AU6070500A - Wafer container - Google Patents

Wafer container

Info

Publication number
AU6070500A
AU6070500A AU60705/00A AU6070500A AU6070500A AU 6070500 A AU6070500 A AU 6070500A AU 60705/00 A AU60705/00 A AU 60705/00A AU 6070500 A AU6070500 A AU 6070500A AU 6070500 A AU6070500 A AU 6070500A
Authority
AU
Australia
Prior art keywords
wafer container
wafer
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU60705/00A
Inventor
Brian R. Cleaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPI/SEMICON
Original Assignee
BRIAN R CLEAVER
SPI SEMICON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRIAN R CLEAVER, SPI SEMICON filed Critical BRIAN R CLEAVER
Publication of AU6070500A publication Critical patent/AU6070500A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/02—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon
    • G11B33/04—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers
    • G11B33/0405—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers for storing discs
    • G11B33/0433—Multiple disc containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/22—Guiding record carriers not specifically of filamentary or web form, or of supports therefor from random access magazine of disc records
    • G11B17/225—Guiding record carriers not specifically of filamentary or web form, or of supports therefor from random access magazine of disc records wherein the disks are transferred from a fixed magazine to a fixed playing unit using a moving carriage
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/02—Containers; Storing means both adapted to cooperate with the recording or reproducing means
    • G11B23/03—Containers for flat record carriers
    • G11B23/0301—Details
    • G11B23/0313—Container cases
    • G11B23/0316—Constructional details, e.g. shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU60705/00A 1999-07-02 2000-07-03 Wafer container Abandoned AU6070500A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14230099P 1999-07-02 1999-07-02
US60142300 1999-07-02
PCT/US2000/018398 WO2001001828A1 (en) 1999-07-02 2000-07-03 Wafer container

Publications (1)

Publication Number Publication Date
AU6070500A true AU6070500A (en) 2001-01-22

Family

ID=22499325

Family Applications (1)

Application Number Title Priority Date Filing Date
AU60705/00A Abandoned AU6070500A (en) 1999-07-02 2000-07-03 Wafer container

Country Status (2)

Country Link
AU (1) AU6070500A (en)
WO (1) WO2001001828A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20106908U1 (en) * 2001-04-21 2002-08-29 Acr Automation In Cleanroom Transport cassette for semiconductor substrate masks
WO2004049430A1 (en) * 2002-11-26 2004-06-10 Disco Corporation Cassette for storing multiple sheets of semiconductor wafers
US6955197B2 (en) 2002-08-31 2005-10-18 Applied Materials, Inc. Substrate carrier having door latching and substrate clamping mechanisms
US7258520B2 (en) 2002-08-31 2007-08-21 Applied Materials, Inc. Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
US7720558B2 (en) 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
CN101370616B (en) 2006-01-11 2011-04-27 应用材料股份有限公司 Substrate carrier, loading port and methods for purging a substrate carrier
CN102616484B (en) * 2012-04-07 2014-02-05 常熟市谷雷特机械产品设计有限公司 Storage cage for cable reel
US10566226B2 (en) 2014-11-11 2020-02-18 Applied Materials, Inc. Multi-cassette carrying case
CN107447192A (en) * 2017-09-18 2017-12-08 京东方科技集团股份有限公司 Mask plate clip and mask plate
FR3114437B1 (en) * 2020-09-21 2023-03-31 Commissariat Energie Atomique Wafer holding device, wafer processing assembly and related wafer processing method
CN114023676B (en) * 2021-10-13 2022-09-16 广东万维半导体技术有限公司 Movable wafer carrying disc bearing device
WO2024081316A1 (en) * 2022-10-11 2024-04-18 Entegris, Inc. Unified latch for wafer cassettes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864755A (en) * 1973-08-20 1975-02-04 Memorex Corp Thermoformed cartridge for a magnetic record disc
JPH01146375U (en) * 1988-03-31 1989-10-09
US5819927A (en) * 1997-02-24 1998-10-13 Yeh; Sheng-Fu CD container storage device
JPH10310187A (en) * 1997-05-08 1998-11-24 Tdk Corp Cartridge housing case

Also Published As

Publication number Publication date
WO2001001828A1 (en) 2001-01-11

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase