JP2010512004A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010512004A5 JP2010512004A5 JP2009539352A JP2009539352A JP2010512004A5 JP 2010512004 A5 JP2010512004 A5 JP 2010512004A5 JP 2009539352 A JP2009539352 A JP 2009539352A JP 2009539352 A JP2009539352 A JP 2009539352A JP 2010512004 A5 JP2010512004 A5 JP 2010512004A5
- Authority
- JP
- Japan
- Prior art keywords
- type material
- conductive type
- doped region
- transfer gate
- work function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 12
- 239000004020 conductor Substances 0.000 claims 8
- 230000009977 dual effect Effects 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 238000009792 diffusion process Methods 0.000 claims 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 4
- 239000002800 charge carrier Substances 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/565,801 | 2006-12-01 | ||
| US11/565,801 US7675097B2 (en) | 2006-12-01 | 2006-12-01 | Silicide strapping in imager transfer gate device |
| PCT/US2007/024684 WO2008069994A2 (en) | 2006-12-01 | 2007-11-30 | Silicide strapping in imager transfer gate device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010512004A JP2010512004A (ja) | 2010-04-15 |
| JP2010512004A5 true JP2010512004A5 (enExample) | 2011-01-20 |
| JP5096483B2 JP5096483B2 (ja) | 2012-12-12 |
Family
ID=39434223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009539352A Active JP5096483B2 (ja) | 2006-12-01 | 2007-11-30 | 撮像素子トランスファゲートデバイスにおけるシリサイドストラップ |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7675097B2 (enExample) |
| EP (1) | EP2089905B1 (enExample) |
| JP (1) | JP5096483B2 (enExample) |
| KR (1) | KR101437194B1 (enExample) |
| CN (1) | CN101281918B (enExample) |
| TW (1) | TWI420659B (enExample) |
| WO (1) | WO2008069994A2 (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008056289A1 (en) * | 2006-11-06 | 2008-05-15 | Nxp B.V. | Method of manufacturing a fet gate |
| US7675097B2 (en) | 2006-12-01 | 2010-03-09 | International Business Machines Corporation | Silicide strapping in imager transfer gate device |
| KR100810423B1 (ko) * | 2006-12-27 | 2008-03-04 | 동부일렉트로닉스 주식회사 | 이미지 센서 및 이미지 센서의 제조 방법 |
| US20080217679A1 (en) * | 2007-03-08 | 2008-09-11 | Macronix International Co., Ltd. | Memory unit structure and operation method thereof |
| KR20090003854A (ko) * | 2007-07-05 | 2009-01-12 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
| US8110465B2 (en) | 2007-07-30 | 2012-02-07 | International Business Machines Corporation | Field effect transistor having an asymmetric gate electrode |
| US7741217B2 (en) * | 2007-10-25 | 2010-06-22 | International Business Machines Corporation | Dual workfunction silicide diode |
| US8743247B2 (en) * | 2008-01-14 | 2014-06-03 | International Business Machines Corporation | Low lag transfer gate device |
| US8227844B2 (en) * | 2008-01-14 | 2012-07-24 | International Business Machines Corporation | Low lag transfer gate device |
| TWI347009B (en) * | 2008-02-04 | 2011-08-11 | Jack Kuo | Continuous multigate transistors |
| US20090261393A1 (en) * | 2008-04-18 | 2009-10-22 | United Microelectronics Corp. | Composite transfer gate and fabrication thereof |
| JP5091886B2 (ja) | 2009-02-13 | 2012-12-05 | 浜松ホトニクス株式会社 | イメージセンサ |
| JP5271104B2 (ja) | 2009-02-13 | 2013-08-21 | 浜松ホトニクス株式会社 | リニアイメージセンサ |
| US20100314667A1 (en) * | 2009-06-11 | 2010-12-16 | Omnivision Technologies, Inc. | Cmos pixel with dual-element transfer gate |
| US9000500B2 (en) | 2009-12-30 | 2015-04-07 | Omnivision Technologies, Inc. | Image sensor with doped transfer gate |
| US8299505B2 (en) | 2011-02-17 | 2012-10-30 | International Business Machines Corporation | Pixel sensor cell with a dual work function gate electode |
| CA2835870A1 (en) | 2011-05-12 | 2012-11-15 | Olive Medical Corporation | Pixel array area optimization using stacking scheme for hybrid image sensor with minimal vertical interconnects |
| US9070784B2 (en) | 2011-07-22 | 2015-06-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metal gate structure of a CMOS semiconductor device and method of forming the same |
| JP2013084834A (ja) * | 2011-10-12 | 2013-05-09 | Sharp Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| US9698185B2 (en) * | 2011-10-13 | 2017-07-04 | Omnivision Technologies, Inc. | Partial buried channel transfer device for image sensors |
| US9000527B2 (en) | 2012-05-15 | 2015-04-07 | Apple Inc. | Gate stack with electrical shunt in end portion of gate stack |
| WO2014002365A1 (ja) * | 2012-06-26 | 2014-01-03 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
| CA2878512A1 (en) | 2012-07-26 | 2014-01-30 | Olive Medical Corporation | Camera system with minimal area monolithic cmos image sensor |
| US8809925B2 (en) * | 2012-10-11 | 2014-08-19 | Omnivision Technologies, Inc. | Partial buried channel transfer device in image sensors |
| US8912584B2 (en) * | 2012-10-23 | 2014-12-16 | Apple Inc. | PFET polysilicon layer with N-type end cap for electrical shunt |
| JP6433975B2 (ja) | 2013-03-15 | 2018-12-05 | デピュイ・シンセス・プロダクツ・インコーポレイテッド | 入力クロック及びデータ伝送クロックのない画像センサ同期 |
| EP2967286B1 (en) | 2013-03-15 | 2021-06-23 | DePuy Synthes Products, Inc. | Minimize image sensor i/o and conductor counts in endoscope applications |
| KR102089682B1 (ko) * | 2013-07-15 | 2020-03-16 | 삼성전자 주식회사 | 반도체 장치 및 이의 제조 방법 |
| CN103456756A (zh) * | 2013-09-26 | 2013-12-18 | 哈尔滨工程大学 | 一种有源像素结构及其制作方法 |
| US9526468B2 (en) | 2014-09-09 | 2016-12-27 | General Electric Company | Multiple frame acquisition for exposure control in X-ray medical imagers |
| JP6668600B2 (ja) * | 2015-03-19 | 2020-03-18 | セイコーエプソン株式会社 | 固体撮像素子及びその製造方法 |
| US10254389B2 (en) | 2015-11-06 | 2019-04-09 | Artilux Corporation | High-speed light sensing apparatus |
| US10418407B2 (en) | 2015-11-06 | 2019-09-17 | Artilux, Inc. | High-speed light sensing apparatus III |
| TWI724164B (zh) * | 2017-05-05 | 2021-04-11 | 聯華電子股份有限公司 | 半導體元件及其製作方法 |
| US11393867B2 (en) * | 2017-12-06 | 2022-07-19 | Facebook Technologies, Llc | Multi-photodiode pixel cell |
| CN113540142B (zh) * | 2018-02-23 | 2024-07-30 | 奥特逻科公司 | 光检测装置 |
| US11105928B2 (en) | 2018-02-23 | 2021-08-31 | Artilux, Inc. | Light-sensing apparatus and light-sensing method thereof |
| CN110108919A (zh) * | 2019-04-16 | 2019-08-09 | 天津大学 | 一种像素内PPD pinning电压的测量方法 |
| CN116670815A (zh) * | 2020-12-21 | 2023-08-29 | 索尼半导体解决方案公司 | 成像设备和电子设备 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2817518B2 (ja) * | 1991-06-21 | 1998-10-30 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| EP0798785B1 (en) | 1996-03-29 | 2003-12-03 | STMicroelectronics S.r.l. | High-voltage-resistant MOS transistor, and corresponding manufacturing process |
| EP0936667A1 (en) * | 1998-01-20 | 1999-08-18 | Lucent Technologies Inc. | Lattice matched barrier for dual doped polysilicon gates |
| US6333205B1 (en) | 1999-08-16 | 2001-12-25 | Micron Technology, Inc. | CMOS imager with selectively silicided gates |
| JP4398917B2 (ja) | 2000-03-28 | 2010-01-13 | 株式会社東芝 | 固体撮像装置及びその製造方法 |
| JP3782297B2 (ja) | 2000-03-28 | 2006-06-07 | 株式会社東芝 | 固体撮像装置及びその製造方法 |
| WO2002013510A2 (en) * | 2000-08-04 | 2002-02-14 | Foveon, Inc. | All-electronic high-resolution digital still camera |
| US6794252B2 (en) * | 2001-09-28 | 2004-09-21 | Texas Instruments Incorporated | Method and system for forming dual work function gate electrodes in a semiconductor device |
| TWI296062B (en) * | 2001-12-28 | 2008-04-21 | Sanyo Electric Co | Liquid crystal display device |
| US7335958B2 (en) * | 2003-06-25 | 2008-02-26 | Micron Technology, Inc. | Tailoring gate work-function in image sensors |
| US7064406B2 (en) | 2003-09-03 | 2006-06-20 | Micron Technology, Inc. | Supression of dark current in a photosensor for imaging |
| US7205584B2 (en) | 2003-12-22 | 2007-04-17 | Micron Technology, Inc. | Image sensor for reduced dark current |
| US7214575B2 (en) | 2004-01-06 | 2007-05-08 | Micron Technology, Inc. | Method and apparatus providing CMOS imager device pixel with transistor having lower threshold voltage than other imager device transistors |
| JP2005260077A (ja) * | 2004-03-12 | 2005-09-22 | Matsushita Electric Ind Co Ltd | 固体撮像素子ならびにその製造方法およびそれを用いたカメラ |
| JP4546201B2 (ja) * | 2004-03-17 | 2010-09-15 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| US7288788B2 (en) | 2004-12-03 | 2007-10-30 | International Business Machines Corporation | Predoped transfer gate for an image sensor |
| US7217968B2 (en) | 2004-12-15 | 2007-05-15 | International Business Machines Corporation | Recessed gate for an image sensor |
| JP4533155B2 (ja) * | 2005-01-12 | 2010-09-01 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| US7115924B1 (en) * | 2005-06-03 | 2006-10-03 | Avago Technologies Sensor Ip Pte. Ltd. | Pixel with asymmetric transfer gate channel doping |
| JP4847828B2 (ja) * | 2006-09-22 | 2011-12-28 | 旭化成エレクトロニクス株式会社 | Cmosイメージセンサの製造方法 |
| US7675097B2 (en) | 2006-12-01 | 2010-03-09 | International Business Machines Corporation | Silicide strapping in imager transfer gate device |
-
2006
- 2006-12-01 US US11/565,801 patent/US7675097B2/en active Active
-
2007
- 2007-11-15 CN CN2007101869334A patent/CN101281918B/zh active Active
- 2007-11-30 WO PCT/US2007/024684 patent/WO2008069994A2/en not_active Ceased
- 2007-11-30 KR KR1020097011278A patent/KR101437194B1/ko active Active
- 2007-11-30 TW TW096145709A patent/TWI420659B/zh active
- 2007-11-30 JP JP2009539352A patent/JP5096483B2/ja active Active
- 2007-11-30 EP EP07867600.4A patent/EP2089905B1/en active Active
-
2010
- 2010-02-03 US US12/699,419 patent/US8158453B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010512004A5 (enExample) | ||
| KR102553314B1 (ko) | 이미지 센서 | |
| US9318520B2 (en) | Solid-state image sensing device manufacturing method and solid-state image sensing device | |
| TWI281253B (en) | Solid-state imaging device | |
| CN102334188B (zh) | 固态成像元件及其制造方法以及电子信息设备 | |
| JP2011517509A5 (enExample) | ||
| KR102095494B1 (ko) | 씨모스 이미지 센서 | |
| US8710559B2 (en) | Solid-state imaging apparatus, method of manufacturing solid-state imaging apparatus, and electronic apparatus | |
| KR102290502B1 (ko) | 이미지 센서 및 이의 제조 방법 | |
| JP2011124451A5 (enExample) | ||
| TW200901454A (en) | Method, apparatus, and system to reduce ground resistance in a pixel array | |
| US20140042445A1 (en) | System and Method for Fabricating a 3D Image Sensor Structure | |
| JP2012129371A5 (enExample) | ||
| JP2010161236A5 (enExample) | ||
| WO2008069994A3 (en) | Silicide strapping in imager transfer gate device | |
| KR20160017168A (ko) | 이미지 센서 | |
| TW200425488A (en) | Solid-state imaging apparatus and its manufacturing method | |
| JP2012015274A5 (enExample) | ||
| TW201003907A (en) | Solid-state imaging device, drive method thereof and electronic apparatus | |
| JP2013080797A5 (enExample) | ||
| TW201222802A (en) | Solid-state imaging device, manufacturing method of solid-state imaging device, and electronic apparatus | |
| CN116322259A (zh) | 光电转换元件和固态摄像装置 | |
| JP7759598B2 (ja) | 撮像装置 | |
| JP2011119543A5 (enExample) | ||
| JP2008166607A5 (enExample) |