KR101233941B1 - 형상 측정 장치 및 방법 - Google Patents

형상 측정 장치 및 방법 Download PDF

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Publication number
KR101233941B1
KR101233941B1 KR1020107020251A KR20107020251A KR101233941B1 KR 101233941 B1 KR101233941 B1 KR 101233941B1 KR 1020107020251 A KR1020107020251 A KR 1020107020251A KR 20107020251 A KR20107020251 A KR 20107020251A KR 101233941 B1 KR101233941 B1 KR 101233941B1
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KR
South Korea
Prior art keywords
light
shape
conical lens
lens
measured
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Expired - Fee Related
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KR1020107020251A
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English (en)
Korean (ko)
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KR20100124757A (ko
Inventor
세이지 하마노
사다후미 오오타
후미오 스가타
요시히로 기쿠치
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파나소닉 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
KR1020107020251A 2009-03-19 2010-03-09 형상 측정 장치 및 방법 Expired - Fee Related KR101233941B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009067183A JP2010217124A (ja) 2009-03-19 2009-03-19 形状測定装置及び方法
JPJP-P-2009-067183 2009-03-19
PCT/JP2010/001643 WO2010106758A1 (ja) 2009-03-19 2010-03-09 形状測定装置及び方法

Publications (2)

Publication Number Publication Date
KR20100124757A KR20100124757A (ko) 2010-11-29
KR101233941B1 true KR101233941B1 (ko) 2013-02-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107020251A Expired - Fee Related KR101233941B1 (ko) 2009-03-19 2010-03-09 형상 측정 장치 및 방법

Country Status (6)

Country Link
US (1) US20110043822A1 (enExample)
EP (1) EP2410289A1 (enExample)
JP (1) JP2010217124A (enExample)
KR (1) KR101233941B1 (enExample)
CN (1) CN101970983B (enExample)
WO (1) WO2010106758A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581703A (zh) * 2011-01-05 2012-07-18 财团法人精密机械研究发展中心 同轴向双进给轴量测装置
US8810904B2 (en) * 2011-02-09 2014-08-19 Northwestern University Optical contact micrometer
DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
CN104949631B (zh) * 2014-03-27 2017-12-15 纽富来科技股份有限公司 曲率测定装置以及曲率测定方法
CN107796596A (zh) * 2016-08-30 2018-03-13 尼德克株式会社 透镜测定装置及透镜测定装置用标识板
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置
CN116294983B (zh) * 2023-02-28 2024-01-23 重庆米森科技有限公司 基于平面光路设计的非闭合光路波阵面分割干涉仪

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06341809A (ja) * 1993-06-01 1994-12-13 Mitsutoyo Corp マイケルソン形干渉測定装置
JPH09287931A (ja) * 1996-04-23 1997-11-04 Matsushita Electric Ind Co Ltd 距離計測方法及び距離センサ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763508A (ja) * 1993-08-31 1995-03-10 Ishikawajima Harima Heavy Ind Co Ltd レーザ顕微鏡
JPH08136248A (ja) * 1994-11-08 1996-05-31 Idec Izumi Corp 共焦点位置測定装置
US7072045B2 (en) * 2002-01-16 2006-07-04 The Regents Of The University Of California High resolution optical coherence tomography with an improved depth range using an axicon lens
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP4144389B2 (ja) * 2003-03-14 2008-09-03 オムロン株式会社 光学式膜計測装置
CN2788123Y (zh) * 2005-01-26 2006-06-14 闫宏 双光路自准直镀膜厚度光学监控装置
US7586670B2 (en) * 2006-05-13 2009-09-08 Alcatel-Lucent Usa Inc. Nonlinear optical devices based on metamaterials
CN101324422B (zh) * 2007-06-12 2011-01-19 北京普瑞微纳科技有限公司 白光干涉测量样品表面形状精细分布的方法及其装置
US20090195788A1 (en) * 2007-12-17 2009-08-06 Shinichi Dosaka Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06341809A (ja) * 1993-06-01 1994-12-13 Mitsutoyo Corp マイケルソン形干渉測定装置
JPH09287931A (ja) * 1996-04-23 1997-11-04 Matsushita Electric Ind Co Ltd 距離計測方法及び距離センサ

Also Published As

Publication number Publication date
WO2010106758A1 (ja) 2010-09-23
CN101970983B (zh) 2012-08-29
KR20100124757A (ko) 2010-11-29
EP2410289A1 (en) 2012-01-25
CN101970983A (zh) 2011-02-09
JP2010217124A (ja) 2010-09-30
US20110043822A1 (en) 2011-02-24

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