JP2010245412A - 半導体集積回路装置の製造方法 - Google Patents
半導体集積回路装置の製造方法 Download PDFInfo
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- JP2010245412A JP2010245412A JP2009094517A JP2009094517A JP2010245412A JP 2010245412 A JP2010245412 A JP 2010245412A JP 2009094517 A JP2009094517 A JP 2009094517A JP 2009094517 A JP2009094517 A JP 2009094517A JP 2010245412 A JP2010245412 A JP 2010245412A
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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Priority Applications (6)
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| JP2009094517A JP2010245412A (ja) | 2009-04-09 | 2009-04-09 | 半導体集積回路装置の製造方法 |
| TW099107105A TW201108336A (en) | 2009-04-09 | 2010-03-11 | Manufacturing method of semiconductor integrated circuit device |
| CN201010155938A CN101866862A (zh) | 2009-04-09 | 2010-04-08 | 半导体集成电路器件的制造方法 |
| KR1020100032282A KR20100112536A (ko) | 2009-04-09 | 2010-04-08 | 반도체 집적 회로 장치의 제조 방법 |
| US12/756,178 US8450150B2 (en) | 2009-04-09 | 2010-04-08 | Manufacturing method of semiconductor integrated circuit device |
| US13/899,270 US20130330879A1 (en) | 2009-04-09 | 2013-05-21 | Manufacturing method of semiconductor integrated circuit device |
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| JP2009094517A JP2010245412A (ja) | 2009-04-09 | 2009-04-09 | 半導体集積回路装置の製造方法 |
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Cited By (1)
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| JP2013522887A (ja) * | 2010-03-18 | 2013-06-13 | モサイド・テクノロジーズ・インコーポレーテッド | オフセットダイスタッキングを用いたマルチチップパッケージおよびその作成方法 |
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| JP5207868B2 (ja) * | 2008-02-08 | 2013-06-12 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| KR101563630B1 (ko) * | 2009-09-17 | 2015-10-28 | 에스케이하이닉스 주식회사 | 반도체 패키지 |
| US8349116B1 (en) | 2011-11-18 | 2013-01-08 | LuxVue Technology Corporation | Micro device transfer head heater assembly and method of transferring a micro device |
| US8426227B1 (en) | 2011-11-18 | 2013-04-23 | LuxVue Technology Corporation | Method of forming a micro light emitting diode array |
| US8967452B2 (en) * | 2012-04-17 | 2015-03-03 | Asm Technology Singapore Pte Ltd | Thermal compression bonding of semiconductor chips |
| CN102760666A (zh) * | 2012-07-05 | 2012-10-31 | 西安永电电气有限责任公司 | 用于igbt的键合真空吸附工装 |
| KR102231293B1 (ko) | 2014-02-10 | 2021-03-23 | 삼성전자주식회사 | 다이 본딩 장치 |
| US9685187B1 (en) * | 2014-09-26 | 2017-06-20 | Western Digital (Fremont), Llc | Bonding tool and method for high accuracy chip-to-chip bonding |
| US9647189B2 (en) * | 2015-01-26 | 2017-05-09 | Cooledge Lighting Inc. | Methods for adhesive bonding of electronic devices |
| KR102341750B1 (ko) | 2015-06-30 | 2021-12-23 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
| KR20170009750A (ko) * | 2015-07-15 | 2017-01-25 | 서울바이오시스 주식회사 | 발광 다이오드 패키지 제조 방법 |
| WO2017095401A1 (en) | 2015-12-02 | 2017-06-08 | Intel Corporation | Die stack with cascade and vertical connections |
| US10199351B2 (en) * | 2015-12-30 | 2019-02-05 | Skyworks Solutions, Inc. | Method and device for improved die bonding |
| KR102579876B1 (ko) | 2016-02-22 | 2023-09-18 | 삼성전자주식회사 | 반도체 패키지 |
| JP6316873B2 (ja) * | 2016-05-31 | 2018-04-25 | 株式会社新川 | ダイの実装方法 |
| JP6349539B2 (ja) * | 2016-09-30 | 2018-07-04 | 株式会社新川 | 半導体装置の製造方法および実装装置 |
| JP6349540B2 (ja) * | 2016-10-06 | 2018-07-04 | 株式会社新川 | 半導体チップの実装装置、および、半導体装置の製造方法 |
| TWI673805B (zh) * | 2017-01-30 | 2019-10-01 | Shinkawa Ltd. | 安裝裝置以及安裝系統 |
| US10431483B2 (en) | 2017-07-14 | 2019-10-01 | Industrial Technology Research Institute | Transfer support and transfer module |
| US11227787B2 (en) | 2017-07-14 | 2022-01-18 | Industrial Technology Research Institute | Transfer support and transfer module |
| CN111344849B (zh) * | 2017-09-29 | 2023-09-08 | 株式会社新川 | 封装装置 |
| TWI807348B (zh) * | 2021-06-21 | 2023-07-01 | 矽品精密工業股份有限公司 | 覆晶作業及其應用之接合設備 |
| JP2023039555A (ja) | 2021-09-09 | 2023-03-22 | キオクシア株式会社 | 半導体装置の製造方法 |
Citations (2)
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| JP2008098608A (ja) * | 2006-09-15 | 2008-04-24 | Lintec Corp | 半導体装置の製造方法 |
| JP2009065034A (ja) * | 2007-09-07 | 2009-03-26 | Renesas Technology Corp | 半導体装置の製造方法 |
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| US6552437B1 (en) * | 1998-10-14 | 2003-04-22 | Hitachi, Ltd. | Semiconductor device and method of manufacture thereof |
| EP2063465A4 (en) * | 2006-09-15 | 2012-08-08 | Lintec Corp | PROCESS FOR MANUFACTURING A SEMICONDUCTOR CONSTRUCTION ELEMENT |
| JP5559452B2 (ja) * | 2006-12-20 | 2014-07-23 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| JP5032231B2 (ja) | 2007-07-23 | 2012-09-26 | リンテック株式会社 | 半導体装置の製造方法 |
| JP5538682B2 (ja) * | 2008-03-06 | 2014-07-02 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置及びその製造方法 |
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- 2010-04-08 KR KR1020100032282A patent/KR20100112536A/ko not_active Withdrawn
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008098608A (ja) * | 2006-09-15 | 2008-04-24 | Lintec Corp | 半導体装置の製造方法 |
| JP2009065034A (ja) * | 2007-09-07 | 2009-03-26 | Renesas Technology Corp | 半導体装置の製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013522887A (ja) * | 2010-03-18 | 2013-06-13 | モサイド・テクノロジーズ・インコーポレーテッド | オフセットダイスタッキングを用いたマルチチップパッケージおよびその作成方法 |
| US9177863B2 (en) | 2010-03-18 | 2015-11-03 | Conversant Intellectual Property Management Inc. | Multi-chip package with offset die stacking and method of making same |
Also Published As
| Publication number | Publication date |
|---|---|
| US8450150B2 (en) | 2013-05-28 |
| CN101866862A (zh) | 2010-10-20 |
| KR20100112536A (ko) | 2010-10-19 |
| TW201108336A (en) | 2011-03-01 |
| US20100261312A1 (en) | 2010-10-14 |
| US20130330879A1 (en) | 2013-12-12 |
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