JP2011171683A - 不揮発性半導体記憶装置 - Google Patents
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C14/00—Digital stores characterised by arrangements of cells having volatile and non-volatile storage properties for back-up when the power is down
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of the switching material, e.g. layer deposition
- H10N70/023—Formation of the switching material, e.g. layer deposition by chemical vapor deposition, e.g. MOCVD, ALD
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/884—Other compounds of groups 13-15, e.g. elemental or compound semiconductors
- H10N70/8845—Carbon or carbides
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Abstract
【解決手段】不揮発性半導体記憶装置は、第1のラインと、前記第1のラインに交差する第2のラインと、前記第1のラインと前記第2のラインとが交差する位置に配されたメモリセルとを備え、前記メモリセルは、可変抵抗素子と、前記可変抵抗素子と直列に接続された負性抵抗素子とを有する。
【選択図】図1
Description
先ず、図1を参照して、第1の実施の形態に係る不揮発性半導体記憶装置1の回路構成について説明する。図1は、第1の実施の形態に係る不揮発性半導体記憶装置1の回路構成を示す図である。
次に、第2の実施の形態に係る不揮発性半導体記憶装置100について説明する。以下では、第1の実施の形態と異なる部分を中心に説明する。
これにより、可変抵抗素子Rへ流れる電流を急峻に遮断することが可能になる。
次に、幾つかのサンプルを作製し、リセット(消去)状態とセット(書き込み)状態との抵抗差について評価した実施例を説明する。セット・リセットは呼び方の一例であるので、他の定義の仕方をしても良い。
第1の実施例に係るセルパターン61において、可変抵抗層61iは、プラズマCVD法を用いて作製され、シリコン(Si)、炭素(C)及び水素(H)から構成される膜を適用した。Si、C、Hを主成分とする可変抵抗層61iの成膜には、CVD法の他にスパッタ法などを用いることができる。可変抵抗層61iを成膜する場合、CVD法では、トリメチルシラン(CH3)3SiH、ジメチルシラン(CH3)2SiH2等のシラン(SiH4)系ガス、およびC2H2、C2H4、C3H6等の炭化水素(CH)系のガスを反応ガスとして用いることができる。この膜に窒素を含有させる場合は、N2、NH3等を添加することによって可能となる。キャリアガスはHe、Ar等の不活性ガスが用いられる。成膜温度は、300℃から500℃程度の範囲で行うことができるが、求める膜特性に応じて、より低温、または高温で成膜することも問題ない。他の成膜条件、例えばRFパワーやガス流量、ガス圧、スペーサーの距離等の効果は別とすると、一般的にはより低温で成膜した場合は水素量が多く、比較的低密度の膜になり易く、一方より高温では逆に水素量が低く、比較的密度の高い膜を得易い。
第1の実施例と同様な構成(図8参照)において、可変抵抗層61iは、プラズマCVD法を用いて作製され、炭素(C)及び水素(H)から構成される膜を適用した。可変抵抗層61iの成膜には、CVD法の他にスパッタ法などを用いることができる。可変抵抗層61iを成膜する場合、CVD法では、C2H2、C2H4、C3H6等の炭化水素(CH)系のガスを反応ガスとして用いることができる。キャリアガスはHe、Ar等の不活性ガスが用いられる。成膜温度は、300℃から500℃程度の範囲で行うことができる。
Claims (5)
- 第1のラインと、
前記第1のラインに交差する第2のラインと、
前記第1のラインと前記第2のラインとが交差する位置に配されたメモリセルと、
を備え、
前記メモリセルは、
可変抵抗素子と、
前記可変抵抗素子と直列に接続された負性抵抗素子と、
を有する
ことを特徴とする不揮発性半導体記憶装置。 - 前記負性抵抗素子は、トンネル・ダイオードを含む
ことを特徴とする請求項1に記載の不揮発性半導体記憶装置。 - 前記負性抵抗素子は、共鳴トンネル・ダイオードを含む
ことを特徴とする請求項1に記載の不揮発性半導体記憶装置。 - 前記共鳴トンネル・ダイオードは、
SiGe、Si、CaF、CdF、SiO2、SiN、Al2O3、GaAs、AlGaAs、AlAs、InAs、InSb、AlSb、GaSbからなる群から選ばれる第1の材料で形成された第1の層と、
前記群から選ばれる第2の材料で形成された第2の層と、
が交互に積層されている
ことを特徴とする請求項3に記載の不揮発性半導体記憶装置。 - 前記メモリセルは、
前記負性抵抗素子の一端に接続された第1のバッファー部と、
前記負性抵抗素子の他端に接続された第2のバッファー部と、
をさらに有する
ことを特徴とする請求項1から4のいずれか1項に記載の不揮発性半導体記憶装置。
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JP2010036652A JP5462027B2 (ja) | 2010-02-22 | 2010-02-22 | 不揮発性半導体記憶装置 |
US12/882,822 US8339834B2 (en) | 2010-02-22 | 2010-09-15 | Non-volatile semiconductor memory device including a variable resistance element |
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JP2010036652A JP5462027B2 (ja) | 2010-02-22 | 2010-02-22 | 不揮発性半導体記憶装置 |
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JP5462027B2 JP5462027B2 (ja) | 2014-04-02 |
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JP2017514291A (ja) * | 2014-02-19 | 2017-06-01 | マイクロン テクノロジー, インク. | 切り替えコンポーネントおよびメモリユニット |
KR101943721B1 (ko) * | 2014-02-19 | 2019-01-29 | 마이크론 테크놀로지, 인크 | 스위칭 컴포넌트 및 메모리 유닛 |
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US20110205781A1 (en) | 2011-08-25 |
US8339834B2 (en) | 2012-12-25 |
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