JPS5578453A - Aperture stop for electron microscope - Google Patents

Aperture stop for electron microscope

Info

Publication number
JPS5578453A
JPS5578453A JP15132678A JP15132678A JPS5578453A JP S5578453 A JPS5578453 A JP S5578453A JP 15132678 A JP15132678 A JP 15132678A JP 15132678 A JP15132678 A JP 15132678A JP S5578453 A JPS5578453 A JP S5578453A
Authority
JP
Japan
Prior art keywords
aperture plate
axis
aperture
piezo
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15132678A
Other languages
Japanese (ja)
Other versions
JPS5856950B2 (en
Inventor
Toshikazu Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15132678A priority Critical patent/JPS5856950B2/en
Publication of JPS5578453A publication Critical patent/JPS5578453A/en
Publication of JPS5856950B2 publication Critical patent/JPS5856950B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate the fine adjustment of aperture by moving an aperture plate using the mechanical strain of a material, which is mechanically strained by the application of a voltage, provided on an aperture plate supporting member.
CONSTITUTION: An aperture plate 6 moves slightly in the direction of X-axis when a piezo-electric element 4 is expanded or contracted by a variable DC power source 15. The aperture plate 6 is slightly moved practically int the direction of Y-axis as a supporting rod 2 is turned about a spherical bearing 3 in a plane perpendicular to the optical axis Z by a push rod 11 according to the expansion and contraction of a piezo-electric element 12 caused by a DC power source 16. Thus, the aperture plate 6 is moved in the horizontal plane in the optional direction by adjusting the DC power sources 15 and 16.
COPYRIGHT: (C)1980,JPO&Japio
JP15132678A 1978-12-06 1978-12-06 Aperture device for electron microscopes, etc. Expired JPS5856950B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15132678A JPS5856950B2 (en) 1978-12-06 1978-12-06 Aperture device for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15132678A JPS5856950B2 (en) 1978-12-06 1978-12-06 Aperture device for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5578453A true JPS5578453A (en) 1980-06-13
JPS5856950B2 JPS5856950B2 (en) 1983-12-17

Family

ID=15516157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15132678A Expired JPS5856950B2 (en) 1978-12-06 1978-12-06 Aperture device for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5856950B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62296351A (en) * 1986-06-17 1987-12-23 Anelva Corp Charged beam device
JPS6349755U (en) * 1986-09-19 1988-04-04
JPS63152145U (en) * 1987-03-27 1988-10-06
EP0883157A1 (en) * 1997-04-22 1998-12-09 Schlumberger Technologies, Inc. Optical system with an axially moveable apertured plate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62296351A (en) * 1986-06-17 1987-12-23 Anelva Corp Charged beam device
JPS6349755U (en) * 1986-09-19 1988-04-04
JPS63152145U (en) * 1987-03-27 1988-10-06
EP0883157A1 (en) * 1997-04-22 1998-12-09 Schlumberger Technologies, Inc. Optical system with an axially moveable apertured plate

Also Published As

Publication number Publication date
JPS5856950B2 (en) 1983-12-17

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