JP2011184794A - 可撓性基板の位置制御装置 - Google Patents
可撓性基板の位置制御装置 Download PDFInfo
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Abstract
【解決手段】帯状の可撓性基板1を縦姿勢で横方向に搬送し、搬送経路に設置された処理部にて、処理を行なう処理装置における可撓性基板の位置制御装置100であって、前記基板の上側縁部を挟持する一対の挟持ローラ131,132と、前記一対の挟持ローラを回転可能かつ相互に接離可能に支持する支持機構140と、前記支持機構を介して前記一対の挟持ローラに加圧力を付与する付勢手段150と、前記付勢手段による前記加圧力の調整手段160と、を備え、前記一対の挟持ローラを構成する各ローラが、軸方向に対して傾斜した周面を有する円錐ローラであり、前記各円錐ローラの小径側が前記基板の幅方向中央側に位置しかつ前記基板の挟持面における回転方向が前記基板の搬送方向と同方向になるように、前記支持機構によって支持されている。
【選択図】図2
Description
帯状の可撓性基板を縦姿勢で横方向に搬送し、前記基板の搬送経路に設置された処理部にて、前記基板に処理を行なう処理装置における可撓性基板の位置制御装置であって、
前記基板の上側縁部を挟持する一対の挟持ローラと、
前記一対の挟持ローラを回転可能かつ相互に接離可能に支持する支持機構と、
前記支持機構を介して前記一対の挟持ローラに加圧力を付与する付勢手段と、
前記付勢手段による前記加圧力の調整手段と、を備えるものにおいて、
前記一対の挟持ローラを構成する各ローラが、軸方向に対して傾斜した周面を有する円錐ローラであり、前記各円錐ローラの小径側が前記基板の幅方向中央側に位置しかつ前記基板の挟持面における回転方向が前記基板の搬送方向と同方向になるように、前記支持機構によって支持されていることを特徴とする。
帯状の可撓性基板を搬送し、前記基板の搬送経路に設置された処理部にて、前記基板に処理を行なう処理装置における可撓性基板の位置制御装置であって、
前記基板の各側縁部をそれぞれ挟持する各一対の挟持ローラと、
前記各一対の挟持ローラをそれぞれ回転可能かつ各対において相互に接離可能に支持する各支持機構と、
前記各支持機構を介して前記各一対の挟持ローラに加圧力を付与する付勢手段と、
前記付勢手段による前記加圧力の調整手段と、を備え、
前記各一対の挟持ローラを構成する各ローラが、軸方向に対して傾斜した周面を有する円錐ローラであり、前記各円錐ローラの小径側が前記基板の幅方向中央側に位置しかつ前記基板の挟持面における回転方向が前記基板の搬送方向と同方向になるように、前記各支持機構によって支持されている、可撓性基板の位置制御装置としても適用されうる。
図2は、本発明第1実施形態に係る基板位置制御装置100を示す搬送方向上流側から見た正面図である。薄膜積層体製造装置は、図4(a)(b)に部分的に示されるように、所定の真空度に維持された真空室10の内部に、帯状の可撓性基板1(フレキシブルフィルム)を、縦姿勢すなわち幅方向を上下方向にして水平方向に搬送し、可撓性基板1の搬送経路に沿って並設された複数の成膜ユニット20(成膜部)で、可撓性基板1の表面に薄膜を積層形成するものである。
図8は、本発明第2実施形態に係る基板位置制御装置200を示す搬送方向上流側から見た正面図である。基板位置制御装置200は、挟持ローラ対230を構成する各挟持ローラ231,232が、何れも截頭円錐形状の円錐ローラで構成されている。すなわち、第2実施形態の各挟持ローラ231,232は、大径側の形状は第1実施形態の挟持ローラ131,132と同様であるが、小径側が短縮されている。その他の構成については、第1実施形態と同様であるので、対応する符号を付すことで詳細な説明は省略する。図9(a)〜(c)は、図3(a)〜(c)に対応している。
図15は、本発明第2実施形態と同様の基板位置制御装置300を、横姿勢で搬送する連続成膜方式の製造装置312に適用した実施形態を示す搬送方向上流側から見た断面図である。薄膜積層体製造装置312は、所定の真空度に維持された真空室の内部に、可撓性基板1を挟んでその上下に対向配置された電極325(ターゲット)と、接地電極326とからなる成膜部が配設されている。成膜部の搬送方向上流側および下流側には、搬送手段を構成するガイドロール(アイドルロール)やフィードロール、テンションロールなどが配設され、さらにそれらの搬送方向上流側および下流側に、可撓性基板1の巻出しロールおよび巻取りロールが配設されている。これらの構成は、従来と同様であるため、図示を省略する。
10 真空室
11 構造要素
20 成膜ユニット
21,25,325 電極
22,26,326 接地電極
24 成膜部
27 支持ローラ
100,200,300 基板位置制御装置
111,211 ブラケット
130,230,330 挟持ローラ対
131,231,331 固定ローラ
132,232,332 可動ローラ
140,240,340 支持機構
141,241,341 固定側支持部材
142,242,342 可動側支持部材
142b,242b ヒンジ部
150,250,350 スプリング(付勢手段)
160,260,360 加圧力調整ネジ
365 可動軸
366 アクチュエータ
367 センサ
Claims (9)
- 帯状の可撓性基板を縦姿勢で横方向に搬送し、前記基板の搬送経路に設置された処理部にて、前記基板に処理を行なう処理装置における可撓性基板の位置制御装置であって、
前記基板の上側縁部を挟持する一対の挟持ローラと、
前記一対の挟持ローラを回転可能かつ相互に接離可能に支持する支持機構と、
前記支持機構を介して前記一対の挟持ローラに加圧力を付与する付勢手段と、
前記付勢手段による前記加圧力の調整手段と、を備えるものにおいて、
前記一対の挟持ローラを構成する各ローラが、軸方向に対して傾斜した周面を有する円錐ローラであり、前記各円錐ローラの小径側が前記基板の幅方向中央側に位置しかつ前記基板の挟持面における回転方向が前記基板の搬送方向と同方向になるように、前記支持機構によって支持されていることを特徴とする可撓性基板の位置制御装置。 - 前記一対の挟持ローラを構成する各ローラが、截頭円錐形状の円錐ローラであることを特徴とする請求項1に記載の可撓性基板の位置制御装置。
- 前記各円錐ローラは、回転軸に対する周面の傾斜角が20〜80度の範囲から選定されていることを特徴とする請求項2に記載の可撓性基板の位置制御装置。
- 前記各円錐ローラは、回転軸に対する周面の傾斜角が45〜65度の範囲から選定されていることを特徴とする請求項2に記載の可撓性基板の位置制御装置。
- 前記基板の下側縁部を挟持する一対の下側挟持ローラと、前記支持機構および前記付勢手段と同様に構成された前記一対の下側挟持ローラのための支持機構および付勢手段と、をさらに備えていることを特徴とする請求項1〜4の何れか一項に記載の可撓性基板の位置制御装置。
- 前記処理装置が、前記処理部として前記基板の搬送経路に沿って等ピッチで並設された複数の成膜部を備え、前記基板を前記成膜部に対応したピッチで間欠的に搬送しながら、前記基板の表面に薄膜を順次積層形成する薄膜積層体製造装置であり、前記一対の上側挟持ローラと、前記一対の下側挟持ローラとが、前記複数の成膜部の間に配設されていることを特徴とする請求項5に記載の可撓性基板の位置制御装置。
- 前記処理装置が、前記基板を連続的に搬送し、前記処理部としての成膜部にて、前記基板の表面に薄膜を積層形成する薄膜積層体製造装置であり、前記一対の上側挟持ローラと、前記一対の下側挟持ローラとが、前記成膜部の上下に搬送方向に沿って複数列設されていることを特徴とする請求項5に記載の可撓性基板の位置制御装置。
- 前記基板の薄膜形成領域と前記複数対の上側挟持ローラとの間および前記複数対の下側挟持ローラとの間でそれぞれ前記基板を支持すべく搬送方向に沿って列設された複数の支持ローラをさらに備えていることを特徴とする請求項7に記載の可撓性基板の位置制御装置。
- 帯状の可撓性基板を搬送し、前記基板の搬送経路に設置された処理部にて、前記基板に処理を行なう処理装置における可撓性基板の位置制御装置であって、
前記基板の各側縁部をそれぞれ挟持する各一対の挟持ローラと、
前記各一対の挟持ローラをそれぞれ回転可能かつ各対において相互に接離可能に支持する各支持機構と、
前記各支持機構を介して前記各一対の挟持ローラに加圧力を付与する付勢手段と、
前記付勢手段による前記加圧力の調整手段と、を備えるものにおいて、
前記各一対の挟持ローラを構成する各ローラが、軸方向に対して傾斜した周面を有する円錐ローラであり、前記各円錐ローラの小径側が前記基板の幅方向中央側に位置しかつ前記基板の挟持面における回転方向が前記基板の搬送方向と同方向になるように、前記各支持機構によって支持されていることを特徴とする可撓性基板の位置制御装置。
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EP10845817.5A EP2535439A4 (en) | 2010-02-09 | 2010-12-21 | POSITION CONTROL DEVICE FOR FLEXIBLE SUBSTRATE |
CN201080032145XA CN102575342A (zh) | 2010-02-09 | 2010-12-21 | 用于柔性基板的位置控制器 |
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CN105122962B (zh) * | 2013-04-18 | 2018-04-06 | 富士机械制造株式会社 | 基板夹紧装置 |
CN104016171A (zh) * | 2014-06-11 | 2014-09-03 | 永新股份(黄山)包装有限公司 | 一种膜卷收卷用锁边夹持器 |
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