JPS5560904A - Automatic focus adjusting device of microscope - Google Patents

Automatic focus adjusting device of microscope

Info

Publication number
JPS5560904A
JPS5560904A JP13378878A JP13378878A JPS5560904A JP S5560904 A JPS5560904 A JP S5560904A JP 13378878 A JP13378878 A JP 13378878A JP 13378878 A JP13378878 A JP 13378878A JP S5560904 A JPS5560904 A JP S5560904A
Authority
JP
Japan
Prior art keywords
microscope
detecting
objective lens
focus position
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13378878A
Other languages
Japanese (ja)
Inventor
Hideyuki Horiuchi
Ryuichi Suzuki
Akihide Hashizume
Hisatake Yokouchi
Shinji Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13378878A priority Critical patent/JPS5560904A/en
Publication of JPS5560904A publication Critical patent/JPS5560904A/en
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE: To provide the device which is capable of adjusting focus with low voltage without vibrations by mounting the objective lens of the microscope to bimorph type piezoelectric elements and providing a means of detecting the focus position and driving the element and a detecting means for lens movement amount.
CONSTITUTION: The slide glass specimen 1 of the microscope is magnified by an objective lens 2 and is photo split by a beam splitter 6. The split beams form the image on the photo detecting plane of a one-dimensional image sensor 7. The optical density image is converted to an electric signal which is then converted to a focus position detecting signal in an analog signal processing part 8. The focus position is detected in an automatic focus adjustment control part 10. Driving of the objective lens part is accomplished by applying voltage to the bimorph construction comprising affixing together two sheets of piezoelectric elements 3, 4. Although the amount of deflection varies with the applied voltage, the material of an elastic plate 5 and others, the size adjustment of about 10μ may be readily performed through voltage application of ±100V.
COPYRIGHT: (C)1980,JPO&Japio
JP13378878A 1978-11-01 1978-11-01 Automatic focus adjusting device of microscope Pending JPS5560904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13378878A JPS5560904A (en) 1978-11-01 1978-11-01 Automatic focus adjusting device of microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13378878A JPS5560904A (en) 1978-11-01 1978-11-01 Automatic focus adjusting device of microscope

Publications (1)

Publication Number Publication Date
JPS5560904A true JPS5560904A (en) 1980-05-08

Family

ID=15113013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13378878A Pending JPS5560904A (en) 1978-11-01 1978-11-01 Automatic focus adjusting device of microscope

Country Status (1)

Country Link
JP (1) JPS5560904A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2619932A1 (en) * 1987-08-25 1989-03-03 Suisse Electronique Microtech DEVICE FOR FINISHING A UNIT WITH RESPECT TO A REFERENCE SYSTEM AND USE THEREOF
JP2014081417A (en) * 2012-10-15 2014-05-08 Astro Design Inc Laser scanning microscope device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2619932A1 (en) * 1987-08-25 1989-03-03 Suisse Electronique Microtech DEVICE FOR FINISHING A UNIT WITH RESPECT TO A REFERENCE SYSTEM AND USE THEREOF
JP2014081417A (en) * 2012-10-15 2014-05-08 Astro Design Inc Laser scanning microscope device

Similar Documents

Publication Publication Date Title
US3798449A (en) Automatic microscope focussing device
EP0849765A3 (en) Charged particle beam system with optical microscope
EP0394901A3 (en) Optical lens control device
DE59007982D1 (en) Autofocus system for cameras.
JPH08110292A (en) Optical trap system and method thereof
DE2700136A1 (en) AUTOMATIC OPTICAL FOCUSING SYSTEM
JPS6457557A (en) Electron microscope
JPS5793307A (en) Automatic focusing system
JPS5560904A (en) Automatic focus adjusting device of microscope
JPS57178212A (en) Microscope optical system
JPS5350851A (en) Automatic focus control apparatus of microscope
JPS56130840A (en) Pickup controlling mechanism for video disc recorder
JPS52147430A (en) Focus detection device
EP0111635A3 (en) Method of selecting the optimum focusing adjustment for an optical instrument
JPH05164968A (en) Near field microscope device
JPS5578453A (en) Aperture stop for electron microscope
JPS5774657A (en) Ultrasonic microscope device
JPS56156938A (en) Focus control device of laser beam
JPS60129706A (en) Lens
JPS5476107A (en) Focus controller
JPS5711464A (en) Electron microscope
JPS6488927A (en) Objective lens supporting device
JPS57178211A (en) Microscope optical system
JPS5545020A (en) Variable focus microscope
JPS56156939A (en) Focal point control device of laser beam