JP2011036847A5 - - Google Patents

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Publication number
JP2011036847A5
JP2011036847A5 JP2009282556A JP2009282556A JP2011036847A5 JP 2011036847 A5 JP2011036847 A5 JP 2011036847A5 JP 2009282556 A JP2009282556 A JP 2009282556A JP 2009282556 A JP2009282556 A JP 2009282556A JP 2011036847 A5 JP2011036847 A5 JP 2011036847A5
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JP
Japan
Prior art keywords
base material
air
substrate
coating film
air blowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009282556A
Other languages
English (en)
Japanese (ja)
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JP2011036847A (ja
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Publication date
Application filed filed Critical
Priority to JP2009282556A priority Critical patent/JP2011036847A/ja
Priority claimed from JP2009282556A external-priority patent/JP2011036847A/ja
Publication of JP2011036847A publication Critical patent/JP2011036847A/ja
Publication of JP2011036847A5 publication Critical patent/JP2011036847A5/ja
Pending legal-status Critical Current

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JP2009282556A 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ Pending JP2011036847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009282556A JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009164833 2009-07-13
JP2009282556A JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

Publications (2)

Publication Number Publication Date
JP2011036847A JP2011036847A (ja) 2011-02-24
JP2011036847A5 true JP2011036847A5 (enrdf_load_stackoverflow) 2013-01-31

Family

ID=43765188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009282556A Pending JP2011036847A (ja) 2009-07-13 2009-12-14 塗膜形成法およびスピンコータ

Country Status (1)

Country Link
JP (1) JP2011036847A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6498006B2 (ja) * 2015-03-25 2019-04-10 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法
CN111359791B (zh) * 2018-12-26 2024-11-22 中冶京诚工程技术有限公司 厚边消减吹扫装置及粉末静电喷涂装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830371A (ja) * 1981-08-17 1983-02-22 Toshiba Corp 塗装方法
JPS6213029A (ja) * 1985-07-10 1987-01-21 Mitsubishi Electric Corp レジスト塗布方法
JPS6447474A (en) * 1987-08-19 1989-02-21 Fujitsu Ltd Method for applying high-viscosity resin
JPH0453224A (ja) * 1990-06-20 1992-02-20 Fujitsu Ltd スピンコータ
JP2528413B2 (ja) * 1992-02-03 1996-08-28 オリジン電気株式会社 不要塗膜の剥離方法及び装置
JPH09141191A (ja) * 1995-11-27 1997-06-03 Toppan Printing Co Ltd 基板裏面洗浄方法
JP2000153211A (ja) * 1998-11-20 2000-06-06 Matsushita Electronics Industry Corp スピンコーティング法、スピンコーティング装置、陰極線管の製造方法
JP3917393B2 (ja) * 2001-08-29 2007-05-23 大日本スクリーン製造株式会社 基板処理装置
JP2003290704A (ja) * 2002-03-29 2003-10-14 Seiko Epson Corp 処理液体の塗布方法及び塗布装置

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