JP2010287732A - 窒化物半導体素子 - Google Patents
窒化物半導体素子 Download PDFInfo
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- JP2010287732A JP2010287732A JP2009140361A JP2009140361A JP2010287732A JP 2010287732 A JP2010287732 A JP 2010287732A JP 2009140361 A JP2009140361 A JP 2009140361A JP 2009140361 A JP2009140361 A JP 2009140361A JP 2010287732 A JP2010287732 A JP 2010287732A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 58
- 229910002704 AlGaN Inorganic materials 0.000 description 29
- 238000010586 diagram Methods 0.000 description 22
- 230000015556 catabolic process Effects 0.000 description 10
- 230000005684 electric field Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000005036 potential barrier Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000005533 two-dimensional electron gas Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000881 depressing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
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Abstract
【解決手段】第1の窒化物半導体からなる第1の層と、第1の層の上に設けられ、第1の窒化物半導体よりもバンドギャップが大なる第2の窒化物半導体からなる第2の層と、第2の層に電気的に接続された第1の電極と、第2の層の上に設けられ、第1の方向において第1の電極と並設された第2の電極と、第2の層の上に設けられたフローティング電極と、を備え、フローティング電極は、第1の方向に直交する第2の方向において第2の電極に挟まれた部分と、第1の電極に向けて第2の電極よりも突出した部分と、を有することを特徴とする窒化物半導体素子。
【選択図】図1
Description
図1は、本発明の第1の実施の形態に係る窒化物半導体SBDの構成を示す模式図である。図1(a)は、SBDの電極パターンを示す模式図であり、図1(b)および(c)は、それぞれSBDのA−A断面およびB−B断面を示す模式図である。
図2は本発明の第2の実施の形態に係る窒化物半導体HFETの構成を模式的に示す電極パターン図と断面図である。図2(a)は、HFETの電極パターンを示す模式図であり、図2(b)および(c)は、それぞれHFETのA−A断面およびB−B断面を示す模式図である。
図5は、本発明の第3の実施の形態に係る窒化物半導体HFETの構成を模式的に示す電極パターン図および断面図である。図5(a)は、HFETの電極パターンを示す模式図であり、図5(b)および(c)は、それぞれHFETのA−A断面およびB−B断面を示す模式図である。
図6は、本発明の第4の実施の形態に係る窒化物半導体HFETの構成を模式的に示す電極パターン図および断面図である。図6(a)は、HFETの電極パターンを示す模式図であり、図6(b)および(c)は、それぞれHFETのA−A断面およびB−B断面を示す模式図である。
図7は、本発明の第5の実施の形態に係る窒化物半導体HFETの構成を模式的に示す電極パターン図および断面図である。図7(a)は、HFETの電極パターンを示す模式図であり、図7(b)および(c)は、それぞれHFETのA−A断面およびB−B断面を示す模式図である。
2 AlGaN層
3 ソース電極
4 ドレイン電極
5 ゲート電極
6 フローティング電極
7 絶縁膜
8 フィールド絶縁膜
9 フィールドプレート電極
10 フィールドプレート電極
13 アノード電極
14 カソード電極
22 短電極部
Claims (5)
- 第1の窒化物半導体からなる第1の層と、
前記第1の層の上に設けられ、前記第1の窒化物半導体よりもバンドギャップが大なる第2の窒化物半導体からなる第2の層と、
前記第2の層に電気的に接続された第1の電極と、
前記第2の層の上に設けられ、第1の方向において前記第1の電極と並設された第2の電極と、
前記第2の層の上に設けられたフローティング電極と、
を備え、
前記フローティング電極は、前記第1の方向に直交する第2の方向において前記第2の電極に挟まれた部分と、前記第1の電極に向けて第2の電極よりも突出した部分と、を有することを特徴とする窒化物半導体素子。 - 前記第2の層に電気的に接続され、前記第1の方向において前記第1及び第2の電極と並設された第3の電極をさらに備え、
前記第2の電極は、前記第1の電極と前記第3の電極との間に設けられたことを特徴とする請求項1記載の窒化物半導体素子。 - 前記第2の電極は、絶縁膜を介して前記フローティング電極の一部を覆っていることを特徴とする請求項1または2に記載の窒化物半導体素子。
- 前記第2の電極と前記第1の電極との間に設けられ、前記フローティング電極と前記第2の層の表面を覆うフィールド絶縁膜と、
前記第2の電極に接続され、前記フィールド絶縁膜の上を前記第1の電極に向かって伸びるように設けられた第1のフィールドプレート電極と、
をさらに備えたことを特徴とする請求項1または2に記載の窒化物半導体素子。 - 前記第1のフィールドプレート電極と離間して設けられ、且つ、前記フローティング電極に接続された第2のフィールドプレート電極をさらに備え、
前記第2のフィールドプレート電極は、前記フィールド絶縁膜の上を前記フローティング電極から前記第1の電極に向かって伸びるように設けられたことを特徴とする請求項4記載の窒化物半導体素子。
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JP2009140361A JP5481103B2 (ja) | 2009-06-11 | 2009-06-11 | 窒化物半導体素子 |
US12/757,528 US8203172B2 (en) | 2009-06-11 | 2010-04-09 | Nitride semiconductor device |
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JP2009140361A JP5481103B2 (ja) | 2009-06-11 | 2009-06-11 | 窒化物半導体素子 |
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Cited By (8)
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JP2011091406A (ja) * | 2009-10-26 | 2011-05-06 | Infineon Technologies Austria Ag | 横型hemtおよび横型hemtの製造方法 |
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JP5481103B2 (ja) | 2014-04-23 |
US20100314666A1 (en) | 2010-12-16 |
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