JP2009245490A - 垂直磁気記録媒体の製造方法および垂直磁気記録媒体 - Google Patents
垂直磁気記録媒体の製造方法および垂直磁気記録媒体 Download PDFInfo
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Abstract
【解決手段】基体110上に、磁気記録層122、媒体保護層126および潤滑層128をこの順に備える垂直磁気記録媒体100の製造方法において、潤滑剤のCF結合密度を測定するCF結合密度測定工程と、測定したCF結合密度が2.0×1022〜2.7×1022atoms/cm3である場合に潤滑剤で潤滑層を成膜する潤滑層成膜工程と、を含むことを特徴とする。
【選択図】図3
Description
明官、「モバイル2.5インチHDD」、雑誌FUJITSU、富士通株式会社、2007年1月、第58巻、第1号、p.10−15
本発明にかかる垂直磁気記録媒体の製造方法の実施形態について説明する。図1は本実施形態にかかる垂直磁気記録媒体100の構成を説明する図である。図1に示す垂直磁気記録媒体100は、基体としてのディスク基体110、付着層112、第1軟磁性層114a、スペーサ層114b、第2軟磁性層114c、前下地層116、第1下地層118a、第2下地層118b、非磁性グラニュラー層120、第1磁気記録層122a、第2磁気記録層122b、連続層124、媒体保護層126、潤滑層128で構成されている。なお第1軟磁性層114a、スペーサ層114b、第2軟磁性層114cは、あわせて軟磁性層114を構成する。第1下地層118aと第2下地層118bはあわせて下地層118を構成する。第1磁気記録層122aと第2磁気記録層122bとはあわせて磁気記録層122を構成する。
実施例として、ディスク基体110上に、真空引きを行った成膜装置を用いて、DCマグネトロンスパッタリング法にてAr雰囲気中で、付着層112から連続層124まで順次成膜を行った。付着層112は、CrTiとした。軟磁性層114は、第1軟磁性層114a、第2軟磁性層114cの組成はCoCrFeBとし、スペーサ層114bの組成はRuとした。前下地層116の組成はfcc構造のNiW合金とした。下地層118は、第1下地層118aは高圧Ar下でRuを成膜し、第2下地層118bは低圧Ar下でRuを成膜した。非磁性グラニュラー層120の組成は非磁性のCoCr−SiO2とした。磁気記録層122の組成は図1に示す通りとした。連続層124の組成はCoCrPtBとした。媒体保護層126はCVD法によりC2H4およびCNを用いて成膜し、媒体保護層の最表面には窒素処理を施した。潤滑層128はディップコート法によりPFPE系の潤滑剤を用いて成膜した。用いた潤滑剤は、潤滑剤Cである。成膜後、一定温度で加熱処理を行った。
一方、比較例として、潤滑剤Bを用いて潤滑層128を成膜した。成膜後、一定温度で加熱処理を行い、加熱時間を30分、60分、120分とした3通りの比較例をそれぞれ製造した。そして、実施例と各比較例とを比較したところ、図4および図5に示すように、摩擦係数測定および表面自由エネルギーのいずれも、比較例より実施例のほうが低いことを確認した。
110 …ディスク基体
112 …付着層
114a …第1軟磁性層
114b …スペーサ層
114c …第2軟磁性層
116 …前下地層
118 …下地層
118a …第1下地層
118b …第2下地層
120 …非磁性グラニュラー層
122 …磁気記録層
122a …第1磁気記録層
122b …第2磁気記録層
124 …連続層
126 …媒体保護層
128 …潤滑層
Claims (4)
- 基体上に、磁気記録層、媒体保護層および潤滑層をこの順に備える垂直磁気記録媒体の製造方法において、
潤滑剤のCF結合密度を測定するCF結合密度測定工程と、
前記測定したCF結合密度が2.0×1022〜2.7×1022atoms/cm3である場合に前記潤滑剤で前記潤滑層を成膜する潤滑層成膜工程と、
を含むことを特徴とする垂直磁気記録媒体の製造方法。 - 前記CF結合密度測定工程では、
エリプソメータ(Ellipsometer)またはX線反射率法(X-Ray Reflectivity; XRR)を用いて前記潤滑層の膜厚を測定し、フーリエ変換赤外分光分析(Fourier Transform Infrared Spectroscopy; FT−IR)またはX線光電子分光分析(X-ray Photoelectron Spectroscopy; XPS)を用いて前記潤滑層の所定範囲におけるCF結合の数を計数し、
前記測定した膜厚と前記計数したCF結合の数とに基づいてCF結合密度を算出することを特徴とする垂直磁気記録媒体の製造方法。 - 前記潤滑剤はパーフロロポリエーテル(PFPE)であることを特徴とする請求項1または2に記載の垂直磁気記録媒体の製造方法。
- 基体上に、磁気記録層、媒体保護層および潤滑層をこの順に備える垂直磁気記録媒体において、
前記潤滑層のCF結合密度は、エリプソメータまたはX線反射率法を用いて測定した前記潤滑層の膜厚と、フーリエ変換赤外分光分析またはX線光電子分光分析を用いて計数した前記潤滑層の所定範囲におけるCF結合の数とに基づいて算出された、2.0×1022〜2.7×1022atoms/cm3であることを特徴とする垂直磁気記録媒体。
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