JP2010217124A - 形状測定装置及び方法 - Google Patents

形状測定装置及び方法 Download PDF

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Publication number
JP2010217124A
JP2010217124A JP2009067183A JP2009067183A JP2010217124A JP 2010217124 A JP2010217124 A JP 2010217124A JP 2009067183 A JP2009067183 A JP 2009067183A JP 2009067183 A JP2009067183 A JP 2009067183A JP 2010217124 A JP2010217124 A JP 2010217124A
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JP
Japan
Prior art keywords
light
measured
conical lens
shape
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009067183A
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English (en)
Japanese (ja)
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JP2010217124A5 (enExample
Inventor
Seiji Hamano
誠司 濱野
Sadaaki Ota
禎章 太田
Fumio Sugata
文雄 菅田
Yoshihiro Kikuchi
義弘 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to JP2009067183A priority Critical patent/JP2010217124A/ja
Priority to US12/935,300 priority patent/US20110043822A1/en
Priority to CN201080001241.8A priority patent/CN101970983B/zh
Priority to PCT/JP2010/001643 priority patent/WO2010106758A1/ja
Priority to EP10753255A priority patent/EP2410289A1/en
Priority to KR1020107020251A priority patent/KR101233941B1/ko
Publication of JP2010217124A publication Critical patent/JP2010217124A/ja
Publication of JP2010217124A5 publication Critical patent/JP2010217124A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2009067183A 2009-03-19 2009-03-19 形状測定装置及び方法 Withdrawn JP2010217124A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009067183A JP2010217124A (ja) 2009-03-19 2009-03-19 形状測定装置及び方法
US12/935,300 US20110043822A1 (en) 2009-03-19 2010-03-09 Shape measuring apparatus and method thereof
CN201080001241.8A CN101970983B (zh) 2009-03-19 2010-03-09 形状测定装置以及方法
PCT/JP2010/001643 WO2010106758A1 (ja) 2009-03-19 2010-03-09 形状測定装置及び方法
EP10753255A EP2410289A1 (en) 2009-03-19 2010-03-09 Shape measurement device and method
KR1020107020251A KR101233941B1 (ko) 2009-03-19 2010-03-09 형상 측정 장치 및 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009067183A JP2010217124A (ja) 2009-03-19 2009-03-19 形状測定装置及び方法

Publications (2)

Publication Number Publication Date
JP2010217124A true JP2010217124A (ja) 2010-09-30
JP2010217124A5 JP2010217124A5 (enExample) 2012-02-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009067183A Withdrawn JP2010217124A (ja) 2009-03-19 2009-03-19 形状測定装置及び方法

Country Status (6)

Country Link
US (1) US20110043822A1 (enExample)
EP (1) EP2410289A1 (enExample)
JP (1) JP2010217124A (enExample)
KR (1) KR101233941B1 (enExample)
CN (1) CN101970983B (enExample)
WO (1) WO2010106758A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581703A (zh) * 2011-01-05 2012-07-18 财团法人精密机械研究发展中心 同轴向双进给轴量测装置
US8810904B2 (en) * 2011-02-09 2014-08-19 Northwestern University Optical contact micrometer
DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
CN104949631B (zh) * 2014-03-27 2017-12-15 纽富来科技股份有限公司 曲率测定装置以及曲率测定方法
CN107796596A (zh) * 2016-08-30 2018-03-13 尼德克株式会社 透镜测定装置及透镜测定装置用标识板
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置
CN116294983B (zh) * 2023-02-28 2024-01-23 重庆米森科技有限公司 基于平面光路设计的非闭合光路波阵面分割干涉仪

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3351857B2 (ja) * 1993-06-01 2002-12-03 株式会社ミツトヨ マイケルソン形干渉測定装置
JPH0763508A (ja) * 1993-08-31 1995-03-10 Ishikawajima Harima Heavy Ind Co Ltd レーザ顕微鏡
JPH08136248A (ja) * 1994-11-08 1996-05-31 Idec Izumi Corp 共焦点位置測定装置
JP3633713B2 (ja) * 1996-04-23 2005-03-30 松下電器産業株式会社 距離計測方法及び距離センサ
US7072045B2 (en) * 2002-01-16 2006-07-04 The Regents Of The University Of California High resolution optical coherence tomography with an improved depth range using an axicon lens
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP4144389B2 (ja) * 2003-03-14 2008-09-03 オムロン株式会社 光学式膜計測装置
CN2788123Y (zh) * 2005-01-26 2006-06-14 闫宏 双光路自准直镀膜厚度光学监控装置
US7586670B2 (en) * 2006-05-13 2009-09-08 Alcatel-Lucent Usa Inc. Nonlinear optical devices based on metamaterials
CN101324422B (zh) * 2007-06-12 2011-01-19 北京普瑞微纳科技有限公司 白光干涉测量样品表面形状精细分布的方法及其装置
US20090195788A1 (en) * 2007-12-17 2009-08-06 Shinichi Dosaka Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection

Also Published As

Publication number Publication date
WO2010106758A1 (ja) 2010-09-23
EP2410289A1 (en) 2012-01-25
CN101970983B (zh) 2012-08-29
CN101970983A (zh) 2011-02-09
US20110043822A1 (en) 2011-02-24
KR101233941B1 (ko) 2013-02-15
KR20100124757A (ko) 2010-11-29

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