JP2009227674A - 新規なスズアミノアルコキシド錯体及びその製造方法 - Google Patents
新規なスズアミノアルコキシド錯体及びその製造方法 Download PDFInfo
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000002243 precursor Substances 0.000 claims abstract description 14
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 12
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000002105 nanoparticle Substances 0.000 claims abstract description 6
- 239000000126 substance Substances 0.000 claims description 25
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- -1 tin amino acids Chemical class 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 125000006527 (C1-C5) alkyl group Chemical group 0.000 claims description 4
- 125000006701 (C1-C7) alkyl group Chemical group 0.000 claims description 4
- 125000006681 (C2-C10) alkylene group Chemical group 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- 229910052794 bromium Inorganic materials 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 229910052740 iodine Inorganic materials 0.000 claims description 2
- 229910052744 lithium Inorganic materials 0.000 claims description 2
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- 150000004703 alkoxides Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 6
- 229910052736 halogen Inorganic materials 0.000 abstract description 5
- 150000002367 halogens Chemical class 0.000 abstract description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 238000011109 contamination Methods 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 3
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 125000002947 alkylene group Chemical group 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical class [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 abstract 1
- XRIBIDPMFSLGFS-UHFFFAOYSA-N 2-(dimethylamino)-2-methylpropan-1-ol Chemical compound CN(C)C(C)(C)CO XRIBIDPMFSLGFS-UHFFFAOYSA-N 0.000 description 11
- 238000004458 analytical method Methods 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 238000005481 NMR spectroscopy Methods 0.000 description 8
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 238000002411 thermogravimetry Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000005160 1H NMR spectroscopy Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VCLPOEMKCWBWJF-UHFFFAOYSA-N CN(C)CC(C)(O[Sn+])C Chemical compound CN(C)CC(C)(O[Sn+])C VCLPOEMKCWBWJF-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- 238000004508 fractional distillation Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000002076 thermal analysis method Methods 0.000 description 2
- AGXSAKYCANEZGX-UHFFFAOYSA-N 1-(dimethylamino)-2-methylbutan-2-ol Chemical compound CCC(C)(O)CN(C)C AGXSAKYCANEZGX-UHFFFAOYSA-N 0.000 description 1
- XTYRIICDYQTTTC-UHFFFAOYSA-N 1-(dimethylamino)-2-methylpropan-2-ol Chemical compound CN(C)CC(C)(C)O XTYRIICDYQTTTC-UHFFFAOYSA-N 0.000 description 1
- UJGTZCUOSXIJSC-UHFFFAOYSA-N CCC(C)C(N(C)C)O[Sn+] Chemical compound CCC(C)C(N(C)C)O[Sn+] UJGTZCUOSXIJSC-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 125000004663 dialkyl amino group Chemical group 0.000 description 1
- 238000004455 differential thermal analysis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
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- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/22—Tin compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/22—Tin compounds
- C07F7/2204—Not belonging to the groups C07F7/2208 - C07F7/2296
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
【解決手段】新規なスズアミノアルコキシド錯体及びその製造方法に関するものであって、下記で表示されるスズアミノアルコキシド錯体でスズ及びスズ酸化物薄膜のための先駆物質及びナノの大きさのスズ及びスズ酸化物粒子製造のための先駆物質製造のための先駆物質として有用なスズアミノアルコキシド錯体及びその製造方法に関する。Sn[O‐A‐NR1R2]2前記化学式において、Aはハロゲン置換または非置換の線形または分枝形の(C2‐C10)アルキレン基であり;R1及びR2は互いに独立した、ハロゲン置換または非置換の線形または分枝形の(C1‐C7)アルキル基である。
【選択図】図1
Description
Sn[O‐A‐NR1R2]2
前記化学式1において、Aはハロゲン置換または非置換の線形または分枝形の(C2‐C10)アルキレン基であり;R1及びR2は互いに独立した、ハロゲン置換または非置換の線形または分枝形の(C1‐C7)アルキル基である。
Sn[OCR3R4(CH2)m‐NR1R2]2
前記化学式2において、mは1乃至3中の整数であり;R1及びR2は互いに独立した、フッ素置換または非置換の線形または分枝形の(C1‐C5)アルキル基であり;R3及びR4は互いに独立した、水素またはフッ素置換または非置換の線形または分枝形の(C1‐C5)アルキル基である。
SnX2+2MO‐A‐NR1R2→Sn[O‐A‐NR1R2]2+2MX
[化学式1]
Sn[O‐A‐NR1R2]2
[化学式3]
SnX2
[化学式4]
MO‐A‐NR1R2
前記化学式1、化学式3及び化学式4において、XはN[Si(CH3)3]2、Cl、BrまたはIであり;MはH、Li、NaまたはKであり;Aはハロゲン置換または非置換の線形または分枝形の(C2‐C10)アルキレン基であり;R1及びR2は互いに独立的した、ハロゲン置換または非置換の線形または分枝形の(C1‐C7)アルキル基である。
(ジメチルアミノ‐2‐メチル‐2‐プロポキシ)スズ(II)[Sn(dmamp)2]の製造
250mLのシュレンクフラスコにSnCl2(1g、5.27mmol)とリチウムヘキサシラザン(Li(btsa)、1.76g、10.54mmol)を常温でエーテル(ether、50mL)を添加した後3時間撹拌した。混合溶液を濾過してLiClを除去し余液を真空下で溶媒を除去した後100℃、10−2torrで分別蒸溜してSn(btsa)2を得た後、得たSn(btsa)2(1g、2.28mmol)をノマルヘキサンに溶かした後2当量のジメチルアミノ‐2‐メチル‐2‐プロパノル(0.53g、4.56mmol)を室温で徐々に添加し6時間撹拌した。
前記実施例1で製造したSn(dmamp)2錯体の核磁気共鳴分光分析(1H‐NMR)結果を図1に、炭素核磁気共鳴分光(13C‐NMR)分析結果を図2に、フーリエ変換赤外線分光(FT‐IR)分析結果を図3に示す。
(ジメチルアミノ‐2‐メチル‐2‐プロポキシ)スズ(II)[Sn(dmamp)2]の製造
250mLのシュレンクフラスコにSnBr2(1g、3.59mmol)とソジウムジメチルアミノ‐2‐メチル‐2‐プロポキシド(Na(dmamp)、1g、7.18mmol)を常温でTHF(50mL)を添加した後、12時間還流した。混合溶液を濾過してNaClを除去し、余液を真空下で溶媒を除去した後100℃、10−2torrで分別蒸溜して純粋な錯体(93%)を得た。
したがって、前記結果から実施例1と同一の錯体が製造されたことを確認した。
(ジメチルアミノ‐2‐メチル‐ブトキシ)スズ(II)[Sn(dmamb)2]の製造
250mLのシュレンクフラスコにSnCl2(1g、5.27mmol)とリチウムヘキサシラザン(Li(btsa))、1.76g、10.54mmol)を常温でエーテル(ether、50mL)を添加した後、3時間撹拌した。混合溶液を濾過してLiClを除去し、余液を真空下で溶媒を除去した後100℃、10−2torrで分別蒸溜してSn(btsa)2を得た後、得たSn(btsa)2をノマルヘキサンに溶かした後、2当量のジメチルアミノ‐2‐メチル‐2‐ブタノール(0.59g、4.56mmol)を室温で徐々に添加して6時間撹拌する。真空下で溶媒を除去した後120℃、10−2torrで分別蒸溜して純粋なSn(dmamb)2錯体(89%)を得た。
Claims (8)
- 下記化学式1で表示されるスズアミノアルコキシド錯体。
[化学式1]
Sn[O‐A‐NR1R2]2
(式中、Aはハロゲン置換または非置換の線形または分枝形の(C2‐C10)アルキレン基であり;
R1及びR2は互いに独立した、ハロゲン置換または非置換の線形または分枝形の(C1‐C7)アルキル基である。) - 下記化学式2で表示されることを特徴とする請求項1に記載のスズアミノアルコキシド錯体。
[化学式2]
Sn[OCR3R4(CH2)m‐NR1R2]2
(式中、mは1乃至3中の整数であり;
R1及びR2は互いに独立的した、フッ素置換または非置換の線形または分枝形の(C1‐C5)アルキル基であり;
R3及びR4は互いに独立的した、水素またはフッ素置換または非置換の線形または分枝形の(C1‐C5)アルキル基である。) - 前記化学式2において、mが1または2であることを特徴とする請求項2に記載のスズアミノアルコキシド錯体。
- 前記化学式2において、R1及びR2は互いに独立的して、CH3、CF3、C2H5、CH(CH3)2及びC(CH3)3から選択され、R3及びR4は互いに独立的して、水素、CH3、CF3、C2H5、CH(CH3)2及びC(CH3)3から選択されることを特徴とする請求項2に記載のスズアミノアルコキシド錯体。
- 下記化学式3のスズ錯体と下記化学式4のアミノアルコキシドアルカリ金属塩錯体を反応させることを特徴とする化学式1のスズアミノアルコキシド錯体の製造方法。
[化学式1]
Sn[O‐A‐NR1R2]2
[化学式3]
SnX2
[化学式4]
MO‐A‐NR1R2
(式中、XはN[Si(CH3)3]2、Cl、BrまたはIであり;
MはH、Li、NaまたはKであり;Aはハロゲン置換または非置換の線形または分枝形の(C2‐C10)アルキレン基であり;
R1及びR2は互いに独立的した、ハロゲン置換または非置換の線形または分枝形の(C1‐C7)アルキル基である。) - 請求項1乃至4のいずれかに記載のスズアミノアルコキシド錯体を先駆物質として使ってスズ錯体を製造する方法。
- 請求項6の方法から製造されたスズ錯体。
- 前記スズ錯体は、スズ酸化物の薄膜またはスズ酸化物のナノ粒子であることを特徴とする請求項7に記載のスズ錯体。
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WO2022009695A1 (ja) * | 2020-07-09 | 2022-01-13 | 株式会社Adeka | アルコキシド化合物、薄膜形成用原料及び薄膜の製造方法 |
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WO2020129616A1 (ja) | 2018-12-17 | 2020-06-25 | 株式会社Adeka | 原子層堆積法用薄膜形成原料、薄膜の製造方法及びアルコキシド化合物 |
KR20210103486A (ko) | 2018-12-17 | 2021-08-23 | 가부시키가이샤 아데카 | 원자층 퇴적법용 박막 형성 원료, 박막의 제조 방법 및 알콕시드 화합물 |
US11623935B2 (en) | 2018-12-17 | 2023-04-11 | Adeka Corporation | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound |
JP7418349B2 (ja) | 2018-12-17 | 2024-01-19 | 株式会社Adeka | 原子層堆積法用薄膜形成原料、薄膜の製造方法及びアルコキシド化合物 |
KR20220041112A (ko) | 2019-08-09 | 2022-03-31 | 가부시키가이샤 고준도가가쿠 겐큐쇼 | 비스(에틸시클로펜타디에닐)주석, 화학 증착용 원료, 주석을 함유하는 박막의 제조 방법 및 주석 산화물 박막의 제조 방법 |
WO2022009695A1 (ja) * | 2020-07-09 | 2022-01-13 | 株式会社Adeka | アルコキシド化合物、薄膜形成用原料及び薄膜の製造方法 |
KR20230158682A (ko) | 2022-05-11 | 2023-11-21 | 한국화학연구원 | 신규한 유기주석 화합물 및 이를 이용한 박막의 제조방법 |
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KR20090100583A (ko) | 2009-09-24 |
CN101538277A (zh) | 2009-09-23 |
US8030507B2 (en) | 2011-10-04 |
EP2105444B1 (en) | 2014-11-05 |
US20090275770A1 (en) | 2009-11-05 |
JP5314468B2 (ja) | 2013-10-16 |
EP2105444A1 (en) | 2009-09-30 |
CN101538277B (zh) | 2013-04-24 |
KR100954541B1 (ko) | 2010-04-23 |
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