JP2010161386A - 半導体装置および半導体基板ならびに半導体基板の製造方法 - Google Patents
半導体装置および半導体基板ならびに半導体基板の製造方法 Download PDFInfo
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Abstract
【解決手段】基板法線方向から見て閉じた形状の窪み104が表面に設けられた基板102と、少なくとも窪み104の内面105、106、107からの結晶成長によって基板102の表面上に形成された半導体層103とを備えた半導体装置である。半導体層103は、基板102に設けられた窪み104の内部に位置する3枚の側面105、106および107からの結晶成長によって形成されているため、基板102の主面の法線方向とは異なる方向に半導体層103が結晶成長して欠陥が1カ所に集合するようになり、その結果、3枚の側面105、106および107の上部にある半導体層103の欠陥密度を減少させることができる。
【選択図】図1
Description
(実施形態1)
図1から図6を参照しながら、本発明による実施形態1を説明する。図1は、実施形態1にかかる半導体装置の構成を模式的に示している。図1に示した半導体装置は、基板法線方向から見て閉じた形状の窪み104が表面に設けられた基板102と、窪み104の内面(105、106、107)からの結晶成長によって基板102の表面上に形成された半導体層103とを備えている。半導体層103は、窪み104の内面(105等)からの結晶成長によって形成されているため、半導体層103中の欠陥(格子欠陥)は窪み104の中心方向へ集中している。すなわち、基板102の法線方向とは異なる方向に(例えば、窪み104の内面に直角な方向に)半導体層103が結晶成長するため、半導体層103の欠陥が集合し、それゆえ、半導体層103の欠陥密度は減少している。この欠陥密度が減少した半導体層103が、半導体素子の能動領域(半導体レーザ素子の活性層や半導体トランジスタ素子のゲート領域など)となる場合には、信頼性に優れ、高性能な半導体装置(半導体レーザ装置、半導体集積回路装置など)が実現される。なお、図1においては、半導体装置を構成する具体的な素子を示していないが、そのような素子は公知の技術を用いて作製することが可能である。
(実施形態2)
図7から図9を参照しながら、本発明による実施形態2を説明する。図7は、実施形態2にかかる半導体装置の構成を模式的に示している。本実施形態の半導体装置は、表面に凸起204が設けられた基板202を有している点が、表面に窪み104が設けられた基板102を有する上記実施形態1の半導体装置と異なる。以下では、説明の簡略化のため、上記実施形態1と異なる点を主に説明し、同様の説明は省略または簡略化する。
(実施形態3)
図10を参照しながら、本発明による実施形態3を説明する。図10は、実施形態3にかかる半導体装置に含まれる半導体層103の上面構成を模式的に示している。本実施形態は、上記実施形態1の窪み104が複数設けられている点が上記実施形態1と異なる。以下では、説明の簡略化のため、上記実施形態1と異なる点を主に説明し、同様の説明は省略または簡略化する。
(実施形態4)
図11を参照しながら、本発明による実施形態4を説明する。図11は、実施形態4にかかる半導体装置に含まれる半導体層203の上面構成を模式的に示している。本実施形態は、上記実施形態2の凸起204が複数設けられている点が上記実施形態2と異なる。以下では、説明の簡略化のため、上記実施形態2と異なる点を主に説明し、同様の説明は省略または簡略化する。
(実施形態5)
図14を参照しながら、本発明による実施形態5を説明する。図14は、実施形態5にかかる半導体レーザ装置の断面構成を模式的に示している。本実施形態は、上記実施形態1における窪み104を有する第1の半導体層102の上に、少なくとも活性層16を含む複数の半導体層(半導体レーザ構造)114が形成されている点が上記実施形態1と異なる。以下では、説明の簡略化のため、上記実施形態1と異なる点を主に説明し、同様の説明は省略または簡略化する。
(実施形態6)
図16を参照しながら、本発明による実施形態6を説明する。図16(a)から(c)は、実施形態6にかかる半導体基板の製造方法を説明するための工程断面図である。本実施形態は、上記実施形態1における窪み104を有する第1の半導体層102の上に、比較的厚い第2の半導体層103を形成した後、第2の半導体層103からなる半導体基板を得る点が上記実施形態1と異なる。以下では、説明の簡略化のため、上記実施形態1と異なる点を主に説明し、同様の説明は省略または簡略化する。
50sccmとしたが、成長速度が例えば100μm/hの場合には、III族原料ガス(GaCl3)の流量を例えば100sccm程度にすればよい。また、キャリアガスとしては、N2だけでなく、H2、またはN2とH2との混合ガスを用いることもできる。
102、202 第1の半導体層
103、203 第2の半導体層
104 窪み
105、106、107、205、206、207 側面
108 底面
109、209 欠陥
204 凸起
208 上面
Claims (1)
- 基板法線方向から見て閉じた形状の窪みが表面に設けられた基板と、
少なくとも前記窪みの内面からの結晶成長によって前記基板の前記表面上に形成された半導体層と
を備えた半導体装置。
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JP2010025503A JP5186515B2 (ja) | 1999-10-06 | 2010-02-08 | 半導体装置および半導体基板ならびに半導体基板の製造方法 |
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JP2010025503A JP5186515B2 (ja) | 1999-10-06 | 2010-02-08 | 半導体装置および半導体基板ならびに半導体基板の製造方法 |
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US (1) | US6821805B1 (ja) |
EP (1) | EP1091422A3 (ja) |
JP (1) | JP5186515B2 (ja) |
KR (1) | KR100751617B1 (ja) |
CN (3) | CN100435436C (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016100363A (ja) * | 2014-11-18 | 2016-05-30 | 日亜化学工業株式会社 | 窒化物半導体素子及びその製造方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4055503B2 (ja) * | 2001-07-24 | 2008-03-05 | 日亜化学工業株式会社 | 半導体発光素子 |
EP1420463A4 (en) * | 2001-08-22 | 2008-11-26 | Sony Corp | NITRID SEMICONDUCTOR ELEMENT AND METHOD FOR THE PRODUCTION THEREOF |
US6812496B2 (en) * | 2002-01-10 | 2004-11-02 | Sharp Kabushiki Kaisha | Group III nitride semiconductor laser device |
US7427555B2 (en) | 2002-12-16 | 2008-09-23 | The Regents Of The University Of California | Growth of planar, non-polar gallium nitride by hydride vapor phase epitaxy |
JP3913194B2 (ja) * | 2003-05-30 | 2007-05-09 | シャープ株式会社 | 窒化物半導体発光素子 |
JP4390640B2 (ja) * | 2003-07-31 | 2009-12-24 | シャープ株式会社 | 窒化物半導体レーザ素子、窒化物半導体発光素子、窒化物半導体ウェハおよびそれらの製造方法 |
WO2005018008A1 (ja) * | 2003-08-19 | 2005-02-24 | Nichia Corporation | 半導体素子 |
JP4818732B2 (ja) * | 2005-03-18 | 2011-11-16 | シャープ株式会社 | 窒化物半導体素子の製造方法 |
CN101350388B (zh) * | 2007-07-20 | 2010-04-14 | 广镓光电股份有限公司 | 供半导体光电组件磊晶用的半导体结构组合及其制程 |
US8648328B2 (en) * | 2011-12-27 | 2014-02-11 | Sharp Laboratories Of America, Inc. | Light emitting diode (LED) using three-dimensional gallium nitride (GaN) pillar structures with planar surfaces |
CN104603959B (zh) * | 2013-08-21 | 2017-07-04 | 夏普株式会社 | 氮化物半导体发光元件 |
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US9985190B2 (en) | 2016-05-18 | 2018-05-29 | eLux Inc. | Formation and structure of post enhanced diodes for orientation control |
US10249599B2 (en) | 2016-06-29 | 2019-04-02 | eLux, Inc. | Laminated printed color conversion phosphor sheets |
US9627437B1 (en) | 2016-06-30 | 2017-04-18 | Sharp Laboratories Of America, Inc. | Patterned phosphors in through hole via (THV) glass |
US10243097B2 (en) | 2016-09-09 | 2019-03-26 | eLux Inc. | Fluidic assembly using tunable suspension flow |
US9837390B1 (en) | 2016-11-07 | 2017-12-05 | Corning Incorporated | Systems and methods for creating fluidic assembly structures on a substrate |
DE102017108435A1 (de) * | 2017-04-20 | 2018-10-25 | Osram Opto Semiconductors Gmbh | Halbleiterlaserdiode und Verfahren zur Herstellung einer Halbleiterlaserdiode |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000124500A (ja) * | 1998-10-15 | 2000-04-28 | Toshiba Corp | 窒化ガリウム系半導体装置 |
JP2000244061A (ja) * | 1998-12-21 | 2000-09-08 | Nichia Chem Ind Ltd | 窒化物半導体の成長方法及び窒化物半導体素子 |
JP2001160539A (ja) * | 1999-09-24 | 2001-06-12 | Sanyo Electric Co Ltd | 窒化物系半導体素子および窒化物系半導体の形成方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5122223A (en) | 1979-05-29 | 1992-06-16 | Massachusetts Institute Of Technology | Graphoepitaxy using energy beams |
US5091767A (en) * | 1991-03-18 | 1992-02-25 | At&T Bell Laboratories | Article comprising a lattice-mismatched semiconductor heterostructure |
JPH0927612A (ja) | 1995-07-10 | 1997-01-28 | Fujitsu Ltd | 量子効果半導体装置とその製造方法 |
JP2828002B2 (ja) | 1995-01-19 | 1998-11-25 | 松下電器産業株式会社 | 半導体発光素子およびその製造方法 |
US5787104A (en) * | 1995-01-19 | 1998-07-28 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting element and method for fabricating the same |
JP3599896B2 (ja) * | 1995-05-19 | 2004-12-08 | 三洋電機株式会社 | 半導体レーザ素子および半導体レーザ素子の製造方法 |
JPH09167739A (ja) | 1995-12-15 | 1997-06-24 | Nippon Telegr & Teleph Corp <Ntt> | 半導体基板 |
JP2830814B2 (ja) * | 1996-01-19 | 1998-12-02 | 日本電気株式会社 | 窒化ガリウム系化合物半導体の結晶成長方法、及び半導体レーザの製造方法 |
JP3399216B2 (ja) * | 1996-03-14 | 2003-04-21 | ソニー株式会社 | 半導体発光素子 |
JP3139445B2 (ja) | 1997-03-13 | 2001-02-26 | 日本電気株式会社 | GaN系半導体の成長方法およびGaN系半導体膜 |
CA2258080C (en) * | 1997-04-11 | 2007-06-05 | Nichia Chemical Industries, Ltd. | Nitride semiconductor growth method, nitride semiconductor substrate, and nitride semiconductor device |
TW420835B (en) * | 1997-06-16 | 2001-02-01 | Matsushita Electric Ind Co Ltd | Semiconductor manufacture method and manufacturing device therefor |
JP3930161B2 (ja) | 1997-08-29 | 2007-06-13 | 株式会社東芝 | 窒化物系半導体素子、発光素子及びその製造方法 |
JP3955367B2 (ja) * | 1997-09-30 | 2007-08-08 | フィリップス ルミレッズ ライティング カンパニー リミテッド ライアビリティ カンパニー | 光半導体素子およびその製造方法 |
FR2769924B1 (fr) * | 1997-10-20 | 2000-03-10 | Centre Nat Rech Scient | Procede de realisation d'une couche epitaxiale de nitrure de gallium, couche epitaxiale de nitrure de gallium et composant optoelectronique muni d'une telle couche |
JP3436128B2 (ja) | 1998-04-28 | 2003-08-11 | 日亜化学工業株式会社 | 窒化物半導体の成長方法及び窒化物半導体素子 |
JP3460581B2 (ja) | 1998-05-28 | 2003-10-27 | 日亜化学工業株式会社 | 窒化物半導体の成長方法及び窒化物半導体素子 |
KR100277940B1 (ko) * | 1998-07-14 | 2001-02-01 | 구자홍 | 지에이엔(gan) 반도체 레이저 다이오드 및 그 제조방법 |
US6319742B1 (en) * | 1998-07-29 | 2001-11-20 | Sanyo Electric Co., Ltd. | Method of forming nitride based semiconductor layer |
US6335546B1 (en) * | 1998-07-31 | 2002-01-01 | Sharp Kabushiki Kaisha | Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device |
JP3826581B2 (ja) | 1998-08-06 | 2006-09-27 | 昭和電工株式会社 | 半導体基板および半導体基板の製造方法 |
JP3201475B2 (ja) | 1998-09-14 | 2001-08-20 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
JP2000124142A (ja) | 1998-10-15 | 2000-04-28 | Nippon Telegr & Teleph Corp <Ntt> | 半導体層の製造方法 |
JP2000223417A (ja) * | 1999-01-28 | 2000-08-11 | Sony Corp | 半導体の成長方法、半導体基板の製造方法および半導体装置の製造方法 |
US6355541B1 (en) * | 1999-04-21 | 2002-03-12 | Lockheed Martin Energy Research Corporation | Method for transfer of thin-film of silicon carbide via implantation and wafer bonding |
KR100339518B1 (ko) * | 1999-06-24 | 2002-06-03 | 조장연 | 질화물 반도체 백색 발광소자 |
KR20010009602A (ko) * | 1999-07-12 | 2001-02-05 | 조장연 | 질화물 반도체 백색 발광소자 |
JP4145437B2 (ja) | 1999-09-28 | 2008-09-03 | 住友電気工業株式会社 | 単結晶GaNの結晶成長方法及び単結晶GaN基板の製造方法と単結晶GaN基板 |
-
2000
- 2000-10-05 US US09/680,054 patent/US6821805B1/en not_active Expired - Lifetime
- 2000-10-06 KR KR1020000058709A patent/KR100751617B1/ko not_active IP Right Cessation
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- 2010-02-08 JP JP2010025503A patent/JP5186515B2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000124500A (ja) * | 1998-10-15 | 2000-04-28 | Toshiba Corp | 窒化ガリウム系半導体装置 |
JP2000244061A (ja) * | 1998-12-21 | 2000-09-08 | Nichia Chem Ind Ltd | 窒化物半導体の成長方法及び窒化物半導体素子 |
JP2001160539A (ja) * | 1999-09-24 | 2001-06-12 | Sanyo Electric Co Ltd | 窒化物系半導体素子および窒化物系半導体の形成方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016100363A (ja) * | 2014-11-18 | 2016-05-30 | 日亜化学工業株式会社 | 窒化物半導体素子及びその製造方法 |
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EP1091422A2 (en) | 2001-04-11 |
EP1091422A3 (en) | 2007-10-10 |
CN1553523A (zh) | 2004-12-08 |
KR20010050884A (ko) | 2001-06-25 |
US6821805B1 (en) | 2004-11-23 |
CN100435436C (zh) | 2008-11-19 |
CN1212695C (zh) | 2005-07-27 |
KR100751617B1 (ko) | 2007-08-22 |
JP5186515B2 (ja) | 2013-04-17 |
CN1295365A (zh) | 2001-05-16 |
CN100337338C (zh) | 2007-09-12 |
CN1661869A (zh) | 2005-08-31 |
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