JP2009509350A - 電極を備えた透明基板 - Google Patents
電極を備えた透明基板 Download PDFInfo
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- JP2009509350A JP2009509350A JP2008531754A JP2008531754A JP2009509350A JP 2009509350 A JP2009509350 A JP 2009509350A JP 2008531754 A JP2008531754 A JP 2008531754A JP 2008531754 A JP2008531754 A JP 2008531754A JP 2009509350 A JP2009509350 A JP 2009509350A
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- 239000000758 substrate Substances 0.000 title claims abstract description 53
- 239000011521 glass Substances 0.000 claims abstract description 11
- 229910052809 inorganic oxide Inorganic materials 0.000 claims abstract description 11
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 35
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 34
- 238000000576 coating method Methods 0.000 claims description 33
- 239000011248 coating agent Substances 0.000 claims description 29
- 239000011787 zinc oxide Substances 0.000 claims description 16
- 230000001699 photocatalysis Effects 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 8
- 229910001887 tin oxide Inorganic materials 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- OANVFVBYPNXRLD-UHFFFAOYSA-M propyromazine bromide Chemical compound [Br-].C12=CC=CC=C2SC2=CC=CC=C2N1C(=O)C(C)[N+]1(C)CCCC1 OANVFVBYPNXRLD-UHFFFAOYSA-M 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 230000003667 anti-reflective effect Effects 0.000 claims description 4
- 230000031700 light absorption Effects 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- 150000001340 alkali metals Chemical class 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 230000002209 hydrophobic effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 59
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 25
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 18
- 239000000463 material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 150000003606 tin compounds Chemical class 0.000 description 7
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- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
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- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910020328 SiSn Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- NPAIMXWXWPJRES-UHFFFAOYSA-N butyltin(3+) Chemical compound CCCC[Sn+3] NPAIMXWXWPJRES-UHFFFAOYSA-N 0.000 description 1
- 210000003850 cellular structure Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 125000004773 chlorofluoromethyl group Chemical group [H]C(F)(Cl)* 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
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- 230000012447 hatching Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002957 persistent organic pollutant Substances 0.000 description 1
- 238000013032 photocatalytic reaction Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- 230000002265 prevention Effects 0.000 description 1
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- 238000007348 radical reaction Methods 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HWEYZGSCHQNNEH-UHFFFAOYSA-N silicon tantalum Chemical compound [Si].[Ta] HWEYZGSCHQNNEH-UHFFFAOYSA-N 0.000 description 1
- UVGLBOPDEUYYCS-UHFFFAOYSA-N silicon zirconium Chemical compound [Si].[Zr] UVGLBOPDEUYYCS-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/245—Oxides by deposition from the vapour phase
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/2453—Coating containing SnO2
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
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- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
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- H—ELECTRICITY
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- H01L31/02—Details
- H01L31/0224—Electrodes
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- H01L31/022483—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- C03C2217/241—Doped oxides with halides
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- C03C2217/44—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the composition of the continuous phase
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Abstract
Description
-電極は、5%〜25%、好ましくは10%〜20%のヘイズを有している。
-電極は、グラフH(TL)で表されるヘイズ(H)と光吸透過率(TL)の積であるファクターを有し、このファクターは、下記の座標対:(15,82)、(10,84)および(6,85)で定義される線の上方に位置している。
-光吸収率に電極の電気表面抵抗を乗じて得られる積は、0.6Ω/□未満である。
-電極は、抵抗/平方(R/□)が15Ω/□もしくはそれ未満であり、特に12Ω/□もしくはそれ未満であり、好ましくは10Ω/□に等しくまたは12Ω/□もしくはそれ未満である。
-ドーピングされていない無機酸化物に基づいた第一層の厚さは、150 nm〜900 nmである。
-第一層は酸化スズ(SnO2)に基づいており、そして第二層はフッ素をドーピングされた酸化スズ(SnO2:F)に基づいている。
-電極は、窒化ケイ素もしくはオキシ窒化ケイ素、窒化アルミニウムもしくはオキシ窒化アルミニウムまたは酸化ケイ素もしくはオキシ窒化ケイ素タイプのもので、厚さが20 nm〜150 nmであるアルカリ金属バリヤー特性を有する副層の上に堆積されている。
-バリヤー副層は、1.9〜2.3の高屈折率の層と1.4〜1.7の低屈折率の層とを交互に、特にSi3N4/SiO2またはSi3N4/SiO2/Si3N4の順序で含んでいる。
-第一層は、酸化亜鉛(ZnO)に基づいており、そして第二層はアルミニウムをドーピングされた酸化亜鉛(ZnO:Al)に基づいている。
-ドーピングされているおよび/またはドーピングされていない酸化スズは、高温、特に600℃を超える温度で堆積されている。
-SiベースまたはCdTeベースの光起電力電池の電極としての上記基板の使用。
-基板は、「Albarino」または「Diamant」タイプの超透明ガラスである。
-基板の面の一方には、反射防止性または疎水性または光触媒性の機能を呈する多層が被覆されている。
-n2および/または、n4は1.35〜1.65である。
-e1は、5 nm〜50 nm、特に10 nm〜30 nmまたは15 nm〜25 nmである。
-e2は、5 nm〜50 nm、特に35 nmまたは30 nm未満もしくはそれに等しく、特に10 nm〜35 nmである。
-e3は、40 nm〜180 nm、好ましくは45 nm〜150 nmである。
-e4は、45 nm〜110 nm、好ましくは70 nm〜105nmである。
Claims (15)
- 電極が組み合わさった透明電極であって、その電極が、ドーピングされていない無機酸化物で構成された第一の透明な導電性層を含み、その第一層が、上記と同じ無機酸化物であるがドーピングされている無機酸化物で構成されている第二の透明な導電性層で被覆されている、特に太陽電池に好適な、特にガラス製の透明基板において、
前記電極が、グラフH(TL)で表されるヘイズ(H)と光透過率(TL)の積であるファクターを有し、かつ該ファクターが、下記の座標対:(15,82)、(10,84)および(6,85)で規定される線の上方に位置することを特徴とする透明基板。 - 前記電極が、5%〜25%のヘイズ、好ましくは10%〜20%のヘイズを有することを特徴とする請求項1に記載の基板。
- 電極の光吸収率に電気表面抵抗を乗じた積が0.6Ω/□未満であることを特徴とする請求項1に記載の基板。
- ドーピングされていない無機酸化物に基づいた第一層の厚さが150 nm〜900 nmであることを特徴とする請求項1に記載の基板。
- 前記第一層が酸化スズ(SnO2)に基づいており、かつ前記第二層がフッ素をドーピングされた酸化スズ(SnO2:F)に基づいていることを特徴とする請求項1〜4のいずれか一項に記載の基板。
- 前記第一層が酸化亜鉛(ZnO)に基づいており、かつ前記第二層がアルミニウムをドーピングされた酸化亜鉛(ZnO2:Al)に基づいていることを特徴とする請求項1〜4のいずれか一項に記載の基板。
- 特にアルカリ金属に対するバリヤーとして働く少なくとも一つのバリヤー層を備えており、該バリヤー層が基板と電極の間に挿入されていることを特徴とする請求項1〜6のいずれか一項に記載の基板。
- 前記バリヤー層が、下記の化合物:窒化ケイ素もしくはオキシ窒化ケイ素、酸化ケイ素もしくはオキシ炭化ケイ素のうちの少なくとも一種から選択した誘電体に基づいていることを特徴とする請求項7に記載の基板。
- 前記バリヤー層が、異なる屈折率を有する少なくとも二つの誘電体層からなる、光学的機能を有する多層コーティングの一部を形成していることを特徴とする請求項7に記載の基板。
- ドーピングされているおよび/またはドーピングされていない前記酸化スズが、高温で、特に600℃を超える温度で、CVD法によって堆積されていることを特徴とする請求項1〜9のいずれか一項に記載の基板。
- 酸化亜鉛に基づいた少なくとも一つのオーバーレーヤーを備えており、該オーバーレーヤーが、フッ素をドーピングされた酸化スズ(SnO2:F)に基づいた第二層の上に堆積されていることを特徴とする請求項1〜5および7〜10のいずれか一項に記載の基板。
- 前記基板が、「Albarino」(登録商標)または「Diamant」(登録商標)タイプの超透明ガラスであることを特徴とする請求項1〜11のいずれか一項に記載の基板。
- 前記基板の面の1つに、反射防止性または疎水性または光触媒性のタイプの機能を呈する多層が被覆されていることを特徴とする請求項1〜12のいずれか一項に記載の基板。
- 請求項1〜13のいずれか一項に記載の基板の太陽電池の電極としての使用。
- 請求項1〜13のいずれか一項に記載の基板を含んでいることを特徴とする太陽電池。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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FR0552850A FR2891269B1 (fr) | 2005-09-23 | 2005-09-23 | Substrat transparent muni d'une electrode |
PCT/FR2006/050903 WO2007034110A1 (fr) | 2005-09-23 | 2006-09-19 | Substrat transparent muni d'une electrode |
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JP2009509350A true JP2009509350A (ja) | 2009-03-05 |
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US (1) | US8187714B2 (ja) |
EP (1) | EP1928799A1 (ja) |
JP (1) | JP2009509350A (ja) |
KR (1) | KR20080046671A (ja) |
CN (1) | CN101268025A (ja) |
BR (1) | BRPI0616268A2 (ja) |
FR (1) | FR2891269B1 (ja) |
WO (1) | WO2007034110A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012132048A (ja) * | 2010-12-20 | 2012-07-12 | Sharp Corp | 透明導電膜付き基体 |
JP2013513223A (ja) * | 2009-12-04 | 2013-04-18 | カンブリオス テクノロジーズ コーポレイション | 増加ヘイズを有するナノ構造系透明導電体およびそれを備えるデバイス |
JP2018509766A (ja) * | 2015-03-12 | 2018-04-05 | ビトロ、エセ.ア.ベ. デ セ.ウベ. | 光電子素子及びその製造方法 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8012317B2 (en) * | 2006-11-02 | 2011-09-06 | Guardian Industries Corp. | Front electrode including transparent conductive coating on patterned glass substrate for use in photovoltaic device and method of making same |
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DE102009026197B4 (de) | 2009-07-17 | 2013-05-02 | Saint-Gobain Sekurit Deutschland Gmbh & Co. Kg | Optisch transparente Glasscheibe und deren Verwendung |
EP2354107A1 (de) | 2010-02-10 | 2011-08-10 | Saint-Gobain Glass France | Verfahren zur Herstellung einer strukturierten TCO-Schutzschicht |
FR2956659B1 (fr) * | 2010-02-22 | 2014-10-10 | Saint Gobain | Substrat verrier revetu de couches a tenue mecanique amelioree |
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BE1020296A3 (fr) * | 2011-11-15 | 2013-07-02 | Agc Glass Europe | Feuille de verre a haute transmission energetique. |
KR101457794B1 (ko) * | 2013-03-20 | 2014-11-05 | 청주대학교 산학협력단 | 비정질 에스아이오씨 박막 위에 형성된 투명전극을 갖는 태양전지 |
US20140314396A1 (en) * | 2013-04-22 | 2014-10-23 | Chih-Ming Hsu | Electrothermal element |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09139515A (ja) * | 1995-11-15 | 1997-05-27 | Sharp Corp | 透明導電膜電極 |
JP2002217428A (ja) * | 2001-01-22 | 2002-08-02 | Sanyo Electric Co Ltd | 光電変換素子及びその製造方法 |
JP2002316837A (ja) * | 2001-04-12 | 2002-10-31 | Nippon Sheet Glass Co Ltd | ガラス板およびそれを用いた太陽電池 |
JP2003231968A (ja) * | 2001-12-03 | 2003-08-19 | Nippon Sheet Glass Co Ltd | 基板、基板の製造方法および基板を用いた光電変換装置 |
JP2004323321A (ja) * | 2003-04-25 | 2004-11-18 | Nippon Sheet Glass Co Ltd | 透明導電膜付き基板の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5078803A (en) * | 1989-09-22 | 1992-01-07 | Siemens Solar Industries L.P. | Solar cells incorporating transparent electrodes comprising hazy zinc oxide |
GB2252332A (en) * | 1991-01-31 | 1992-08-05 | Glaverbel | Glass coated with two tin oxide coatings |
JP3573392B2 (ja) * | 1996-12-09 | 2004-10-06 | 東芝ライテック株式会社 | 光触媒体、光源および照明器具 |
WO2000015572A2 (en) * | 1998-09-17 | 2000-03-23 | Libbey-Owens-Ford Co. | Heat strengthened coated glass article and method for making same |
US6964731B1 (en) * | 1998-12-21 | 2005-11-15 | Cardinal Cg Company | Soil-resistant coating for glass surfaces |
FR2832706B1 (fr) * | 2001-11-28 | 2004-07-23 | Saint Gobain | Substrat transparent muni d'une electrode |
US7259085B2 (en) * | 2001-12-03 | 2007-08-21 | Nippon Sheet Glass Company, Limited | Method for forming thin film, substrate having thin film formed by the method, and photoelectric conversion device using the substrate |
-
2005
- 2005-09-23 FR FR0552850A patent/FR2891269B1/fr not_active Expired - Fee Related
-
2006
- 2006-09-19 JP JP2008531754A patent/JP2009509350A/ja active Pending
- 2006-09-19 KR KR1020087006795A patent/KR20080046671A/ko not_active Application Discontinuation
- 2006-09-19 BR BRPI0616268-1A patent/BRPI0616268A2/pt not_active IP Right Cessation
- 2006-09-19 US US12/067,865 patent/US8187714B2/en not_active Expired - Fee Related
- 2006-09-19 EP EP06831192A patent/EP1928799A1/fr not_active Withdrawn
- 2006-09-19 CN CNA2006800345227A patent/CN101268025A/zh active Pending
- 2006-09-19 WO PCT/FR2006/050903 patent/WO2007034110A1/fr active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09139515A (ja) * | 1995-11-15 | 1997-05-27 | Sharp Corp | 透明導電膜電極 |
JP2002217428A (ja) * | 2001-01-22 | 2002-08-02 | Sanyo Electric Co Ltd | 光電変換素子及びその製造方法 |
JP2002316837A (ja) * | 2001-04-12 | 2002-10-31 | Nippon Sheet Glass Co Ltd | ガラス板およびそれを用いた太陽電池 |
JP2003231968A (ja) * | 2001-12-03 | 2003-08-19 | Nippon Sheet Glass Co Ltd | 基板、基板の製造方法および基板を用いた光電変換装置 |
JP2004323321A (ja) * | 2003-04-25 | 2004-11-18 | Nippon Sheet Glass Co Ltd | 透明導電膜付き基板の製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013513223A (ja) * | 2009-12-04 | 2013-04-18 | カンブリオス テクノロジーズ コーポレイション | 増加ヘイズを有するナノ構造系透明導電体およびそれを備えるデバイス |
US9586816B2 (en) | 2009-12-04 | 2017-03-07 | Cam Holding Corporation | Nanostructure-based transparent conductors having increased haze and devices comprising the same |
JP2012132048A (ja) * | 2010-12-20 | 2012-07-12 | Sharp Corp | 透明導電膜付き基体 |
JP2018509766A (ja) * | 2015-03-12 | 2018-04-05 | ビトロ、エセ.ア.ベ. デ セ.ウベ. | 光電子素子及びその製造方法 |
US10672921B2 (en) | 2015-03-12 | 2020-06-02 | Vitro Flat Glass Llc | Article with transparent conductive layer and method of making the same |
US10672920B2 (en) | 2015-03-12 | 2020-06-02 | Vitro Flat Glass Llc | Article with buffer layer |
US10680123B2 (en) | 2015-03-12 | 2020-06-09 | Vitro Flat Glass Llc | Article with transparent conductive oxide coating |
Also Published As
Publication number | Publication date |
---|---|
FR2891269B1 (fr) | 2007-11-09 |
FR2891269A1 (fr) | 2007-03-30 |
KR20080046671A (ko) | 2008-05-27 |
BRPI0616268A2 (pt) | 2011-06-14 |
WO2007034110A1 (fr) | 2007-03-29 |
US20080314442A1 (en) | 2008-12-25 |
CN101268025A (zh) | 2008-09-17 |
US8187714B2 (en) | 2012-05-29 |
EP1928799A1 (fr) | 2008-06-11 |
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