|
US516475A
(en)
*
|
|
1894-03-13 |
|
Thomas corscaden |
|
US2528557A
(en)
*
|
1944-10-27 |
1950-11-07 |
Samuel A Shapiro |
Refrigerant control manifold
|
|
US3516436A
(en)
*
|
1967-03-14 |
1970-06-23 |
Inst Werkzeugmaschinen |
Arrangement for interconnecting logical operational units for pneumatic controls
|
|
US3589387A
(en)
*
|
1969-08-22 |
1971-06-29 |
Int Basic Economy Corp |
Integrated manifold circuits and method of assembly
|
|
US3654960A
(en)
*
|
1969-12-31 |
1972-04-11 |
Hydro Stack Mfg Corp |
Modular hydraulic system
|
|
US3834417A
(en)
*
|
1972-04-10 |
1974-09-10 |
Norgren Co C A |
Coupling unit for fluid control components
|
|
US4384474A
(en)
*
|
1980-10-30 |
1983-05-24 |
Amf Incorporated |
Method and apparatus for testing and using membrane filters in an on site of use housing
|
|
US4784880A
(en)
*
|
1986-07-25 |
1988-11-15 |
Albany International Corp. |
Method for modifying asymmetric membranes by endo-treating
|
|
US5136475A
(en)
*
|
1990-10-29 |
1992-08-04 |
Mcdermott Kevin |
Emergency light for marking of aircraft landing sites and other purposes
|
|
DE4212367C2
(de)
*
|
1991-04-15 |
2000-08-03 |
Denso Corp |
Vorrichtung zur Entfernung von Wasser in einem Kühlsystem
|
|
JP2731080B2
(ja)
*
|
1991-05-31 |
1998-03-25 |
株式会社本山製作所 |
ガス制御装置
|
|
DE69233568T2
(de)
*
|
1991-09-10 |
2006-08-10 |
Smc K.K. |
Durch Flüssigkeitsdruck betätigte Vorrichtung
|
|
US5163475A
(en)
*
|
1991-11-26 |
1992-11-17 |
Praxair Technology, Inc. |
Gas delivery panels
|
|
US5303731A
(en)
*
|
1992-06-30 |
1994-04-19 |
Unit Instruments, Inc. |
Liquid flow controller
|
|
FR2696947B1
(fr)
*
|
1992-10-20 |
1994-11-25 |
Ceramiques Tech Soc D |
Module de filtration, de séparation, de purification de gaz ou de liquide, ou de transformation catalytique.
|
|
US5423228A
(en)
*
|
1992-12-18 |
1995-06-13 |
Monitor Labs, Inc. |
Dilution stack sampling apparatus
|
|
KR0177533B1
(ko)
*
|
1993-02-11 |
1999-03-20 |
길버트 피. 와이너 |
배관용 필터
|
|
US5333637A
(en)
*
|
1993-06-11 |
1994-08-02 |
Rosemount Inc. |
Pneumatic instrument particle trap
|
|
JPH07236808A
(ja)
*
|
1994-03-01 |
1995-09-12 |
Koganei Corp |
真空配管用濾過装置
|
|
US6234455B1
(en)
*
|
1994-06-30 |
2001-05-22 |
Gotz-Ulrich Wittek |
Device and process for delivering substances for dispersal in the air
|
|
US5730181A
(en)
*
|
1994-07-15 |
1998-03-24 |
Unit Instruments, Inc. |
Mass flow controller with vertical purifier
|
|
US5545242A
(en)
*
|
1994-07-19 |
1996-08-13 |
Pall Corporation |
In-line filter for tubing
|
|
US5605179A
(en)
*
|
1995-03-17 |
1997-02-25 |
Insync Systems, Inc. |
Integrated gas panel
|
|
JPH08254283A
(ja)
*
|
1995-03-17 |
1996-10-01 |
Motoyama Seisakusho:Kk |
バルブ
|
|
WO1996034705A1
(en)
|
1995-05-05 |
1996-11-07 |
Insync Systems, Inc. |
Mfc-quick change method and apparatus
|
|
JP3546275B2
(ja)
*
|
1995-06-30 |
2004-07-21 |
忠弘 大見 |
流体制御装置
|
|
US5684245A
(en)
*
|
1995-11-17 |
1997-11-04 |
Mks Instruments, Inc. |
Apparatus for mass flow measurement of a gas
|
|
KR100232112B1
(ko)
*
|
1996-01-05 |
1999-12-01 |
아마노 시게루 |
가스공급유닛
|
|
US5810031A
(en)
|
1996-02-21 |
1998-09-22 |
Aeroquip Corporation |
Ultra high purity gas distribution component with integral valved coupling and methods for its use
|
|
US5732744A
(en)
*
|
1996-03-08 |
1998-03-31 |
Control Systems, Inc. |
Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
|
|
US6394138B1
(en)
*
|
1996-10-30 |
2002-05-28 |
Unit Instruments, Inc. |
Manifold system of removable components for distribution of fluids
|
|
US5992463A
(en)
*
|
1996-10-30 |
1999-11-30 |
Unit Instruments, Inc. |
Gas panel
|
|
US6293310B1
(en)
*
|
1996-10-30 |
2001-09-25 |
Unit Instruments, Inc. |
Gas panel
|
|
US5836355A
(en)
*
|
1996-12-03 |
1998-11-17 |
Insync Systems, Inc. |
Building blocks for integrated gas panel
|
|
US5908553A
(en)
*
|
1996-12-06 |
1999-06-01 |
Reid; Roger P. |
Water purifier with adjustable volume in dwell passage
|
|
JP3997338B2
(ja)
*
|
1997-02-14 |
2007-10-24 |
忠弘 大見 |
流体制御装置
|
|
JPH10300000A
(ja)
*
|
1997-02-28 |
1998-11-13 |
Benkan Corp |
集積化ガス制御装置
|
|
US6068016A
(en)
*
|
1997-09-25 |
2000-05-30 |
Applied Materials, Inc |
Modular fluid flow system with integrated pump-purge
|
|
JP4378553B2
(ja)
*
|
1997-10-13 |
2009-12-09 |
忠弘 大見 |
流体制御装置
|
|
JP4042191B2
(ja)
*
|
1997-12-11 |
2008-02-06 |
Ｓｍｃ株式会社 |
マニホールド形流量検出器組立体
|
|
WO1999035422A1
(en)
*
|
1998-01-09 |
1999-07-15 |
Swagelok Company |
Seal for a modular flow devices
|
|
US6158454A
(en)
*
|
1998-04-14 |
2000-12-12 |
Insync Systems, Inc. |
Sieve like structure for fluid flow through structural arrangement
|
|
US6260581B1
(en)
*
|
1998-06-12 |
2001-07-17 |
J. Gregory Hollingshead |
Apparatus for assembling modular chemical distribution substrate blocks
|
|
JP2002518167A
(ja)
*
|
1998-06-24 |
2002-06-25 |
ポール・コーポレーション |
浄化組立体及び浄化方法
|
|
US5964481A
(en)
*
|
1998-07-10 |
1999-10-12 |
Buch; Dana |
Modular mounting apparatus for fluid control components
|
|
US6078030A
(en)
*
|
1998-09-09 |
2000-06-20 |
Millipore Corporation |
Component heater for use in semiconductor manufacturing equipment
|
|
US6149718A
(en)
*
|
1998-10-16 |
2000-11-21 |
Mott Mettallurgical Corporation |
Contamination control system
|
|
WO2000031462A1
(en)
*
|
1998-11-20 |
2000-06-02 |
Mykrolis Corporation |
System and method for integrating gas components
|
|
US6298881B1
(en)
*
|
1999-03-16 |
2001-10-09 |
Shigemoto & Annett Ii, Inc. |
Modular fluid handling assembly and modular fluid handling units with double containment
|
|
US6155289A
(en)
*
|
1999-05-07 |
2000-12-05 |
International Business Machines |
Method of and system for sub-atmospheric gas delivery with backflow control
|
|
US6186177B1
(en)
*
|
1999-06-23 |
2001-02-13 |
Mks Instruments, Inc. |
Integrated gas delivery system
|
|
US6123107A
(en)
*
|
1999-07-09 |
2000-09-26 |
Redwood Microsystems, Inc. |
Apparatus and method for mounting micromechanical fluid control components
|
|
US6817381B2
(en)
*
|
1999-08-24 |
2004-11-16 |
Tokyo Electron Limited |
Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
|
|
US6729353B2
(en)
*
|
1999-09-01 |
2004-05-04 |
Asml Us, Inc. |
Modular fluid delivery apparatus
|
|
US6283155B1
(en)
*
|
1999-12-06 |
2001-09-04 |
Insync Systems, Inc. |
System of modular substrates for enabling the distribution of process fluids through removable components
|
|
US6546960B1
(en)
*
|
2000-03-03 |
2003-04-15 |
Creative Pathways, Inc. |
Self-aligning SmartStrate™
|
|
EP1132669B1
(en)
*
|
2000-03-10 |
2004-10-13 |
Tokyo Electron Limited |
Fluid control apparatus
|
|
JP4156184B2
(ja)
*
|
2000-08-01 |
2008-09-24 |
株式会社キッツエスシーティー |
集積化ガス制御装置
|
|
JP2002089798A
(ja)
*
|
2000-09-11 |
2002-03-27 |
Ulvac Japan Ltd |
流体制御装置およびこれを用いたガス処理装置
|
|
US6349744B1
(en)
*
|
2000-10-13 |
2002-02-26 |
Mks Instruments, Inc. |
Manifold for modular gas box system
|
|
JP2002174400A
(ja)
*
|
2000-12-06 |
2002-06-21 |
Motoyama Eng Works Ltd |
集積化ユニット
|
|
JP4487135B2
(ja)
*
|
2001-03-05 |
2010-06-23 |
東京エレクトロン株式会社 |
流体制御装置
|
|
WO2002093053A1
(en)
*
|
2001-05-16 |
2002-11-21 |
Unit Instruments, Inc. |
Fluid flow system
|
|
JP2002349797A
(ja)
*
|
2001-05-23 |
2002-12-04 |
Fujikin Inc |
流体制御装置
|
|
US6951226B2
(en)
*
|
2001-07-13 |
2005-10-04 |
Talon Innovations, Inc. |
Shear-resistant modular fluidic blocks
|
|
CN100351565C
(zh)
*
|
2001-12-06 |
2007-11-28 |
旭有机材工业株式会社 |
汇流阀
|
|
JP3564115B2
(ja)
*
|
2001-12-06 |
2004-09-08 |
シーケーディ株式会社 |
ガス供給ユニット
|
|
US6634385B2
(en)
*
|
2001-12-21 |
2003-10-21 |
Motorola, Inc. |
Apparatus for conveying fluids and base plate
|
|
JP2003280745A
(ja)
*
|
2002-03-25 |
2003-10-02 |
Stec Inc |
マスフローコントローラ
|
|
US6934138B2
(en)
*
|
2002-08-08 |
2005-08-23 |
General Instrument Corporation |
Method and device for bonding AC utilities and HFC access networks for surge mitigation
|
|
JP4116366B2
(ja)
*
|
2002-08-21 |
2008-07-09 |
日本精線株式会社 |
フィルター組立体
|
|
JP2005539375A
(ja)
*
|
2002-08-27 |
2005-12-22 |
セレリティ・インコーポレイテッド |
共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
|
|
JP4092164B2
(ja)
*
|
2002-09-20 |
2008-05-28 |
シーケーディ株式会社 |
ガス供給ユニット
|
|
EP1555471A4
(en)
*
|
2002-10-21 |
2005-12-14 |
Ckd Corp |
INTEGRATED GAS VALVE
|
|
US7258139B2
(en)
*
|
2002-11-26 |
2007-08-21 |
Swagelok Company |
Modular surface mount fluid system
|
|
JP2004183771A
(ja)
*
|
2002-12-03 |
2004-07-02 |
Fujikin Inc |
流体制御装置
|
|
US7089134B2
(en)
*
|
2003-01-17 |
2006-08-08 |
Applied Materials, Inc. |
Method and apparatus for analyzing gas flow in a gas panel
|
|
US6907904B2
(en)
*
|
2003-03-03 |
2005-06-21 |
Redwood Microsystems, Inc. |
Fluid delivery system and mounting panel therefor
|
|
US20050005981A1
(en)
*
|
2003-03-26 |
2005-01-13 |
Paul Eidsmore |
Modular fluid components and assembly
|
|
WO2005005109A1
(ja)
*
|
2003-07-14 |
2005-01-20 |
Kuroda Precision Industries, Ltd. |
切換弁装置
|
|
US7418978B2
(en)
*
|
2004-01-30 |
2008-09-02 |
Applied Materials, Inc. |
Methods and apparatus for providing fluid to a semiconductor device processing apparatus
|
|
US7370674B2
(en)
*
|
2004-02-20 |
2008-05-13 |
Michael Doyle |
Modular fluid distribution system
|
|
US7048008B2
(en)
*
|
2004-04-13 |
2006-05-23 |
Ultra Clean Holdings, Inc. |
Gas-panel assembly
|
|
JP2006009969A
(ja)
*
|
2004-06-25 |
2006-01-12 |
Kitz Sct:Kk |
集積化ガス制御装置用流路ブロックとその製造方法並びに集積化ガス制御装置
|
|
US7458397B2
(en)
*
|
2004-07-09 |
2008-12-02 |
Michael Doyle |
Modular fluid distribution system
|
|
US20060011246A1
(en)
*
|
2004-07-09 |
2006-01-19 |
Leys John A |
Fluid flow control system and method
|
|
US7004199B1
(en)
*
|
2004-08-04 |
2006-02-28 |
Fujikin Incorporated |
Fluid control apparatus
|
|
US7320333B2
(en)
|
2005-05-09 |
2008-01-22 |
Elkhart Brass Manufacturing Company, Inc. |
Compact field adjustable pressure reducing valve
|
|
US7320339B2
(en)
*
|
2005-06-02 |
2008-01-22 |
Ultra Clean Holdings, Inc. |
Gas-panel assembly
|
|
US7299825B2
(en)
*
|
2005-06-02 |
2007-11-27 |
Ultra Clean Holdings, Inc. |
Gas-panel assembly
|
|
US7410519B1
(en)
*
|
2005-08-16 |
2008-08-12 |
Ewald Dieter H |
Sandwich filter block
|
|
US7575616B2
(en)
|
2006-02-10 |
2009-08-18 |
Entegris, Inc. |
Low-profile surface mount filter
|
|
US7806143B2
(en)
*
|
2007-06-11 |
2010-10-05 |
Lam Research Corporation |
Flexible manifold for integrated gas system gas panels
|