JP2009076687A - アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法 - Google Patents
アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法 Download PDFInfo
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Abstract
【解決手段】流路形成基板用ウェハ110の表面に下電極60を形成し、第3圧電体層73を焼成する温度よりも低い焼成温度で第1圧電体層71を下電極60上に形成し、下電極60及び第1圧電体層71を同時にパターニングし、その後、第3圧電体層73を焼成する温度よりも低い焼成温度で第2圧電体層72を第1圧電体層71を含む流路形成基板用ウェハ110の全面に形成し、その後、複数の圧電体膜75からなる第3圧電体層73を形成し、該第3圧電体層73上に上電極を形成する。
【選択図】 図5
Description
かかる態様では、第1圧電体層及び第2圧電体層を第3圧電体層の焼成温度よりも低温で焼成することで、圧電体層に組成不安定相ができることを防止し、アクチュエータ装置の変位特性の向上を図ることができると共に、信頼性を向上できる。
かかる態様では、液体噴射特性を向上して信頼性を向上した液体噴射ヘッドを製造することができる。
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図及びそのA−A′断面図である。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態1では、下電極60及び第1圧電体層71を形成後、これらを同時にパターニングしたが、特にこれに限定されず、圧電体層70及び上電極80を形成した後パターニングしてもよい。
Claims (4)
- 基板上に下電極を形成する工程と、該下電極上にチタン、ジルコニウム及び鉛を含む圧電体前駆体膜を形成すると共に前記圧電体前駆体膜を焼成して結晶化して圧電体膜を形成する工程を繰り返し行って菱面体晶系の結晶構造を有する複数の圧電体膜で構成される圧電体層を形成する工程と、該圧電体層上に上電極を形成する工程とを具備し、
前記圧電体層を形成する工程では、前記下電極上に第1圧電体層と、該第1圧電体層上に第2圧電体層と、該第2圧電体層上に第3圧電体層とを形成する際、
前記下電極を形成した後、前記下電極上に種チタン層を形成し、その後、該種チタン層上に前記第3圧電体層の焼成温度よりも低い温度で焼成することにより前記第1圧電体層を形成すると共に、
前記第1圧電体層を形成した後、前記第1圧電体層上に中間種チタン層を形成し、その後、該中間種チタン層上に前記第3圧電体層の焼成温度よりも低い温度で焼成することにより前記第2圧電体層を形成すると共に、
該第2圧電体層上に1層以上の圧電体膜を積層して第3圧電体層を形成することを特徴とするアクチュエータ装置の製造方法。 - 請求項1に記載するアクチュエータ装置の製造方法において、
前記第1圧電体層を、前記種チタン層の厚さの5〜40倍の厚さに形成すると共に摂氏630度〜680度で焼成し、
前記第2圧電体層を、前記中間種チタン層の厚さの5〜40倍の厚さに形成すると共に摂氏630度〜680度で焼成することを特徴とするアクチュエータ装置の製造方法。 - 請求項1又は請求項2に記載するアクチュエータ装置の製造方法において、
前記第1圧電体層を形成した後、前記下電極と前記第1圧電体層とを同時にパターニングする工程を更に具備し、
前記圧電体層を形成する工程では、パターニングされた前記第1圧電体層を含む前記基板上に前記中間チタン層を形成した後、前記第2圧電体層と前記第3圧電体層と前記上電極とを順次積層することを特徴とするアクチュエータ装置の製造方法。 - 液体を噴射するノズル開口に連通する圧力発生室が設けられた流路形成基板と、該流路形成基板の一方面側に前記圧力発生室に圧力変化を生じさせて前記ノズル開口から液体を噴射させる液体噴射手段を具備する液体噴射ヘッドの製造方法であって、
前記液体噴射手段を請求項1〜請求項3の何れか一項に記載のアクチュエータ装置の製造方法で形成することを特徴とする液体噴射ヘッドの製造方法。
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JP2007244428A JP5187489B2 (ja) | 2007-09-20 | 2007-09-20 | アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法 |
US12/234,338 US20090077782A1 (en) | 2007-09-20 | 2008-09-19 | Method for producing actuator device and method for producing liquid ejecting head |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015154037A (ja) * | 2014-02-19 | 2015-08-24 | セイコーエプソン株式会社 | 圧電アクチュエーター、液体噴射ヘッド、及び圧電アクチュエーターの製造方法 |
US10825979B2 (en) | 2016-08-31 | 2020-11-03 | Seiko Epson Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric motor, robot, electronic component transporting apparatus, and printer |
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Publication number | Priority date | Publication date | Assignee | Title |
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EP1978569B1 (en) * | 2007-02-19 | 2011-11-30 | Siemens Aktiengesellschaft | Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator |
EP1978567B1 (en) * | 2007-02-19 | 2014-06-25 | Continental Automotive GmbH | Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator |
EP1978568B1 (en) * | 2007-02-19 | 2011-10-12 | Siemens Aktiengesellschaft | Piezoceramic multilayer actuator and method of manufacturing the same |
JP5919956B2 (ja) * | 2012-03-30 | 2016-05-18 | 三菱マテリアル株式会社 | Pzt系強誘電体薄膜の製造方法 |
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JP4737375B2 (ja) * | 2004-03-11 | 2011-07-27 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法 |
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JP2006144090A (ja) * | 2004-11-22 | 2006-06-08 | Seiko Epson Corp | スパッタリング方法、スパッタリング装置、圧電素子の製造方法及び液体噴射ヘッド |
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JP2015154037A (ja) * | 2014-02-19 | 2015-08-24 | セイコーエプソン株式会社 | 圧電アクチュエーター、液体噴射ヘッド、及び圧電アクチュエーターの製造方法 |
US10825979B2 (en) | 2016-08-31 | 2020-11-03 | Seiko Epson Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric motor, robot, electronic component transporting apparatus, and printer |
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