JP2011056415A - 塗布装置とその塗布位置補正方法 - Google Patents

塗布装置とその塗布位置補正方法 Download PDF

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Publication number
JP2011056415A
JP2011056415A JP2009209547A JP2009209547A JP2011056415A JP 2011056415 A JP2011056415 A JP 2011056415A JP 2009209547 A JP2009209547 A JP 2009209547A JP 2009209547 A JP2009209547 A JP 2009209547A JP 2011056415 A JP2011056415 A JP 2011056415A
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JP
Japan
Prior art keywords
gantry
coating
head
substrate
heads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009209547A
Other languages
English (en)
Japanese (ja)
Inventor
Isamu Maruyama
勇 圓山
Hideyuki Kawakita
英之 川北
Koji Ishimaru
康治 石丸
Tadao Kosuge
忠男 小菅
Takeshi Watanabe
健 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP2009209547A priority Critical patent/JP2011056415A/ja
Priority to CN2010102611618A priority patent/CN102019254B/zh
Priority to TW099128450A priority patent/TWI441689B/zh
Priority to KR1020100083760A priority patent/KR101141806B1/ko
Publication of JP2011056415A publication Critical patent/JP2011056415A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mathematical Physics (AREA)
JP2009209547A 2009-09-10 2009-09-10 塗布装置とその塗布位置補正方法 Pending JP2011056415A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009209547A JP2011056415A (ja) 2009-09-10 2009-09-10 塗布装置とその塗布位置補正方法
CN2010102611618A CN102019254B (zh) 2009-09-10 2010-08-19 涂敷装置及其涂敷位置修正方法
TW099128450A TWI441689B (zh) 2009-09-10 2010-08-25 Coating device and its coating position correction method
KR1020100083760A KR101141806B1 (ko) 2009-09-10 2010-08-30 도포 장치와 그 도포 위치 보정 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009209547A JP2011056415A (ja) 2009-09-10 2009-09-10 塗布装置とその塗布位置補正方法

Publications (1)

Publication Number Publication Date
JP2011056415A true JP2011056415A (ja) 2011-03-24

Family

ID=43861272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009209547A Pending JP2011056415A (ja) 2009-09-10 2009-09-10 塗布装置とその塗布位置補正方法

Country Status (4)

Country Link
JP (1) JP2011056415A (zh)
KR (1) KR101141806B1 (zh)
CN (1) CN102019254B (zh)
TW (1) TWI441689B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110280444A (zh) * 2019-07-03 2019-09-27 东莞京川精密机械设备有限公司 指纹玻璃自动贴合设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012172814A1 (ja) * 2011-06-17 2012-12-20 横浜ゴム株式会社 グレージングガスケット付きガラスパネルの製造方法および製造装置
TWI593467B (zh) * 2014-10-21 2017-08-01 技鼎股份有限公司 點膠方法及點膠裝置
CN109382264B (zh) * 2018-10-23 2021-06-04 惠科股份有限公司 涂布机构、涂布工艺及显示面板

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100311749B1 (ko) * 1999-05-27 2001-10-18 정문술 표면실장장치의 모듈 헤드 원점조정장치 및 방법
JP4713842B2 (ja) * 2004-03-31 2011-06-29 株式会社東芝 ノズルヘッド制御装置，ノズルヘッド駆動装置，液体吐出装置，表示機器の製造装置，ノズルヘッドの吐出タイミング制御方法，ノズルヘッドの駆動方法，表示機器の製造方法
JP4419764B2 (ja) * 2004-09-13 2010-02-24 株式会社日立プラントテクノロジー 塗布装置と塗布方法
WO2007010714A1 (ja) * 2005-07-19 2007-01-25 Sharp Kabushiki Kaisha 液晶滴下装置及びこれを用いた液晶滴下方法
JP2007136330A (ja) * 2005-11-17 2007-06-07 Sharp Corp インク吐出装置及びインク吐出方法
JP4749159B2 (ja) * 2006-01-13 2011-08-17 大日本スクリーン製造株式会社 塗布装置および塗布装置における基板の位置調整方法
KR100884834B1 (ko) * 2006-05-16 2009-02-20 주식회사 탑 엔지니어링 페이스트 도포기의 기판 정렬 방법
JP5352073B2 (ja) * 2007-10-12 2013-11-27 株式会社日立製作所 インクジェットヘッド装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110280444A (zh) * 2019-07-03 2019-09-27 东莞京川精密机械设备有限公司 指纹玻璃自动贴合设备

Also Published As

Publication number Publication date
CN102019254A (zh) 2011-04-20
CN102019254B (zh) 2013-03-20
TWI441689B (zh) 2014-06-21
KR101141806B1 (ko) 2012-05-11
KR20110027573A (ko) 2011-03-16
TW201127499A (en) 2011-08-16

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