JP2009152630A - 活性トレンチコーナおよび厚底の酸化物を備えたトレンチmisデバイス、ならびにこれを製造する方法 - Google Patents
活性トレンチコーナおよび厚底の酸化物を備えたトレンチmisデバイス、ならびにこれを製造する方法 Download PDFInfo
- Publication number
- JP2009152630A JP2009152630A JP2009049460A JP2009049460A JP2009152630A JP 2009152630 A JP2009152630 A JP 2009152630A JP 2009049460 A JP2009049460 A JP 2009049460A JP 2009049460 A JP2009049460 A JP 2009049460A JP 2009152630 A JP2009152630 A JP 2009152630A
- Authority
- JP
- Japan
- Prior art keywords
- trench
- region
- layer
- insulating layer
- oxide layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 210000000746 body region Anatomy 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 230000007704 transition Effects 0.000 claims abstract description 23
- 230000007423 decrease Effects 0.000 claims abstract description 6
- 150000004767 nitrides Chemical class 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 43
- 238000009792 diffusion process Methods 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 17
- 229920005591 polysilicon Polymers 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 10
- 239000002019 doping agent Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 4
- 230000001590 oxidative effect Effects 0.000 claims 2
- 230000008569 process Effects 0.000 description 23
- 239000012212 insulator Substances 0.000 description 19
- 239000004020 conductor Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 239000005380 borophosphosilicate glass Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 241000293849 Cordylanthus Species 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28185—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the gate insulator and before the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28238—Making the insulator with sacrificial oxide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4983—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET with a lateral structure, e.g. a Polysilicon gate with a lateral doping variation or with a lateral composition variation or characterised by the sidewalls being composed of conductive, resistive or dielectric material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/512—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being parallel to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66621—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation using etching to form a recess at the gate location
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7834—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with a non-planar structure, e.g. the gate or the source or the drain being non-planar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Composite Materials (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
【解決手段】半導体基板の中に延在するトレンチ104の底部の少なくとも一部分に隣接したNエピ領域116と、トレンチの側壁の少なくとも一部分に隣接したP導電型のボディ領域112とを備える。トレンチに形成された酸化物層の第1の区域106は、半導体デバイスのNエピ領域の少なくとも一部分に隣接し、第2の区域110はボディ領域の少なくとも一部分に隣接する。第1の区域における酸化物層の厚さは第2の区域における酸化物層の厚さよりも厚く、第1及び第2区域の間の遷移領域108における酸化物層の厚さは、第1の区域から第2の区域へと徐々に薄くなり、第1の領域と第2の領域との間のPN接合部114は、酸化物層の遷移領域に隣接したトレンチで終端をなす。
【選択図】図10
Description
この発明は、トレンチ金属−絶縁体−半導体(MIS)デバイスに関し、特に、高周波数動作に好適なトレンチMOSFETに関する。
いくつかの金属−絶縁体−半導体(MIS)デバイスは、半導体基板(たとえば、シリコン)の面から下方向に延在するトレンチに位置するゲートを含む。このようなデバイスにおける電流の流れは、主として垂直であり、結果として、セルをより高密度に詰め込むことができる。その他の点はすべて同じであるので、こうすることにより電流が流れる能力が高められ、デバイスのオン抵抗が減じられる。MISデバイスの一般的な範疇に含まれるデバイスには、金属−酸化物−半導体電界効果トランジスタ(MOSFET)、絶縁ゲート型バイポーラトランジスタ(IGBT)およびMOSゲートサイリスタが含まれる。
この発明に従って、金属−絶縁体−半導体(MIS)デバイスは、基板の面から基板の中に延在するトレンチを含む半導体基板を含む。第1の導電型のソース領域は、トレンチの側壁および基板の面に隣接する。第1の導電型とは反対の第2の導電型のボディ領域は、ソース領域とトレンチの側壁とトレンチの底面の第1の部分とに隣接する。第1の導電型のドレイン領域は、ボディ領域とトレンチの底面の第2の部分とに隣接する。トレンチには、少なくともボディ領域に接する側壁に沿って、かつ少なくともボディ領域に接する底面の第1の部分に沿って、第1の絶縁層が並ぶ。トレンチにはまた、トレンチの底面の第2の部分に沿って、第2の絶縁層が並ぶ。第2の絶縁層は第1の絶縁層に結合され、第2の絶縁層は第1の絶縁層よりも厚い。
図4には、この発明に従ったトレンチMOSFET40の一実施例の断面図が示される。MOSFET40においては、N−層であり得、N+基板(図示せず)上に通常成長するn型エピタキシャル(「N−エピ」)層13はドレインである。p型ボディ領域12は、N+ソース領域11からN−エピ層13を分離する。ボディ領域12は、トレンチ19の側壁に沿って、コーナ領域25を通り過ぎ、トレンチ19の底部に部分的に長く拡散される。電流は、側壁に沿って(破線で示される)チャネルを通って垂直に流れ、トレンチ19のコーナ領域25の周りを通る。
ナ領域25の周りでトレンチの底部へとチャネルを延在させることにより、薄いゲート酸化物領域(すなわち、図3における薄いゲート酸化物領域24を参照)におけるゲート・ドレイン間の著しいオーバーラップを防ぐ。というのも、ボディ領域12の拡散は、コーナ領域25を介して非常によく制御することができるからである。横方向の拡散は縦方向の拡散よりも6〜10倍遅いので、ボディ領域12とN−エピ層13との間のpn接合を、薄いゲート絶縁体15と酸化プラグ33との間の遷移と一致させることができる。したがって、酸化プラグ33および活性コーナ領域25は、オン抵抗、Ronへの影響を最低限にしつつゲート・ドレイン間のキャパシタンス、Cgdを最小限にし、高周波数適用例に対して有用なトレンチMOSFET40をもたらす。
けるゲート・ドレイン間のオーバーラップを防ぐ。これにより、Cgdが最小限にされる。
の厚さは厚い区域106から薄い区域110へと徐々に薄くなる。MOSFET100はまた、N−エピ領域116とのPN接合部114を形成するP−ボディ領域112を含む。PN接合部114は遷移領域108においてトレンチ104と交差する。上述のように、遷移領域108の位置は、MOSFET100の製作中に窒化物層の厚さを変えることにより変更することができる。
Claims (28)
- MISデバイスを製作する方法であって、
半導体基板を設けるステップと、
前記基板にトレンチを形成するステップとを含み、前記トレンチは側壁および底面を含み、前記方法はさらに、
前記側壁および前記底面上にマスク層を堆積させるステップと、
前記マスク層をエッチングして、前記トレンチの前記底面の中心部分を露出させるステップと、
前記トレンチに厚い絶縁層を堆積させるステップと、
前記厚い絶縁層をエッチングして、前記側壁上に前記マスク層の露出した部分を形成しつつ、前記トレンチの前記底面の前記中心部分上に前記厚い絶縁層の一部分を残すステップと、
前記マスク層を除去して、前記側壁と前記トレンチの前記底面の周辺部分とを露出しつつ、前記トレンチの前記底面の前記中心部分上に前記厚い絶縁層の前記部分を残すステップと、
前記側壁と前記底面の前記周辺部分との上に薄い絶縁層を形成するステップと、
前記薄い絶縁層の前記部分のまわり、およびその上方にゲートを形成するステップとを含み、前記ゲートは前記トレンチにおける前記薄い絶縁層に隣接する、方法。 - 薄い絶縁層を形成する前記ステップは、前記側壁と前記底面の前記周辺部分とを熱酸化するステップを含む、請求項1に記載の方法。
- 薄い絶縁層を形成する前記ステップの前に、前記側壁と前記底面の前記周辺部分との上に薄い犠牲酸化物層を形成するステップと、
薄い絶縁層を形成する前記ステップの前に、前記犠牲酸化物層を除去するステップとをさらに含む、請求項1に記載の方法。 - ゲートを形成する前記ステップは、
前記トレンチにおいてドープされたポリシリコンを堆積させるステップと、
前記ドープされたポリシリコンを前記基板の前記面にほぼ等しい高さにまでエッチングするステップとを含む、請求項1に記載の方法。 - マスク層を堆積させる前記ステップの前に、前記側壁および前記底面上に薄い絶縁層を成長させるステップをさらに含む、請求項1に記載の方法。
- 前記基板において、前記トレンチの前記底面の少なくとも前記中心部分に隣接した高導電性領域を形成するステップをさらに含む、請求項1に記載の方法。
- MISデバイスを製作する方法であって、
半導体基板を設けるステップと、
前記基板にトレンチを形成するステップとを含み、前記トレンチは、側壁、コーナ面および中心底面を含み、前記方法はさらに、
前記中心底面上に厚い絶縁層を堆積させるステップと、
前記側壁および前記コーナ面上に薄い絶縁層を形成するステップと、
前記厚い絶縁層のまわり、およびその上方にゲートを形成するステップとを含み、前記ゲートは、前記コーナ面の少なくとも一部分に沿った活性コーナ領域を形成するように、前記トレンチにおいて前記薄い絶縁層に隣接する、方法。 - 厚い絶縁層を堆積させる前記ステップは、
前記側壁、前記コーナ面および前記中心底面上にマスク層を堆積させるステップと、
前記マスク層をエッチングして、前記トレンチの前記中心底面を露出するステップと、
前記トレンチに厚い絶縁層を堆積させるステップと、
前記厚い絶縁層をエッチングして、前記側壁上の前記マスク層の露出した部分を形成しつつ、前記トレンチの前記中心底面上に前記厚い絶縁層の一部分を残すステップと、
前記マスク層を除去して、前記側壁と前記トレンチの前記コーナ面とを露出しつつ、前記トレンチの前記中心底面上に前記厚い絶縁層の前記部分を残すステップとを含む、請求項7に記載の方法。 - 前記基板において、前記トレンチの少なくとも前記中心底面に隣接した高導電性領域を形成するステップをさらに含む、請求項7に記載の方法。
- 金属−絶縁体−半導体(MIS)デバイスであって、
半導体基板を含み、この半導体基板は、前記基板の面から前記基板の中に延在するトレンチを含み、前記MISデバイスはさらに、
第1の導電型のドレイン領域と、
前記第1の導電型とは反対の第2の導電型を有し、前記トレンチの側壁の少なくとも一部分に隣接したボディ領域とを含み、
前記トレンチには酸化物層が並び、前記酸化物層は、第1の区域、第2の区域および前記第1の区域と前記第2の区域との間の遷移領域を含み、前記第1の区域は前記ドレイン領域の少なくとも一部分に隣接しており、前記第2の区域は前記ボディ領域の少なくとも一部分に隣接しており、前記第1の区域における前記酸化物層の厚さは、前記第2の区域における前記酸化物層の厚さよりも厚く、前記遷移領域における前記酸化物層の厚さは、前記第1の区域から前記第2の区域へと徐々に薄くなり、前記ボディ領域と前記ドレイン領域との間のPN接合部は、前記酸化物層の前記遷移領域に隣接した前記トレンチで終端をなす、MISデバイス。 - 前記遷移領域は、前記トレンチの底面に隣接して位置する、請求項10に記載のMISデバイス。
- 前記遷移領域は、前記トレンチの側壁に隣接して位置する、請求項10に記載のMISデバイス。
- 前記遷移領域は、前記トレンチのコーナに隣接して位置する、請求項10に記載のMISデバイス。
- 上面に隣接して位置するソース領域と、前記トレンチと、前記ボディ領域とをさらに含む、請求項10に記載のMISデバイス。
- 前記ボディ領域はP型であり、前記ドレイン領域はN型である、請求項10に記載のMISデバイス。
- 前記トレンチの底部に隣接した前記第1の導電型の大量にドープされた領域を含み、前記大量にドープされた領域は、前記ドレインのドーピング濃度よりも高いドーピング濃度を有する、請求項10に記載のMISデバイス。
- 半導体デバイスであって、
半導体基板を含み、この半導体基板は、前記基板の面から前記基板の中に延在するトレンチを含み、前記半導体デバイスはさらに、
前記トレンチの底部の少なくとも一部分に隣接した第1の導電型の第1の領域と、
前記第1の導電型とは反対の第2の導電型を有し、前記トレンチの側壁の少なくとも一部分に隣接した第2の領域とを含み、
前記トレンチには酸化物層が並び、前記酸化物層は、第1の区域、第2の区域および前記第1の区域と前記第2の区域との間の遷移領域を含み、前記第1の区域は前記半導体デバイスの前記第1の領域の少なくとも一部分に隣接し、前記第2の区域は前記半導体デバイスの前記第2の領域の少なくとも一部分に隣接し、前記第1の区域における前記酸化物層の厚さは前記第2の区域における前記酸化物層の厚さよりも厚く、前記遷移領域における前記酸化物層の厚さは前記第1の区域から前記第2の区域へと徐々に薄くなり、前記第1の領域と前記第2の領域との間のPN接合部は、前記酸化物層の前記遷移領域に隣接した前記トレンチで終端をなす、半導体デバイス。 - MISデバイスを製作する方法であって、
半導体基板を設けるステップと、
前記基板にトレンチを形成するステップと、
前記トレンチに窒化物層を堆積させるステップと、
前記窒化物層をエッチングして、前記トレンチの底部において露出した面積を形成するステップと、
基板を加熱し、これにより前記露出した面積に酸化物層を成長させるステップとを含む、方法。 - 前記窒化物層を除去するステップと、
前記トレンチの側壁の少なくとも一部分上に比較的薄いゲート酸化物層を形成するステップと、
前記トレンチにゲートを形成するステップとをさらに含む、請求項18に記載の方法。 - ゲートを形成するステップは、
前記トレンチにおいてドープされたポリシリコンを堆積させるステップと、
前記ドープされたポリシリコンを前記基板の面にほぼ等しい高さにまでエッチングするステップとを含む、請求項19に記載の方法。 - 前記窒化物層を除去するステップは、
前記窒化物層の一部分を除去するステップと、
前記窒化物層の残りの部分を酸化して、酸化窒化物を形成するステップと、
前記酸化窒化物を除去するステップとを含む、請求項19に記載の方法。 - 酸化物層を成長させるステップは、前記窒化物層の一部分を前記トレンチの面からリフトオフさせるステップを含む、請求項18に記載の方法。
- 窒化物層を堆積させるステップは、500Å厚以下の窒化物層を堆積させるステップを含む、請求項18に記載の方法。
- 窒化物層を堆積させるステップは、1,500〜2,000Å厚の範囲である窒化物層を堆積させるステップを含む、請求項18に記載の方法。
- 酸化物層を成長させるステップは、遷移領域を作るステップを含み、酸化物層の厚さは、前記露出した面積から離れる方向に徐々に薄くなる、請求項18に記載の方法。
- 基板は第1の導電型であり、方法は、第2の導電型のドーパントを前記基板に拡散するステップをさらに含み、前記ドーパントは、前記基板の残りの部分とのPN接合部を形成する、請求項25に記載の方法。
- 前記第2の導電型のドーパントを拡散するステップは、前記PN接合部が前記遷移領域においてトレンチと交差するように前記PN接合部の拡散を制御するステップを含む、請求項26に記載の方法。
- 前記トレンチの底部を通じてドーパントを注入して、前記トレンチの前記底部に隣接した大量にドープされた領域を形成するステップを含む、請求項18に記載の方法。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/927,143 US6849898B2 (en) | 2001-08-10 | 2001-08-10 | Trench MIS device with active trench corners and thick bottom oxide |
US09/927,143 | 2001-08-10 | ||
US10/106,896 | 2002-03-26 | ||
US10/106,896 US6875657B2 (en) | 2001-08-10 | 2002-03-26 | Method of fabricating trench MIS device with graduated gate oxide layer |
US10/106,812 US6903412B2 (en) | 2001-08-10 | 2002-03-26 | Trench MIS device with graduated gate oxide layer |
US10/106,812 | 2002-03-26 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003520005A Division JP4299665B2 (ja) | 2001-08-10 | 2002-08-05 | 活性トレンチコーナおよび厚底の酸化物を備えたトレンチmisデバイス、ならびにこれを製造する方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009152630A true JP2009152630A (ja) | 2009-07-09 |
JP5467781B2 JP5467781B2 (ja) | 2014-04-09 |
Family
ID=25454261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009049460A Expired - Lifetime JP5467781B2 (ja) | 2001-08-10 | 2009-03-03 | トレンチ・ゲート半導体デバイス、およびmisデバイスの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (3) | US6849898B2 (ja) |
JP (1) | JP5467781B2 (ja) |
KR (1) | KR100771815B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10290707B2 (en) | 2015-03-24 | 2019-05-14 | Toyota Jidosha Kabushiki Kaisha | Semiconductor device |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060038223A1 (en) * | 2001-07-03 | 2006-02-23 | Siliconix Incorporated | Trench MOSFET having drain-drift region comprising stack of implanted regions |
US7033876B2 (en) * | 2001-07-03 | 2006-04-25 | Siliconix Incorporated | Trench MIS device having implanted drain-drift region and thick bottom oxide and process for manufacturing the same |
US7009247B2 (en) * | 2001-07-03 | 2006-03-07 | Siliconix Incorporated | Trench MIS device with thick oxide layer in bottom of gate contact trench |
US7291884B2 (en) * | 2001-07-03 | 2007-11-06 | Siliconix Incorporated | Trench MIS device having implanted drain-drift region and thick bottom oxide |
US7652326B2 (en) | 2003-05-20 | 2010-01-26 | Fairchild Semiconductor Corporation | Power semiconductor devices and methods of manufacture |
JP3954541B2 (ja) * | 2003-08-05 | 2007-08-08 | 株式会社東芝 | 半導体装置及びその製造方法 |
GB0327793D0 (en) * | 2003-11-29 | 2003-12-31 | Koninkl Philips Electronics Nv | Trench mosfet |
JP2007531988A (ja) * | 2004-03-01 | 2007-11-08 | インターナショナル レクティファイアー コーポレイション | トレンチデバイスのための自動整合された接点構造体 |
US20060026248A1 (en) * | 2004-07-29 | 2006-02-02 | International Business Machines Corporation | System and method for preparing electronic mails |
DE112006001516T5 (de) | 2005-06-10 | 2008-04-17 | Fairchild Semiconductor Corp. | Feldeffekttransistor mit Ladungsgleichgewicht |
US7648877B2 (en) * | 2005-06-24 | 2010-01-19 | Fairchild Semiconductor Corporation | Structure and method for forming laterally extending dielectric layer in a trench-gate FET |
TWI400757B (zh) * | 2005-06-29 | 2013-07-01 | Fairchild Semiconductor | 形成遮蔽閘極場效應電晶體之方法 |
US7883965B2 (en) * | 2006-07-31 | 2011-02-08 | Hynix Semiconductor Inc. | Semiconductor device and method for fabricating the same |
KR100824205B1 (ko) * | 2006-12-26 | 2008-04-21 | 매그나칩 반도체 유한회사 | Dmos 트랜지스터 및 그 제조방법 |
US7956411B2 (en) * | 2008-01-15 | 2011-06-07 | Fairchild Semiconductor Corporation | High aspect ratio trench structures with void-free fill material |
US7807576B2 (en) * | 2008-06-20 | 2010-10-05 | Fairchild Semiconductor Corporation | Structure and method for forming a thick bottom dielectric (TBD) for trench-gate devices |
US20100308400A1 (en) * | 2008-06-20 | 2010-12-09 | Maxpower Semiconductor Inc. | Semiconductor Power Switches Having Trench Gates |
US7936009B2 (en) * | 2008-07-09 | 2011-05-03 | Fairchild Semiconductor Corporation | Shielded gate trench FET with an inter-electrode dielectric having a low-k dielectric therein |
US8193579B2 (en) * | 2008-07-29 | 2012-06-05 | Rohm Co., Ltd. | Trench type semiconductor device and fabrication method for the same |
US8426275B2 (en) | 2009-01-09 | 2013-04-23 | Niko Semiconductor Co., Ltd. | Fabrication method of trenched power MOSFET |
TWI435447B (zh) * | 2009-01-09 | 2014-04-21 | Niko Semiconductor Co Ltd | 功率金氧半導體場效電晶體及其製造方法 |
US8105903B2 (en) * | 2009-09-21 | 2012-01-31 | Force Mos Technology Co., Ltd. | Method for making a trench MOSFET with shallow trench structures |
US8735992B2 (en) * | 2010-02-18 | 2014-05-27 | Vishay-Siliconix | Power switch with active snubber |
US8378392B2 (en) * | 2010-04-07 | 2013-02-19 | Force Mos Technology Co., Ltd. | Trench MOSFET with body region having concave-arc shape |
US8598654B2 (en) | 2011-03-16 | 2013-12-03 | Fairchild Semiconductor Corporation | MOSFET device with thick trench bottom oxide |
JP5729331B2 (ja) * | 2011-04-12 | 2015-06-03 | 株式会社デンソー | 半導体装置の製造方法及び半導体装置 |
KR101339271B1 (ko) * | 2012-12-18 | 2013-12-09 | 현대자동차 주식회사 | 반도체 소자의 제조 방법 |
US20210043735A1 (en) * | 2016-04-07 | 2021-02-11 | Abb Power Grids Switzerland Ag | Short channel trench power mosfet and method |
KR102335490B1 (ko) | 2017-12-14 | 2021-12-03 | 현대자동차 주식회사 | 반도체 소자 및 그 제조 방법 |
CN109935625A (zh) * | 2017-12-15 | 2019-06-25 | 深圳尚阳通科技有限公司 | 一种肖特基二极管器件及制造方法 |
KR102417149B1 (ko) * | 2020-12-09 | 2022-07-05 | 현대모비스 주식회사 | 전력 반도체 소자 |
KR102417147B1 (ko) * | 2020-12-09 | 2022-07-05 | 현대모비스 주식회사 | 전력 반도체 소자 및 그 제조 방법 |
CN116072716A (zh) * | 2023-04-06 | 2023-05-05 | 深圳市美浦森半导体有限公司 | 一种分离栅trench MOS器件结构及其制造方法 |
CN116487418B (zh) * | 2023-06-20 | 2023-09-08 | 合肥晶合集成电路股份有限公司 | 半导体结构及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01192174A (ja) * | 1988-01-27 | 1989-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JPH09148578A (ja) * | 1995-11-11 | 1997-06-06 | Samsung Electron Co Ltd | トレンチdmosトランジスタ及びその製造方法 |
JPH1168102A (ja) * | 1997-08-21 | 1999-03-09 | Toshiba Corp | 半導体装置の製造方法 |
JPH11163342A (ja) * | 1997-11-27 | 1999-06-18 | Nec Corp | 半導体装置 |
JP2000299464A (ja) * | 1999-04-01 | 2000-10-24 | Intersil Corp | パワートレンチmosゲート装置およびその製造方法 |
JP2001127284A (ja) * | 1999-10-26 | 2001-05-11 | Hitachi Ltd | 半導体装置の製造方法 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US106812A (en) * | 1870-08-30 | Improvement in fire-escapes | ||
US927143A (en) * | 1905-11-20 | 1909-07-06 | Hill Motor Car Company | Steering-gear for automobiles. |
US4546367A (en) | 1982-06-21 | 1985-10-08 | Eaton Corporation | Lateral bidirectional notch FET with extended gate insulator |
JPS6126261A (ja) * | 1984-07-16 | 1986-02-05 | Nippon Telegr & Teleph Corp <Ntt> | 縦形mos電界効果トランジスタの製造方法 |
US4683714A (en) * | 1986-06-17 | 1987-08-04 | General Motors Corporation | Oil scavenge system |
US4914058A (en) * | 1987-12-29 | 1990-04-03 | Siliconix Incorporated | Grooved DMOS process with varying gate dielectric thickness |
US4967245A (en) * | 1988-03-14 | 1990-10-30 | Siliconix Incorporated | Trench power MOSFET device |
JPH03211885A (ja) | 1990-01-17 | 1991-09-17 | Matsushita Electron Corp | 半導体装置及びその製造方法 |
JPH0621468A (ja) | 1992-06-29 | 1994-01-28 | Toshiba Corp | 絶縁ゲート型半導体装置 |
JPH07122749A (ja) | 1993-09-01 | 1995-05-12 | Toshiba Corp | 半導体装置及びその製造方法 |
EP0676814B1 (en) * | 1994-04-06 | 2006-03-22 | Denso Corporation | Process of producing trench semiconductor device |
US5429970A (en) * | 1994-07-18 | 1995-07-04 | United Microelectronics Corporation | Method of making flash EEPROM memory cell |
US5424231A (en) | 1994-08-09 | 1995-06-13 | United Microelectronics Corp. | Method for manufacturing a VDMOS transistor |
FR2738394B1 (fr) * | 1995-09-06 | 1998-06-26 | Nippon Denso Co | Dispositif a semi-conducteur en carbure de silicium, et son procede de fabrication |
US5770878A (en) | 1996-04-10 | 1998-06-23 | Harris Corporation | Trench MOS gate device |
JP2917922B2 (ja) | 1996-07-15 | 1999-07-12 | 日本電気株式会社 | 半導体装置及びその製造方法 |
EP0948818B1 (en) | 1996-07-19 | 2009-01-07 | SILICONIX Incorporated | High density trench dmos transistor with trench bottom implant |
TW315513B (en) * | 1996-12-09 | 1997-09-11 | United Microelectronics Corp | The multi-level ROM structure and its manufacturing method |
JP3915180B2 (ja) | 1997-07-03 | 2007-05-16 | 富士電機デバイステクノロジー株式会社 | トレンチ型mos半導体装置およびその製造方法 |
US6074909A (en) | 1998-07-31 | 2000-06-13 | Siemens Aktiengesellschaft | Apparatus and method for forming controlled deep trench top isolation layers |
US6084264A (en) | 1998-11-25 | 2000-07-04 | Siliconix Incorporated | Trench MOSFET having improved breakdown and on-resistance characteristics |
US6144054A (en) | 1998-12-04 | 2000-11-07 | International Business Machines Corporation | DRAM cell having an annular signal transfer region |
JP2000269487A (ja) | 1999-03-15 | 2000-09-29 | Toshiba Corp | 半導体装置及びその製造方法 |
DE19913375B4 (de) | 1999-03-24 | 2009-03-26 | Infineon Technologies Ag | Verfahren zur Herstellung einer MOS-Transistorstruktur |
US6291298B1 (en) | 1999-05-25 | 2001-09-18 | Advanced Analogic Technologies, Inc. | Process of manufacturing Trench gate semiconductor device having gate oxide layer with multiple thicknesses |
US6291200B1 (en) | 1999-11-17 | 2001-09-18 | Agentase, Llc | Enzyme-containing polymeric sensors |
US6580123B2 (en) | 2000-04-04 | 2003-06-17 | International Rectifier Corporation | Low voltage power MOSFET device and process for its manufacture |
US6444528B1 (en) * | 2000-08-16 | 2002-09-03 | Fairchild Semiconductor Corporation | Selective oxide deposition in the bottom of a trench |
US6569738B2 (en) | 2001-07-03 | 2003-05-27 | Siliconix, Inc. | Process for manufacturing trench gated MOSFET having drain/drift region |
-
2001
- 2001-08-10 US US09/927,143 patent/US6849898B2/en not_active Expired - Lifetime
-
2002
- 2002-03-26 US US10/106,812 patent/US6903412B2/en not_active Expired - Lifetime
- 2002-03-26 US US10/106,896 patent/US6875657B2/en not_active Expired - Lifetime
- 2002-08-05 KR KR1020047002023A patent/KR100771815B1/ko not_active IP Right Cessation
-
2009
- 2009-03-03 JP JP2009049460A patent/JP5467781B2/ja not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01192174A (ja) * | 1988-01-27 | 1989-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JPH09148578A (ja) * | 1995-11-11 | 1997-06-06 | Samsung Electron Co Ltd | トレンチdmosトランジスタ及びその製造方法 |
JPH1168102A (ja) * | 1997-08-21 | 1999-03-09 | Toshiba Corp | 半導体装置の製造方法 |
JPH11163342A (ja) * | 1997-11-27 | 1999-06-18 | Nec Corp | 半導体装置 |
JP2000299464A (ja) * | 1999-04-01 | 2000-10-24 | Intersil Corp | パワートレンチmosゲート装置およびその製造方法 |
JP2001127284A (ja) * | 1999-10-26 | 2001-05-11 | Hitachi Ltd | 半導体装置の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10290707B2 (en) | 2015-03-24 | 2019-05-14 | Toyota Jidosha Kabushiki Kaisha | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
US20030032248A1 (en) | 2003-02-13 |
US20030032247A1 (en) | 2003-02-13 |
KR20040044441A (ko) | 2004-05-28 |
US6875657B2 (en) | 2005-04-05 |
US6849898B2 (en) | 2005-02-01 |
US20030030104A1 (en) | 2003-02-13 |
JP5467781B2 (ja) | 2014-04-09 |
US6903412B2 (en) | 2005-06-07 |
KR100771815B1 (ko) | 2007-10-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5467781B2 (ja) | トレンチ・ゲート半導体デバイス、およびmisデバイスの製造方法 | |
US7416947B2 (en) | Method of fabricating trench MIS device with thick oxide layer in bottom of trench | |
US6921697B2 (en) | Method for making trench MIS device with reduced gate-to-drain capacitance | |
JP4388017B2 (ja) | 注入されたドレインドリフト領域および厚い底部酸化物を有するトレンチmis装置およびそれを製造するためのプロセス | |
JP5649597B2 (ja) | トレンチmisデバイスの終端領域の作製プロセスおよび、misデバイスを含む半導体ダイとその形成方法 | |
US7795675B2 (en) | Termination for trench MIS device | |
US7326995B2 (en) | Trench MIS device having implanted drain-drift region and thick bottom oxide | |
TWI381527B (zh) | 超自對準構槽型雙擴散金屬氧化物半導體電晶體結構及其製造方法 | |
JP2837014B2 (ja) | 半導体装置及びその製造方法 | |
US20050218447A1 (en) | Process of fabricating termination region for trench MIS device | |
JP4299665B2 (ja) | 活性トレンチコーナおよび厚底の酸化物を備えたトレンチmisデバイス、ならびにこれを製造する方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120302 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120327 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120626 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120629 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120726 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120731 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120824 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120829 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120926 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20121023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130222 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20130301 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20130322 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130329 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130820 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130826 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131202 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140128 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5467781 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |