JPS6415601A - Scan-type tunnel electron microscope - Google Patents
Scan-type tunnel electron microscopeInfo
- Publication number
- JPS6415601A JPS6415601A JP17094087A JP17094087A JPS6415601A JP S6415601 A JPS6415601 A JP S6415601A JP 17094087 A JP17094087 A JP 17094087A JP 17094087 A JP17094087 A JP 17094087A JP S6415601 A JPS6415601 A JP S6415601A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- probe
- motion mechanism
- rough motion
- scan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170940A JP2633858B2 (en) | 1987-07-10 | 1987-07-10 | Probe microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170940A JP2633858B2 (en) | 1987-07-10 | 1987-07-10 | Probe microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6415601A true JPS6415601A (en) | 1989-01-19 |
JP2633858B2 JP2633858B2 (en) | 1997-07-23 |
Family
ID=15914189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170940A Expired - Fee Related JP2633858B2 (en) | 1987-07-10 | 1987-07-10 | Probe microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2633858B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01127403U (en) * | 1988-02-23 | 1989-08-31 | ||
JPH03210406A (en) * | 1990-01-12 | 1991-09-13 | Jeol Ltd | Scanning type tunnel microscope instrument |
US8104316B2 (en) | 2007-03-30 | 2012-01-31 | Sumitomo Metal Industries, Ltd. | Piercing mill |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63236907A (en) * | 1987-03-25 | 1988-10-03 | Agency Of Ind Science & Technol | Scan type tunnel microscope |
JPS63236903A (en) * | 1987-03-25 | 1988-10-03 | Agency Of Ind Science & Technol | Scan type tunnel microscope |
-
1987
- 1987-07-10 JP JP62170940A patent/JP2633858B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63236907A (en) * | 1987-03-25 | 1988-10-03 | Agency Of Ind Science & Technol | Scan type tunnel microscope |
JPS63236903A (en) * | 1987-03-25 | 1988-10-03 | Agency Of Ind Science & Technol | Scan type tunnel microscope |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01127403U (en) * | 1988-02-23 | 1989-08-31 | ||
JPH03210406A (en) * | 1990-01-12 | 1991-09-13 | Jeol Ltd | Scanning type tunnel microscope instrument |
US8104316B2 (en) | 2007-03-30 | 2012-01-31 | Sumitomo Metal Industries, Ltd. | Piercing mill |
Also Published As
Publication number | Publication date |
---|---|
JP2633858B2 (en) | 1997-07-23 |
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Legal Events
Date | Code | Title | Description |
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S531 | Written request for registration of change of domicile |
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S111 | Request for change of ownership or part of ownership |
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R250 | Receipt of annual fees |
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R360 | Written notification for declining of transfer of rights |
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R370 | Written measure of declining of transfer procedure |
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S111 | Request for change of ownership or part of ownership |
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R350 | Written notification of registration of transfer |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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LAPS | Cancellation because of no payment of annual fees |