CN101324422B - 白光干涉测量样品表面形状精细分布的方法及其装置 - Google Patents
白光干涉测量样品表面形状精细分布的方法及其装置 Download PDFInfo
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- 238000009826 distribution Methods 0.000 title claims abstract description 23
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- 238000005070 sampling Methods 0.000 claims abstract description 19
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- 230000003595 spectral effect Effects 0.000 claims abstract description 4
- 238000012360 testing method Methods 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 6
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- 230000002452 interceptive effect Effects 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
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- 238000005315 distribution function Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
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JP2010217124A (ja) * | 2009-03-19 | 2010-09-30 | Panasonic Corp | 形状測定装置及び方法 |
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CN108169131A (zh) * | 2017-12-28 | 2018-06-15 | 无锡奥芬光电科技有限公司 | 基于白光光栅干涉法的微小颗粒检查方法及设备 |
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CN110285771A (zh) * | 2019-05-15 | 2019-09-27 | 淮阴师范学院 | 基于白光干涉的嵌入式三维形貌测量模块 |
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CN111220067B (zh) * | 2020-02-27 | 2021-07-13 | 中国工程物理研究院机械制造工艺研究所 | 一种白光干涉仪自动对焦装置及方法 |
CN111220068B (zh) * | 2020-02-27 | 2021-07-13 | 中国工程物理研究院机械制造工艺研究所 | 一种依据样品空间结构照明的白光干涉测量装置及方法 |
CN111412861B (zh) * | 2020-03-31 | 2022-02-11 | 天津大学 | 一种线白光表面轮廓测量方法 |
CN113091881B (zh) * | 2021-04-13 | 2023-06-30 | 河南省计量科学研究院 | 提高光子相关法空气声压测量精度的方法 |
CN114608474B (zh) * | 2022-02-23 | 2023-10-17 | 中国科学院空天信息创新研究院 | 一种偏振相机差动白光干涉测量装置 |
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US5471303A (en) * | 1994-04-29 | 1995-11-28 | Wyko Corporation | Combination of white-light scanning and phase-shifting interferometry for surface profile measurements |
US6028670A (en) * | 1998-01-19 | 2000-02-22 | Zygo Corporation | Interferometric methods and systems using low coherence illumination |
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CN201050978Y (zh) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | 白光干涉测量样品表面形状精细分布的装置 |
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