JP2010199236A - 発光素子の製造方法および発光素子 - Google Patents

発光素子の製造方法および発光素子 Download PDF

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Publication number
JP2010199236A
JP2010199236A JP2009041159A JP2009041159A JP2010199236A JP 2010199236 A JP2010199236 A JP 2010199236A JP 2009041159 A JP2009041159 A JP 2009041159A JP 2009041159 A JP2009041159 A JP 2009041159A JP 2010199236 A JP2010199236 A JP 2010199236A
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JP
Japan
Prior art keywords
layer
emitting element
well layer
light emitting
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009041159A
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English (en)
Japanese (ja)
Inventor
Yusuke Yoshizumi
祐介 善積
Masanori Ueno
昌紀 上野
Takao Nakamura
孝夫 中村
Toshio Ueda
登志雄 上田
Eiryo Takasuka
英良 高須賀
Hirohiko Senda
裕彦 千田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2009041159A priority Critical patent/JP2010199236A/ja
Priority to CN2010800035068A priority patent/CN102239574A/zh
Priority to PCT/JP2010/051029 priority patent/WO2010098163A1/ja
Priority to KR1020117013023A priority patent/KR20110084296A/ko
Priority to US13/124,612 priority patent/US20110198566A1/en
Priority to EP10746044.6A priority patent/EP2403023A4/en
Priority to TW099103040A priority patent/TW201036215A/zh
Publication of JP2010199236A publication Critical patent/JP2010199236A/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/0254—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00—Special growth methods for semiconductor lasers
    • H01S2304/04—MOCVD or MOVPE
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Led Devices (AREA)
  • Semiconductor Lasers (AREA)
JP2009041159A 2009-02-24 2009-02-24 発光素子の製造方法および発光素子 Pending JP2010199236A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2009041159A JP2010199236A (ja) 2009-02-24 2009-02-24 発光素子の製造方法および発光素子
CN2010800035068A CN102239574A (zh) 2009-02-24 2010-01-27 制造发光元件的方法和发光元件
PCT/JP2010/051029 WO2010098163A1 (ja) 2009-02-24 2010-01-27 発光素子の製造方法および発光素子
KR1020117013023A KR20110084296A (ko) 2009-02-24 2010-01-27 발광 소자의 제조 방법 및 발광 소자
US13/124,612 US20110198566A1 (en) 2009-02-24 2010-01-27 Method for manufacturing light emitting element and light emitting element
EP10746044.6A EP2403023A4 (en) 2009-02-24 2010-01-27 METHOD FOR PRODUCING A LIGHT-EMITTING ELEMENT AND LIGHT-EMITTING ELEMENT
TW099103040A TW201036215A (en) 2009-02-24 2010-02-02 Light emitting element producing method and light emitting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009041159A JP2010199236A (ja) 2009-02-24 2009-02-24 発光素子の製造方法および発光素子

Publications (1)

Publication Number Publication Date
JP2010199236A true JP2010199236A (ja) 2010-09-09

Family

ID=42665373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009041159A Pending JP2010199236A (ja) 2009-02-24 2009-02-24 発光素子の製造方法および発光素子

Country Status (7)

Country Link
US (1) US20110198566A1 (zh)
EP (1) EP2403023A4 (zh)
JP (1) JP2010199236A (zh)
KR (1) KR20110084296A (zh)
CN (1) CN102239574A (zh)
TW (1) TW201036215A (zh)
WO (1) WO2010098163A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108735867A (zh) * 2018-06-11 2018-11-02 厦门乾照光电股份有限公司 发光二极管的芯片及其量子阱结构和制造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5788194B2 (ja) 2011-03-03 2015-09-30 シャープ株式会社 発光装置、照明装置、及び車両用前照灯
US9108568B2 (en) 2011-06-29 2015-08-18 Sharp Kabushiki Kaisha Light-projecting device, and vehicle headlamp including light-projecting device
US9761763B2 (en) * 2012-12-21 2017-09-12 Soraa, Inc. Dense-luminescent-materials-coated violet LEDs
CN110649088A (zh) * 2019-09-30 2020-01-03 厦门市三安集成电路有限公司 外延结构和低开启电压晶体管
CN112259647B (zh) * 2020-09-08 2022-03-18 华灿光电（浙江）有限公司 发光二极管外延片的制备方法及发光二极管外延片
CN113764549B (zh) * 2021-09-07 2024-05-24 圆融光电科技股份有限公司 一种发光二极管的制备方法

Citations (5)

* Cited by examiner, † Cited by third party
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JPH09186091A (ja) * 1995-12-28 1997-07-15 Sharp Corp Ｉｉｉ−ｖ族化合物半導体の製造方法
JP2001015808A (ja) * 1999-06-29 2001-01-19 Sharp Corp 窒素化合物半導体発光素子及びその製造方法
JP2003007617A (ja) * 2001-06-19 2003-01-10 Sharp Corp 化合物半導体の製造方法および化合物半導体、並びに、化合物半導体装置
JP2008028121A (ja) * 2006-07-20 2008-02-07 Hitachi Cable Ltd 半導体発光素子の製造方法
JP2008078186A (ja) * 2006-09-19 2008-04-03 Mitsubishi Chemicals Corp 窒化物系化合物半導体の結晶成長方法

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US6017774A (en) * 1995-12-24 2000-01-25 Sharp Kabushiki Kaisha Method for producing group III-V compound semiconductor and fabricating light emitting device using such semiconductor
EP0993027A4 (en) * 1997-03-28 2002-05-29 Sharp Kk PROCESS FOR MANUFACTURING SEMICONDUCTOR COMPOUNDS
JP3976294B2 (ja) * 1998-06-26 2007-09-12 シャープ株式会社 窒化物系化合物半導体発光素子の製造方法
JP3710339B2 (ja) * 1999-08-31 2005-10-26 シャープ株式会社 ＧａＮ系化合物半導体発光素子の製造方法
JP2003178987A (ja) * 2001-12-13 2003-06-27 Hitachi Cable Ltd 窒化物系化合物半導体の製造方法及び窒化物系化合物半導体ウェハ並びに窒化物系化合物半導体デバイス
KR100513923B1 (ko) * 2004-08-13 2005-09-08 재단법인서울대학교산학협력재단 질화물 반도체층을 성장시키는 방법 및 이를 이용하는 질화물 반도체 발광소자
GB2432974A (en) * 2004-09-28 2007-06-06 Sumitomo Chemical Co A group iii-v compound semiconductor and a method for producing the same
US7459380B2 (en) * 2006-05-05 2008-12-02 Applied Materials, Inc. Dislocation-specific dielectric mask deposition and lateral epitaxial overgrowth to reduce dislocation density of nitride films
JP2007324546A (ja) * 2006-06-05 2007-12-13 Showa Denko Kk 窒化ガリウム系化合物半導体発光素子の製造方法、及び窒化ガリウム系化合物半導体発光素子、並びにランプ
JP4668225B2 (ja) * 2007-03-27 2011-04-13 シャープ株式会社 窒化物半導体発光素子の製造方法
US20090310640A1 (en) * 2008-04-04 2009-12-17 The Regents Of The University Of California MOCVD GROWTH TECHNIQUE FOR PLANAR SEMIPOLAR (Al, In, Ga, B)N BASED LIGHT EMITTING DIODES
JP4294077B2 (ja) * 2008-06-09 2009-07-08 シャープ株式会社 窒化物半導体発光素子の製造方法
JP2010021290A (ja) * 2008-07-09 2010-01-28 Sumitomo Electric Ind Ltd 量子井戸構造の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186091A (ja) * 1995-12-28 1997-07-15 Sharp Corp Ｉｉｉ−ｖ族化合物半導体の製造方法
JP2001015808A (ja) * 1999-06-29 2001-01-19 Sharp Corp 窒素化合物半導体発光素子及びその製造方法
JP2003007617A (ja) * 2001-06-19 2003-01-10 Sharp Corp 化合物半導体の製造方法および化合物半導体、並びに、化合物半導体装置
JP2008028121A (ja) * 2006-07-20 2008-02-07 Hitachi Cable Ltd 半導体発光素子の製造方法
JP2008078186A (ja) * 2006-09-19 2008-04-03 Mitsubishi Chemicals Corp 窒化物系化合物半導体の結晶成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108735867A (zh) * 2018-06-11 2018-11-02 厦门乾照光电股份有限公司 发光二极管的芯片及其量子阱结构和制造方法

Also Published As

Publication number Publication date
CN102239574A (zh) 2011-11-09
EP2403023A4 (en) 2013-11-27
KR20110084296A (ko) 2011-07-21
US20110198566A1 (en) 2011-08-18
WO2010098163A1 (ja) 2010-09-02
TW201036215A (en) 2010-10-01
EP2403023A1 (en) 2012-01-04

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