JP2010505045A5 - - Google Patents
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- Publication number
- JP2010505045A5 JP2010505045A5 JP2009530550A JP2009530550A JP2010505045A5 JP 2010505045 A5 JP2010505045 A5 JP 2010505045A5 JP 2009530550 A JP2009530550 A JP 2009530550A JP 2009530550 A JP2009530550 A JP 2009530550A JP 2010505045 A5 JP2010505045 A5 JP 2010505045A5
- Authority
- JP
- Japan
- Prior art keywords
- solution
- gallium
- salt
- complexing agent
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008139 complexing agent Substances 0.000 claims description 25
- 229910052733 gallium Inorganic materials 0.000 claims description 19
- 150000003839 salts Chemical class 0.000 claims description 19
- 239000010949 copper Substances 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 15
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 11
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 10
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 7
- 229910002651 NO3 Inorganic materials 0.000 claims description 7
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 5
- -1 alkali metal salt Chemical class 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000006259 organic additive Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000003002 pH adjusting agent Substances 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 12
- 229910052783 alkali metal Inorganic materials 0.000 claims 2
- 239000013522 chelant Substances 0.000 claims 2
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims 1
- 150000001413 amino acids Chemical class 0.000 claims 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims 1
- 229910003002 lithium salt Inorganic materials 0.000 claims 1
- 159000000002 lithium salts Chemical class 0.000 claims 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 claims 1
- 159000000000 sodium salts Chemical class 0.000 claims 1
- 229940095064 tartrate Drugs 0.000 claims 1
- 238000000034 method Methods 0.000 description 32
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 18
- 239000004471 Glycine Substances 0.000 description 9
- 229940071264 lithium citrate Drugs 0.000 description 6
- WJSIUCDMWSDDCE-UHFFFAOYSA-K lithium citrate (anhydrous) Chemical compound [Li+].[Li+].[Li+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O WJSIUCDMWSDDCE-UHFFFAOYSA-K 0.000 description 6
- 239000001508 potassium citrate Substances 0.000 description 6
- 229960002635 potassium citrate Drugs 0.000 description 6
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 6
- 235000011082 potassium citrates Nutrition 0.000 description 6
- 239000001509 sodium citrate Substances 0.000 description 6
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 6
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 6
- 150000001860 citric acid derivatives Chemical class 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- VIJMMQUAJQEELS-UHFFFAOYSA-N n,n-bis(ethenyl)ethenamine Chemical compound C=CN(C=C)C=C VIJMMQUAJQEELS-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- BCSZNBYWPPFADT-UHFFFAOYSA-N 4-(1,2,4-triazol-4-ylmethyl)benzonitrile Chemical compound C1=CC(C#N)=CC=C1CN1C=NN=C1 BCSZNBYWPPFADT-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/535,927 US7507321B2 (en) | 2006-01-06 | 2006-09-27 | Efficient gallium thin film electroplating methods and chemistries |
| PCT/US2007/079356 WO2008039736A1 (en) | 2006-09-27 | 2007-09-25 | Efficient gallium thin film electroplating methods and chemistries |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010505045A JP2010505045A (ja) | 2010-02-18 |
| JP2010505045A5 true JP2010505045A5 (enExample) | 2010-11-11 |
Family
ID=39230522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009530550A Pending JP2010505045A (ja) | 2006-09-27 | 2007-09-25 | 効率的なガリウム薄膜電気めっき方法及び化学 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7507321B2 (enExample) |
| EP (1) | EP2094882A4 (enExample) |
| JP (1) | JP2010505045A (enExample) |
| KR (1) | KR20090085583A (enExample) |
| CN (1) | CN101528987A (enExample) |
| TW (1) | TW200829725A (enExample) |
| WO (1) | WO2008039736A1 (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070111367A1 (en) * | 2005-10-19 | 2007-05-17 | Basol Bulent M | Method and apparatus for converting precursor layers into photovoltaic absorbers |
| US20070093006A1 (en) * | 2005-10-24 | 2007-04-26 | Basol Bulent M | Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto |
| US7507321B2 (en) * | 2006-01-06 | 2009-03-24 | Solopower, Inc. | Efficient gallium thin film electroplating methods and chemistries |
| US7892413B2 (en) * | 2006-09-27 | 2011-02-22 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
| US8066865B2 (en) * | 2008-05-19 | 2011-11-29 | Solopower, Inc. | Electroplating methods and chemistries for deposition of group IIIA-group via thin films |
| US20080175993A1 (en) * | 2006-10-13 | 2008-07-24 | Jalal Ashjaee | Reel-to-reel reaction of a precursor film to form solar cell absorber |
| US20090183675A1 (en) * | 2006-10-13 | 2009-07-23 | Mustafa Pinarbasi | Reactor to form solar cell absorbers |
| JP2008260981A (ja) * | 2007-04-10 | 2008-10-30 | Yuken Industry Co Ltd | めっき液、めっき方法およびめっき皮膜が形成された物品 |
| US8225664B1 (en) * | 2007-10-17 | 2012-07-24 | Lsp Technologies | Lamb waves for laser bond inspection |
| US8409418B2 (en) * | 2009-02-06 | 2013-04-02 | Solopower, Inc. | Enhanced plating chemistries and methods for preparation of group IBIIIAVIA thin film solar cell absorbers |
| US8425753B2 (en) * | 2008-05-19 | 2013-04-23 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
| US20090188808A1 (en) * | 2008-01-29 | 2009-07-30 | Jiaxiong Wang | Indium electroplating baths for thin layer deposition |
| EP2128903B1 (en) * | 2008-05-30 | 2017-02-22 | ATOTECH Deutschland GmbH | Electroplating additive for the deposition of a metal, a binary, ternary, quaternary or pentanary alloy of elements of group 11 (IB)-group 13 (IIIA)-group 16 (VIA) |
| US7951280B2 (en) * | 2008-11-07 | 2011-05-31 | Solopower, Inc. | Gallium electroplating methods and electrolytes employing mixed solvents |
| WO2010065955A1 (en) * | 2008-12-05 | 2010-06-10 | Solopower, Inc. | Method and apparatus for forming contact layers for continuous workpieces |
| US20100200417A1 (en) * | 2009-02-04 | 2010-08-12 | Impulse Devices, Inc. | Method and Apparatus for Electrodeposition in Metal Acoustic Resonators |
| US20100213073A1 (en) * | 2009-02-23 | 2010-08-26 | International Business Machines Corporation | Bath for electroplating a i-iii-vi compound, use thereof and structures containing same |
| WO2010126699A2 (en) | 2009-04-29 | 2010-11-04 | Hunter Douglas Industries B.V. | Architectural panels with organic photovoltaic interlayers and methods of forming the same |
| US20110108115A1 (en) * | 2009-11-11 | 2011-05-12 | International Business Machines Corporation | Forming a Photovoltaic Device |
| CN101805915A (zh) * | 2010-04-20 | 2010-08-18 | 南开大学 | 一种电镀金属Ga和Ga合金的溶液体系及其制备方法 |
| US8304272B2 (en) | 2010-07-02 | 2012-11-06 | International Business Machines Corporation | Germanium photodetector |
| US20120055612A1 (en) | 2010-09-02 | 2012-03-08 | International Business Machines Corporation | Electrodeposition methods of gallium and gallium alloy films and related photovoltaic structures |
| US8545689B2 (en) | 2010-09-02 | 2013-10-01 | International Business Machines Corporation | Gallium electrodeposition processes and chemistries |
| US20120143046A1 (en) * | 2010-12-03 | 2012-06-07 | Stadler Bethanie J H | Electro-chemical-deposition of galfenol and the uses therof |
| JP5552042B2 (ja) | 2010-12-27 | 2014-07-16 | インターナショナル・ビジネス・マシーンズ・コーポレーション | プログラム解析の方法、システムおよびプログラム |
| ES2546065T3 (es) | 2011-07-20 | 2015-09-18 | Enthone Inc. | Aparato para la deposición electroquímica de un metal |
| US9410259B2 (en) | 2011-09-02 | 2016-08-09 | Alliance For Sustainable Energy, Llc | Electrodeposition of gallium for photovoltaics |
| CN102703928B (zh) * | 2012-05-23 | 2015-04-01 | 中国科学院过程工程研究所 | 一种超声辅助强化电解提取金属镓的方法 |
| CN103114316B (zh) * | 2013-03-01 | 2015-10-28 | 沈阳师范大学 | 一种环境友好的镀镓用电镀液 |
| CN103741185B (zh) * | 2013-12-12 | 2017-01-04 | 深圳首创新能源股份有限公司 | 制备cigs吸收层的电镀生产线 |
| WO2018140433A1 (en) | 2017-01-24 | 2018-08-02 | Mallinckrodt Nuclear Medicine Llc | Gallium-69 enriched target bodies |
| US11103878B2 (en) | 2017-04-03 | 2021-08-31 | Yale University | Electrochemical separation and recovery of metals |
| CN106968002A (zh) * | 2017-05-09 | 2017-07-21 | 句容市博远电子有限公司 | 一种含稀散金属的电镀液 |
| US20200006412A1 (en) * | 2018-06-28 | 2020-01-02 | Applied Materials, Inc. | Methods and apparatus for image sensor semiconductors |
| CN112779013B (zh) * | 2020-12-31 | 2022-04-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | 用于光电化学刻蚀氮化镓的刻蚀液 |
| US12057670B2 (en) | 2021-03-31 | 2024-08-06 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method for manufacturing the same |
| EP4628630A2 (en) | 2021-06-01 | 2025-10-08 | NTH Cycle, Inc. | Electrochemical metal deposition system and method |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2582377A (en) * | 1947-04-11 | 1952-01-15 | Aluminum Co Of America | Recovery of gallium from alkali metal aluminate solutions |
| US2793179A (en) * | 1955-06-13 | 1957-05-21 | Ind De L Aluminium Sa | Method of recovering gallium from an alkali aluminate lye |
| US2873232A (en) * | 1956-06-18 | 1959-02-10 | Philco Corp | Method of jet plating |
| US3061528A (en) * | 1961-07-13 | 1962-10-30 | Hughes Aircraft Co | Gallium plating and methods therefor |
| US3787463A (en) * | 1972-02-24 | 1974-01-22 | Oxy Metal Finishing Corp | Amine gold complex useful for the electrodeposition of gold and its alloys |
| US4199416A (en) * | 1977-05-03 | 1980-04-22 | Johnson, Matthey & Co., Limited | Composition for the electroplating of gold |
| US4488942A (en) * | 1983-08-05 | 1984-12-18 | Omi International Corporation | Zinc and zinc alloy electroplating bath and process |
| JPH04325688A (ja) * | 1991-04-26 | 1992-11-16 | Murata Mfg Co Ltd | 無電解めっき浴 |
| US5304403A (en) * | 1992-09-04 | 1994-04-19 | General Moors Corporation | Zinc/nickel/phosphorus coatings and elecroless coating method therefor |
| CH687112A5 (fr) * | 1993-06-08 | 1996-09-13 | Yazaki Corp | Procédé pour déposer un précurseur du composé CuInSe(2). |
| JP2806469B2 (ja) * | 1993-09-16 | 1998-09-30 | 矢崎総業株式会社 | 太陽電池吸収層の製造方法 |
| JP3089994B2 (ja) * | 1995-07-26 | 2000-09-18 | 矢崎総業株式会社 | 銅−インジウム−硫黄−セレン薄膜の作製方法、及び銅−インジウム−硫黄−セレン系カルコパイライト結晶の製造方法 |
| US5730852A (en) * | 1995-09-25 | 1998-03-24 | Davis, Joseph & Negley | Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells |
| US5554211A (en) * | 1995-11-15 | 1996-09-10 | Mcgean-Rohco, Inc. | Aqueous electroless plating solutions |
| US6188044B1 (en) * | 1998-04-27 | 2001-02-13 | Cvc Products, Inc. | High-performance energy transfer system and method for thermal processing applications |
| EP1103637A1 (en) * | 1999-11-29 | 2001-05-30 | ENTHONE-OMI, Inc. | Method of producing AuCuGa alloy coating using electrolysis, and alloys produced by such a method |
| US20020189665A1 (en) * | 2000-04-10 | 2002-12-19 | Davis, Joseph & Negley | Preparation of CIGS-based solar cells using a buffered electrodeposition bath |
| FR2839201B1 (fr) * | 2002-04-29 | 2005-04-01 | Electricite De France | Procede de fabrication de semi-conducteurs en couches minces a base de composes i-iii-vi2, pour applications photovoltaiques |
| FR2849532B1 (fr) * | 2002-12-26 | 2005-08-19 | Electricite De France | Procede de fabrication d'un compose i-iii-vi2 en couches minces, favorisant l'incorporation d'elements iii |
| US20070111367A1 (en) * | 2005-10-19 | 2007-05-17 | Basol Bulent M | Method and apparatus for converting precursor layers into photovoltaic absorbers |
| US7507321B2 (en) * | 2006-01-06 | 2009-03-24 | Solopower, Inc. | Efficient gallium thin film electroplating methods and chemistries |
-
2006
- 2006-09-27 US US11/535,927 patent/US7507321B2/en not_active Expired - Fee Related
-
2007
- 2007-09-25 JP JP2009530550A patent/JP2010505045A/ja active Pending
- 2007-09-25 KR KR1020097008547A patent/KR20090085583A/ko not_active Ceased
- 2007-09-25 CN CNA2007800391728A patent/CN101528987A/zh active Pending
- 2007-09-25 EP EP07814990A patent/EP2094882A4/en not_active Withdrawn
- 2007-09-25 WO PCT/US2007/079356 patent/WO2008039736A1/en not_active Ceased
- 2007-09-27 TW TW096135964A patent/TW200829725A/zh unknown
-
2009
- 2009-03-16 US US12/404,690 patent/US20090173634A1/en not_active Abandoned
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