JPS5576559A - Electron beam fine adjusting device - Google Patents

Electron beam fine adjusting device

Info

Publication number
JPS5576559A
JPS5576559A JP14891678A JP14891678A JPS5576559A JP S5576559 A JPS5576559 A JP S5576559A JP 14891678 A JP14891678 A JP 14891678A JP 14891678 A JP14891678 A JP 14891678A JP S5576559 A JPS5576559 A JP S5576559A
Authority
JP
Japan
Prior art keywords
rigid bodies
voltage
shaft
elements
fine adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14891678A
Other languages
Japanese (ja)
Other versions
JPS6146934B2 (en
Inventor
Tadashi Nakamura
Toru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP14891678A priority Critical patent/JPS5576559A/en
Publication of JPS5576559A publication Critical patent/JPS5576559A/en
Publication of JPS6146934B2 publication Critical patent/JPS6146934B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To adjust rapidly and accurately the iris without effects on the beam by providing a fine adjusting mechanism having a piezo-electric element as a driving source on the constitutional movable mechanism.
CONSTITUTION: The traveling shaft 1 comprises rigid bodies 2, 2' and piezo-electric elements 3, 4, 5. The elements 3, 4 fixed to the rigid bodies 2, 2' are shrinked to leave from the shaft 1 by applying a driving voltage on them, and are extended to press the shaft 1 by shutting the voltage. The element 5 extends in proportion to the voltage applied on it, both ends are fixed to rigid bodies 2, 2'. Accordingly the traveling shaft 1 can be moved relatively to the constitution comprising rigid bodies and elements in the limit of extension of the element 5. Thus iris can be adjusted with accuracy of better than 1μw rapidly without effects on the beam by controlling the voltage.
COPYRIGHT: (C)1980,JPO&Japio
JP14891678A 1978-12-01 1978-12-01 Electron beam fine adjusting device Granted JPS5576559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Publications (2)

Publication Number Publication Date
JPS5576559A true JPS5576559A (en) 1980-06-09
JPS6146934B2 JPS6146934B2 (en) 1986-10-16

Family

ID=15463519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891678A Granted JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Country Status (1)

Country Link
JP (1) JPS5576559A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158318U (en) * 1982-04-17 1983-10-22 株式会社トーキン Laminated displacement element
WO2010009807A1 (en) * 2008-07-22 2010-01-28 Carl Zeiss Smt Ag Actuator and projection exposure system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9243239B2 (en) 2012-03-26 2016-01-26 The Regents Of The University Of Colorado, A Body Corporate Purification of cystathionine beta-synthase
CN108472277A (en) 2015-11-09 2018-08-31 科罗拉多州立大学董事会法人团体 Composition for treating homocystinuria and method
EP3612214A4 (en) 2017-04-17 2021-01-20 The Regents of the University of Colorado, A Body Corporate Optimization of enzyme replacement therapy for treatment of homocystinuria

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137368A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Movable iris for electron microscope
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137368A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Movable iris for electron microscope
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158318U (en) * 1982-04-17 1983-10-22 株式会社トーキン Laminated displacement element
WO2010009807A1 (en) * 2008-07-22 2010-01-28 Carl Zeiss Smt Ag Actuator and projection exposure system
US9766550B2 (en) 2008-07-22 2017-09-19 Carl Zeiss Smt Gmbh Actuators and microlithography projection exposure systems and methods using the same

Also Published As

Publication number Publication date
JPS6146934B2 (en) 1986-10-16

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