JP2011254569A5 - - Google Patents
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- Publication number
- JP2011254569A5 JP2011254569A5 JP2010124711A JP2010124711A JP2011254569A5 JP 2011254569 A5 JP2011254569 A5 JP 2011254569A5 JP 2010124711 A JP2010124711 A JP 2010124711A JP 2010124711 A JP2010124711 A JP 2010124711A JP 2011254569 A5 JP2011254569 A5 JP 2011254569A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- substrate
- body according
- manufacturing
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 2
- 229910052810 boron oxide Inorganic materials 0.000 claims 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910001220 stainless steel Inorganic materials 0.000 claims 2
- 239000010935 stainless steel Substances 0.000 claims 2
- 229910002113 barium titanate Inorganic materials 0.000 claims 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010124711A JP5669443B2 (ja) | 2010-05-31 | 2010-05-31 | 振動体とその製造方法及び振動波アクチュエータ |
| US13/118,320 US9083264B2 (en) | 2010-05-31 | 2011-05-27 | Vibration element, manufacturing method thereof, and vibration wave actuator |
| US14/790,383 US20150303832A1 (en) | 2010-05-31 | 2015-07-02 | Vibration element, manufacturing method thereof, and vibration wave actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010124711A JP5669443B2 (ja) | 2010-05-31 | 2010-05-31 | 振動体とその製造方法及び振動波アクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011254569A JP2011254569A (ja) | 2011-12-15 |
| JP2011254569A5 true JP2011254569A5 (https=) | 2013-07-11 |
| JP5669443B2 JP5669443B2 (ja) | 2015-02-12 |
Family
ID=45021502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010124711A Expired - Fee Related JP5669443B2 (ja) | 2010-05-31 | 2010-05-31 | 振動体とその製造方法及び振動波アクチュエータ |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US9083264B2 (https=) |
| JP (1) | JP5669443B2 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103636017B (zh) * | 2011-06-27 | 2016-06-01 | 佳能株式会社 | 压电元件、振荡波电机和光学装置 |
| JP6106840B2 (ja) * | 2012-03-23 | 2017-04-05 | ヤマハ株式会社 | Ｐｚｔデバイス |
| US9818925B2 (en) * | 2012-06-14 | 2017-11-14 | Canon Kabushiki Kaisha | Vibrating body, method of manufacturing the same and vibration type drive device |
| JP2014117014A (ja) * | 2012-12-06 | 2014-06-26 | Canon Inc | 振動体とその製造方法及び振動波駆動装置 |
| JP2014170926A (ja) | 2013-02-08 | 2014-09-18 | Canon Inc | 振動体、その製造方法、及び振動型駆動装置 |
| JP2014155350A (ja) | 2013-02-08 | 2014-08-25 | Canon Inc | 振動体とその製造方法及び振動型駆動装置 |
| US9494453B2 (en) * | 2013-03-25 | 2016-11-15 | Woojin Inc. | Ultrasonic sensor for high temperature and manufacturing method thereof |
| CN103686564A (zh) * | 2013-12-16 | 2014-03-26 | 西安康弘新材料科技有限公司 | 多层独石双晶式压电骨传导振子 |
| CN105375812A (zh) * | 2014-08-13 | 2016-03-02 | 精工爱普生株式会社 | 压电驱动装置及其驱动方法、机器人及其驱动方法 |
| JP6467809B2 (ja) * | 2014-08-13 | 2019-02-13 | セイコーエプソン株式会社 | 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法 |
| JP6601190B2 (ja) * | 2015-11-30 | 2019-11-06 | セイコーエプソン株式会社 | 圧電モジュール、超音波モジュール及び電子機器 |
| JP6617536B2 (ja) * | 2015-11-30 | 2019-12-11 | セイコーエプソン株式会社 | 圧電デバイス、圧電モジュール及び電子機器 |
| JP6427714B2 (ja) * | 2016-03-25 | 2018-11-21 | 日本碍子株式会社 | 接合体および弾性波素子 |
| JP2018107437A (ja) * | 2016-12-27 | 2018-07-05 | キヤノン株式会社 | 振動子、振動波駆動装置、振動波モータおよび電子機器 |
| US20180190896A1 (en) * | 2017-01-04 | 2018-07-05 | Te Connectivity Corporation | Ultrasonic Transmitter and Receiver |
| US10680161B1 (en) * | 2017-03-29 | 2020-06-09 | Apple Inc. | Electronic Devices with Piezoelectric Ink |
| CN107196554A (zh) * | 2017-07-03 | 2017-09-22 | 南京邮电大学 | 一种基于压电陶瓷的分形结构振动换能器及其制造方法 |
| JP7039994B2 (ja) * | 2017-12-25 | 2022-03-23 | セイコーエプソン株式会社 | 圧電素子及びその製造方法並びに液体吐出ヘッド |
| WO2021126056A1 (en) * | 2019-12-16 | 2021-06-24 | Piezomotor Uppsala Ab | Electromechanical actuators with composite drive pads |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6331480A (ja) * | 1986-07-23 | 1988-02-10 | Canon Inc | 超音波モ−タ |
| JPH03283583A (ja) * | 1990-03-30 | 1991-12-13 | Mazda Motor Corp | 圧電体厚膜の製造方法 |
| JPH06237026A (ja) * | 1993-02-09 | 1994-08-23 | Murata Mfg Co Ltd | 厚膜電極の形成方法 |
| US5292375A (en) * | 1993-06-07 | 1994-03-08 | The United States Of America As Represented By The Secretary Of The Army | Removal of lead based coating by vitrification |
| US6052271A (en) * | 1994-01-13 | 2000-04-18 | Rohm Co., Ltd. | Ferroelectric capacitor including an iridium oxide layer in the lower electrode |
| JPH08111991A (ja) * | 1994-08-19 | 1996-04-30 | Mitsui Petrochem Ind Ltd | 超音波モータ用圧電振動子および圧電振動子の取付け方法 |
| JP3340043B2 (ja) * | 1996-12-26 | 2002-10-28 | 京セラ株式会社 | 圧電アクチュエータとその製造方法 |
| JP2000052557A (ja) * | 1998-08-12 | 2000-02-22 | Fujitsu Ltd | 圧電素子 |
| JP4468510B2 (ja) * | 1999-04-08 | 2010-05-26 | 京セラ株式会社 | 圧電素子及び積層型圧電アクチュエータ |
| GB2367532B (en) * | 2000-07-27 | 2004-03-10 | Kyocera Corp | Layered unit provided with piezoelectric ceramics,method of producing the same and ink jet printing head employing the same |
| US7187104B2 (en) * | 2003-03-28 | 2007-03-06 | Canon Kabushiki Kaisha | Vibration-type driving device, control apparatus for controlling the driving of the vibration-type driving device, and electronic equipment having the vibration-type driving device and the control apparatus |
| JP4055633B2 (ja) * | 2003-04-14 | 2008-03-05 | ウシオ電機株式会社 | 箔シールランプ |
| US7562451B2 (en) * | 2003-12-09 | 2009-07-21 | Seiko Epson Corporation | Method of manufacturing actuator device for ink jet head |
| JP5009507B2 (ja) * | 2004-04-05 | 2012-08-22 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| JP4683884B2 (ja) * | 2004-08-31 | 2011-05-18 | キヤノン株式会社 | 振動型駆動装置および作動装置 |
| JP2007123483A (ja) * | 2005-10-27 | 2007-05-17 | Kyocera Corp | 圧電アクチュエータ及び液体吐出装置 |
| KR101153562B1 (ko) * | 2006-01-26 | 2012-06-11 | 삼성전기주식회사 | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 |
| WO2007097460A1 (ja) * | 2006-02-27 | 2007-08-30 | Kyocera Corporation | セラミック部材の製造方法、並びにセラミック部材、ガスセンサ素子、燃料電池素子、フィルタ素子、積層型圧電素子、噴射装置、及び燃料噴射システム |
| JP5506009B2 (ja) * | 2007-02-27 | 2014-05-28 | キヤノン株式会社 | 圧電素子およびその製造方法、振動板ならびに振動波駆動装置 |
| WO2008117476A1 (en) * | 2007-03-27 | 2008-10-02 | Kyocera Corporation | Multi-layer piezoelectric element and method of producing the same |
| US7710001B2 (en) * | 2007-10-01 | 2010-05-04 | Washington State University | Piezoelectric transducers and associated methods |
| JP2009124791A (ja) * | 2007-11-12 | 2009-06-04 | Canon Inc | 振動体及び振動波アクチュエータ |
| JP5090466B2 (ja) * | 2007-11-28 | 2012-12-05 | 京セラ株式会社 | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム |
| JP5391600B2 (ja) * | 2008-07-16 | 2014-01-15 | 船井電機株式会社 | 振動ミラー素子 |
| US8216858B2 (en) * | 2009-02-18 | 2012-07-10 | Canon Kabushiki Kaisha | Ferroelectric material, method of producing ferroelectric material, and ferroelectric device |
| JP5669452B2 (ja) * | 2009-07-28 | 2015-02-12 | キヤノン株式会社 | 振動体の製造方法 |
| JP5717975B2 (ja) * | 2010-03-31 | 2015-05-13 | キヤノン株式会社 | 振動体及び振動波アクチュエータ |
-
2010
- 2010-05-31 JP JP2010124711A patent/JP5669443B2/ja not_active Expired - Fee Related
-
2011
- 2011-05-27 US US13/118,320 patent/US9083264B2/en not_active Expired - Fee Related
-
2015
- 2015-07-02 US US14/790,383 patent/US20150303832A1/en not_active Abandoned
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