JP2010199298A - 凹凸パターンの形成方法および凹凸パターン形成用シート - Google Patents
凹凸パターンの形成方法および凹凸パターン形成用シート Download PDFInfo
- Publication number
- JP2010199298A JP2010199298A JP2009042545A JP2009042545A JP2010199298A JP 2010199298 A JP2010199298 A JP 2010199298A JP 2009042545 A JP2009042545 A JP 2009042545A JP 2009042545 A JP2009042545 A JP 2009042545A JP 2010199298 A JP2010199298 A JP 2010199298A
- Authority
- JP
- Japan
- Prior art keywords
- convex pattern
- concavo
- sheet
- pattern layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 135
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 208
- 238000010438 heat treatment Methods 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims description 164
- 238000005530 etching Methods 0.000 claims description 120
- 229910052751 metal Inorganic materials 0.000 claims description 51
- 230000009477 glass transition Effects 0.000 claims description 47
- 239000002184 metal Substances 0.000 claims description 46
- 229910052752 metalloid Inorganic materials 0.000 claims description 34
- 230000007261 regionalization Effects 0.000 claims description 19
- 229920005992 thermoplastic resin Polymers 0.000 claims description 14
- 229920003023 plastic Polymers 0.000 claims description 7
- 239000004033 plastic Substances 0.000 claims description 7
- 238000005243 fluidization Methods 0.000 claims description 5
- 238000012546 transfer Methods 0.000 abstract description 28
- 239000010410 layer Substances 0.000 description 515
- 239000012790 adhesive layer Substances 0.000 description 103
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 70
- 239000010408 film Substances 0.000 description 36
- 239000000428 dust Substances 0.000 description 35
- 239000000377 silicon dioxide Substances 0.000 description 34
- 229920000620 organic polymer Polymers 0.000 description 29
- 230000035882 stress Effects 0.000 description 29
- -1 polyethylene Polymers 0.000 description 26
- 229910052782 aluminium Inorganic materials 0.000 description 22
- 238000001312 dry etching Methods 0.000 description 20
- 239000007789 gas Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 20
- 239000011347 resin Substances 0.000 description 20
- 238000001020 plasma etching Methods 0.000 description 15
- 239000004793 Polystyrene Substances 0.000 description 14
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 239000010419 fine particle Substances 0.000 description 14
- 229920000139 polyethylene terephthalate Polymers 0.000 description 14
- 239000005020 polyethylene terephthalate Substances 0.000 description 14
- 229920002223 polystyrene Polymers 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 13
- 239000003795 chemical substances by application Substances 0.000 description 13
- 239000005011 phenolic resin Substances 0.000 description 13
- 239000004372 Polyvinyl alcohol Substances 0.000 description 12
- 238000000113 differential scanning calorimetry Methods 0.000 description 12
- 229920002451 polyvinyl alcohol Polymers 0.000 description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 11
- 229910001882 dioxygen Inorganic materials 0.000 description 11
- 239000011521 glass Substances 0.000 description 11
- 238000003825 pressing Methods 0.000 description 11
- 229920000178 Acrylic resin Polymers 0.000 description 10
- 239000004925 Acrylic resin Substances 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 10
- 239000001301 oxygen Substances 0.000 description 10
- 239000004014 plasticizer Substances 0.000 description 10
- 229920000098 polyolefin Polymers 0.000 description 10
- 229920002050 silicone resin Polymers 0.000 description 10
- 239000007787 solid Substances 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 229920001971 elastomer Polymers 0.000 description 9
- 239000000806 elastomer Substances 0.000 description 9
- 239000003822 epoxy resin Substances 0.000 description 9
- 229920003251 poly(α-methylstyrene) Polymers 0.000 description 9
- 229920000647 polyepoxide Polymers 0.000 description 9
- 239000003505 polymerization initiator Substances 0.000 description 9
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- 230000008602 contraction Effects 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 8
- 239000011368 organic material Substances 0.000 description 8
- 125000004430 oxygen atom Chemical group O* 0.000 description 8
- 229920000728 polyester Polymers 0.000 description 8
- 239000012779 reinforcing material Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 239000004952 Polyamide Substances 0.000 description 7
- 238000004380 ashing Methods 0.000 description 7
- 229920000515 polycarbonate Polymers 0.000 description 7
- 239000004417 polycarbonate Substances 0.000 description 7
- 229920002635 polyurethane Polymers 0.000 description 7
- 239000004814 polyurethane Substances 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 239000004831 Hot glue Substances 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 6
- 239000004743 Polypropylene Substances 0.000 description 6
- 229920003086 cellulose ether Polymers 0.000 description 6
- 238000002788 crimping Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 238000007606 doctor blade method Methods 0.000 description 6
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229920002647 polyamide Polymers 0.000 description 6
- 229920000573 polyethylene Polymers 0.000 description 6
- 229920001155 polypropylene Polymers 0.000 description 6
- 238000011084 recovery Methods 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 229920003169 water-soluble polymer Polymers 0.000 description 6
- YPSXFMHXRZAGTG-UHFFFAOYSA-N 4-methoxy-2-[2-(5-methoxy-2-nitrosophenyl)ethyl]-1-nitrosobenzene Chemical compound COC1=CC=C(N=O)C(CCC=2C(=CC=C(OC)C=2)N=O)=C1 YPSXFMHXRZAGTG-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 5
- 239000004744 fabric Substances 0.000 description 5
- 239000011151 fibre-reinforced plastic Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 239000011342 resin composition Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 229920002725 thermoplastic elastomer Polymers 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 4
- 239000003963 antioxidant agent Substances 0.000 description 4
- 239000002216 antistatic agent Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000005489 elastic deformation Effects 0.000 description 4
- 239000005038 ethylene vinyl acetate Substances 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000003365 glass fiber Substances 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- 229910010272 inorganic material Inorganic materials 0.000 description 4
- 239000011147 inorganic material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000004745 nonwoven fabric Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229920000233 poly(alkylene oxides) Polymers 0.000 description 4
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 4
- 229920001451 polypropylene glycol Polymers 0.000 description 4
- 239000004800 polyvinyl chloride Substances 0.000 description 4
- 229920000915 polyvinyl chloride Polymers 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000010008 shearing Methods 0.000 description 4
- 239000012748 slip agent Substances 0.000 description 4
- 238000003980 solgel method Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- RIWRBSMFKVOJMN-UHFFFAOYSA-N 2-methyl-1-phenylpropan-2-ol Chemical compound CC(C)(O)CC1=CC=CC=C1 RIWRBSMFKVOJMN-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 125000004386 diacrylate group Chemical group 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920006122 polyamide resin Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 2
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 2
- FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 description 2
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 229930195725 Mannitol Natural products 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 2
- JMGVKSNVCIHNRN-UHFFFAOYSA-N [2-(2,3,4,5,6-pentamethylphenyl)-1-silylethenyl]silane Chemical compound CC1=C(C(=C(C(=C1C=C([SiH3])[SiH3])C)C)C)C JMGVKSNVCIHNRN-UHFFFAOYSA-N 0.000 description 2
- 229940081735 acetylcellulose Drugs 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002301 cellulose acetate Polymers 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910000423 chromium oxide Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000594 mannitol Substances 0.000 description 2
- 235000010355 mannitol Nutrition 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052699 polonium Inorganic materials 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920001709 polysilazane Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical class [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000000600 sorbitol Substances 0.000 description 2
- 235000010356 sorbitol Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 239000000560 biocompatible material Substances 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000008642 heat stress Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000813 microcontact printing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000002174 soft lithography Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/263—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer having non-uniform thickness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B23/00—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose
- B32B23/04—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising such cellulosic plastic substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B23/00—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose
- B32B23/04—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising such cellulosic plastic substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B23/08—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising such cellulosic plastic substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B23/00—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose
- B32B23/10—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose next to a fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B23/00—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose
- B32B23/22—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising ethers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/12—Layered products comprising a layer of synthetic resin next to a fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
- B32B27/22—Layered products comprising a layer of synthetic resin characterised by the use of special additives using plasticisers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/285—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyethers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/302—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising aromatic vinyl (co)polymers, e.g. styrenic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/306—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl acetate or vinyl alcohol (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
- B32B27/322—Layered products comprising a layer of synthetic resin comprising polyolefins comprising halogenated polyolefins, e.g. PTFE
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
- B32B27/365—Layered products comprising a layer of synthetic resin comprising polyesters comprising polycarbonates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/38—Layered products comprising a layer of synthetic resin comprising epoxy resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/40—Layered products comprising a layer of synthetic resin comprising polyurethanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/30—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
- B32B5/024—Woven fabric
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
- B32B9/007—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile comprising carbon, e.g. graphite, composite carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/26—Polymeric coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/28—Multiple coating on one surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2260/00—Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
- B32B2260/02—Composition of the impregnated, bonded or embedded layer
- B32B2260/021—Fibrous or filamentary layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2260/00—Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
- B32B2260/04—Impregnation, embedding, or binder material
- B32B2260/046—Synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2262/00—Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2274/00—Thermoplastic elastomer material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/416—Reflective
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
- B32B37/025—Transfer laminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/06—Embossing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
- Y10T156/1039—Surface deformation only of sandwich or lamina [e.g., embossed panels]
- Y10T156/1041—Subsequent to lamination
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24521—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness with component conforming to contour of nonplanar surface
- Y10T428/24545—Containing metal or metal compound
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Textile Engineering (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
【解決手段】少なくとも一方の主面に凹凸パターン部を有するシート状部材2を、加熱により流動化させる工程と、前記主面に形成され少なくとも部分的に前記凹凸パターン部と噛合するとともに、前記凹凸パターン部の複数の凹部に渡って連続した反転凹凸パターン層4を介して、前記シート状部材を基材5に圧着する工程と、前記圧着後、前記シート状部材を除去して、少なくとも前記反転凹凸パターン層を前記基材上に残置する工程と、前記シート状部材を除去した後、前記反転凹凸パターン層のパターン形状を前記基材の表面に転写する工程とを具備することを特徴とする。
【選択図】図1
Description
前記主面に形成され少なくとも部分的に前記凹凸パターン部と噛合するとともに、前記凹凸パターン部の複数の凹部に渡って連続した反転凹凸パターン層を介して、前記シート状部材を基材に圧着する工程と、
前記圧着後、前記シート状部材を除去して、少なくとも前記反転凹凸パターン層を前記基材上に残置する工程と、
前記シート状部材を除去した後、前記反転凹凸パターン層のパターン形状を前記基材の表面に転写する工程と
を具備することを特徴とする。
少なくとも部分的に前記凹凸パターン層と噛合し、該凹凸パターン層の複数の凹部に渡って連続した反転凹凸パターン層と、
前記凹凸パターン層および前記反転凹凸パターン層のいずれか一方は、金属元素または半金属元素を含むことを特徴とする。
図1〜4を参照して、本実施形態にかかる凹凸パターン形成方法を説明する。なお本実施形態におけるシートとは、二次元的な拡がりを有するものを広く包含し、フィルムおよびプレートも含む。
ISO 11357-2 1999 Plastics -- Differential scanning calorimetry (DSC) -- Part 2:Determination of glass transition temperature; P-310
シート状部材の材料は、加熱により流動化するものであれば特に限定されず、熱可塑性樹脂およびB−ステージ樹脂から選択することができる。シート状部材は、後の工程で除去される。酸素ガスを用いたドライエッチングにより除去しやすいことから、SiやAlなどの原子を含まず、酸素原子の含有量の高い有機高分子が好ましい。
他の実施形態にかかる凹凸パターン形成用シートについて、図18〜19の断面模式図を参照しつつ説明する。なお本実施形態におけるシートとは、二次元的な拡がりを有するものを広く包含し、フィルムおよびプレートも含む。
ISO 11357-2 1999 Plastics -- Differential scanning calorimetry (DSC) -- Part 2:Determination of glass transition temperature; P-310
キャリアシートの材料は特に限定されず、アルミニウムおよび銅などの金属、ガラス、カーボン、セラミックスならびに有機高分子などが用いられる。可撓性に優れることから、有機高分子が好ましい。可撓性の材料の場合には、反りのある基材にも低圧で凹凸パターン形成用シートを密着させることができる。さらには、酸素ガスを用いたドライエッチングにより除去しやすいことから、SiやAlなどの原子を含まず、酸素原子の含有量の高い有機高分子が好ましい。
まず、ポリエチレンテレフタレート(PET)シート(12μm厚)をキャリアシートとして用いて、凹凸パターン形成用シートを作製した。シート状部材としてグリセリン(可塑剤)を添加したポリビニルアルコール(PVA)シート(20μm厚)を用意し、キャリアシートの上に積層して熱圧着した。熱圧着後のPVAシート上には、蒸着法により50nmの層厚でシリカ層を形成した。シリカ層は、耐エッチング層として作用する。
本実施例においては、接着層を有する凹凸パターン形成用シートを用いて、基材表面に凹凸パターンを形成した。
本実施例においては、凹凸パターン部がシート状部材に直接刻印された凹凸パターン形成用シートを用いて、基材表面に凹凸パターンを形成した。
4…反転凹凸パターン層; 5…基材; 6…基材の段差
7…基材に転写された凹凸パターン; 8…凹凸パターン転写後の基材
9…凹凸パターン形成用シート; 10…シート状部材; 11…凹凸パターン層
12…反転凹凸パターン層; 13…接着層; 14…基材; 15…基材の段差
16…接着層と段差側壁との接着部分; 17…反転凹凸パターン層
18…反転凹凸パターン層の凹部; 19…反転凹凸パターン層の凸部; 20…基材
21…反転凹凸パターン層の残存した凸部; 22…形状調整後の残存した凸部
23…基材に転写された凹凸パターン; 24…凹凸パターン層
25…凹凸パターン層の凹部; 26…凹凸パターン層の凸部
27…反転凹凸パターン層; 28…基材; 29…凹凸パターン層の残存した凸部
30…反転凹凸パターン層のエッチングにより露出した凹凸パターン層の残存した凸部
31…反転凹凸パターン層の残存した凹部; 32…基材に転写された凹凸パターン
33…凹凸パターン層; 34…反転凹凸パターン層; 35…側壁転写層
36…基材; 37…残存した側壁転写層の側壁部分
38…残存した反転凹凸パターン層; 39…基材に転写された凹凸パターン
40…基材; 41…基材外周端の稜部; 42…凹凸パターン形成用シート
43…シート状部材; 44…凹凸パターン層; 45…反転凹凸パターン層
46…基材に圧着された凹凸パターン層
47…基材に圧着された反転凹凸パターン層
48…剥がしているところの凹凸パターン形成用シート
49…凹凸パターン形成用シート; 50…シート状部材
51…反転凹凸パターン層; 52…基材に圧着された反転凹凸パターン層
53…剥がしているところの凹凸パターン形成用シート。
Claims (19)
- 少なくとも一方の主面に凹凸パターン部を有するシート状部材を、加熱により流動化させる工程と、
前記主面に形成され少なくとも部分的に前記凹凸パターン部と噛合するとともに、前記凹凸パターン部の複数の凹部に渡って連続した反転凹凸パターン層を介して、前記シート状部材を基材に圧着する工程と、
前記圧着後、前記シート状部材を除去して、少なくとも前記反転凹凸パターン層を前記基材上に残置する工程と、
前記シート状部材を除去した後、前記反転凹凸パターン層のパターン形状を前記基材の表面に転写する工程と
を具備することを特徴とする凹凸パターン形成方法。 - 前記凹凸パターン部は、前記シート状部材の前記主面上に形成された凹凸パターン層であり、
前記凹凸パターン層および前記反転凹凸パターン層のうち少なくとも一方のガラス転移温度は、前記シート状部材のうち前記凹凸パターン層以外の部分のガラス転移温度より高いことを特徴とする請求項1に記載の凹凸パターン形成方法。 - 前記反転凹凸パターン層のガラス転移温度は、前記シート状部材のガラス転移温度より高いことを特徴とする請求項1に記載の凹凸パターン形成方法。
- 前記転写する工程は、前記シート状部材を除去した後、前記反転凹凸パターン層の凸部をエッチングマスクとして前記基材の表面をエッチングする工程であることを特徴とする請求項2または3に記載の凹凸パターン形成方法。
- 前記転写する工程は、前記シート状部材を除去した後、前記反転凹凸パターン層を鋳型としたエッチングマスクを用いて前記基材の表面をエッチングする工程であることを特徴とする請求項2または3に記載の凹凸パターン形成方法。
- 前記シート状部材を除去する際、前記凹凸パターン層は前記反転凹凸パターン層を介して前記基材上に残置されることを特徴とする請求項4または5に記載の凹凸パターン形成方法。
- 前記基材をエッチングする前に、前記凹凸パターン層を除去して、前記反転凹凸パターン部を露出する工程をさらに具備することを特徴とする請求項6に記載の凹凸パターン形成方法。
- 前記露出された反転凹凸パターン層の凹部を除去して前記基材を露出し、前記反転凹凸パターン層の凸部を残置する工程をさらに具備することを特徴とする請求項7に記載の凹凸パターン形成方法。
- 前記基材上に残置された反転凹凸パターン部の凸部の幅を狭める工程をさらに具備することを特徴とする請求項8に記載の凹凸パターン形成方法。
- 前記基板は表面に段差が形成されており、前記圧着時に前記凹凸パターン層を少なくとも部分的に塑性変形させることを特徴とする請求項2に記載の凹凸パターン形成方法。
- 前記塑性変形が破断であることを特徴とする請求項10に記載の凹凸パターン形成方法。
- 前記シート状部材の流動化は、前記基材上に載置された後に行なわれることを特徴とする請求項1乃至11のいずれか1項に記載の凹凸パターン形成方法。
- 前記シート状部材の流動化は、前記基材上に載置される前に行なわれることを特徴とする請求項1乃至11のいずれか1項に記載の凹凸パターン形成方法。
- 前記反転凹凸パターン層は、前記凹凸パターン部上に予め形成されていることを特徴とする請求項1乃至13のいずれか1項に記載の凹凸パターン形成方法。
- 前記圧着時に前記反転凹凸パターン層を少なくとも部分的に塑性変形させることを特徴とする請求項14に記載の凹凸パターン形成方法。
- 前記塑性変形が破断であることを特徴とする請求項15に記載の凹凸パターン形成方法。
- 前記反転凹凸パターン層は、金属元素または半金属元素を含むことを特徴とする請求項1乃至16のいずれか1項に記載の凹凸パターン形成方法。
- 凹凸パターン層を一主面に備える熱可塑性樹脂を含むシート状部材と、
少なくとも部分的に前記凹凸パターン層と噛合し、該凹凸パターン層の複数の凹部に渡って連続した反転凹凸パターン層と、
前記凹凸パターン層および前記反転凹凸パターン層のいずれか一方は、金属元素または半金属元素を含むことを特徴とする凹凸パターン形成用シート。 - 前記凹凸パターン層および前記反転凹凸パターン層のガラス転移温度は前記シート状部材のうち前記凹凸パターン層以外の部分のガラス転移温度より高いことを特徴とする請求項18に記載の凹凸パターン形成用シート。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009042545A JP5319326B2 (ja) | 2009-02-25 | 2009-02-25 | 凹凸パターンの形成方法および凹凸パターン形成用シート |
US12/711,644 US8323520B2 (en) | 2009-02-25 | 2010-02-24 | Method for manufacturing fine concave-convex pattern and sheet for manufacturing fine concave-convex pattern |
US13/673,279 US9114592B2 (en) | 2009-02-25 | 2012-11-09 | Method for manufacturing fine concave-convex pattern and sheet for manufacturing fine concave-convex pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009042545A JP5319326B2 (ja) | 2009-02-25 | 2009-02-25 | 凹凸パターンの形成方法および凹凸パターン形成用シート |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010199298A true JP2010199298A (ja) | 2010-09-09 |
JP5319326B2 JP5319326B2 (ja) | 2013-10-16 |
Family
ID=42630050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009042545A Active JP5319326B2 (ja) | 2009-02-25 | 2009-02-25 | 凹凸パターンの形成方法および凹凸パターン形成用シート |
Country Status (2)
Country | Link |
---|---|
US (2) | US8323520B2 (ja) |
JP (1) | JP5319326B2 (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011066273A (ja) * | 2009-09-18 | 2011-03-31 | Konica Minolta Holdings Inc | 微細マスクパターンの形成方法、ナノインプリントリソグラフィ方法および微細構造体の製造方法 |
JP2013012673A (ja) * | 2011-06-30 | 2013-01-17 | Asahi Kasei Corp | 微細マスク形成用積層体 |
JP2013036027A (ja) * | 2011-07-12 | 2013-02-21 | Fujifilm Corp | インプリント用硬化性組成物、パターン形成方法およびパターン |
JP2013070004A (ja) * | 2011-09-26 | 2013-04-18 | Toshiba Corp | パターン形成方法 |
WO2014054456A1 (ja) * | 2012-10-01 | 2014-04-10 | 東芝機械株式会社 | 被成形体組立体、被成形体組立体の製造装置および被成形体組立体の製造・使用方法 |
US8877538B2 (en) | 2011-12-05 | 2014-11-04 | Korea Institute Of Science And Technology | Pressure sensor having nanostructure and manufacturing method thereof |
JP2015112780A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法、ならびに太陽電池及びその製造方法 |
JP2015112781A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法 |
JP2015112782A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法 |
JPWO2013161095A1 (ja) * | 2012-04-26 | 2015-12-21 | 東レ株式会社 | 凹凸構造を有する結晶基板の製造方法 |
JPWO2015147134A1 (ja) * | 2014-03-26 | 2017-04-13 | Jxエネルギー株式会社 | エピタキシャル成長用基板の製造方法、それより得られるエピタキシャル成長用基板及びその基板を用いた発光素子 |
JP2018148162A (ja) * | 2017-03-09 | 2018-09-20 | 日本特殊陶業株式会社 | 保持装置の製造方法 |
JP2019182486A (ja) * | 2018-04-11 | 2019-10-24 | 日本テトラパック株式会社 | 包装容器及び包装材料の製造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9017854B2 (en) * | 2010-08-30 | 2015-04-28 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
SG189450A1 (en) * | 2010-10-25 | 2013-05-31 | Univ Nanyang Tech | Method for micropatterning a substrate and a patterned substrate formed thereof |
US9366791B2 (en) | 2011-02-21 | 2016-06-14 | Canon Kabushiki Kaisha | Diffractive optical element and manufacturing method for the same |
WO2014085511A2 (en) * | 2012-11-27 | 2014-06-05 | The Regents Of The University Of California | Polymerized metal-organic material for printable photonic devices |
DE102014018934A1 (de) * | 2014-12-22 | 2016-06-23 | Airbus Defence and Space GmbH | Vorrichtung zum Aufheizen eines Verbundwerkstoffs mit temperaturabhängigen Verarbeitungseigenschaften und damit zusammenhängende Verfahren |
GB201613051D0 (en) | 2016-07-28 | 2016-09-14 | Landa Labs (2012) Ltd | Applying an electrical conductor to a substrate |
US11226556B2 (en) * | 2019-04-11 | 2022-01-18 | Applied Materials, Inc. | Patterning of multi-depth optical devices |
KR102292282B1 (ko) * | 2021-01-13 | 2021-08-20 | 성균관대학교산학협력단 | 비등방성 기계적 팽창 기판 및 이를 이용한 크랙 기반 압력 센서 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002151381A (ja) * | 2000-11-09 | 2002-05-24 | Nec Kagoshima Ltd | パターン形成方法 |
JP2005279807A (ja) * | 2004-03-29 | 2005-10-13 | Toshiba Corp | 凸凹パターンの形成方法および凸凹パターン形成用部材 |
JP2007320071A (ja) * | 2006-05-30 | 2007-12-13 | Asahi Glass Co Ltd | テンプレートおよび転写微細パターンを有する処理基材の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4407695A (en) | 1981-12-31 | 1983-10-04 | Exxon Research And Engineering Co. | Natural lithographic fabrication of microstructures over large areas |
JP2902064B2 (ja) | 1990-07-09 | 1999-06-07 | ニチバン株式会社 | アクリル系粘着剤組成物 |
JPH0580530A (ja) * | 1991-09-24 | 1993-04-02 | Hitachi Ltd | 薄膜パターン製造方法 |
US6318867B1 (en) * | 1993-10-20 | 2001-11-20 | 3M Innovative Properties Company | Conformable cube corner retroreflective sheeting |
US5772905A (en) | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
JP3269827B2 (ja) * | 1997-04-04 | 2002-04-02 | ユニバーシティ・オブ・サザン・カリフォルニア | 電気化学製造のための物品、方法、および装置 |
KR101166278B1 (ko) | 2004-05-07 | 2012-07-17 | 오브듀캇 아베 | 일정한 온도에서의 임프린트 리소그라피를 위한 방법 |
JP2006237312A (ja) | 2005-02-25 | 2006-09-07 | Yoshihiko Hirai | 注型インプリント法 |
JP5002422B2 (ja) * | 2007-11-14 | 2012-08-15 | 株式会社日立ハイテクノロジーズ | ナノプリント用樹脂スタンパ |
-
2009
- 2009-02-25 JP JP2009042545A patent/JP5319326B2/ja active Active
-
2010
- 2010-02-24 US US12/711,644 patent/US8323520B2/en not_active Expired - Fee Related
-
2012
- 2012-11-09 US US13/673,279 patent/US9114592B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002151381A (ja) * | 2000-11-09 | 2002-05-24 | Nec Kagoshima Ltd | パターン形成方法 |
JP2005279807A (ja) * | 2004-03-29 | 2005-10-13 | Toshiba Corp | 凸凹パターンの形成方法および凸凹パターン形成用部材 |
JP2007320071A (ja) * | 2006-05-30 | 2007-12-13 | Asahi Glass Co Ltd | テンプレートおよび転写微細パターンを有する処理基材の製造方法 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011066273A (ja) * | 2009-09-18 | 2011-03-31 | Konica Minolta Holdings Inc | 微細マスクパターンの形成方法、ナノインプリントリソグラフィ方法および微細構造体の製造方法 |
JP2013012673A (ja) * | 2011-06-30 | 2013-01-17 | Asahi Kasei Corp | 微細マスク形成用積層体 |
JP2013036027A (ja) * | 2011-07-12 | 2013-02-21 | Fujifilm Corp | インプリント用硬化性組成物、パターン形成方法およびパターン |
JP2013070004A (ja) * | 2011-09-26 | 2013-04-18 | Toshiba Corp | パターン形成方法 |
US8877538B2 (en) | 2011-12-05 | 2014-11-04 | Korea Institute Of Science And Technology | Pressure sensor having nanostructure and manufacturing method thereof |
JPWO2013161095A1 (ja) * | 2012-04-26 | 2015-12-21 | 東レ株式会社 | 凹凸構造を有する結晶基板の製造方法 |
WO2014054456A1 (ja) * | 2012-10-01 | 2014-04-10 | 東芝機械株式会社 | 被成形体組立体、被成形体組立体の製造装置および被成形体組立体の製造・使用方法 |
JP2014069524A (ja) * | 2012-10-01 | 2014-04-21 | Toshiba Mach Co Ltd | 被成形体組立体、被成形体組立体の製造装置および被成形体組立体の製造・使用方法 |
US10723063B2 (en) | 2012-10-01 | 2020-07-28 | Toshiba Kikai Kabushiki Kaisha | Apparatus for manufacturing molded body assembly |
JP2015112781A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法 |
JP2015112782A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法 |
JP2015112780A (ja) * | 2013-12-11 | 2015-06-22 | 旭化成イーマテリアルズ株式会社 | 機能転写体及び機能層の転写方法、ならびに太陽電池及びその製造方法 |
JPWO2015147134A1 (ja) * | 2014-03-26 | 2017-04-13 | Jxエネルギー株式会社 | エピタキシャル成長用基板の製造方法、それより得られるエピタキシャル成長用基板及びその基板を用いた発光素子 |
JP2018148162A (ja) * | 2017-03-09 | 2018-09-20 | 日本特殊陶業株式会社 | 保持装置の製造方法 |
JP2019182486A (ja) * | 2018-04-11 | 2019-10-24 | 日本テトラパック株式会社 | 包装容器及び包装材料の製造方法 |
US11097880B2 (en) | 2018-04-11 | 2021-08-24 | Tetra Laval Holdings & Finance S.A. | Packaging container |
Also Published As
Publication number | Publication date |
---|---|
US20130065007A1 (en) | 2013-03-14 |
US8323520B2 (en) | 2012-12-04 |
US9114592B2 (en) | 2015-08-25 |
US20100213169A1 (en) | 2010-08-26 |
JP5319326B2 (ja) | 2013-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5319326B2 (ja) | 凹凸パターンの形成方法および凹凸パターン形成用シート | |
JP4068074B2 (ja) | 凸凹パターンの形成方法および凸凹パターン形成用部材 | |
CN102591143B (zh) | 一种大面积纳米压印光刻的装置和方法 | |
JP4544372B2 (ja) | 基板の製造方法 | |
TWI588009B (zh) | A method of manufacturing a stamper, a stamper, and a stamper With components | |
US20140093692A1 (en) | Resin Mold, Production Process Therefor and Uses Thereof | |
JP2009532230A5 (ja) | ||
JP2010083915A (ja) | 粘着シートの粘着剤層表面に凹凸を形成するための剥離シート | |
KR20140056255A (ko) | 수지제 몰드의 접합 방법 및 이 접합 방법에 의해 제조된 롤투롤용 연속 몰드 구성체 | |
TWI604932B (zh) | 光學元件製作用模及其製造方法、光學元件 | |
JP2006344972A (ja) | ソフトモールド及びその製造方法並びにこれを利用したパターニング方法 | |
JP2007301839A (ja) | パタン形成方法、インプリントモールド、および磁気記録媒体の製造方法 | |
JP5168815B2 (ja) | パターンの形成方法 | |
KR20150126218A (ko) | 마스터 몰드 제조 방법 | |
US9180608B2 (en) | Stamp, method of manufacturing the same, and imprinting method using the stamp | |
CN107112210B (zh) | 压印用模具 | |
US9676173B2 (en) | Process for the transfer of at least a portion of a composite film onto a flexible polymer membrane | |
TWI768116B (zh) | 電鑄用母版及使用該電鑄用母版的電鑄模具的製造方法 | |
JP6634721B2 (ja) | インプリント用モールド、および、その離型処理方法 | |
TWI400160B (zh) | 應用於微奈米壓印製程之模具 | |
KR102627439B1 (ko) | 버블 프리 계면을 가지는 2차원 나노 소재 적층 구조체 및 그 제조 방법 | |
KR102230702B1 (ko) | 나노 임프린팅 패턴 제작 방법 | |
JP2010153589A (ja) | 微細パターンの形成方法 | |
CN116931147A (zh) | 一种双面图形结构的制备方法及双面图形结构 | |
JP2018002947A (ja) | 保護フィルム及びその製造方法、並びに、機能転写体 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110323 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130129 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130321 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130618 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130711 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5319326 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |