JP2011176328A - 静電ウェハクランプ装置のための進歩したプラテン - Google Patents
静電ウェハクランプ装置のための進歩したプラテン Download PDFInfo
- Publication number
- JP2011176328A JP2011176328A JP2011066529A JP2011066529A JP2011176328A JP 2011176328 A JP2011176328 A JP 2011176328A JP 2011066529 A JP2011066529 A JP 2011066529A JP 2011066529 A JP2011066529 A JP 2011066529A JP 2011176328 A JP2011176328 A JP 2011176328A
- Authority
- JP
- Japan
- Prior art keywords
- platen
- particles
- thickness
- wafer
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/23—Chucks or sockets with magnetic or electrostatic means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
- Discharging, Photosensitive Material Shape In Electrophotography (AREA)
Abstract
【解決手段】誘電材料のプラテン体12と誘電材料の中に拡散した導電性材料の粒子とを含む静電ウェハクランプ装置10のためのプラテンであって、プラテンが導電性粒子の拡散により比較的大きな静電容量をもち、湿度にかかわらずクランプ力の増加したプラテンをもたらす。また、電源28からの減少した印加電圧で一定のクランプ力を維持し、プラテン上の残留電圧を除去し、ウェハ38の解除の速度を増加させるのに十分な量だけプラテン体の厚みを減少させることができる。
【選択図】図1
Description
Claims (18)
- a)誘電材料のプラテン体と、
b)プラテン体の体積当り約2.5%〜約15.0%の量で誘電材料の中に拡散した導電性材料の粒子と
を含む静電ウェハクランプ装置のためのプラテン。 - 誘電材料がAl2O3を含む請求項1に記載のプラテン。
- 導電性材料の粒子が、炭素化遷移金属、窒素化遷移金属および炭素化粒子からなる群から選択される請求項1に記載のプラテン。
- 誘電材料がAl2O3を含み、導電性材料の粒子がTiCを含む請求項1に記載のプラテン。
- TiCがプラテン体の体積当り約5.0%の量で存在する請求項1に記載のプラテン。
- a)所定の厚みをもつ誘電材料のプラテン体と、
b)誘電材料の中に拡散した導電性材料の粒子と
を含む静電ウェハクランプ装置のためのプラテンであって、
c)プラテンが導電性粒子の拡散により比較的大きな静電容量をもち、その結果としてプラテンが周囲湿度にかかわらず増加したクランプ力を与える
ことを含むプラテン。 - 減少した大きさの印加電圧で同量のクランプ力を与えるのに十分な量だけプラテン体の厚みを減少させた請求項6に記載のプラテン。
- プラテン上の残留電圧を除去するのに十分な量だけプラテン体の厚みを減少させた請求項6に記載のプラテン。
- ウェハの解除の速度を増加させるのに十分な量だけプラテン体の厚みを減少させた請求項6に記載のプラテン。
- Al2O3誘電材料のプラテン体であってその中に拡散した導電性TiCの粒子を含む静電ウェハクランプ装置のためのプラテン。
- TiCの粒子がプラテン体の体積当り約5%の量で存在する請求項10に記載のプラテン。
- プラテン体が約0.3mmの厚みをもつ請求項10に記載のプラテン。
- プラテン体が約0.1mmの厚みをもつ請求項10に記載のプラテン。
- a)誘電セラミック材料と導電性セラミック材料とを溶媒中で混合し、
b)生成混合物を乾燥し、
c)生成混合物をプラテンの形状に成形し、および
d)成形品を焼結する
ことを含む静電ウェハクランプ装置のためのプラテンを製造する方法。 - 誘電セラミック材料がアルミナセラミック粉末(power)を含み、導電性セラミック材料が炭化チタンセラミック粉末を含む請求項14に記載の方法。
- 溶媒がエタノールである請求項15に記載の方法。
- 焼結を約1600℃の温度で行う請求項15に記載の方法。
- 焼結後の生成品を研削および研磨することをさらに含む請求項15に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/137,790 | 2002-05-01 | ||
US10/137,790 US6660665B2 (en) | 2002-05-01 | 2002-05-01 | Platen for electrostatic wafer clamping apparatus |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004502453A Division JP5058438B2 (ja) | 2002-05-01 | 2003-04-30 | 静電ウェハクランプ装置のための進歩したプラテン |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011176328A true JP2011176328A (ja) | 2011-09-08 |
JP2011176328A5 JP2011176328A5 (ja) | 2012-09-06 |
Family
ID=29269158
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004502453A Expired - Fee Related JP5058438B2 (ja) | 2002-05-01 | 2003-04-30 | 静電ウェハクランプ装置のための進歩したプラテン |
JP2011066529A Pending JP2011176328A (ja) | 2002-05-01 | 2011-03-24 | 静電ウェハクランプ装置のための進歩したプラテン |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004502453A Expired - Fee Related JP5058438B2 (ja) | 2002-05-01 | 2003-04-30 | 静電ウェハクランプ装置のための進歩したプラテン |
Country Status (10)
Country | Link |
---|---|
US (1) | US6660665B2 (ja) |
EP (1) | EP1532728B1 (ja) |
JP (2) | JP5058438B2 (ja) |
KR (1) | KR100979684B1 (ja) |
CN (1) | CN100508355C (ja) |
AT (1) | ATE476782T1 (ja) |
AU (1) | AU2003228776A1 (ja) |
DE (1) | DE60333642D1 (ja) |
HK (1) | HK1081735A1 (ja) |
WO (1) | WO2003094335A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016529735A (ja) * | 2013-08-27 | 2016-09-23 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | 静電チャック用障壁層 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4631748B2 (ja) * | 2006-03-02 | 2011-02-16 | Toto株式会社 | 静電吸着方法 |
CN101221893B (zh) * | 2007-01-12 | 2010-05-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种促进半导体晶片上静电电荷消散的方法 |
JP4976911B2 (ja) * | 2007-04-27 | 2012-07-18 | 新光電気工業株式会社 | 静電チャック |
US8363378B2 (en) * | 2009-02-17 | 2013-01-29 | Intevac, Inc. | Method for optimized removal of wafer from electrostatic chuck |
JP6052976B2 (ja) * | 2012-10-15 | 2016-12-27 | 日本タングステン株式会社 | 静電チャック誘電体層および静電チャック |
WO2016081951A1 (en) * | 2014-11-23 | 2016-05-26 | M Cubed Technologies | Wafer pin chuck fabrication and repair |
CN110491819B (zh) * | 2018-05-14 | 2021-11-12 | 北京北方华创微电子装备有限公司 | 平衡静电力的方法和静电卡盘 |
JP7430489B2 (ja) * | 2019-01-16 | 2024-02-13 | セメス株式会社 | 静電チャック、静電チャック装置 |
KR102234220B1 (ko) * | 2020-07-24 | 2021-03-30 | 이준호 | 도전성의 정전척 리프트 핀, 이를 포함하는 정전척 및 이들을 이용한 반도체 생산방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0521584A (ja) * | 1991-07-16 | 1993-01-29 | Nikon Corp | 保持装置 |
JP2000252351A (ja) * | 1999-02-26 | 2000-09-14 | Taiheiyo Cement Corp | 静電チャックおよびその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3772748A (en) * | 1971-04-16 | 1973-11-20 | Nl Industries Inc | Method for forming electrodes and conductors |
US4808315A (en) * | 1986-04-28 | 1989-02-28 | Asahi Kasei Kogyo Kabushiki Kaisha | Porous hollow fiber membrane and a method for the removal of a virus by using the same |
US5691876A (en) * | 1995-01-31 | 1997-11-25 | Applied Materials, Inc. | High temperature polyimide electrostatic chuck |
JP3887842B2 (ja) * | 1995-03-17 | 2007-02-28 | 東京エレクトロン株式会社 | ステージ装置 |
JPH0945753A (ja) * | 1995-07-28 | 1997-02-14 | Kyocera Corp | 物品保持装置 |
US6399143B1 (en) * | 1996-04-09 | 2002-06-04 | Delsys Pharmaceutical Corporation | Method for clamping and electrostatically coating a substrate |
US5754391A (en) * | 1996-05-17 | 1998-05-19 | Saphikon Inc. | Electrostatic chuck |
JP4256483B2 (ja) * | 1996-07-19 | 2009-04-22 | アプライド マテリアルズ インコーポレイテッド | 静電チャック、集積回路デバイスを製造するための装置、及び静電チャックの製造方法 |
JPH11168134A (ja) * | 1997-12-03 | 1999-06-22 | Shin Etsu Chem Co Ltd | 静電吸着装置およびその製造方法 |
US5969934A (en) * | 1998-04-10 | 1999-10-19 | Varian Semiconductor Equipment Associats, Inc. | Electrostatic wafer clamp having low particulate contamination of wafers |
JP2002016129A (ja) * | 2000-06-30 | 2002-01-18 | Taiheiyo Cement Corp | 静電チャック |
JP2002373769A (ja) * | 2001-06-14 | 2002-12-26 | Ibiden Co Ltd | ホットプレートユニット |
JP4510358B2 (ja) * | 2002-03-27 | 2010-07-21 | 太平洋セメント株式会社 | 静電チャックおよびその製造方法 |
-
2002
- 2002-05-01 US US10/137,790 patent/US6660665B2/en not_active Expired - Lifetime
-
2003
- 2003-04-30 AT AT03726546T patent/ATE476782T1/de not_active IP Right Cessation
- 2003-04-30 WO PCT/US2003/013459 patent/WO2003094335A1/en active Application Filing
- 2003-04-30 EP EP03726546A patent/EP1532728B1/en not_active Expired - Lifetime
- 2003-04-30 DE DE60333642T patent/DE60333642D1/de not_active Expired - Lifetime
- 2003-04-30 CN CNB038150476A patent/CN100508355C/zh not_active Expired - Fee Related
- 2003-04-30 JP JP2004502453A patent/JP5058438B2/ja not_active Expired - Fee Related
- 2003-04-30 KR KR1020047017606A patent/KR100979684B1/ko active IP Right Grant
- 2003-04-30 AU AU2003228776A patent/AU2003228776A1/en not_active Abandoned
-
2006
- 2006-02-10 HK HK06101784.2A patent/HK1081735A1/xx not_active IP Right Cessation
-
2011
- 2011-03-24 JP JP2011066529A patent/JP2011176328A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0521584A (ja) * | 1991-07-16 | 1993-01-29 | Nikon Corp | 保持装置 |
JP2000252351A (ja) * | 1999-02-26 | 2000-09-14 | Taiheiyo Cement Corp | 静電チャックおよびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016529735A (ja) * | 2013-08-27 | 2016-09-23 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | 静電チャック用障壁層 |
Also Published As
Publication number | Publication date |
---|---|
KR100979684B1 (ko) | 2010-09-02 |
CN100508355C (zh) | 2009-07-01 |
CN1663105A (zh) | 2005-08-31 |
EP1532728B1 (en) | 2010-08-04 |
ATE476782T1 (de) | 2010-08-15 |
AU2003228776A1 (en) | 2003-11-17 |
WO2003094335A1 (en) | 2003-11-13 |
JP5058438B2 (ja) | 2012-10-24 |
DE60333642D1 (de) | 2010-09-16 |
US6660665B2 (en) | 2003-12-09 |
EP1532728A4 (en) | 2008-07-16 |
KR20050026385A (ko) | 2005-03-15 |
EP1532728A1 (en) | 2005-05-25 |
HK1081735A1 (en) | 2006-05-19 |
JP2005524247A (ja) | 2005-08-11 |
US20030207596A1 (en) | 2003-11-06 |
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