JP2011103498A5 - - Google Patents

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Publication number
JP2011103498A5
JP2011103498A5 JP2011031168A JP2011031168A JP2011103498A5 JP 2011103498 A5 JP2011103498 A5 JP 2011103498A5 JP 2011031168 A JP2011031168 A JP 2011031168A JP 2011031168 A JP2011031168 A JP 2011031168A JP 2011103498 A5 JP2011103498 A5 JP 2011103498A5
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JP
Japan
Prior art keywords
water
polishing
cmp
cerium oxide
azobis
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JP2011031168A
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English (en)
Japanese (ja)
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JP2011103498A (ja
JP5509114B2 (ja
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Priority to JP2011031168A priority Critical patent/JP5509114B2/ja
Priority claimed from JP2011031168A external-priority patent/JP5509114B2/ja
Publication of JP2011103498A publication Critical patent/JP2011103498A/ja
Publication of JP2011103498A5 publication Critical patent/JP2011103498A5/ja
Application granted granted Critical
Publication of JP5509114B2 publication Critical patent/JP5509114B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2011031168A 2004-07-23 2011-02-16 Ｃｍｐ研磨剤及び基板の研磨方法 Expired - Lifetime JP5509114B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011031168A JP5509114B2 (ja) 2004-07-23 2011-02-16 Ｃｍｐ研磨剤及び基板の研磨方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004216039 2004-07-23
JP2004216039 2004-07-23
JP2011031168A JP5509114B2 (ja) 2004-07-23 2011-02-16 Ｃｍｐ研磨剤及び基板の研磨方法

Related Parent Applications (1)

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JP2006529234A Division JPWO2006009160A1 (ja) 2004-07-23 2005-07-20 Ｃｍｐ研磨剤及び基板の研磨方法

Related Child Applications (1)

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JP2013042019A Division JP5655879B2 (ja) 2004-07-23 2013-03-04 Ｃｍｐ研磨剤及び基板の研磨方法

Publications (3)

Publication Number Publication Date
JP2011103498A JP2011103498A (ja) 2011-05-26
JP2011103498A5 true JP2011103498A5 (OSRAM) 2012-06-21
JP5509114B2 JP5509114B2 (ja) 2014-06-04

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ID=35785268

Family Applications (3)

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JP2006529234A Pending JPWO2006009160A1 (ja) 2004-07-23 2005-07-20 Ｃｍｐ研磨剤及び基板の研磨方法
JP2011031168A Expired - Lifetime JP5509114B2 (ja) 2004-07-23 2011-02-16 Ｃｍｐ研磨剤及び基板の研磨方法
JP2013042019A Expired - Lifetime JP5655879B2 (ja) 2004-07-23 2013-03-04 Ｃｍｐ研磨剤及び基板の研磨方法

Family Applications Before (1)

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JP2006529234A Pending JPWO2006009160A1 (ja) 2004-07-23 2005-07-20 Ｃｍｐ研磨剤及び基板の研磨方法

Family Applications After (1)

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JP2013042019A Expired - Lifetime JP5655879B2 (ja) 2004-07-23 2013-03-04 Ｃｍｐ研磨剤及び基板の研磨方法

Country Status (7)

Country Link
US (1) US9293344B2 (OSRAM)
EP (1) EP1796152B1 (OSRAM)
JP (3) JPWO2006009160A1 (OSRAM)
KR (1) KR100856171B1 (OSRAM)
CN (3) CN101311205A (OSRAM)
TW (1) TWI287040B (OSRAM)
WO (1) WO2006009160A1 (OSRAM)

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MD3809C2 (ro) * 2008-06-26 2009-08-31 Акционерное Общество "Azurit" Procedeu de prelucrare de finisare a plăcilor pentru acoperire din calcar hemogen
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