JPS5578453A - Aperture stop for electron microscope - Google Patents
Aperture stop for electron microscopeInfo
- Publication number
- JPS5578453A JPS5578453A JP15132678A JP15132678A JPS5578453A JP S5578453 A JPS5578453 A JP S5578453A JP 15132678 A JP15132678 A JP 15132678A JP 15132678 A JP15132678 A JP 15132678A JP S5578453 A JPS5578453 A JP S5578453A
- Authority
- JP
- Japan
- Prior art keywords
- aperture plate
- axis
- aperture
- piezo
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To facilitate the fine adjustment of aperture by moving an aperture plate using the mechanical strain of a material, which is mechanically strained by the application of a voltage, provided on an aperture plate supporting member.
CONSTITUTION: An aperture plate 6 moves slightly in the direction of X-axis when a piezo-electric element 4 is expanded or contracted by a variable DC power source 15. The aperture plate 6 is slightly moved practically int the direction of Y-axis as a supporting rod 2 is turned about a spherical bearing 3 in a plane perpendicular to the optical axis Z by a push rod 11 according to the expansion and contraction of a piezo-electric element 12 caused by a DC power source 16. Thus, the aperture plate 6 is moved in the horizontal plane in the optional direction by adjusting the DC power sources 15 and 16.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15132678A JPS5856950B2 (en) | 1978-12-06 | 1978-12-06 | Aperture device for electron microscopes, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15132678A JPS5856950B2 (en) | 1978-12-06 | 1978-12-06 | Aperture device for electron microscopes, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5578453A true JPS5578453A (en) | 1980-06-13 |
JPS5856950B2 JPS5856950B2 (en) | 1983-12-17 |
Family
ID=15516157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15132678A Expired JPS5856950B2 (en) | 1978-12-06 | 1978-12-06 | Aperture device for electron microscopes, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856950B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62296351A (en) * | 1986-06-17 | 1987-12-23 | Anelva Corp | Charged beam device |
JPS6349755U (en) * | 1986-09-19 | 1988-04-04 | ||
JPS63152145U (en) * | 1987-03-27 | 1988-10-06 | ||
EP0883157A1 (en) * | 1997-04-22 | 1998-12-09 | Schlumberger Technologies, Inc. | Optical system with an axially moveable apertured plate |
-
1978
- 1978-12-06 JP JP15132678A patent/JPS5856950B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62296351A (en) * | 1986-06-17 | 1987-12-23 | Anelva Corp | Charged beam device |
JPS6349755U (en) * | 1986-09-19 | 1988-04-04 | ||
JPS63152145U (en) * | 1987-03-27 | 1988-10-06 | ||
EP0883157A1 (en) * | 1997-04-22 | 1998-12-09 | Schlumberger Technologies, Inc. | Optical system with an axially moveable apertured plate |
Also Published As
Publication number | Publication date |
---|---|
JPS5856950B2 (en) | 1983-12-17 |
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