JP2011166130A5 - - Google Patents

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JP2011166130A5
JP2011166130A5 JP2011005376A JP2011005376A JP2011166130A5 JP 2011166130 A5 JP2011166130 A5 JP 2011166130A5 JP 2011005376 A JP2011005376 A JP 2011005376A JP 2011005376 A JP2011005376 A JP 2011005376A JP 2011166130 A5 JP2011166130 A5 JP 2011166130A5
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Prior art keywords
transistor
electrode
formation region
semiconductor
channel formation
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JP2011005376A
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JP5121946B2 (en
JP2011166130A (en
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Priority to JP2011005376A priority Critical patent/JP5121946B2/en
Priority claimed from JP2011005376A external-priority patent/JP5121946B2/en
Publication of JP2011166130A publication Critical patent/JP2011166130A/en
Publication of JP2011166130A5 publication Critical patent/JP2011166130A5/ja
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Claims (5)

第1のトランジスタと、A first transistor;
第2のトランジスタと、A second transistor;
容量素子と、を有する半導体装置であって、A semiconductor device having a capacitive element,
前記第1のトランジスタは、ゲート電極と、第1のチャネル形成領域と、を有し、The first transistor has a gate electrode and a first channel formation region,
前記第2のトランジスタは、第2のチャネル形成領域と、ゲート絶縁膜と、ソース電極と、ドレイン電極と、を有し、The second transistor has a second channel formation region, a gate insulating film, a source electrode, and a drain electrode,
前記第1のチャネル形成領域は、第1の半導体を有し、The first channel formation region includes a first semiconductor;
前記第2のチャネル形成領域は、酸化物半導体を有し、The second channel formation region includes an oxide semiconductor,
前記ゲート電極は、前記ソース電極または前記ドレイン電極と電気的に接続し、The gate electrode is electrically connected to the source electrode or the drain electrode;
前記容量素子の第1の電極は、前記ソース電極または前記ドレイン電極の一方と電気的に接続し、A first electrode of the capacitor is electrically connected to one of the source electrode or the drain electrode;
前記容量素子は、前記第1の電極及び第2の電極に挟まれた前記ゲート絶縁膜及び前記酸化物半導体を有することを特徴とする半導体装置。The capacitor element includes the gate insulating film and the oxide semiconductor sandwiched between the first electrode and the second electrode.
請求項1において、In claim 1,
前記第1の半導体と前記酸化物半導体は異なる材料であることを特徴とする半導体装置。The semiconductor device, wherein the first semiconductor and the oxide semiconductor are different materials.
請求項1または請求項2において、
前記酸化物半導体は、エネルギーギャップが3eVより大きいことを特徴とする半導体装置。
In claim 1 or claim 2,
The oxide semiconductor is a semiconductor device that energy gap and wherein the magnitude Ikoto than 3 eV.
請求項1乃至請求項3のいずれか一項において、
前記第1のトランジスタのスイッチングスピードは、前記第2のトランジスタのスイッチングスピードよりも大きいことを特徴とする半導体装置。
In any one of Claims 1 thru | or 3,
The switching speed of the first transistor, wherein a greater than the switching speed of the second transistor.
請求項1乃至請求項4のいずれか一項において、
前記第2のトランジスタのオフ電流は、前記第1のトランジスタのオフ電流よりも小さいことを特徴とする半導体装置。
In any one of Claims 1 thru | or 4,
The off-current of the second transistor, wherein a is smaller than the off-current of the first transistor.
JP2011005376A 2010-01-15 2011-01-14 Semiconductor device Expired - Fee Related JP5121946B2 (en)

Priority Applications (1)

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JP2011005376A JP5121946B2 (en) 2010-01-15 2011-01-14 Semiconductor device

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JP2010007421 2010-01-15
JP2010007421 2010-01-15
JP2011005376A JP5121946B2 (en) 2010-01-15 2011-01-14 Semiconductor device

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JP2012233528A Division JP5825745B2 (en) 2010-01-15 2012-10-23 Semiconductor device

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JP2011166130A JP2011166130A (en) 2011-08-25
JP2011166130A5 true JP2011166130A5 (en) 2012-09-06
JP5121946B2 JP5121946B2 (en) 2013-01-16

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Country Status (6)

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US (1) US8866233B2 (en)
JP (2) JP5121946B2 (en)
KR (1) KR101698537B1 (en)
CN (1) CN102725841B (en)
TW (2) TWI585947B (en)
WO (1) WO2011086812A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7512484B2 (en) 2012-01-23 2024-07-08 株式会社半導体エネルギー研究所 Semiconductor Device

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180043383A (en) 2010-01-22 2018-04-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Method for manufacturing semiconductor device
KR102008754B1 (en) 2010-01-24 2019-08-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Display device and manufacturing method thereof
CN102725842B (en) 2010-02-05 2014-12-03 株式会社半导体能源研究所 Semiconductor device
KR102094131B1 (en) 2010-02-05 2020-03-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Method for driving semiconductor device
WO2011096264A1 (en) * 2010-02-05 2011-08-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of driving semiconductor device
KR101862823B1 (en) 2010-02-05 2018-05-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Semiconductor device and method of driving semiconductor device
KR101891065B1 (en) * 2010-03-19 2018-08-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Semiconductor device and driving method of semiconductor device
US8416622B2 (en) 2010-05-20 2013-04-09 Semiconductor Energy Laboratory Co., Ltd. Driving method of a semiconductor device with an inverted period having a negative potential applied to a gate of an oxide semiconductor transistor
US8582348B2 (en) 2010-08-06 2013-11-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for driving semiconductor device
US8422272B2 (en) 2010-08-06 2013-04-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and driving method thereof
JP5727892B2 (en) 2010-08-26 2015-06-03 株式会社半導体エネルギー研究所 Semiconductor device
US9048142B2 (en) 2010-12-28 2015-06-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6013682B2 (en) 2011-05-20 2016-10-25 株式会社半導体エネルギー研究所 Driving method of semiconductor device
JP6250955B2 (en) 2012-05-25 2017-12-20 株式会社半導体エネルギー研究所 Driving method of semiconductor device
JP2014195243A (en) 2013-02-28 2014-10-09 Semiconductor Energy Lab Co Ltd Semiconductor device
US9612795B2 (en) 2013-03-14 2017-04-04 Semiconductor Energy Laboratory Co., Ltd. Data processing device, data processing method, and computer program
JP6456598B2 (en) 2013-04-19 2019-01-23 株式会社半導体エネルギー研究所 Display device
US9349418B2 (en) 2013-12-27 2016-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for driving the same
US10985196B2 (en) 2014-02-24 2021-04-20 Lg Display Co., Ltd. Thin film transistor substrate with intermediate insulating layer and display using the same
US9881986B2 (en) 2014-02-24 2018-01-30 Lg Display Co., Ltd. Thin film transistor substrate and display using the same
EP2911199B1 (en) 2014-02-24 2020-05-06 LG Display Co., Ltd. Thin film transistor substrate and display using the same
US10325937B2 (en) 2014-02-24 2019-06-18 Lg Display Co., Ltd. Thin film transistor substrate with intermediate insulating layer and display using the same
US9721973B2 (en) 2014-02-24 2017-08-01 Lg Display Co., Ltd. Thin film transistor substrate and display using the same
US9214508B2 (en) 2014-02-24 2015-12-15 Lg Display Co., Ltd. Thin film transistor substrate with intermediate insulating layer and display using the same
EP2911202B1 (en) 2014-02-24 2019-02-20 LG Display Co., Ltd. Thin film transistor substrate and display using the same
US10186528B2 (en) 2014-02-24 2019-01-22 Lg Display Co., Ltd. Thin film transistor substrate and display using the same
TWI711165B (en) * 2014-11-21 2020-11-21 日商半導體能源研究所股份有限公司 Semiconductor device and electronic device
JP6689062B2 (en) 2014-12-10 2020-04-28 株式会社半導体エネルギー研究所 Semiconductor device
US9954112B2 (en) * 2015-01-26 2018-04-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US10008502B2 (en) 2016-05-04 2018-06-26 Semiconductor Energy Laboratory Co., Ltd. Memory device
WO2018020331A1 (en) 2016-07-29 2018-02-01 Semiconductor Energy Laboratory Co., Ltd. Display device, input/output device, and semiconductor device
US10872666B2 (en) * 2019-02-22 2020-12-22 Micron Technology, Inc. Source line management for memory cells with floating gates
US11183429B2 (en) * 2019-03-25 2021-11-23 Samsung Electronics Co., Ltd. Method of manufacturing a semiconductor device including forming a gate insulating material layer on a protection layer and removing the gate insulation material layer and the protection layer on the first region

Family Cites Families (135)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60198861A (en) 1984-03-23 1985-10-08 Fujitsu Ltd Thin film transistor
JPS6319847A (en) 1986-07-14 1988-01-27 Oki Electric Ind Co Ltd Semiconductor memory device
JPH0244256B2 (en) 1987-01-28 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho INGAZN2O5DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO
JPS63210023A (en) 1987-02-24 1988-08-31 Natl Inst For Res In Inorg Mater Compound having laminar structure of hexagonal crystal system expressed by ingazn4o7 and its production
JPH0244258B2 (en) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho INGAZN3O6DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO
JPH0244260B2 (en) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho INGAZN5O8DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO
JPH0244262B2 (en) 1987-02-27 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho INGAZN6O9DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO
JPH0244263B2 (en) 1987-04-22 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho INGAZN7O10DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO
US4864374A (en) * 1987-11-30 1989-09-05 Texas Instruments Incorporated Two-transistor dram cell with high alpha particle immunity
JPH0254572A (en) 1988-08-18 1990-02-23 Matsushita Electric Ind Co Ltd Semiconductor memory
JP2784615B2 (en) * 1991-10-16 1998-08-06 株式会社半導体エネルギー研究所 Electro-optical display device and driving method thereof
US7071910B1 (en) * 1991-10-16 2006-07-04 Semiconductor Energy Laboratory Co., Ltd. Electrooptical device and method of driving and manufacturing the same
US6759680B1 (en) * 1991-10-16 2004-07-06 Semiconductor Energy Laboratory Co., Ltd. Display device having thin film transistors
US7253440B1 (en) * 1991-10-16 2007-08-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having at least first and second thin film transistors
JPH10148848A (en) 1991-10-16 1998-06-02 Semiconductor Energy Lab Co Ltd Electrooptical display device and driving method therefor
JPH05251705A (en) 1992-03-04 1993-09-28 Fuji Xerox Co Ltd Thin-film transistor
JPH0792500A (en) * 1993-06-29 1995-04-07 Toshiba Corp Semiconductor device
JPH07176184A (en) 1993-12-20 1995-07-14 Mitsubishi Electric Corp Semiconductor memory and writing and reading method for data in the semiconductor memory
JP3479375B2 (en) 1995-03-27 2003-12-15 科学技術振興事業団 Metal oxide semiconductor device in which a pn junction is formed with a thin film transistor made of a metal oxide semiconductor such as cuprous oxide, and methods for manufacturing the same
WO1997006554A2 (en) 1995-08-03 1997-02-20 Philips Electronics N.V. Semiconductor device provided with transparent switching element
JP3625598B2 (en) * 1995-12-30 2005-03-02 三星電子株式会社 Manufacturing method of liquid crystal display device
JP4103968B2 (en) * 1996-09-18 2008-06-18 株式会社半導体エネルギー研究所 Insulated gate type semiconductor device
JPH1145949A (en) 1997-07-28 1999-02-16 Mitsubishi Electric Corp Static semiconductor memory device and its manufacture
JP4170454B2 (en) 1998-07-24 2008-10-22 Hoya株式会社 Article having transparent conductive oxide thin film and method for producing the same
JP2000150861A (en) * 1998-11-16 2000-05-30 Tdk Corp Oxide thin film
JP3276930B2 (en) 1998-11-17 2002-04-22 科学技術振興事業団 Transistor and semiconductor device
JP3955409B2 (en) * 1999-03-17 2007-08-08 株式会社ルネサステクノロジ Semiconductor memory device
TW460731B (en) * 1999-09-03 2001-10-21 Ind Tech Res Inst Electrode structure and production method of wide viewing angle LCD
JP4089858B2 (en) 2000-09-01 2008-05-28 国立大学法人東北大学 Semiconductor device
KR20020038482A (en) * 2000-11-15 2002-05-23 모리시타 요이찌 Thin film transistor array, method for producing the same, and display panel using the same
JP3997731B2 (en) * 2001-03-19 2007-10-24 富士ゼロックス株式会社 Method for forming a crystalline semiconductor thin film on a substrate
JP2002289859A (en) 2001-03-23 2002-10-04 Minolta Co Ltd Thin-film transistor
JP4090716B2 (en) 2001-09-10 2008-05-28 雅司 川崎 Thin film transistor and matrix display device
JP3925839B2 (en) 2001-09-10 2007-06-06 シャープ株式会社 Semiconductor memory device and test method thereof
US7061014B2 (en) * 2001-11-05 2006-06-13 Japan Science And Technology Agency Natural-superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film
JP4164562B2 (en) 2002-09-11 2008-10-15 独立行政法人科学技術振興機構 Transparent thin film field effect transistor using homologous thin film as active layer
JP4083486B2 (en) * 2002-02-21 2008-04-30 独立行政法人科学技術振興機構 Method for producing LnCuO (S, Se, Te) single crystal thin film
CN1445821A (en) * 2002-03-15 2003-10-01 三洋电机株式会社 Forming method of ZnO film and ZnO semiconductor layer, semiconductor element and manufacturing method thereof
JP3933591B2 (en) * 2002-03-26 2007-06-20 淳二 城戸 Organic electroluminescent device
US7339187B2 (en) * 2002-05-21 2008-03-04 State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University Transistor structures
US6787835B2 (en) * 2002-06-11 2004-09-07 Hitachi, Ltd. Semiconductor memories
JP2004022625A (en) 2002-06-13 2004-01-22 Murata Mfg Co Ltd Manufacturing method of semiconductor device and its manufacturing method
US7105868B2 (en) * 2002-06-24 2006-09-12 Cermet, Inc. High-electron mobility transistor with zinc oxide
US7067843B2 (en) * 2002-10-11 2006-06-27 E. I. Du Pont De Nemours And Company Transparent oxide semiconductor thin film transistors
JP4166105B2 (en) 2003-03-06 2008-10-15 シャープ株式会社 Semiconductor device and manufacturing method thereof
JP2004273732A (en) 2003-03-07 2004-09-30 Sharp Corp Active matrix substrate and its producing process
JP4108633B2 (en) * 2003-06-20 2008-06-25 シャープ株式会社 THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE
US7262463B2 (en) * 2003-07-25 2007-08-28 Hewlett-Packard Development Company, L.P. Transistor including a deposited channel region having a doped portion
US7291967B2 (en) * 2003-08-29 2007-11-06 Semiconductor Energy Laboratory Co., Ltd. Light emitting element including a barrier layer and a manufacturing method thereof
US7297977B2 (en) 2004-03-12 2007-11-20 Hewlett-Packard Development Company, L.P. Semiconductor device
US7145174B2 (en) * 2004-03-12 2006-12-05 Hewlett-Packard Development Company, Lp. Semiconductor device
JP4620046B2 (en) 2004-03-12 2011-01-26 独立行政法人科学技術振興機構 Thin film transistor and manufacturing method thereof
US7282782B2 (en) * 2004-03-12 2007-10-16 Hewlett-Packard Development Company, L.P. Combined binary oxide semiconductor device
US7211825B2 (en) * 2004-06-14 2007-05-01 Yi-Chi Shih Indium oxide-based thin film transistors and circuits
JP2006100760A (en) * 2004-09-02 2006-04-13 Casio Comput Co Ltd Thin-film transistor and its manufacturing method
US7285501B2 (en) * 2004-09-17 2007-10-23 Hewlett-Packard Development Company, L.P. Method of forming a solution processed device
US7298084B2 (en) * 2004-11-02 2007-11-20 3M Innovative Properties Company Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes
AU2005302963B2 (en) * 2004-11-10 2009-07-02 Cannon Kabushiki Kaisha Light-emitting device
WO2006051995A1 (en) * 2004-11-10 2006-05-18 Canon Kabushiki Kaisha Field effect transistor employing an amorphous oxide
CA2708335A1 (en) * 2004-11-10 2006-05-18 Canon Kabushiki Kaisha Amorphous oxide and field effect transistor
US7453065B2 (en) * 2004-11-10 2008-11-18 Canon Kabushiki Kaisha Sensor and image pickup device
US7863611B2 (en) * 2004-11-10 2011-01-04 Canon Kabushiki Kaisha Integrated circuits utilizing amorphous oxides
US7829444B2 (en) * 2004-11-10 2010-11-09 Canon Kabushiki Kaisha Field effect transistor manufacturing method
US7791072B2 (en) * 2004-11-10 2010-09-07 Canon Kabushiki Kaisha Display
US7579224B2 (en) 2005-01-21 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film semiconductor device
TWI562380B (en) * 2005-01-28 2016-12-11 Semiconductor Energy Lab Co Ltd Semiconductor device, electronic device, and method of manufacturing semiconductor device
US7608531B2 (en) * 2005-01-28 2009-10-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, electronic device, and method of manufacturing semiconductor device
US7858451B2 (en) 2005-02-03 2010-12-28 Semiconductor Energy Laboratory Co., Ltd. Electronic device, semiconductor device and manufacturing method thereof
US7948171B2 (en) 2005-02-18 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US20060197092A1 (en) * 2005-03-03 2006-09-07 Randy Hoffman System and method for forming conductive material on a substrate
US8681077B2 (en) * 2005-03-18 2014-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, and display device, driving method and electronic apparatus thereof
WO2006105077A2 (en) * 2005-03-28 2006-10-05 Massachusetts Institute Of Technology Low voltage thin film transistor with high-k dielectric material
US7645478B2 (en) * 2005-03-31 2010-01-12 3M Innovative Properties Company Methods of making displays
US8300031B2 (en) * 2005-04-20 2012-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element
JP2006344849A (en) * 2005-06-10 2006-12-21 Casio Comput Co Ltd Thin film transistor
US7691666B2 (en) * 2005-06-16 2010-04-06 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7402506B2 (en) * 2005-06-16 2008-07-22 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7507618B2 (en) * 2005-06-27 2009-03-24 3M Innovative Properties Company Method for making electronic devices using metal oxide nanoparticles
KR100711890B1 (en) * 2005-07-28 2007-04-25 삼성에스디아이 주식회사 Organic Light Emitting Display and Fabrication Method for the same
JP2007059128A (en) * 2005-08-23 2007-03-08 Canon Inc Organic electroluminescent display device and manufacturing method thereof
JP4280736B2 (en) 2005-09-06 2009-06-17 キヤノン株式会社 Semiconductor element
JP5116225B2 (en) * 2005-09-06 2013-01-09 キヤノン株式会社 Manufacturing method of oxide semiconductor device
JP2007073705A (en) * 2005-09-06 2007-03-22 Canon Inc Oxide-semiconductor channel film transistor and its method of manufacturing same
JP4850457B2 (en) 2005-09-06 2012-01-11 キヤノン株式会社 Thin film transistor and thin film diode
JP4560502B2 (en) * 2005-09-06 2010-10-13 キヤノン株式会社 Field effect transistor
JP2007081335A (en) * 2005-09-16 2007-03-29 Renesas Technology Corp Semiconductor device
EP3614442A3 (en) 2005-09-29 2020-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having oxide semiconductor layer and manufactoring method thereof
JP5037808B2 (en) * 2005-10-20 2012-10-03 キヤノン株式会社 Field effect transistor using amorphous oxide, and display device using the transistor
KR101117948B1 (en) * 2005-11-15 2012-02-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Method of Manufacturing a Liquid Crystal Display Device
TWI292281B (en) 2005-12-29 2008-01-01 Ind Tech Res Inst Pixel structure of active organic light emitting diode and method of fabricating the same
US7867636B2 (en) * 2006-01-11 2011-01-11 Murata Manufacturing Co., Ltd. Transparent conductive film and method for manufacturing the same
JP4977478B2 (en) * 2006-01-21 2012-07-18 三星電子株式会社 ZnO film and method of manufacturing TFT using the same
US7576394B2 (en) * 2006-02-02 2009-08-18 Kochi Industrial Promotion Center Thin film transistor including low resistance conductive thin films and manufacturing method thereof
US7977169B2 (en) * 2006-02-15 2011-07-12 Kochi Industrial Promotion Center Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof
JP2007251104A (en) * 2006-03-20 2007-09-27 Seiko Epson Corp Method of manufacturing film transistor
KR20070101595A (en) * 2006-04-11 2007-10-17 삼성전자주식회사 Zno thin film transistor
US20070252928A1 (en) * 2006-04-28 2007-11-01 Toppan Printing Co., Ltd. Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof
JP5028033B2 (en) * 2006-06-13 2012-09-19 キヤノン株式会社 Oxide semiconductor film dry etching method
JP4999400B2 (en) * 2006-08-09 2012-08-15 キヤノン株式会社 Oxide semiconductor film dry etching method
JP4609797B2 (en) * 2006-08-09 2011-01-12 Nec液晶テクノロジー株式会社 Thin film device and manufacturing method thereof
JP4332545B2 (en) 2006-09-15 2009-09-16 キヤノン株式会社 Field effect transistor and manufacturing method thereof
JP5164357B2 (en) * 2006-09-27 2013-03-21 キヤノン株式会社 Semiconductor device and manufacturing method of semiconductor device
JP4274219B2 (en) * 2006-09-27 2009-06-03 セイコーエプソン株式会社 Electronic devices, organic electroluminescence devices, organic thin film semiconductor devices
US7622371B2 (en) * 2006-10-10 2009-11-24 Hewlett-Packard Development Company, L.P. Fused nanocrystal thin film semiconductor and method
US7772021B2 (en) * 2006-11-29 2010-08-10 Samsung Electronics Co., Ltd. Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays
JP2008140684A (en) * 2006-12-04 2008-06-19 Toppan Printing Co Ltd Color el display, and its manufacturing method
JP5105842B2 (en) * 2006-12-05 2012-12-26 キヤノン株式会社 Display device using oxide semiconductor and manufacturing method thereof
KR101303578B1 (en) * 2007-01-05 2013-09-09 삼성전자주식회사 Etching method of thin film
US8207063B2 (en) * 2007-01-26 2012-06-26 Eastman Kodak Company Process for atomic layer deposition
EP1950804A2 (en) * 2007-01-26 2008-07-30 Samsung Electronics Co., Ltd. Display device and manufacturing method of the same
JP4910779B2 (en) 2007-03-02 2012-04-04 凸版印刷株式会社 Organic EL display and manufacturing method thereof
KR100851215B1 (en) 2007-03-14 2008-08-07 삼성에스디아이 주식회사 Thin film transistor and organic light-emitting dislplay device having the thin film transistor
JP5465825B2 (en) * 2007-03-26 2014-04-09 出光興産株式会社 Semiconductor device, semiconductor device manufacturing method, and display device
US7795613B2 (en) 2007-04-17 2010-09-14 Toppan Printing Co., Ltd. Structure with transistor
KR101325053B1 (en) 2007-04-18 2013-11-05 삼성디스플레이 주식회사 Thin film transistor substrate and manufacturing method thereof
KR20080094300A (en) 2007-04-19 2008-10-23 삼성전자주식회사 Thin film transistor and method of manufacturing the same and flat panel display comprising the same
KR101334181B1 (en) 2007-04-20 2013-11-28 삼성전자주식회사 Thin Film Transistor having selectively crystallized channel layer and method of manufacturing the same
WO2008133345A1 (en) 2007-04-25 2008-11-06 Canon Kabushiki Kaisha Oxynitride semiconductor
KR101345376B1 (en) 2007-05-29 2013-12-24 삼성전자주식회사 Fabrication method of ZnO family Thin film transistor
JP2008300612A (en) * 2007-05-31 2008-12-11 Panasonic Corp Display device and manufacturing method thereof
JP5303119B2 (en) * 2007-06-05 2013-10-02 株式会社ジャパンディスプレイ Semiconductor device
TWI453915B (en) * 2007-09-10 2014-09-21 Idemitsu Kosan Co Thin film transistor
US8008627B2 (en) * 2007-09-21 2011-08-30 Fujifilm Corporation Radiation imaging element
JP5489423B2 (en) 2007-09-21 2014-05-14 富士フイルム株式会社 Radiation imaging device
JP5215158B2 (en) 2007-12-17 2013-06-19 富士フイルム株式会社 Inorganic crystalline alignment film, method for manufacturing the same, and semiconductor device
KR20090075554A (en) * 2008-01-04 2009-07-08 삼성전자주식회사 Liquid crystal display and fabricating method of the same
WO2009090969A1 (en) * 2008-01-15 2009-07-23 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
JP5489410B2 (en) * 2008-02-18 2014-05-14 富士フイルム株式会社 Thin film field effect transistor and display device using the same
JP5305731B2 (en) * 2008-05-12 2013-10-02 キヤノン株式会社 Method for controlling threshold voltage of semiconductor device
JP5306705B2 (en) * 2008-05-23 2013-10-02 株式会社半導体エネルギー研究所 Semiconductor device
JP2010003910A (en) * 2008-06-20 2010-01-07 Toshiba Mobile Display Co Ltd Display element
JP5584960B2 (en) * 2008-07-03 2014-09-10 ソニー株式会社 Thin film transistor and display device
JP4623179B2 (en) 2008-09-18 2011-02-02 ソニー株式会社 Thin film transistor and manufacturing method thereof
JP5451280B2 (en) 2008-10-09 2014-03-26 キヤノン株式会社 Wurtzite crystal growth substrate, manufacturing method thereof, and semiconductor device
JP5781720B2 (en) * 2008-12-15 2015-09-24 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7512484B2 (en) 2012-01-23 2024-07-08 株式会社半導体エネルギー研究所 Semiconductor Device

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