JPS5576559A - Electron beam fine adjusting device - Google Patents
Electron beam fine adjusting deviceInfo
- Publication number
- JPS5576559A JPS5576559A JP14891678A JP14891678A JPS5576559A JP S5576559 A JPS5576559 A JP S5576559A JP 14891678 A JP14891678 A JP 14891678A JP 14891678 A JP14891678 A JP 14891678A JP S5576559 A JPS5576559 A JP S5576559A
- Authority
- JP
- Japan
- Prior art keywords
- rigid bodies
- voltage
- shaft
- elements
- fine adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To adjust rapidly and accurately the iris without effects on the beam by providing a fine adjusting mechanism having a piezo-electric element as a driving source on the constitutional movable mechanism.
CONSTITUTION: The traveling shaft 1 comprises rigid bodies 2, 2' and piezo-electric elements 3, 4, 5. The elements 3, 4 fixed to the rigid bodies 2, 2' are shrinked to leave from the shaft 1 by applying a driving voltage on them, and are extended to press the shaft 1 by shutting the voltage. The element 5 extends in proportion to the voltage applied on it, both ends are fixed to rigid bodies 2, 2'. Accordingly the traveling shaft 1 can be moved relatively to the constitution comprising rigid bodies and elements in the limit of extension of the element 5. Thus iris can be adjusted with accuracy of better than 1μw rapidly without effects on the beam by controlling the voltage.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14891678A JPS5576559A (en) | 1978-12-01 | 1978-12-01 | Electron beam fine adjusting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14891678A JPS5576559A (en) | 1978-12-01 | 1978-12-01 | Electron beam fine adjusting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5576559A true JPS5576559A (en) | 1980-06-09 |
JPS6146934B2 JPS6146934B2 (en) | 1986-10-16 |
Family
ID=15463519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14891678A Granted JPS5576559A (en) | 1978-12-01 | 1978-12-01 | Electron beam fine adjusting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5576559A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158318U (en) * | 1982-04-17 | 1983-10-22 | 株式会社トーキン | Laminated displacement element |
WO2010009807A1 (en) * | 2008-07-22 | 2010-01-28 | Carl Zeiss Smt Ag | Actuator and projection exposure system |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9243239B2 (en) | 2012-03-26 | 2016-01-26 | The Regents Of The University Of Colorado, A Body Corporate | Purification of cystathionine beta-synthase |
CN108472277A (en) | 2015-11-09 | 2018-08-31 | 科罗拉多州立大学董事会法人团体 | Composition for treating homocystinuria and method |
EP3612214A4 (en) | 2017-04-17 | 2021-01-20 | The Regents of the University of Colorado, A Body Corporate | Optimization of enzyme replacement therapy for treatment of homocystinuria |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137368A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Movable iris for electron microscope |
JPS5315060A (en) * | 1976-07-28 | 1978-02-10 | Hitachi Ltd | Inching device |
-
1978
- 1978-12-01 JP JP14891678A patent/JPS5576559A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137368A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Movable iris for electron microscope |
JPS5315060A (en) * | 1976-07-28 | 1978-02-10 | Hitachi Ltd | Inching device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158318U (en) * | 1982-04-17 | 1983-10-22 | 株式会社トーキン | Laminated displacement element |
WO2010009807A1 (en) * | 2008-07-22 | 2010-01-28 | Carl Zeiss Smt Ag | Actuator and projection exposure system |
US9766550B2 (en) | 2008-07-22 | 2017-09-19 | Carl Zeiss Smt Gmbh | Actuators and microlithography projection exposure systems and methods using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6146934B2 (en) | 1986-10-16 |
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