JP2008513742A - 直接像の技術を使用した平面の媒質の光学検査 - Google Patents

直接像の技術を使用した平面の媒質の光学検査 Download PDF

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JP2008513742A
JP2008513742A JP2007531555A JP2007531555A JP2008513742A JP 2008513742 A JP2008513742 A JP 2008513742A JP 2007531555 A JP2007531555 A JP 2007531555A JP 2007531555 A JP2007531555 A JP 2007531555A JP 2008513742 A JP2008513742 A JP 2008513742A
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transparent medium
scanning
defect
glass
light
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JP2008513742A5 (enExample
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トーマス，デイヴィッド，ピー．
ウェイス，アダム
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ディー．バイス サイエンティフィック インコーポレーテッド
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Publication of JP2008513742A publication Critical patent/JP2008513742A/ja
Publication of JP2008513742A5 publication Critical patent/JP2008513742A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2007531555A 2004-09-17 2005-09-19 直接像の技術を使用した平面の媒質の光学検査 Pending JP2008513742A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61060504P 2004-09-17 2004-09-17
PCT/CA2005/001421 WO2006029536A1 (en) 2004-09-17 2005-09-19 Optical inspection of flat media using direct image technology

Publications (2)

Publication Number Publication Date
JP2008513742A true JP2008513742A (ja) 2008-05-01
JP2008513742A5 JP2008513742A5 (enExample) 2012-01-12

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JP2007531555A Pending JP2008513742A (ja) 2004-09-17 2005-09-19 直接像の技術を使用した平面の媒質の光学検査

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Country Link
US (1) US8040502B2 (enExample)
EP (1) EP1794577A4 (enExample)
JP (1) JP2008513742A (enExample)
KR (1) KR20070085258A (enExample)
CA (1) CA2580551A1 (enExample)
WO (1) WO2006029536A1 (enExample)

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US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP4960161B2 (ja) * 2006-10-11 2012-06-27 日東電工株式会社 検査データ処理装置及び検査データ処理方法
GB2479677A (en) * 2007-04-23 2011-10-19 Belron Hungary Kft Zug Branch Glazing panel investigation
US7948617B2 (en) * 2007-07-09 2011-05-24 Fluke Corporation Optical multiwavelength window contamination monitor for optical control sensors and systems
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US8953083B2 (en) * 2012-02-13 2015-02-10 Apple Inc. Housing camera lens cover using GRIN technology
US20130226330A1 (en) * 2012-02-24 2013-08-29 Alliance For Sustainable Energy, Llc Optical techniques for monitoring continuous manufacturing of proton exchange membrane fuel cell components
US9389187B2 (en) * 2012-11-29 2016-07-12 Corning Incorporated Glass-sheet optical inspection systems and methods with illumination and exposure control
DE102013108485B4 (de) * 2013-08-06 2015-06-25 Khs Gmbh Vorrichtung und Verfahren zum Fehlertracking bei Bandmaterialien
JP2017502295A (ja) * 2013-12-23 2017-01-19 コーニング インコーポレイテッド 非イメージングコヒーレントラインスキャナシステムおよび光学検査方法
CN104459421B (zh) * 2014-12-30 2017-07-11 广州视源电子科技股份有限公司 一种二极管极性检测方法与系统
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CN104897693A (zh) * 2015-06-12 2015-09-09 武汉中导光电设备有限公司 一种玻璃表面缺陷增强装置及其检测方法
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KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
CN106596580A (zh) * 2016-06-14 2017-04-26 艾悌亚信息技术（上海）有限公司 可提高触摸屏玻屏aoi检测良品率的aoi算法/工艺方法
CN106323600B (zh) * 2016-08-31 2020-04-24 武汉精测电子集团股份有限公司 一种级联分布式aoi缺陷检测系统及其检测方法
JP7183156B2 (ja) 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部の検査方法および装置並びに入射光の出射方法
JP7183155B2 (ja) 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部検査方法および装置
US10480935B2 (en) 2016-12-02 2019-11-19 Alliance For Sustainable Energy, Llc Thickness mapping using multispectral imaging
KR101937187B1 (ko) * 2017-05-11 2019-01-14 주식회사 에이치비테크놀러지 필름표면의 불량 검출 장치
CN111246943B (zh) * 2017-08-15 2021-06-22 通用医疗公司 用于集成复用模块化测光的方法和系统
US10402963B2 (en) * 2017-08-24 2019-09-03 Kla-Tencor Corporation Defect detection on transparent or translucent wafers
US11415528B2 (en) * 2017-10-10 2022-08-16 Wdi Wise Device Inc. Method and apparatus for automated in-line inspection of optically transparent materials
CN212207144U (zh) * 2017-11-15 2020-12-22 康宁公司 用于检测玻璃片上的表面缺陷的设备
US10408705B1 (en) * 2017-12-21 2019-09-10 Lawrence Livermore National Security, Llc System and method for focal-plane angular-spatial illuminator/detector (fasid) design for improved graded index lenses
EP3502637A1 (en) * 2017-12-23 2019-06-26 ABB Schweiz AG Method and system for real-time web manufacturing supervision
CN108445022B (zh) * 2018-03-19 2020-11-03 无锡尚实电子科技有限公司 一种玻璃残才去除检测方式
US11054370B2 (en) * 2018-08-07 2021-07-06 Britescan, Llc Scanning devices for ascertaining attributes of tangible objects
CA3108903A1 (en) 2018-08-07 2020-02-13 Britescan, Llc Portable scanning device for ascertaining attributes of sample materials
CN109686157B (zh) * 2018-12-10 2021-04-30 武汉精立电子技术有限公司 一种兼具复判与考试功能的面板复检系统
CN109613004A (zh) * 2018-12-13 2019-04-12 武汉精立电子技术有限公司 一种背光检中缺陷显示方法
CN109558562B (zh) * 2018-12-14 2021-05-18 武汉精立电子技术有限公司 一种用于aoi复判的管理方法与系统
CN110208269B (zh) * 2019-05-17 2021-08-20 高视科技(苏州)有限公司 一种玻璃表面异物与内部异物区分的方法及系统
CN112824881A (zh) * 2020-04-28 2021-05-21 奕目(上海)科技有限公司 一种基于光场相机的透明或半透明介质缺陷检测系统及方法
CN112782176A (zh) * 2020-05-15 2021-05-11 奕目(上海)科技有限公司 一种产品外观检测方法及装置
JP2023530429A (ja) 2020-06-17 2023-07-18 コーニング インコーポレイテッド ガラス系基板の特徴を測定するための方法及び装置
CN112748071A (zh) * 2020-07-17 2021-05-04 奕目(上海)科技有限公司 透明或半透明介质缺陷检测系统和方法

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JPS6168543A (ja) * 1984-09-12 1986-04-08 Nitto Electric Ind Co Ltd 検体における欠陥の光学的検査方法及びその装置
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JPS63173940A (ja) * 1987-01-14 1988-07-18 Nippon Sheet Glass Co Ltd 光学式欠陥検出装置
JPH0283438A (ja) * 1988-09-21 1990-03-23 Nissan Motor Co Ltd 透明板表面の付着物等評価装置
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Publication number Publication date
CA2580551A1 (en) 2006-03-23
KR20070085258A (ko) 2007-08-27
EP1794577A4 (en) 2010-10-06
US20080062422A1 (en) 2008-03-13
WO2006029536A1 (en) 2006-03-23
US8040502B2 (en) 2011-10-18
EP1794577A1 (en) 2007-06-13

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