JP2011036847A - 塗膜形成法およびスピンコータ - Google Patents

塗膜形成法およびスピンコータ Download PDF

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Publication number
JP2011036847A
JP2011036847A JP2009282556A JP2009282556A JP2011036847A JP 2011036847 A JP2011036847 A JP 2011036847A JP 2009282556 A JP2009282556 A JP 2009282556A JP 2009282556 A JP2009282556 A JP 2009282556A JP 2011036847 A JP2011036847 A JP 2011036847A
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Japan
Prior art keywords
air
base material
substrate
coating film
air blowing
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Pending
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JP2009282556A
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English (en)
Japanese (ja)
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JP2011036847A5 (enrdf_load_stackoverflow
Inventor
Maya Shakagoori
真矢 釋迦郡
Yoshihiko Hoshiide
芳彦 星出
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Mitsubishi Chemical Corp
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Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Rayon Co Ltd
Priority to JP2009282556A priority Critical patent/JP2011036847A/ja
Publication of JP2011036847A publication Critical patent/JP2011036847A/ja
Publication of JP2011036847A5 publication Critical patent/JP2011036847A5/ja
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP2009282556A 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ Pending JP2011036847A (ja)

Priority Applications (1)

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JP2009282556A JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009164833 2009-07-13
JP2009282556A JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

Publications (2)

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JP2011036847A true JP2011036847A (ja) 2011-02-24
JP2011036847A5 JP2011036847A5 (enrdf_load_stackoverflow) 2013-01-31

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JP2009282556A Pending JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

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JP (1) JP2011036847A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016152308A1 (ja) * 2015-03-25 2016-09-29 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法
CN111359791A (zh) * 2018-12-26 2020-07-03 中冶京诚工程技术有限公司 厚边消减吹扫装置及粉末静电喷涂装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830371A (ja) * 1981-08-17 1983-02-22 Toshiba Corp 塗装方法
JPS6213029A (ja) * 1985-07-10 1987-01-21 Mitsubishi Electric Corp レジスト塗布方法
JPS6447474A (en) * 1987-08-19 1989-02-21 Fujitsu Ltd Method for applying high-viscosity resin
JPH0453224A (ja) * 1990-06-20 1992-02-20 Fujitsu Ltd スピンコータ
JPH0623314A (ja) * 1992-02-03 1994-02-01 Origin Electric Co Ltd 不要塗膜の剥離方法及び装置
JPH09141191A (ja) * 1995-11-27 1997-06-03 Toppan Printing Co Ltd 基板裏面洗浄方法
JP2000153211A (ja) * 1998-11-20 2000-06-06 Matsushita Electronics Industry Corp スピンコーティング法、スピンコーティング装置、陰極線管の製造方法
JP2003068693A (ja) * 2001-08-29 2003-03-07 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003290704A (ja) * 2002-03-29 2003-10-14 Seiko Epson Corp 処理液体の塗布方法及び塗布装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830371A (ja) * 1981-08-17 1983-02-22 Toshiba Corp 塗装方法
JPS6213029A (ja) * 1985-07-10 1987-01-21 Mitsubishi Electric Corp レジスト塗布方法
JPS6447474A (en) * 1987-08-19 1989-02-21 Fujitsu Ltd Method for applying high-viscosity resin
JPH0453224A (ja) * 1990-06-20 1992-02-20 Fujitsu Ltd スピンコータ
JPH0623314A (ja) * 1992-02-03 1994-02-01 Origin Electric Co Ltd 不要塗膜の剥離方法及び装置
JPH09141191A (ja) * 1995-11-27 1997-06-03 Toppan Printing Co Ltd 基板裏面洗浄方法
JP2000153211A (ja) * 1998-11-20 2000-06-06 Matsushita Electronics Industry Corp スピンコーティング法、スピンコーティング装置、陰極線管の製造方法
JP2003068693A (ja) * 2001-08-29 2003-03-07 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003290704A (ja) * 2002-03-29 2003-10-14 Seiko Epson Corp 処理液体の塗布方法及び塗布装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016152308A1 (ja) * 2015-03-25 2016-09-29 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法
JP2016182531A (ja) * 2015-03-25 2016-10-20 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法
CN107249760A (zh) * 2015-03-25 2017-10-13 株式会社斯库林集团 涂敷方法
TWI614066B (zh) * 2015-03-25 2018-02-11 思可林集團股份有限公司 塗佈方法
US10569297B2 (en) 2015-03-25 2020-02-25 SCREEN Holdings Co., Ltd. Coating method
CN107249760B (zh) * 2015-03-25 2020-10-30 株式会社斯库林集团 涂敷方法
CN111359791A (zh) * 2018-12-26 2020-07-03 中冶京诚工程技术有限公司 厚边消减吹扫装置及粉末静电喷涂装置

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