JP2011528857A5 - - Google Patents

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Publication number
JP2011528857A5
JP2011528857A5 JP2011519055A JP2011519055A JP2011528857A5 JP 2011528857 A5 JP2011528857 A5 JP 2011528857A5 JP 2011519055 A JP2011519055 A JP 2011519055A JP 2011519055 A JP2011519055 A JP 2011519055A JP 2011528857 A5 JP2011528857 A5 JP 2011528857A5
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JP
Japan
Prior art keywords
actuator
unit
deformation unit
movable part
deformation
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JP2011519055A
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English (en)
Japanese (ja)
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JP5127985B2 (ja
JP2011528857A (ja
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Priority claimed from DE102008034285A external-priority patent/DE102008034285A1/de
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Publication of JP2011528857A5 publication Critical patent/JP2011528857A5/ja
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Publication of JP5127985B2 publication Critical patent/JP5127985B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011519055A 2008-07-22 2009-07-07 アクチュエータおよび投影露光システム Expired - Fee Related JP5127985B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008034285A DE102008034285A1 (de) 2008-07-22 2008-07-22 Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie
DE102008034285.8 2008-07-22
PCT/EP2009/004892 WO2010009807A1 (de) 2008-07-22 2009-07-07 Aktuator und projektionsbelichtungsanlage

Publications (3)

Publication Number Publication Date
JP2011528857A JP2011528857A (ja) 2011-11-24
JP2011528857A5 true JP2011528857A5 (https=) 2012-02-16
JP5127985B2 JP5127985B2 (ja) 2013-01-23

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ID=41066389

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Application Number Title Priority Date Filing Date
JP2011519055A Expired - Fee Related JP5127985B2 (ja) 2008-07-22 2009-07-07 アクチュエータおよび投影露光システム

Country Status (6)

Country Link
US (3) US20110128521A1 (https=)
EP (1) EP2300877B1 (https=)
JP (1) JP5127985B2 (https=)
KR (1) KR101449792B1 (https=)
DE (1) DE102008034285A1 (https=)
WO (1) WO2010009807A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008034285A1 (de) 2008-07-22 2010-02-04 Carl Zeiss Smt Ag Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie
WO2012097868A1 (en) * 2011-01-18 2012-07-26 Piezomotor Uppsala Ab Operation of electromechanical actuator devices
DE102011088251B4 (de) * 2011-12-12 2013-08-22 Carl Zeiss Smt Gmbh Autarker Aktuator
DE102012211320A1 (de) 2012-06-29 2013-08-08 Carl Zeiss Smt Gmbh Aktuator mit Rotor und Projektionsbelichtungsanlage
ITVI20120173A1 (it) 2012-07-17 2014-01-18 Paolo Bonfiglio Motore ad attuatori lineari
CN104167953B (zh) * 2014-08-26 2016-06-15 哈尔滨工业大学 一种内驱动式被动箝位压电驱动器
CN105406756B (zh) * 2015-12-12 2017-10-20 西安交通大学 一种压电粗纤维和压电堆的尺蠖式作动器及作动方法
DE102016107461A1 (de) * 2016-04-22 2017-10-26 Eto Magnetic Gmbh Aktorvorrichtung und Verfahren zum Betrieb einer Aktorvorrichtung
DE102017111642A1 (de) * 2017-05-29 2017-08-10 Eto Magnetic Gmbh Kleingerätevorrichtung
GB201818045D0 (en) 2018-11-05 2018-12-19 Nhs Blood & Transplant Method for producing erythroid cells
KR20200126231A (ko) 2019-04-29 2020-11-06 한국전기연구원 열전소자를 이용한 sma 액추에이터
DE102024122134B3 (de) * 2024-08-02 2025-10-09 Carl Zeiss Smt Gmbh Maskeninspektionsvorrichtung und Verfahren zum Justieren einer Maskeninspektionsvorrichtung
CN119826770B (zh) * 2025-01-15 2025-11-25 哈尔滨工业大学 基于力位融合视觉测量的大型绳网天线面形测量与调控方法及装置

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1933205A1 (de) * 1969-06-26 1971-01-07 Siemens Ag Mikroschritt-Motor
JPS5576559A (en) * 1978-12-01 1980-06-09 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam fine adjusting device
US4570096A (en) * 1983-10-27 1986-02-11 Nec Corporation Electromechanical translation device comprising an electrostrictive driver of a stacked ceramic capacitor type
JPS61258679A (ja) * 1985-05-07 1986-11-17 Nec Corp 回転角制御装置
JPS6223381A (ja) * 1985-07-23 1987-01-31 Ube Ind Ltd 圧電式アクチュエータ装置
JPS63148654A (ja) * 1986-12-12 1988-06-21 Shimizu Constr Co Ltd ウエ−ハカセツトのハンドリング装置
US4794912A (en) * 1987-08-17 1989-01-03 Welch Allyn, Inc. Borescope or endoscope with fluid dynamic muscle
JP2557072B2 (ja) * 1987-09-25 1996-11-27 株式会社金門製作所 地震感知装置
JPH0241668A (ja) * 1988-07-29 1990-02-09 Canon Inc 尺取虫型アクチュエータ
IL87312A (en) * 1988-08-02 1992-02-16 Zvi Orbach Electromechanical translation apparatus of the inchworm linear motor type
US4874979A (en) * 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus
JPH02151276A (ja) * 1988-12-01 1990-06-11 Nippon Electric Ind Co Ltd 圧電駆動機構
JPH04304983A (ja) * 1991-03-29 1992-10-28 Toshiba Corp 管内移動装置及びその操縦方法
JPH04372324A (ja) * 1991-06-21 1992-12-25 Toyoda Mach Works Ltd 送り装置
US5319257A (en) * 1992-07-13 1994-06-07 Martin Marietta Energy Systems, Inc. Unitaxial constant velocity microactuator
JPH06226579A (ja) * 1993-02-09 1994-08-16 Sony Corp 微小送り装置
EP0740522B1 (de) * 1993-08-30 2000-03-08 STM Medizintechnik Starnberg GmbH Piezoelektrisches Linear-Antriebselement
JPH0993961A (ja) * 1995-09-22 1997-04-04 Kazuma Suzuki 圧電アクチュエータ
JPH09247968A (ja) * 1996-03-06 1997-09-19 Minolta Co Ltd 電気機械変換素子を使用した駆動装置
JP2000147232A (ja) * 1998-11-06 2000-05-26 Canon Inc 回折光学装置及びそれを用いた投影露光装置
US6246157B1 (en) * 1999-08-23 2001-06-12 Rockwell Science Center Llc Push-pull high force piezoelectric linear motor
WO2001047318A2 (en) * 1999-12-21 2001-06-28 1... Limited Loudspeaker using an electro-active device
US6836056B2 (en) * 2000-02-04 2004-12-28 Viking Technologies, L.C. Linear motor having piezo actuators
US6437226B2 (en) * 2000-03-07 2002-08-20 Viking Technologies, Inc. Method and system for automatically tuning a stringed instrument
KR100714927B1 (ko) * 2000-04-25 2007-05-07 에이에스엠엘 유에스, 인크. 광학 시스템에서의 렌즈의 정밀 위치 설정 및 정렬을 위한장치, 시스템 및 방법
DE10022526A1 (de) 2000-05-09 2001-11-22 Beiersdorf Ag Einrastverschluß für Verpackungen
JP4806850B2 (ja) * 2001-01-24 2011-11-02 パナソニック株式会社 アクチュエータ
US7035056B2 (en) * 2001-11-07 2006-04-25 Asml Netherlands B.V. Piezoelectric actuator and a lithographic apparatus and a device manufacturing method
US7486382B2 (en) * 2001-12-19 2009-02-03 Carl Zeiss Smt Ag Imaging device in a projection exposure machine
DE10225266A1 (de) * 2001-12-19 2003-07-03 Zeiss Carl Smt Ag Abbildungseinrichtung in einer Projektionsbelichtungsanlage
JP4320437B2 (ja) * 2001-12-27 2009-08-26 日本電気株式会社 移動システムおよびその移動方法
JP3861705B2 (ja) * 2002-01-31 2006-12-20 松下電工株式会社 電歪アクチュエータ
DE10301818A1 (de) * 2003-01-20 2004-07-29 Carl Zeiss Smt Ag Piezo-Linearantrieb mit einer Gruppe von Piezostapelaktuatoren
US7045932B2 (en) * 2003-03-04 2006-05-16 Exfo Burleigh Prod Group Inc Electromechanical translation apparatus
US7309946B2 (en) * 2003-03-19 2007-12-18 Academia Sinica Motion actuator
US7548010B2 (en) * 2004-09-21 2009-06-16 Gm Global Technology Operations, Inc. Active material based actuators for large displacements and rotations
US7227440B2 (en) * 2005-03-03 2007-06-05 Pratt & Whitney Canada Corp. Electromagnetic actuator
JP4716096B2 (ja) * 2005-06-08 2011-07-06 ソニー株式会社 駆動装置及び撮像装置
JP2007068794A (ja) * 2005-09-07 2007-03-22 Okayama Univ 流体アクチュエータ、流体アクチュエータの製造方法、流体アクチュエータを備えた筋力補助装置、及び流体アクチュエータで構成した拘束具
JP2007116889A (ja) * 2005-09-22 2007-05-10 Canon Inc インチワーム駆動によるアクチュエータ
JP4568234B2 (ja) * 2006-02-07 2010-10-27 株式会社東芝 アクチュエータおよび撮像装置
EP2017949A1 (en) * 2007-07-16 2009-01-21 Interuniversitair Microelektronica Centrum (IMEC) Stepping actuator and method of fabrication
DE102008034285A1 (de) 2008-07-22 2010-02-04 Carl Zeiss Smt Ag Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie

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