JPS5364478A - Position aligning device - Google Patents

Position aligning device

Info

Publication number
JPS5364478A
JPS5364478A JP13991576A JP13991576A JPS5364478A JP S5364478 A JPS5364478 A JP S5364478A JP 13991576 A JP13991576 A JP 13991576A JP 13991576 A JP13991576 A JP 13991576A JP S5364478 A JPS5364478 A JP S5364478A
Authority
JP
Japan
Prior art keywords
position aligning
feeding
aligning device
screw feeding
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13991576A
Other languages
Japanese (ja)
Other versions
JPS5750282B2 (en
Inventor
Satoru Nakayama
Toa Hayasaka
Naoji Otsuka
Shinichi Yamazaki
Kazue Yoshida
Masao Hiyane
Yoshiro Fushida
Kazumasa Nakamura
Kazuo Tamamushi
Hideo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP13991576A priority Critical patent/JPS5364478A/en
Publication of JPS5364478A publication Critical patent/JPS5364478A/en
Publication of JPS5750282B2 publication Critical patent/JPS5750282B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To perform position aligning at high accuracy by means of coarse adjustment feeding and screw feeding by screw feeding and fine adjustment feeding by a dynamic type electromechanical transducer, electrostrictive element driving.
JP13991576A 1976-11-20 1976-11-20 Position aligning device Granted JPS5364478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13991576A JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13991576A JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Publications (2)

Publication Number Publication Date
JPS5364478A true JPS5364478A (en) 1978-06-08
JPS5750282B2 JPS5750282B2 (en) 1982-10-26

Family

ID=15256599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13991576A Granted JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Country Status (1)

Country Link
JP (1) JPS5364478A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
JPS5830129A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Horizontal fine adjustment device
CN109079539A (en) * 2018-07-17 2018-12-25 安徽致精机电科技有限公司 A kind of auxiliary holding device for electromechanical equipment processing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014053343A (en) * 2012-09-05 2014-03-20 Toyota Motor Corp Semiconductor positioning device, and semiconductor positioning method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
JPS5830129A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Horizontal fine adjustment device
JPH0434166B2 (en) * 1981-08-17 1992-06-05 Hitachi Ltd
CN109079539A (en) * 2018-07-17 2018-12-25 安徽致精机电科技有限公司 A kind of auxiliary holding device for electromechanical equipment processing

Also Published As

Publication number Publication date
JPS5750282B2 (en) 1982-10-26

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