JP2009523325A5 - - Google Patents

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Publication number
JP2009523325A5
JP2009523325A5 JP2008550404A JP2008550404A JP2009523325A5 JP 2009523325 A5 JP2009523325 A5 JP 2009523325A5 JP 2008550404 A JP2008550404 A JP 2008550404A JP 2008550404 A JP2008550404 A JP 2008550404A JP 2009523325 A5 JP2009523325 A5 JP 2009523325A5
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JP
Japan
Prior art keywords
substrate carrier
port
seal
gas
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008550404A
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English (en)
Japanese (ja)
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JP2009523325A (ja
JP5105334B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2007/000722 external-priority patent/WO2007082031A2/en
Publication of JP2009523325A publication Critical patent/JP2009523325A/ja
Publication of JP2009523325A5 publication Critical patent/JP2009523325A5/ja
Application granted granted Critical
Publication of JP5105334B2 publication Critical patent/JP5105334B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008550404A 2006-01-11 2007-01-11 基板キャリヤをパージするための方法及び装置 Expired - Fee Related JP5105334B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US75815206P 2006-01-11 2006-01-11
US60/758,152 2006-01-11
PCT/US2007/000722 WO2007082031A2 (en) 2006-01-11 2007-01-11 Methods and apparatus for purging a substrate carrier

Publications (3)

Publication Number Publication Date
JP2009523325A JP2009523325A (ja) 2009-06-18
JP2009523325A5 true JP2009523325A5 (enExample) 2010-02-25
JP5105334B2 JP5105334B2 (ja) 2012-12-26

Family

ID=38257028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008550404A Expired - Fee Related JP5105334B2 (ja) 2006-01-11 2007-01-11 基板キャリヤをパージするための方法及び装置

Country Status (6)

Country Link
US (3) US8074597B2 (enExample)
JP (1) JP5105334B2 (enExample)
KR (1) KR20080087880A (enExample)
CN (1) CN101370616B (enExample)
TW (1) TWI367539B (enExample)
WO (1) WO2007082031A2 (enExample)

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CN101370616B (zh) 2006-01-11 2011-04-27 应用材料股份有限公司 一种基材载件、一种装载端口以及一种清洗基材载件的方法
US8870512B2 (en) 2007-10-27 2014-10-28 Applied Materials, Inc. Sealed substrate carriers and systems and methods for transporting substrates
US20110084194A1 (en) * 2009-09-24 2011-04-14 Dgel Sciences Cassette for biological analysis and method of making thereof
TWI575631B (zh) 2011-06-28 2017-03-21 Dynamic Micro Systems 半導體儲存櫃系統與方法
CN103426792A (zh) * 2012-05-24 2013-12-04 上海宏力半导体制造有限公司 一种密封的n2清洗装置
US9412632B2 (en) * 2012-10-25 2016-08-09 Taiwan Semiconductor Manufacturing Company, Ltd. Reticle pod
CN109671643B (zh) 2013-08-12 2023-11-28 应用材料公司 具有工厂接口环境控制的基板处理系统、装置和方法
KR102162366B1 (ko) 2014-01-21 2020-10-06 우범제 퓸 제거 장치
KR102226451B1 (ko) * 2014-09-22 2021-03-12 에스케이하이닉스 주식회사 기판 캐리어 세정장치 및 기판 캐리어의 세정 방법
US10359743B2 (en) 2014-11-25 2019-07-23 Applied Materials, Inc. Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
JP2018515936A (ja) 2015-05-22 2018-06-14 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 磁気ドア密封を含む、基板キャリアドアアセンブリ、基板キャリア、及び方法
US10573545B2 (en) 2016-06-28 2020-02-25 Murata Machinery, Ltd. Substrate carrier and substrate carrier stack
FR3058562B1 (fr) * 2016-11-07 2019-05-10 Pfeiffer Vacuum Dispositif et procede de controle de l'etancheite d'une enceinte de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs
US10741432B2 (en) 2017-02-06 2020-08-11 Applied Materials, Inc. Systems, apparatus, and methods for a load port door opener
US10446428B2 (en) 2017-03-14 2019-10-15 Applied Materials, Inc. Load port operation in electronic device manufacturing apparatus, systems, and methods
DE202019101794U1 (de) * 2018-06-27 2019-10-09 Murata Machinery, Ltd. Vorrichtungen zum mindestens einen aus Substrat-Handhabung, Substrat-Lagerung, Substrat-Behandlung und Substrat-Verarbeitung
US11061417B2 (en) 2018-12-19 2021-07-13 Applied Materials, Inc. Selectable-rate bottom purge apparatus and methods
US11569102B2 (en) 2020-02-14 2023-01-31 Applied Materials, Inc. Oxidation inhibiting gas in a manufacturing system
US12087605B2 (en) * 2020-09-30 2024-09-10 Gudeng Precision Industrial Co., Ltd. Reticle pod with antistatic capability
TWD223988S (zh) * 2022-03-03 2023-03-01 家登精密工業股份有限公司 氣匣

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CN101370616B (zh) 2006-01-11 2011-04-27 应用材料股份有限公司 一种基材载件、一种装载端口以及一种清洗基材载件的方法
US8870512B2 (en) 2007-10-27 2014-10-28 Applied Materials, Inc. Sealed substrate carriers and systems and methods for transporting substrates

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