc Phase contrast imaging
CN101257851A (zh) * 2005-06-06 2008-09-03 保罗·谢勒学院 用于利用不相干的多色x射线源进行定量相衬成像和断层照相术的干涉仪
WO2010082688A2 (en) * 2009-01-15 2010-07-22 Canon Kabushiki Kaisha X-ray imaging apparatus and method of x-ray imaging

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPN201295A0 (en) * 1995-03-28 1995-04-27 Commonwealth Scientific And Industrial Research Organisation Simplified conditions and configurations for phase-contrast imaging with hard x-rays
JP2002102215A (ja) * 2000-09-27 2002-04-09 Konica Corp 乳房ｘ画像撮影装置
JP2006058279A (ja) * 2004-07-23 2006-03-02 Osaka Industrial Promotion Organization Ｘ線シアリング干渉計
JP4512660B2 (ja) * 2008-03-12 2010-07-28 キヤノン株式会社 Ｘ線撮像装置、ｘ線撮像方法、ｘ線撮像装置の制御方法
JP4847568B2 (ja) * 2008-10-24 2011-12-28 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
GB2479329B (en) * 2009-01-15 2013-08-14 Canon Kk X-ray imaging apparatus and method of X-ray imaging
JP2010177062A (ja) 2009-01-30 2010-08-12 Hitachi Ltd リチウム二次電池
JP2010249533A (ja) * 2009-04-10 2010-11-04 Canon Inc タルボ・ロー干渉計用の線源格子
JP5675169B2 (ja) 2009-06-18 2015-02-25 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
JP5697370B2 (ja) 2009-07-24 2015-04-08 キヤノン株式会社 Ｘ線撮像装置
JP5269041B2 (ja) 2009-12-04 2013-08-21 キヤノン株式会社 Ｘ線撮像装置およびｘ線撮像方法
JP2013116270A (ja) * 2011-12-05 2013-06-13 Canon Inc Ｘ線撮像装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001212127A (ja) * 2000-02-03 2001-08-07 Ge Yokogawa Medical Systems Ltd Ｘ線ｃｔシステム及びその制御方法及び記憶媒体
CN101257851A (zh) * 2005-06-06 2008-09-03 保罗·谢勒学院 用于利用不相干的多色x射线源进行定量相衬成像和断层照相术的干涉仪
CN101011254A (zh) * 2006-02-01 2007-08-08 西门子公司 用于产生相位对比图像的x射线装置的焦点/检测器系统
US20070183584A1 (en) * 2006-02-01 2007-08-09 Joachim Baumann Focus-detector arrangement with X-ray optical grating for phase contrast measurement
JP2007203063A (ja) * 2006-02-01 2007-08-16 Siemens Ag Ｘ線装置の焦点‐検出器システム
EP1879020A1 (en) * 2006-07-12 2008-01-16 Paul Scherrer Institut X-ray interferometer for phase contrast imaging
WO2008029107A2 (en) * 2006-09-08 2008-03-13 Ucl Business Plc Phase contrast imaging
WO2010082688A2 (en) * 2009-01-15 2010-07-22 Canon Kabushiki Kaisha X-ray imaging apparatus and method of x-ray imaging

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109920577A (zh) * 2014-07-24 2019-06-21 佳能株式会社 结构体、其制造方法和塔尔博干涉仪
CN109920577B (zh) * 2014-07-24 2024-01-19 佳能株式会社 结构体、其制造方法和塔尔博干涉仪
CN106097288A (zh) * 2015-04-30 2016-11-09 卡尔蔡司显微镜有限公司 用于生成物体结构的衬度图像的方法及其相关的装置
CN106097288B (zh) * 2015-04-30 2020-12-04 卡尔蔡司显微镜有限公司 用于生成物体结构的衬度图像的方法及其相关的装置
CN109780993A (zh) * 2017-11-14 2019-05-21 骆远 微分相位对比显微系统与方法
CN109780993B (zh) * 2017-11-14 2021-06-22 骆远 微分相位对比显微系统与方法

Also Published As

Publication number Publication date
JP2012037352A (ja) 2012-02-23
US9234856B2 (en) 2016-01-12
US20130108020A1 (en) 2013-05-02
EP2601516A1 (en) 2013-06-12
JP5646906B2 (ja) 2014-12-24
WO2012018129A1 (en) 2012-02-09

Similar Documents

Publication Publication Date Title
CN103052876A (zh) 使用具有不等的狭缝宽度的光栅的x射线相衬成像
US9031189B2 (en) X-ray imaging apparatus and X-ray imaging method
US8908829B2 (en) X-ray imaging apparatus and X-ray imaging method
US9103923B2 (en) X-ray imaging apparatus and X-ray imaging method
CN101013613B (zh) X射线设备的焦点-检测器装置的x射线光学透射光栅
CN102187207B (zh) X射线成像装置和x射线成像方法
US9164045B2 (en) Phase imaging
JP5111528B2 (ja) Ｘ線撮像装置およびｘ線撮像方法
CN102458254A (zh) X射线成像装置和x射线成像方法
JP5665834B2 (ja) Ｘ線撮像装置
JP5610885B2 (ja) Ｘ線撮像装置および撮像方法
EP3538879A1 (en) Grating-based phase contrast imaging

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20130417