JP2009267021A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
- Publication number
- JP2009267021A JP2009267021A JP2008113813A JP2008113813A JP2009267021A JP 2009267021 A JP2009267021 A JP 2009267021A JP 2008113813 A JP2008113813 A JP 2008113813A JP 2008113813 A JP2008113813 A JP 2008113813A JP 2009267021 A JP2009267021 A JP 2009267021A
- Authority
- JP
- Japan
- Prior art keywords
- film
- silicon
- silicon carbide
- gate electrode
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 63
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 63
- 239000010703 silicon Substances 0.000 claims abstract description 63
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 63
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 63
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052796 boron Inorganic materials 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 238000002955 isolation Methods 0.000 claims abstract description 16
- 239000012535 impurity Substances 0.000 claims description 22
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 8
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 2
- 230000003405 preventing effect Effects 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 18
- 239000010410 layer Substances 0.000 description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 16
- 229910052799 carbon Inorganic materials 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
【解決手段】半導体基板100と、前記半導体基板上に形成され、長手方向と短手方向とを有し、順に積層されたボロンを含むシリコン炭化膜とシリコン膜とを有する半導体層110と、少なくとも前記半導体層の前記短手方向の側面に形成されたゲート電極150と、前記半導体層に形成され、前記ゲート電極の前記長手方向に隣接して形成されたソース・ドレイン領域111、112と、前記半導体層の側面であって、前記ゲート電極と前記半導体基板との間に形成された素子分離絶縁膜130と、を備える。
【選択図】図1
Description
前記半導体基板上に形成され、長手方向と短手方向とを有し、ボロン又はインジウムを含むシリコン炭化膜と前記シリコン炭化膜上に設けられたシリコン膜とを有する半導体層と、少なくとも前記半導体層の前記短手方向の側面に形成されたゲート電極と、前記半導体層に形成され、前記ゲート電極の前記長手方向に隣接して形成されたソース・ドレイン領域と、前記半導体層の側面であって、前記ゲート電極と前記半導体基板との間に形成された素子分離絶縁膜と、を備えるものである。
Claims (5)
- 半導体基板と、
前記半導体基板上に形成され、長手方向と短手方向とを有し、ボロン又はインジウムを含むシリコン炭化膜と前記シリコン炭化膜上に設けられたシリコン膜とを有する半導体層と、
少なくとも前記半導体層の前記短手方向の側面に形成されたゲート電極と、
前記半導体層に形成され、前記ゲート電極の前記長手方向に隣接して形成されたソース・ドレイン領域と、
前記半導体層の側面であって、前記ゲート電極と前記半導体基板との間に形成された素子分離絶縁膜と、
を備える半導体装置。 - 半導体基板と、
前記半導体基板上に形成され、長手方向と短手方向とを有し、ボロン又はインジウムを含むシリコン炭化膜と前記シリコン炭化膜上に設けられたシリコンゲルマニウム膜とを有する半導体層と、
少なくとも前記半導体層の前記短手方向の側面に形成されたゲート電極と、
前記半導体層に形成され、前記ゲート電極の前記長手方向に隣接して形成されたソース・ドレイン領域と、
前記半導体層の側面であって、前記ゲート電極と前記半導体基板との間に形成された素子分離絶縁膜と、
を備える半導体装置。 - 前記半導体層は、前記シリコン炭化膜の下方にボロン又はインジウムを含むシリコン膜をさらに有することを特徴とする請求項1又は2に記載の半導体装置。
- 前記シリコン炭化膜において、前記シリコン炭化膜上に設けられた膜との界面における不純物濃度は、前記シリコン炭化膜下に設けられた膜との界面における不純物濃度よりも小さいことを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- ボロン又はインジウムを含む第1のシリコン膜を形成し、
前記第1のシリコン膜上にシリコン炭化膜を形成し、
前記シリコン炭化膜上に第2のシリコン膜を形成し、
前記第2のシリコン膜及び前記シリコン炭化膜を加工してフィンを形成し、
前記フィンの側面にゲート絶縁膜を形成し、
前記フィンの側面に前記ゲート絶縁膜を介してゲート電極を形成し、
前記ゲート電極の両側の前記フィンにソース・ドレイン領域を形成する半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008113813A JP5159413B2 (ja) | 2008-04-24 | 2008-04-24 | 半導体装置及びその製造方法 |
US12/402,093 US8035199B2 (en) | 2008-04-24 | 2009-03-11 | Semiconductor device and method for manufacturing the same |
US13/224,449 US8420467B2 (en) | 2008-04-24 | 2011-09-02 | Semiconductor device and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008113813A JP5159413B2 (ja) | 2008-04-24 | 2008-04-24 | 半導体装置及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009267021A true JP2009267021A (ja) | 2009-11-12 |
JP2009267021A5 JP2009267021A5 (ja) | 2010-11-04 |
JP5159413B2 JP5159413B2 (ja) | 2013-03-06 |
Family
ID=41214155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008113813A Active JP5159413B2 (ja) | 2008-04-24 | 2008-04-24 | 半導体装置及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8035199B2 (ja) |
JP (1) | JP5159413B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011151272A (ja) * | 2010-01-22 | 2011-08-04 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2011181931A (ja) * | 2010-03-01 | 2011-09-15 | Taiwan Semiconductor Manufacturing Co Ltd | フィン型fetを有する半導体装置およびその製造方法 |
JP2011199287A (ja) * | 2010-03-17 | 2011-10-06 | Taiwan Semiconductor Manufacturing Co Ltd | フィン型電界効果トランジスタおよびその製造方法 |
KR101125272B1 (ko) | 2008-12-29 | 2012-03-21 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 역전된 t자 모양의 핀들을 갖는 복수-게이트 트랜지스터들 |
JP2013513250A (ja) * | 2009-12-23 | 2013-04-18 | インテル コーポレイション | 非平面ゲルマニウム量子井戸デバイス |
JP2013515356A (ja) * | 2009-12-23 | 2013-05-02 | インテル・コーポレーション | エピタキシャルソース/ドレインが自己整合したマルチゲート半導体デバイス |
JP2016516298A (ja) * | 2013-03-14 | 2016-06-02 | インテル・コーポレーション | ナノワイヤトランジスタのリーク低減構造 |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8211772B2 (en) * | 2009-12-23 | 2012-07-03 | Intel Corporation | Two-dimensional condensation for uniaxially strained semiconductor fins |
JP2011258776A (ja) | 2010-06-09 | 2011-12-22 | Toshiba Corp | 不揮発性半導体メモリ |
US8558279B2 (en) * | 2010-09-23 | 2013-10-15 | Intel Corporation | Non-planar device having uniaxially strained semiconductor body and method of making same |
US9761666B2 (en) | 2011-06-16 | 2017-09-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained channel field effect transistor |
US9281378B2 (en) | 2012-01-24 | 2016-03-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin recess last process for FinFET fabrication |
US9171925B2 (en) | 2012-01-24 | 2015-10-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-gate devices with replaced-channels and methods for forming the same |
US9466696B2 (en) | 2012-01-24 | 2016-10-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs and methods for forming the same |
US8836016B2 (en) * | 2012-03-08 | 2014-09-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structures and methods with high mobility and high energy bandgap materials |
CN103515430B (zh) * | 2012-06-19 | 2016-08-10 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其制造方法 |
US9059292B2 (en) | 2012-08-02 | 2015-06-16 | International Business Machines Corporation | Source and drain doping profile control employing carbon-doped semiconductor material |
US8610201B1 (en) * | 2012-08-16 | 2013-12-17 | Kabushiki Kaisha Toshiba | FinFET comprising a punch-through stopper |
US8932918B2 (en) * | 2012-08-29 | 2015-01-13 | International Business Machines Corporation | FinFET with self-aligned punchthrough stopper |
US9443962B2 (en) | 2012-11-09 | 2016-09-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Recessing STI to increase fin height in fin-first process |
US9349837B2 (en) | 2012-11-09 | 2016-05-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Recessing STI to increase Fin height in Fin-first process |
CN105261651B (zh) * | 2012-11-30 | 2018-11-27 | 中国科学院微电子研究所 | 半导体器件 |
CN103928334B (zh) * | 2013-01-15 | 2017-06-16 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
CN103928335B (zh) * | 2013-01-15 | 2017-10-17 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
CN103928333B (zh) * | 2013-01-15 | 2019-03-12 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
US8933528B2 (en) * | 2013-03-11 | 2015-01-13 | International Business Machines Corporation | Semiconductor fin isolation by a well trapping fin portion |
US8940602B2 (en) * | 2013-04-11 | 2015-01-27 | International Business Machines Corporation | Self-aligned structure for bulk FinFET |
US8957478B2 (en) * | 2013-06-24 | 2015-02-17 | International Business Machines Corporation | Semiconductor device including source/drain formed on bulk and gate channel formed on oxide layer |
EP4224531A3 (en) * | 2013-09-25 | 2023-08-23 | Tahoe Research, Ltd. | Isolation well doping with solid-state diffusion sources for finfet architectures |
US9275996B2 (en) | 2013-11-22 | 2016-03-01 | Mears Technologies, Inc. | Vertical semiconductor devices including superlattice punch through stop layer and related methods |
US9054189B1 (en) | 2014-01-06 | 2015-06-09 | Samsung Electronics Co., Ltd. | Semiconductor device and method for fabricating the same |
US20150255456A1 (en) * | 2014-03-04 | 2015-09-10 | Globalfoundries Inc. | Replacement fin insolation in a semiconductor device |
WO2015142847A1 (en) * | 2014-03-17 | 2015-09-24 | Tufts University | Integrated circuit with multi-threshold bulk finfets |
US9431537B2 (en) | 2014-03-26 | 2016-08-30 | Samsung Electronics Co., Ltd. | Semiconductor devices and methods of fabricating the same |
US9721955B2 (en) | 2014-04-25 | 2017-08-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for SRAM FinFET device having an oxide feature |
WO2015191561A1 (en) | 2014-06-09 | 2015-12-17 | Mears Technologies, Inc. | Semiconductor devices with enhanced deterministic doping and related methods |
US9564530B2 (en) | 2014-06-23 | 2017-02-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit structure and method with solid phase diffusion |
CN105225956A (zh) * | 2014-06-26 | 2016-01-06 | 中国科学院微电子研究所 | 一种FinFET制造方法 |
US9299618B1 (en) | 2014-09-24 | 2016-03-29 | International Business Machines Corporation | Structure and method for advanced bulk fin isolation |
CN105679672A (zh) * | 2014-11-19 | 2016-06-15 | 中国科学院微电子研究所 | 鳍式场效应晶体管、鳍及其制造方法 |
CN105679659A (zh) * | 2014-11-20 | 2016-06-15 | 中国科学院微电子研究所 | Ptsl工艺方法、鳍式场效应晶体管的制造方法 |
US9722046B2 (en) | 2014-11-25 | 2017-08-01 | Atomera Incorporated | Semiconductor device including a superlattice and replacement metal gate structure and related methods |
CN105845573A (zh) * | 2015-01-14 | 2016-08-10 | 中芯国际集成电路制造(上海)有限公司 | 一种FinFET器件及其制造方法、电子装置 |
US9865710B2 (en) * | 2015-03-31 | 2018-01-09 | Stmicroelectronics, Inc. | FinFET having a non-uniform fin |
US9954107B2 (en) * | 2015-05-05 | 2018-04-24 | International Business Machines Corporation | Strained FinFET source drain isolation |
WO2016187042A1 (en) | 2015-05-15 | 2016-11-24 | Atomera Incorporated | Semiconductor devices with superlattice layers providing halo implant peak confinement and related methods |
WO2016196600A1 (en) | 2015-06-02 | 2016-12-08 | Atomera Incorporated | Method for making enhanced semiconductor structures in single wafer processing chamber with desired uniformity control |
CN106328527B (zh) * | 2015-06-30 | 2019-05-28 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管的形成方法 |
US9601386B1 (en) | 2015-09-11 | 2017-03-21 | International Business Machines Corporation | Fin isolation on a bulk wafer |
CN106601678B (zh) * | 2015-10-14 | 2019-10-25 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制备方法、电子装置 |
CN106611710A (zh) * | 2015-10-22 | 2017-05-03 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
US9947774B2 (en) * | 2015-10-28 | 2018-04-17 | International Business Machines Corporation | Fin field effect transistor complementary metal oxide semiconductor with dual strained channels with solid phase doping |
US9558939B1 (en) | 2016-01-15 | 2017-01-31 | Atomera Incorporated | Methods for making a semiconductor device including atomic layer structures using N2O as an oxygen source |
US9748245B1 (en) * | 2016-09-23 | 2017-08-29 | International Business Machines Corporation | Multiple finFET formation with epitaxy separation |
US20180122908A1 (en) * | 2016-10-31 | 2018-05-03 | International Business Machines Corporation | Silicon germanium alloy fin with multiple threshold voltages |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326306A (ja) * | 1993-04-29 | 1994-11-25 | Samsung Electron Co Ltd | Mosトランジスタおよびその製造方法 |
JPH08139325A (ja) * | 1994-09-14 | 1996-05-31 | Toshiba Corp | 半導体装置 |
JP2000031481A (ja) * | 1998-07-15 | 2000-01-28 | Nec Corp | 半導体装置およびその製造方法 |
JP2000077654A (ja) * | 1998-09-03 | 2000-03-14 | Matsushita Electric Ind Co Ltd | 電界効果型半導体装置およびその製造方法 |
JP2004282080A (ja) * | 2003-03-17 | 2004-10-07 | Samsung Electronics Co Ltd | 半導体素子及びその製造方法 |
JP2006310458A (ja) * | 2005-04-27 | 2006-11-09 | Toshiba Corp | 半導体装置の製造方法 |
JP2007081329A (ja) * | 2005-09-16 | 2007-03-29 | Toshiba Corp | 半導体装置 |
JP2007258485A (ja) * | 2006-03-23 | 2007-10-04 | Toshiba Corp | 半導体装置及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5315143A (en) | 1992-04-28 | 1994-05-24 | Matsushita Electric Industrial Co., Ltd. | High density integrated semiconductor device |
US7154118B2 (en) * | 2004-03-31 | 2006-12-26 | Intel Corporation | Bulk non-planar transistor having strained enhanced mobility and methods of fabrication |
JP2007242737A (ja) | 2006-03-06 | 2007-09-20 | Toshiba Corp | 半導体装置 |
US7638843B2 (en) * | 2006-05-05 | 2009-12-29 | Texas Instruments Incorporated | Integrating high performance and low power multi-gate devices |
-
2008
- 2008-04-24 JP JP2008113813A patent/JP5159413B2/ja active Active
-
2009
- 2009-03-11 US US12/402,093 patent/US8035199B2/en active Active
-
2011
- 2011-09-02 US US13/224,449 patent/US8420467B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326306A (ja) * | 1993-04-29 | 1994-11-25 | Samsung Electron Co Ltd | Mosトランジスタおよびその製造方法 |
JPH08139325A (ja) * | 1994-09-14 | 1996-05-31 | Toshiba Corp | 半導体装置 |
JP2000031481A (ja) * | 1998-07-15 | 2000-01-28 | Nec Corp | 半導体装置およびその製造方法 |
JP2000077654A (ja) * | 1998-09-03 | 2000-03-14 | Matsushita Electric Ind Co Ltd | 電界効果型半導体装置およびその製造方法 |
JP2004282080A (ja) * | 2003-03-17 | 2004-10-07 | Samsung Electronics Co Ltd | 半導体素子及びその製造方法 |
JP2006310458A (ja) * | 2005-04-27 | 2006-11-09 | Toshiba Corp | 半導体装置の製造方法 |
JP2007081329A (ja) * | 2005-09-16 | 2007-03-29 | Toshiba Corp | 半導体装置 |
JP2007258485A (ja) * | 2006-03-23 | 2007-10-04 | Toshiba Corp | 半導体装置及びその製造方法 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101125272B1 (ko) | 2008-12-29 | 2012-03-21 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 역전된 t자 모양의 핀들을 갖는 복수-게이트 트랜지스터들 |
JP2013513250A (ja) * | 2009-12-23 | 2013-04-18 | インテル コーポレイション | 非平面ゲルマニウム量子井戸デバイス |
US9153671B2 (en) | 2009-12-23 | 2015-10-06 | Intel Corporation | Techniques for forming non-planar germanium quantum well devices |
US10236369B2 (en) | 2009-12-23 | 2019-03-19 | Intel Corporation | Techniques for forming non-planar germanium quantum well devices |
US9799759B2 (en) | 2009-12-23 | 2017-10-24 | Intel Corporation | Techniques for forming non-planar germanium quantum well devices |
US9263557B2 (en) | 2009-12-23 | 2016-02-16 | Intel Corporation | Techniques for forming non-planar germanium quantum well devices |
JP2015188102A (ja) * | 2009-12-23 | 2015-10-29 | インテル・コーポレーション | マルチゲートトランジスタ |
JP2013515356A (ja) * | 2009-12-23 | 2013-05-02 | インテル・コーポレーション | エピタキシャルソース/ドレインが自己整合したマルチゲート半導体デバイス |
US8394690B2 (en) | 2010-01-22 | 2013-03-12 | Kabushiki Kaisha Toshiba | Semiconductor device and fabrication method thereof |
JP2011151272A (ja) * | 2010-01-22 | 2011-08-04 | Toshiba Corp | 半導体装置及びその製造方法 |
US8242568B2 (en) | 2010-01-22 | 2012-08-14 | Kabushiki Kaisha Toshiba | Semiconductor device and fabrication method thereof |
JP2011181931A (ja) * | 2010-03-01 | 2011-09-15 | Taiwan Semiconductor Manufacturing Co Ltd | フィン型fetを有する半導体装置およびその製造方法 |
JP2011199287A (ja) * | 2010-03-17 | 2011-10-06 | Taiwan Semiconductor Manufacturing Co Ltd | フィン型電界効果トランジスタおよびその製造方法 |
JP2016516298A (ja) * | 2013-03-14 | 2016-06-02 | インテル・コーポレーション | ナノワイヤトランジスタのリーク低減構造 |
US9825130B2 (en) | 2013-03-14 | 2017-11-21 | Intel Corporation | Leakage reduction structures for nanowire transistors |
Also Published As
Publication number | Publication date |
---|---|
JP5159413B2 (ja) | 2013-03-06 |
US8420467B2 (en) | 2013-04-16 |
US20120003801A1 (en) | 2012-01-05 |
US8035199B2 (en) | 2011-10-11 |
US20090267155A1 (en) | 2009-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5159413B2 (ja) | 半導体装置及びその製造方法 | |
US9806178B2 (en) | FinFET structure and method for fabricating the same | |
JP4271210B2 (ja) | 電界効果トランジスタ、集積回路素子、及びそれらの製造方法 | |
JP5305969B2 (ja) | 半導体装置 | |
US20180151565A1 (en) | Method of manufacturing a semiconductor device and a semiconductor device | |
US20170207129A1 (en) | Method for fabricating semiconductor device | |
US9385231B2 (en) | Device structure with increased contact area and reduced gate capacitance | |
JP2009032955A (ja) | 半導体装置、およびその製造方法 | |
WO2014059812A1 (zh) | 堆叠纳米线mos晶体管制作方法 | |
TW201121051A (en) | Integrated circuit structure | |
JP2013197342A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2006013303A (ja) | 半導体装置及びその製造方法 | |
WO2014056277A1 (zh) | 半导体结构及其制造方法 | |
US9583622B2 (en) | Semiconductor structure and method for manufacturing the same | |
WO2011147212A1 (zh) | 一种半导体器件及其形成方法 | |
JP2009021456A (ja) | フィン型トランジスタおよびその形成方法 | |
JP5032418B2 (ja) | 電界効果トランジスタ、集積回路素子、及びそれらの製造方法 | |
JP2010010587A (ja) | 半導体素子及び半導体素子の製造方法 | |
US8461650B2 (en) | Semiconductor device and method for manufacturing the same | |
CN106531632B (zh) | 堆叠纳米线mos晶体管制作方法 | |
US20170033107A1 (en) | Semiconductor device and method for manufacturing the same | |
JP5286416B2 (ja) | 半導体装置およびその製造方法 | |
JP2011066362A (ja) | 半導体装置 | |
CN110233108B (zh) | 一种围栅器件及其制造方法 | |
WO2013155740A1 (zh) | 一种半导体结构及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100916 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100916 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121108 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121113 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121211 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5159413 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151221 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |