CN101970983B - 形状测定装置以及方法 - Google Patents

形状测定装置以及方法 Download PDF

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Publication number
CN101970983B
CN101970983B CN201080001241.8A CN201080001241A CN101970983B CN 101970983 B CN101970983 B CN 101970983B CN 201080001241 A CN201080001241 A CN 201080001241A CN 101970983 B CN101970983 B CN 101970983B
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China
Prior art keywords
light
measured
conical lens
shape
lens
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Expired - Fee Related
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CN201080001241.8A
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English (en)
Chinese (zh)
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CN101970983A (zh
Inventor
滨野诚司
太田祯章
菅田文雄
菊池义弘
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Publication of CN101970983A publication Critical patent/CN101970983A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CN201080001241.8A 2009-03-19 2010-03-09 形状测定装置以及方法 Expired - Fee Related CN101970983B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-067183 2009-03-19
JP2009067183A JP2010217124A (ja) 2009-03-19 2009-03-19 形状測定装置及び方法
PCT/JP2010/001643 WO2010106758A1 (ja) 2009-03-19 2010-03-09 形状測定装置及び方法

Publications (2)

Publication Number Publication Date
CN101970983A CN101970983A (zh) 2011-02-09
CN101970983B true CN101970983B (zh) 2012-08-29

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Family Applications (1)

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CN201080001241.8A Expired - Fee Related CN101970983B (zh) 2009-03-19 2010-03-09 形状测定装置以及方法

Country Status (6)

Country Link
US (1) US20110043822A1 (enExample)
EP (1) EP2410289A1 (enExample)
JP (1) JP2010217124A (enExample)
KR (1) KR101233941B1 (enExample)
CN (1) CN101970983B (enExample)
WO (1) WO2010106758A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581703A (zh) * 2011-01-05 2012-07-18 财团法人精密机械研究发展中心 同轴向双进给轴量测装置
US8810904B2 (en) * 2011-02-09 2014-08-19 Northwestern University Optical contact micrometer
DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
CN104949631B (zh) * 2014-03-27 2017-12-15 纽富来科技股份有限公司 曲率测定装置以及曲率测定方法
CN107796596A (zh) * 2016-08-30 2018-03-13 尼德克株式会社 透镜测定装置及透镜测定装置用标识板
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置
CN116294983B (zh) * 2023-02-28 2024-01-23 重庆米森科技有限公司 基于平面光路设计的非闭合光路波阵面分割干涉仪

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2788123Y (zh) * 2005-01-26 2006-06-14 闫宏 双光路自准直镀膜厚度光学监控装置
CN101324422A (zh) * 2007-06-12 2008-12-17 西安普瑞光学仪器有限公司 白光干涉测量样品表面形状精细分布的方法及其装置

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JP3351857B2 (ja) * 1993-06-01 2002-12-03 株式会社ミツトヨ マイケルソン形干渉測定装置
JPH0763508A (ja) * 1993-08-31 1995-03-10 Ishikawajima Harima Heavy Ind Co Ltd レーザ顕微鏡
JPH08136248A (ja) * 1994-11-08 1996-05-31 Idec Izumi Corp 共焦点位置測定装置
JP3633713B2 (ja) * 1996-04-23 2005-03-30 松下電器産業株式会社 距離計測方法及び距離センサ
US7072045B2 (en) * 2002-01-16 2006-07-04 The Regents Of The University Of California High resolution optical coherence tomography with an improved depth range using an axicon lens
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP4144389B2 (ja) * 2003-03-14 2008-09-03 オムロン株式会社 光学式膜計測装置
US7586670B2 (en) * 2006-05-13 2009-09-08 Alcatel-Lucent Usa Inc. Nonlinear optical devices based on metamaterials
US20090195788A1 (en) * 2007-12-17 2009-08-06 Shinichi Dosaka Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2788123Y (zh) * 2005-01-26 2006-06-14 闫宏 双光路自准直镀膜厚度光学监控装置
CN101324422A (zh) * 2007-06-12 2008-12-17 西安普瑞光学仪器有限公司 白光干涉测量样品表面形状精细分布的方法及其装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开平6-341809A 1994.12.13
JP特开平8-136248A 1996.05.31
JP特开平9-287931A 1997.11.04

Also Published As

Publication number Publication date
WO2010106758A1 (ja) 2010-09-23
EP2410289A1 (en) 2012-01-25
JP2010217124A (ja) 2010-09-30
CN101970983A (zh) 2011-02-09
US20110043822A1 (en) 2011-02-24
KR101233941B1 (ko) 2013-02-15
KR20100124757A (ko) 2010-11-29

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