JP2009513020A - 前駆体層を光起電性吸収体に変換するための方法と装置 - Google Patents
前駆体層を光起電性吸収体に変換するための方法と装置 Download PDFInfo
- Publication number
- JP2009513020A JP2009513020A JP2008536813A JP2008536813A JP2009513020A JP 2009513020 A JP2009513020 A JP 2009513020A JP 2008536813 A JP2008536813 A JP 2008536813A JP 2008536813 A JP2008536813 A JP 2008536813A JP 2009513020 A JP2009513020 A JP 2009513020A
- Authority
- JP
- Japan
- Prior art keywords
- gap
- gas
- reactor
- chambers
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 82
- 239000002243 precursor Substances 0.000 title claims description 102
- 239000006096 absorbing agent Substances 0.000 title description 14
- 239000000758 substrate Substances 0.000 claims abstract description 110
- 150000001875 compounds Chemical class 0.000 claims abstract description 39
- 238000000137 annealing Methods 0.000 claims abstract description 29
- 239000007789 gas Substances 0.000 claims description 109
- 238000012545 processing Methods 0.000 claims description 82
- 239000000463 material Substances 0.000 claims description 80
- 229910052711 selenium Inorganic materials 0.000 claims description 42
- 229910052717 sulfur Inorganic materials 0.000 claims description 39
- 230000008569 process Effects 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims description 13
- 239000011261 inert gas Substances 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims 4
- 239000010409 thin film Substances 0.000 abstract description 23
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 154
- 239000011669 selenium Substances 0.000 description 97
- 239000010949 copper Substances 0.000 description 70
- 229910052733 gallium Inorganic materials 0.000 description 62
- 229910052738 indium Inorganic materials 0.000 description 60
- 238000006243 chemical reaction Methods 0.000 description 55
- 229910052802 copper Inorganic materials 0.000 description 24
- 229910052751 metal Inorganic materials 0.000 description 22
- 239000002184 metal Substances 0.000 description 22
- 239000000203 mixture Substances 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 239000010408 film Substances 0.000 description 13
- 238000013461 design Methods 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 8
- 239000000976 ink Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000013459 approach Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 229910052714 tellurium Inorganic materials 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002105 nanoparticle Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 150000004678 hydrides Chemical class 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 239000003870 refractory metal Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010549 co-Evaporation Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000006166 lysate Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 150000003346 selenoethers Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005987 sulfurization reaction Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000807 Ga alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000012494 Quartz wool Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- AKUCEXGLFUSJCD-UHFFFAOYSA-N indium(3+);selenium(2-) Chemical compound [Se-2].[Se-2].[Se-2].[In+3].[In+3] AKUCEXGLFUSJCD-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052699 polonium Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- IRPLSAGFWHCJIQ-UHFFFAOYSA-N selanylidenecopper Chemical compound [Se]=[Cu] IRPLSAGFWHCJIQ-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- GKCNVZWZCYIBPR-UHFFFAOYSA-N sulfanylideneindium Chemical compound [In]=S GKCNVZWZCYIBPR-UHFFFAOYSA-N 0.000 description 1
- 238000005486 sulfidation Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
- H01L31/03928—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (40)
- 予め決められた温度プロファイルに従って基板を処理するインラインリアクタであって、
基板入口と、
基板出口と、
これら入口と出口との間の一連の複数のチャンバと、
メカニズムと、
少なくとも1つのガス入口とを具備し、
前記チャンバの各々は、
上側本体と、
下側本体と、
これら上側本体と下側本体との間に形成されているギャップと、
温度制御装置とを有し、
前記ギャップは、所定の幅と、高さと、長さとを有し、チャンバの各々において、最小高さに対する最小幅の比率が、少なくとも15であり、また、前記一連のチャンバの各々のギャップは、これら一連のチャンバの他のチャンバのギャップと一直線上に配置され、
前記温度制御装置は、前記チャンバの少なくともいくつかの前記ギャップ内の温度が異なるように、予め決められた温度プロファイルに基づいてこのギャップ内の温度を調節し、
前記メカニズムは、前記一連のチャンバのそれぞれのギャップを通るように、前記基板入口から前記基板出口へ、この基板を移動させ、
前記少なくとも1つのガス入口は、前記チャンバの少なくとも1つの前記ギャップ中にガスを吐出するように構成されている、リアクタ。 - 隣接したチャンバ相互は、バッファ領域によって分離されている請求項1のリアクタ。
- 前記チャンバの少なくとも1つの前記ギャップの高さは、このギャップの幅方向で変化している請求項2のリアクタ。
- 前記チャンバの少なくとも1つの前記ギャップの高さは、このギャップの長さ方向で変化している請求項3のリアクタ。
- 前記チャンバの少なくとも1つの前記ギャップの高さは、このギャップの長さ方向で変化している請求項2のリアクタ。
- 前記チャンバの少なくともいくつかの前記ギャップの高さが異なる請求項1のリアクタ。
- 各々のチャンバの前記ギャップの高さは、実質的に同じである請求項1のリアクタ。
- 前記温度制御装置は、加熱部材と冷却部材とを制御する請求項1のリアクタ。
- 前記メカニズムは、供給スプール並びに受けスプールを有し、これらスプールは、それぞれ可撓性の薄片基板を供給並びに受けるように使用される請求項1のリアクタ。
- 前記一連の複数のチャンバと、前記メカニズムとを収容する二次囲いをさらに具備する請求項2のリアクタ。
- 前記ギャップに、SeとSとの少なくとも一方を供給するように、前記ガス入口に接続され、Se含有ガスとS含有ガスとの少なくとも一方をさらに具備する請求項1のリアクタ。
- 前記ガス入口を有する少なくとも1つのチャンバの、前記ギャップの高さは、ガス入口を有さない隣接したチャンバよりも高い請求項1のリアクタ。
- 前記一連のチャンバの各々は、
ギャップ入口と、
ギャップ出口と、
ギャップ入口シールと、
ギャップ出口シールと、
開いた位置のとき、前記基板は、前記第1のメカニズムによって移動され、閉じた位置のとき、前記ギャップは、前記ギャップ入口シールと前記ギャップ出口シールとによってシールされるように、開いた位置と閉じた位置との間に、前記上側本体と前記下側本体とを相対的に移動させる第2のメカニズムとを有する請求項1のリアクタ。 - 前記チャンバが前記閉じた位置のとき、少なくとも1つのガス出口が、前記チャンバの1つに連結され、このガス出口が、このチャンバの前記ギャップからガスを取り除くように構成されている請求項13のリアクタ。
- 隣接したチャンバ相互は、バッファ領域によって分離されている請求項13のリアクタ。
- 前記温度制御装置は、加熱部材と冷却部材とを制御する請求項13のリアクタ。
- 前記メカニズムは、供給スプール並びに受けスプールを有し、これらスプールは、それぞれ可撓性の薄片基板を供給並びに受けるように使用される請求項13のリアクタ。
- 前記一連の複数のチャンバと、前記メカニズムとを収容する二次囲いをさらに具備する請求項13のリアクタ。
- 前記メカニズムは、供給スプール並びに受けスプールを有し、これらスプールは、それぞれ可撓性の薄片基板を供給並びに受けるように使用される請求項18のリアクタ。
- 前記ギャップに、SeとSとの少なくとも一方を供給するように、前記ガス入口に接続され、Se含有ガスとS含有ガスの少なくとも一方をさらに具備する請求項13のリアクタ。
- 可撓性のロールの表面上にIBIIIAVIA族化合物層を形成する方法であって、
前記可撓性のロールの表面上に、少なくとも1種のIB族材料と、少なくとも1種のIIIA族材料とを含む前駆体層を堆積させることと、
この前駆体層の露出上面に、少なくとも1種のVIA族材料を与えることと、
この与える工程の後または間に、一連の複数の処理チャンバを使用して前記可撓性のロールをアニールすることとを含み、
このアニールの工程は、前記堆積された前駆体層を有する可撓性のロールを、入口から、前記一連の処理チャンバを通って、出口へと送ることを含み、
これら一連の処理チャンバの各々は、予め決められた温度に設定されたギャップを有し、この結果、このギャップ内の前記可撓性のロールの所定の部分に、予め決められた温度を適用する方法。 - 前記ギャップを通して前記可撓性のロールを送る前に、雰囲気をクリーンにするように、前記ギャップの各々に不活性ガスを与える工程をさらに含む請求項21の方法。
- 前記与える工程は、前記ギャップ中に少なくとも1種のVIA族材料を含む処理ガスを吐出することを含む請求項21の方法。
- 前記与える工程は、前記アニールの工程の前に、前記前駆体層の前記露出上面上に、少なくとも1種のVIA族材料の層を堆積させることを含む請求項21の方法。
- 前記与える工程は、前記アニールの工程の間に、前記ギャップ中に少なくとも1種のVIA族材料を含む処理ガスを吐出することをさらに含む請求項24の方法。
- 前記与える工程は、前記アニールの工程の前に、前記前駆体層の前記露出上面にSeの層を堆積させることと、前記アニールの工程の間に、前記ギャップ中にSを含む処理ガスを吐出することとを含む請求項25の方法。
- 前記の処理チャンバの各々は、上側本体と、下側本体と、ギャップ入口シールと、ギャップ出口シールとを有し、
前記アニールの工程は、
開いた位置のとき、前記可撓性のロールが、移動され、閉じた位置のとき、前記ギャップは、前記ギャップ入口シールと前記ギャップ出口シールとによってシールされ、前記可撓性のロールが留まるように、開いた位置と閉じた位置との間に、前記処理チャンバの各々の前記上側本体と前記下側本体とを相対的に移動させる工程をさらに含む請求項26の方法。 - 前記アニールの工程は、このアニールの工程の間に、前記処理チャンバの少なくとも1つの前記ギャップを通るように、不活性ガスを流入させる工程を含む請求項24の方法。
- 前記アニールの工程は、このアニールの工程の間に、前記処理チャンバの各々の前記ギャップを通るように、不活性ガスを流入させる工程を含む請求項28の方法。
- 少なくとも1種のVIA族材料の前記層を堆積させることは、前記可撓性のロールが移動しているとき、この可撓性のロールの前記露出上面の所定の部分が前記入口に送られる前に、前記前駆体層の露出上面の前記所定の部分上で行われる請求項24の方法。
- 前記アニールの工程は、このアニールの工程の間に、前記処理チャンバの少なくとも1つの前記ギャップを通るように、不活性ガスを流入させる工程を含む請求項30の方法。
- 前記アニールの工程は、このアニールの工程の間に、前記処理チャンバの各々の前記ギャップを通るように、不活性ガスを流入させる工程を含む請求項31の方法。
- 前記アニールの工程は、このアニールの工程の間に、前記ギャップ中に少なくとも1種のVIA族材料を含む処理ガスを吐出することをさらに含む請求項30の方法。
- 各々の処理チャンバは、上側本体と、下側本体と、ギャップ入口シールと、ギャップ出口シールとを有し、
前記アニールの工程は、
開いた位置のとき、前記可撓性のロールが、移動され、閉じた位置のとき、前記ギャップは、前記ギャップ入口シールと前記ギャップ出口シールとによってシールされ、前記可撓性のロールが留まるように、開いた位置と閉じた位置との間に、各々の処理チャンバの前記上側本体と前記下側本体とを相対的に移動させる工程をさらに含む、請求項21の方法。 - 前記アニールの工程の間、前記少なくとも1つの処理チャンバが閉じた位置にあるとき、前記前駆体層の前記露出上面は、この処理チャンバの少なくとも1つの前記上側本体に近接する請求項34の方法。
- 前記前駆体層の前記露出上面は、前記少なくとも1つの処理チャンバの前記上側本体の多孔性セクションに近接する請求項35の方法。
- 前記多孔性セクションを通して、前記前駆体層の前記露出上面へ、ガスと蒸気との一方を流入させる工程をさらに含む請求項36の方法。
- 前記近接は、およそ1ミリメートル以内である請求項36の方法。
- 前記前駆体層の前記露出上面は、前記少なくとも1つの処理チャンバの前記上側本体の多孔性セクションと接触する請求項35の方法。
- 前記前駆体層の前記露出上面に、前記多孔性セクションを通して、ガスと蒸気との少なくとも一方を流入させる工程をさらに含む請求項39の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US72863805P | 2005-10-19 | 2005-10-19 | |
US78237306P | 2006-03-14 | 2006-03-14 | |
US11/549,590 US20070111367A1 (en) | 2005-10-19 | 2006-10-13 | Method and apparatus for converting precursor layers into photovoltaic absorbers |
PCT/US2006/040968 WO2007047888A2 (en) | 2005-10-19 | 2006-10-17 | Method and apparatus for converting precursor layers into photovoltaic absorbers |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009513020A true JP2009513020A (ja) | 2009-03-26 |
Family
ID=37963296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008536813A Pending JP2009513020A (ja) | 2005-10-19 | 2006-10-17 | 前駆体層を光起電性吸収体に変換するための方法と装置 |
Country Status (7)
Country | Link |
---|---|
US (2) | US20070111367A1 (ja) |
EP (1) | EP1938360B1 (ja) |
JP (1) | JP2009513020A (ja) |
KR (1) | KR20080072663A (ja) |
CN (1) | CN101578386B (ja) |
TW (1) | TWI413269B (ja) |
WO (1) | WO2007047888A2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012046746A1 (ja) * | 2010-10-05 | 2012-04-12 | 株式会社神戸製鋼所 | 化合物半導体薄膜太陽電池用光吸収層の製造方法、およびIn-Cu合金スパッタリングターゲット |
JP2014513413A (ja) * | 2011-03-10 | 2014-05-29 | サン−ゴバン グラス フランス | 五元化合物半導体CZTSSeおよび薄膜太陽電池の製造方法 |
JP2016524319A (ja) * | 2013-05-03 | 2016-08-12 | エヌウイクスセーイエス | I−iii金属前駆体の熱処理およびカルコゲン化によるi−iii−vi2半導体層の形成 |
Families Citing this family (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7605328B2 (en) * | 2004-02-19 | 2009-10-20 | Nanosolar, Inc. | Photovoltaic thin-film cell produced from metallic blend using high-temperature printing |
US7700464B2 (en) * | 2004-02-19 | 2010-04-20 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from nanoflake particles |
US8623448B2 (en) | 2004-02-19 | 2014-01-07 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles |
US20070163639A1 (en) * | 2004-02-19 | 2007-07-19 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from microflake particles |
US20070163642A1 (en) * | 2004-02-19 | 2007-07-19 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic microflake articles |
US8372734B2 (en) * | 2004-02-19 | 2013-02-12 | Nanosolar, Inc | High-throughput printing of semiconductor precursor layer from chalcogenide nanoflake particles |
US7663057B2 (en) * | 2004-02-19 | 2010-02-16 | Nanosolar, Inc. | Solution-based fabrication of photovoltaic cell |
US8329501B1 (en) | 2004-02-19 | 2012-12-11 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles |
US8309163B2 (en) | 2004-02-19 | 2012-11-13 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material |
US7115304B2 (en) * | 2004-02-19 | 2006-10-03 | Nanosolar, Inc. | High throughput surface treatment on coiled flexible substrates |
US20070163641A1 (en) * | 2004-02-19 | 2007-07-19 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic nanoflake particles |
US20070169809A1 (en) * | 2004-02-19 | 2007-07-26 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of low-melting chalcogenides |
US8846141B1 (en) | 2004-02-19 | 2014-09-30 | Aeris Capital Sustainable Ip Ltd. | High-throughput printing of semiconductor precursor layer from microflake particles |
US7507321B2 (en) * | 2006-01-06 | 2009-03-24 | Solopower, Inc. | Efficient gallium thin film electroplating methods and chemistries |
DE102006028429B3 (de) * | 2006-06-21 | 2007-06-28 | Fachhochschule Kiel | Verfahren zur Herstellung einer Absorberbeschichtung auf Sol-Gel-Basis für Solarthermie |
US20080023059A1 (en) * | 2006-07-25 | 2008-01-31 | Basol Bulent M | Tandem solar cell structures and methods of manufacturing same |
CN101506991A (zh) * | 2006-07-26 | 2009-08-12 | 索罗能源公司 | 用于掺杂太阳能电池制造中使用的化合物层的工艺 |
US20100139557A1 (en) * | 2006-10-13 | 2010-06-10 | Solopower, Inc. | Reactor to form solar cell absorbers in roll-to-roll fashion |
US8323735B2 (en) * | 2006-10-13 | 2012-12-04 | Solopower, Inc. | Method and apparatus to form solar cell absorber layers with planar surface |
US9103033B2 (en) * | 2006-10-13 | 2015-08-11 | Solopower Systems, Inc. | Reel-to-reel reaction of precursor film to form solar cell absorber |
US7854963B2 (en) * | 2006-10-13 | 2010-12-21 | Solopower, Inc. | Method and apparatus for controlling composition profile of copper indium gallium chalcogenide layers |
US20090183675A1 (en) * | 2006-10-13 | 2009-07-23 | Mustafa Pinarbasi | Reactor to form solar cell absorbers |
US20080175993A1 (en) * | 2006-10-13 | 2008-07-24 | Jalal Ashjaee | Reel-to-reel reaction of a precursor film to form solar cell absorber |
KR20090098962A (ko) * | 2006-10-19 | 2009-09-18 | 솔로파워, 인코포레이티드 | 광전지 필름 제조를 위한 롤투롤 전기도금 |
US8197703B2 (en) * | 2007-04-25 | 2012-06-12 | Solopower, Inc. | Method and apparatus for affecting surface composition of CIGS absorbers formed by two-stage process |
TWI555864B (zh) * | 2007-09-11 | 2016-11-01 | 中心熱光電股份公司 | 提供硫屬元素之方法及裝置 |
US8409418B2 (en) * | 2009-02-06 | 2013-04-02 | Solopower, Inc. | Enhanced plating chemistries and methods for preparation of group IBIIIAVIA thin film solar cell absorbers |
US8425753B2 (en) * | 2008-05-19 | 2013-04-23 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
US8163090B2 (en) | 2007-12-10 | 2012-04-24 | Solopower, Inc. | Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation |
US8323408B2 (en) * | 2007-12-10 | 2012-12-04 | Solopower, Inc. | Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
US9646828B2 (en) | 2008-04-02 | 2017-05-09 | Sunlight Photonics Inc. | Reacted particle deposition (RPD) method for forming a compound semi-conductor thin-film |
US7842534B2 (en) * | 2008-04-02 | 2010-11-30 | Sunlight Photonics Inc. | Method for forming a compound semi-conductor thin-film |
US8207012B2 (en) * | 2008-04-28 | 2012-06-26 | Solopower, Inc. | Method and apparatus for achieving low resistance contact to a metal based thin film solar cell |
DE102008022784A1 (de) * | 2008-05-08 | 2009-11-12 | Avancis Gmbh & Co. Kg | Vorrichtung und Verfahren zum Tempern von Gegenständen in einer Behandlungskammer |
TW201034228A (en) * | 2008-12-05 | 2010-09-16 | Solopower Inc | Method and apparatus for forming contact layers for continuous workpieces |
EP2379458A4 (en) * | 2009-01-21 | 2015-02-11 | Purdue Research Foundation | SELENIZATION OF A LAYER OF PRECURSORS CONTAINING NANOPARTICLES OF HIDES2 |
TW201034207A (en) * | 2009-01-29 | 2010-09-16 | First Solar Inc | Photovoltaic device with improved crystal orientation |
US20130040420A1 (en) * | 2009-03-04 | 2013-02-14 | Nanosolar, Inc. | Methods and devices for processing a precursor layer in a group via environment |
DE102009011695A1 (de) * | 2009-03-09 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten |
DE102009012200A1 (de) * | 2009-03-11 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten mit Chalkogenquelle |
DE102009011496A1 (de) * | 2009-03-06 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten mit Chalkogenrückgewinnung |
TWI509107B (zh) * | 2009-03-06 | 2015-11-21 | Centrotherm Photovoltaics Ag | 利用氧族元素源將金屬先驅物薄膜熱轉變成半導體薄膜之方法及裝置 |
JP5260373B2 (ja) * | 2009-03-24 | 2013-08-14 | 本田技研工業株式会社 | 薄膜太陽電池の製造方法 |
MX2011011952A (es) * | 2009-05-12 | 2011-11-29 | First Solar Inc | Dispositivo fotovoltaico. |
WO2011019608A1 (en) * | 2009-08-10 | 2011-02-17 | First Solar, Inc | Photovoltaic device back contact |
DE102009053532B4 (de) | 2009-11-18 | 2017-01-05 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur Herstellung einer Verbindungshalbleiterschicht |
US20110132755A1 (en) * | 2009-12-04 | 2011-06-09 | Kim Woosam | In-line system for manufacturing solar cell |
US8153469B2 (en) * | 2009-12-07 | 2012-04-10 | Solopower, Inc. | Reaction methods to form group IBIIIAVIA thin film solar cell absorbers |
JP5480782B2 (ja) * | 2010-01-21 | 2014-04-23 | 富士フイルム株式会社 | 太陽電池および太陽電池の製造方法 |
CN102024870B (zh) * | 2010-04-19 | 2013-07-24 | 福建欧德生光电科技有限公司 | 半导体薄膜太阳能电池的制造系统和方法 |
CN102270683A (zh) * | 2010-06-03 | 2011-12-07 | 上海空间电源研究所 | 柔性薄膜太阳电池集成组件及其制备方法 |
CN101916794A (zh) * | 2010-06-25 | 2010-12-15 | 清华大学 | 一种连续制备铜铟镓硒硫太阳能电池吸收层的设备 |
TWI508179B (zh) * | 2010-07-23 | 2015-11-11 | Sunshine Pv Corp | 薄膜太陽能電池的退火裝置 |
US20120100663A1 (en) * | 2010-10-26 | 2012-04-26 | International Business Machines Corporation | Fabrication of CuZnSn(S,Se) Thin Film Solar Cell with Valve Controlled S and Se |
US20120052617A1 (en) * | 2010-12-20 | 2012-03-01 | General Electric Company | Vapor deposition apparatus and process for continuous deposition of a doped thin film layer on a substrate |
US20120028393A1 (en) * | 2010-12-20 | 2012-02-02 | Primestar Solar, Inc. | Vapor deposition apparatus and process for continuous deposition of a doped thin film layer on a substrate |
US20120234314A1 (en) * | 2011-03-16 | 2012-09-20 | Solopower, Inc. | Roll-to-roll reactor for processing flexible continuous workpiece |
FR2975223B1 (fr) * | 2011-05-10 | 2016-12-23 | Electricite De France | Traitement thermique par injection d'un gaz caloporteur. |
US8726829B2 (en) * | 2011-06-07 | 2014-05-20 | Jiaxiong Wang | Chemical bath deposition apparatus for fabrication of semiconductor films through roll-to-roll processes |
KR101374690B1 (ko) | 2011-11-16 | 2014-03-31 | 한국생산기술연구원 | Cigs 태양전지용 철-니켈 합금 금속 포일 기판재 |
US20130164918A1 (en) * | 2011-12-21 | 2013-06-27 | Intermolecular, Inc. | Absorbers For High-Efficiency Thin-Film PV |
US20130189635A1 (en) * | 2012-01-25 | 2013-07-25 | First Solar, Inc. | Method and apparatus providing separate modules for processing a substrate |
TWI512829B (zh) * | 2012-05-24 | 2015-12-11 | Sunshine Pv Corp | 薄膜太陽能電池的退火方法 |
US9112095B2 (en) * | 2012-12-14 | 2015-08-18 | Intermolecular, Inc. | CIGS absorber formed by co-sputtered indium |
CN103021823B (zh) * | 2012-12-15 | 2016-03-16 | 山东孚日光伏科技有限公司 | 一种非真空的步进通过式快速硒化装置及利用其实现的硒化方法 |
US9105798B2 (en) * | 2013-05-14 | 2015-08-11 | Sun Harmonics, Ltd | Preparation of CIGS absorber layers using coated semiconductor nanoparticle and nanowire networks |
US9406829B2 (en) | 2013-06-28 | 2016-08-02 | First Solar, Inc. | Method of manufacturing a photovoltaic device |
US20150027372A1 (en) * | 2013-07-26 | 2015-01-29 | First Solar, Inc. | Vapor Deposition Apparatus for Continuous Deposition of Multiple Thin Film Layers on a Substrate |
US9293632B2 (en) * | 2013-09-18 | 2016-03-22 | Globalfoundries Inc. | Pressure transfer process for thin film solar cell fabrication |
CN106460143A (zh) * | 2014-06-17 | 2017-02-22 | 纽升股份有限公司 | 卷对卷金属衬底的硒化或硫化方法 |
TWI757299B (zh) * | 2016-06-02 | 2022-03-11 | 美商應用材料股份有限公司 | 用於沉積材料在連續基板上的方法及設備 |
US10590535B2 (en) * | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
JP7187147B2 (ja) * | 2017-12-12 | 2022-12-12 | 東京エレクトロン株式会社 | 搬送装置のティーチング方法及び基板処理システム |
JP6976166B2 (ja) * | 2017-12-28 | 2021-12-08 | 東京エレクトロン株式会社 | 基板処理方法および基板処理装置 |
US20190301022A1 (en) * | 2018-04-03 | 2019-10-03 | Global Solar Energy, Inc. | Systems and methods for depositing a thin film onto a flexible substrate |
CN110534611A (zh) * | 2018-05-25 | 2019-12-03 | 米亚索乐装备集成(福建)有限公司 | 一种用于片状电池的加热设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145060A (ja) * | 1997-11-06 | 1999-05-28 | Fuji Electric Co Ltd | 薄膜製造装置および光電変換素子 |
JP2000503808A (ja) * | 1996-08-27 | 2000-03-28 | イーエステー―インスティトウト・フュール・ゾラールテヒノロジーン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | Cis帯状太陽電池を製造する方法と装置 |
DE10006778A1 (de) * | 2000-02-09 | 2001-08-23 | Cis Solartechnik Gmbh | Verfahren zur Wärmebehandlung von flexiblen, bandförmigen CIS-Solarzellen und Wärmebehandlungsofen |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US537869A (en) * | 1895-04-23 | Folding bed | ||
US3032890A (en) * | 1958-03-28 | 1962-05-08 | Continental Can Co | Sealing structures for treating chambers |
US4048953A (en) * | 1974-06-19 | 1977-09-20 | Pfizer Inc. | Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material |
US4492181A (en) * | 1982-03-19 | 1985-01-08 | Sovonics Solar Systems | Apparatus for continuously producing tandem amorphous photovoltaic cells |
US4798660A (en) * | 1985-07-16 | 1989-01-17 | Atlantic Richfield Company | Method for forming Cu In Se2 films |
DE4324320B4 (de) * | 1992-07-24 | 2006-08-31 | Fuji Electric Co., Ltd., Kawasaki | Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung |
EP0662247B1 (de) * | 1992-09-22 | 1999-03-10 | Siemens Aktiengesellschaft | Schnelles verfahren zur erzeugung eines chalkopyrit-halbleiters auf einem substrat |
JP3571785B2 (ja) * | 1993-12-28 | 2004-09-29 | キヤノン株式会社 | 堆積膜形成方法及び堆積膜形成装置 |
US5772431A (en) * | 1995-05-22 | 1998-06-30 | Yazaki Corporation | Thin-film solar cell manufacturing apparatus and manufacturing method |
JP3249408B2 (ja) * | 1996-10-25 | 2002-01-21 | 昭和シェル石油株式会社 | 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置 |
US6284309B1 (en) * | 1997-12-19 | 2001-09-04 | Atotech Deutschland Gmbh | Method of producing copper surfaces for improved bonding, compositions used therein and articles made therefrom |
US6188044B1 (en) * | 1998-04-27 | 2001-02-13 | Cvc Products, Inc. | High-performance energy transfer system and method for thermal processing applications |
US20020189665A1 (en) * | 2000-04-10 | 2002-12-19 | Davis, Joseph & Negley | Preparation of CIGS-based solar cells using a buffered electrodeposition bath |
US6893544B2 (en) * | 2001-08-14 | 2005-05-17 | Samsung Corning Co., Ltd. | Apparatus and method for depositing thin films on a glass substrate |
FR2843129B1 (fr) * | 2002-08-01 | 2006-01-06 | Tecmachine | Installation pour le traitement sous vide notamment de substrats |
EP1556902A4 (en) * | 2002-09-30 | 2009-07-29 | Miasole | MANUFACTURING DEVICE AND METHOD FOR PRODUCING THIN FILM SOLAR CELLS IN A LARGE SCALE |
DE10342398B4 (de) * | 2003-09-13 | 2008-05-29 | Schott Ag | Schutzschicht für einen Körper sowie Verfahren zur Herstellung und Verwendung von Schutzschichten |
DE10352144B8 (de) * | 2003-11-04 | 2008-11-13 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsanlage zum Beschichten von längserstreckten Substraten |
JP2006211812A (ja) * | 2005-01-27 | 2006-08-10 | Canon Inc | 位置決め装置、露光装置、並びにデバイス製造方法 |
US7442413B2 (en) * | 2005-11-18 | 2008-10-28 | Daystar Technologies, Inc. | Methods and apparatus for treating a work piece with a vaporous element |
US7507321B2 (en) * | 2006-01-06 | 2009-03-24 | Solopower, Inc. | Efficient gallium thin film electroplating methods and chemistries |
US20080175993A1 (en) * | 2006-10-13 | 2008-07-24 | Jalal Ashjaee | Reel-to-reel reaction of a precursor film to form solar cell absorber |
-
2006
- 2006-10-13 US US11/549,590 patent/US20070111367A1/en not_active Abandoned
- 2006-10-17 KR KR1020087011690A patent/KR20080072663A/ko not_active Application Discontinuation
- 2006-10-17 EP EP06826316A patent/EP1938360B1/en not_active Not-in-force
- 2006-10-17 CN CN2006800441243A patent/CN101578386B/zh not_active Expired - Fee Related
- 2006-10-17 WO PCT/US2006/040968 patent/WO2007047888A2/en active Application Filing
- 2006-10-17 JP JP2008536813A patent/JP2009513020A/ja active Pending
- 2006-10-18 TW TW095138400A patent/TWI413269B/zh not_active IP Right Cessation
-
2010
- 2010-07-26 US US12/843,674 patent/US20110011340A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000503808A (ja) * | 1996-08-27 | 2000-03-28 | イーエステー―インスティトウト・フュール・ゾラールテヒノロジーン・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | Cis帯状太陽電池を製造する方法と装置 |
JPH11145060A (ja) * | 1997-11-06 | 1999-05-28 | Fuji Electric Co Ltd | 薄膜製造装置および光電変換素子 |
DE10006778A1 (de) * | 2000-02-09 | 2001-08-23 | Cis Solartechnik Gmbh | Verfahren zur Wärmebehandlung von flexiblen, bandförmigen CIS-Solarzellen und Wärmebehandlungsofen |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012046746A1 (ja) * | 2010-10-05 | 2012-04-12 | 株式会社神戸製鋼所 | 化合物半導体薄膜太陽電池用光吸収層の製造方法、およびIn-Cu合金スパッタリングターゲット |
JP2014513413A (ja) * | 2011-03-10 | 2014-05-29 | サン−ゴバン グラス フランス | 五元化合物半導体CZTSSeおよび薄膜太陽電池の製造方法 |
JP2016524319A (ja) * | 2013-05-03 | 2016-08-12 | エヌウイクスセーイエス | I−iii金属前駆体の熱処理およびカルコゲン化によるi−iii−vi2半導体層の形成 |
Also Published As
Publication number | Publication date |
---|---|
TWI413269B (zh) | 2013-10-21 |
US20110011340A1 (en) | 2011-01-20 |
CN101578386B (zh) | 2012-08-08 |
WO2007047888A2 (en) | 2007-04-26 |
WO2007047888A3 (en) | 2009-05-14 |
EP1938360A4 (en) | 2010-07-07 |
KR20080072663A (ko) | 2008-08-06 |
CN101578386A (zh) | 2009-11-11 |
EP1938360B1 (en) | 2013-03-06 |
US20070111367A1 (en) | 2007-05-17 |
EP1938360A2 (en) | 2008-07-02 |
TW200733412A (en) | 2007-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2009513020A (ja) | 前駆体層を光起電性吸収体に変換するための方法と装置 | |
US9103033B2 (en) | Reel-to-reel reaction of precursor film to form solar cell absorber | |
US7585547B2 (en) | Method and apparatus to form thin layers of materials on a base | |
US20080175993A1 (en) | Reel-to-reel reaction of a precursor film to form solar cell absorber | |
US8323408B2 (en) | Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation | |
US8163090B2 (en) | Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation | |
US8192594B2 (en) | Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication | |
CN101578707B (zh) | 用于形成太阳能电池吸收体的前驱物膜的卷对卷反应 | |
US20090183675A1 (en) | Reactor to form solar cell absorbers | |
US20120264075A1 (en) | Assembled Reactor for Fabrications of Thin Film Solar Cell Absorbers through Roll-to-Roll Processes | |
US20120258567A1 (en) | Reaction methods to form group ibiiiavia thin film solar cell absorbers | |
US20110136293A1 (en) | Reaction methods to form group ibiiiavia thin film solar cell absorbers | |
TW201123470A (en) | Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates | |
US20100139557A1 (en) | Reactor to form solar cell absorbers in roll-to-roll fashion | |
WO2010078088A1 (en) | Reactor to form solar cell absorbers in roll-to-roll fashion | |
RU2212080C2 (ru) | СПОСОБ ПОЛУЧЕНИЯ ХАЛЬКОПИРИТНЫХ CuInSe2, Cu (In, Ga)Se2, CuGaSe2 ТОНКИХ ПЛЕНОК | |
WO2011135420A1 (en) | Process for the production of a compound semiconductor layer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20091002 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111125 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120612 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120911 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120919 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121012 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121019 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121112 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121119 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121212 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130820 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140204 |