JP2011190260A5 - - Google Patents

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Publication number
JP2011190260A5
JP2011190260A5 JP2011055905A JP2011055905A JP2011190260A5 JP 2011190260 A5 JP2011190260 A5 JP 2011190260A5 JP 2011055905 A JP2011055905 A JP 2011055905A JP 2011055905 A JP2011055905 A JP 2011055905A JP 2011190260 A5 JP2011190260 A5 JP 2011190260A5
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JP
Japan
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ester
acid
mercapto
sodium
alkyl
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JP2011055905A
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English (en)
Japanese (ja)
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JP6054594B2 (ja
JP2011190260A (ja
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Priority claimed from US12/661,301 external-priority patent/US20110220512A1/en
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JP2011055905A 2010-03-15 2011-03-14 めっき浴および方法 Active JP6054594B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/661301 2010-03-15
US12/661,301 US20110220512A1 (en) 2010-03-15 2010-03-15 Plating bath and method

Publications (3)

Publication Number Publication Date
JP2011190260A JP2011190260A (ja) 2011-09-29
JP2011190260A5 true JP2011190260A5 (OSRAM) 2016-04-14
JP6054594B2 JP6054594B2 (ja) 2016-12-27

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JP2011055905A Active JP6054594B2 (ja) 2010-03-15 2011-03-14 めっき浴および方法

Country Status (6)

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US (2) US20110220512A1 (OSRAM)
EP (1) EP2366692B1 (OSRAM)
JP (1) JP6054594B2 (OSRAM)
KR (1) KR101739410B1 (OSRAM)
CN (2) CN102250319A (OSRAM)
TW (1) TWI428326B (OSRAM)

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US8268157B2 (en) * 2010-03-15 2012-09-18 Rohm And Haas Electronic Materials Llc Plating bath and method
US8454815B2 (en) 2011-10-24 2013-06-04 Rohm And Haas Electronics Materials Llc Plating bath and method
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US20140238868A1 (en) 2013-02-25 2014-08-28 Dow Global Technologies Llc Electroplating bath
US20140262801A1 (en) * 2013-03-14 2014-09-18 Rohm And Haas Electronic Materials Llc Method of filling through-holes
US9598787B2 (en) * 2013-03-14 2017-03-21 Rohm And Haas Electronic Materials Llc Method of filling through-holes
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US9809891B2 (en) 2014-06-30 2017-11-07 Rohm And Haas Electronic Materials Llc Plating method
US10154598B2 (en) * 2014-10-13 2018-12-11 Rohm And Haas Electronic Materials Llc Filling through-holes
US9725816B2 (en) 2014-12-30 2017-08-08 Rohm And Haas Electronic Materials Llc Amino sulfonic acid based polymers for copper electroplating
US9611560B2 (en) 2014-12-30 2017-04-04 Rohm And Haas Electronic Materials Llc Sulfonamide based polymers for copper electroplating
US9783905B2 (en) 2014-12-30 2017-10-10 Rohm and Haas Electronic Mateirals LLC Reaction products of amino acids and epoxies
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US10988852B2 (en) 2015-10-27 2021-04-27 Rohm And Haas Electronic Materials Llc Method of electroplating copper into a via on a substrate from an acid copper electroplating bath
US10512174B2 (en) * 2016-02-15 2019-12-17 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids and other defects
US10508357B2 (en) 2016-02-15 2019-12-17 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids and other defects
US10190228B2 (en) * 2016-03-29 2019-01-29 Rohm And Haas Electronic Materials Llc Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features
CN109952390A (zh) * 2016-09-22 2019-06-28 麦克德米德乐思公司 在微电子件中的铜的电沉积
US10718059B2 (en) 2017-07-10 2020-07-21 Rohm And Haas Electronic Materials Llc Nickel electroplating compositions with cationic polymers and methods of electroplating nickel
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CN107217283B (zh) * 2017-07-25 2018-11-16 上海新阳半导体材料股份有限公司 整平剂、含其的金属电镀组合物、制备方法及应用
CN111892706A (zh) * 2020-07-23 2020-11-06 中国科学院大学温州研究院(温州生物材料与工程研究所) 一种peg偶联杂环化合物及其在酸性光亮镀铜中的应用
JPWO2022172823A1 (OSRAM) 2021-02-15 2022-08-18
KR102339862B1 (ko) * 2021-07-06 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 회로패턴 형성용 전기도금 조성물
KR102339868B1 (ko) * 2021-07-30 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물
KR102339867B1 (ko) * 2021-07-30 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물
CN115894908B (zh) * 2021-09-30 2025-06-06 华为技术有限公司 聚合物、整平剂及其制备方法、电镀液和电镀方法
CN114381769B (zh) * 2021-12-24 2023-06-09 广州市慧科高新材料科技有限公司 一种超速填孔镀铜整平剂的合成方法以及应用
US20230279577A1 (en) 2022-03-04 2023-09-07 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids

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