JP2008311291A - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 54
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 160
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 160
- 239000010703 silicon Substances 0.000 claims abstract description 160
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 89
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 89
- 238000000034 method Methods 0.000 claims abstract description 79
- 238000000137 annealing Methods 0.000 claims abstract description 48
- 230000008569 process Effects 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims description 156
- 238000009792 diffusion process Methods 0.000 claims description 57
- 238000005530 etching Methods 0.000 claims description 56
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 38
- 238000002161 passivation Methods 0.000 claims description 29
- 239000012535 impurity Substances 0.000 claims description 24
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 21
- 229910000077 silane Inorganic materials 0.000 claims description 20
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 19
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 19
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 17
- 238000010030 laminating Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 238000002407 reforming Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 152
- 239000007789 gas Substances 0.000 description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 27
- 229910052814 silicon oxide Inorganic materials 0.000 description 27
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 22
- 238000010438 heat treatment Methods 0.000 description 17
- 239000000243 solution Substances 0.000 description 16
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 14
- 229910052796 boron Inorganic materials 0.000 description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- 229910052698 phosphorus Inorganic materials 0.000 description 8
- 239000011574 phosphorus Substances 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 7
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
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- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 5
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000012808 vapor phase Substances 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910007991 Si-N Inorganic materials 0.000 description 2
- 229910006294 Si—N Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000006388 chemical passivation reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000572 ellipsometry Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
【解決手段】シリコン基板の少なくとも片面に屈折率が2.4以上3.2以下の窒化シリコン膜を形成する第1工程と、窒化シリコン膜が形成されたシリコン基板をアニール処理する第2工程とを含む太陽電池の製造方法に関する。
【選択図】図6
Description
高屈折率の窒化シリコン膜は、一般に使用される屈折率2.0前後の窒化シリコン膜とくらべ、様々な点で明らかに異なる。
<第1工程>
上述の検討から、本発明の第1工程において、まず、シリコン基板の少なくとも片面に、プラズマCVD法により屈折率が2.4以上3.2以下の窒化シリコン膜を形成する。該窒化シリコン膜は、混合ガスを用いたプラズマCVD法により形成されることが好ましい。
<第2工程>
本発明は、第1工程の後にアニール処理を行なうことで、更なるシリコン基板のτcpの向上を図ることができる。
次に、さらに高温、長時間でアニール処理を行ない、τcpの向上について検証した。表3に示す条件6〜9の設定で、シリコン基板をそれぞれアニール処理した。
高n−SiNを表面に形成したシリコン基板をアニール処理することで、該シリコン基板が改質される。そこで、本発明の太陽電池の製造方法は、高n−SiNをシリコン基板の表面に形成後アニール処理によりシリコン基板を改質する工程を含むことを特徴とする。さらに、本発明において、高n−SiNを不純物拡散層形成時の拡散マスクに使用し、不純物拡散層形成時の加熱処理が、アニール処理を兼ねることで、製造工程の簡略化を図ることができる。具体的には、第1工程における窒化シリコン膜は、拡散マスクであり、第2工程は、シリコン基板の不純物拡散層の形成を兼ねる。
図1Aは、本発明における好ましい一実施形態で製造される太陽電池の裏面からの平面図である。図1Bは、図1AのIB−IB線に沿った太陽電池の断面図である。
≪形態1≫
図6は、本発明の製造工程の好ましい一形態の各工程を示す断面図である。以下、本実施の形態において図6に基づいて説明する。図6(a)〜(k)においては説明の便宜のためシリコン基板1の裏面にn+層6とp+層5を1つずつ形成したものを示す。
図7は、本発明の製造工程の好ましい一形態の各工程を示す断面図である。以下、本実施の形態において図7に基づいて説明する。図7(a)〜(k)においては説明の便宜のためシリコン基板の裏面にn+層とp+層を1つずつ形成したものを示す。
<実施例1>
本発明の実施例を、裏面接合型太陽電池を例に図6に基づいて説明する。
本発明の実施例を、裏面接合型太陽電池を例に図7に基づいて開示する。
図8は、比較例として、従来の太陽電池の製造方法の各工程を示す断面図である。図8(a)〜(k)においては説明の便宜のためシリコン基板の裏面にn+層とp+層を1つずつ形成したものを示す。以下、比較例について図8に基づいて裏面接合型太陽電池を例にして説明する。
実施例1、実施例2および比較例で作製された太陽電池を標準照射条件(A.M.1.5G、100mW/cm2、25℃)で、Jsc(短絡電流密度)、Voc(開放電圧)を測定した値を以下の表5に示す。
Claims (13)
- シリコン基板の少なくとも片面に屈折率が2.4以上3.2以下の窒化シリコン膜を形成する第1工程と、
前記窒化シリコン膜が形成された前記シリコン基板をアニール処理する第2工程と、を含む太陽電池の製造方法。 - 前記第1工程は、シランガスとアンモニアガスとを含む混合ガスを用いるプラズマCVD法でなされ、
前記混合ガスの中の、前記シランガス/前記アンモニアガスの比が0.7以上である
請求項1に記載の太陽電池の製造方法。 - 前記窒化シリコン膜は、膜厚が5nm以上100nm以下である請求項1または2に記載の太陽電池の製造方法。
- 前記アニール処理の温度が450℃以上1000℃以下である請求項1〜3のいずれかに記載の太陽電池の製造方法。
- 前記アニール処理の時間が1分以上60分以下である請求項1〜4のいずれかに記載の太陽電池の製造方法。
- 前記第1工程における前記窒化シリコン膜は、拡散マスクであり、
前記第2工程は、前記シリコン基板の不純物拡散層の形成を兼ねる請求項1〜5のいずれかに記載の太陽電池の製造方法。 - 前記第1工程の前記拡散マスクのパターニングは、前記窒化シリコン膜をエッチング可能な成分を含有するエッチングペーストを用いる請求項6に記載の太陽電池の製造方法。
- 前記エッチングペーストは、リン酸を20重量%以上40重量%以下含有する請求項6に記載の太陽電池の製造方法。
- 前記第2工程の後、前記窒化シリコン膜にパッシベーション膜を積層する工程を含む請求項6〜8のいずれかに記載の太陽電池の製造方法。
- 前記第2工程の後、前記窒化シリコン膜を除去する工程を含む請求項1〜8のいずれかに記載の太陽電池の製造方法。
- 前記シリコン基板の裏面にパッシベーション膜を形成する工程を含む請求項10に記載の太陽電池の製造方法。
- 前記パッシベーション膜は、屈折率2.4以上3.2以下の窒化シリコン膜である請求項10または11に記載の太陽電池の製造方法。
- 前記第2工程の後、前記窒化シリコン膜に、前記窒化シリコン膜をエッチング可能な成分を含有するエッチングペーストを塗布し、
前記シリコン基板を350℃以上400℃以下で加熱して、
前記窒化シリコン膜を除去する工程を含む請求項10に記載の太陽電池の製造方法。
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010161310A (ja) * | 2009-01-09 | 2010-07-22 | Sharp Corp | 裏面電極型太陽電池および裏面電極型太陽電池の製造方法 |
WO2010101054A1 (ja) * | 2009-03-02 | 2010-09-10 | シャープ株式会社 | 半導体装置の製造方法 |
WO2010110106A1 (ja) * | 2009-03-27 | 2010-09-30 | シャープ株式会社 | 光電変換素子の製造方法および光電変換素子 |
WO2011048656A1 (ja) * | 2009-10-19 | 2011-04-28 | 三菱電機株式会社 | 基板の粗面化方法、光起電力装置の製造方法 |
WO2011149021A1 (ja) * | 2010-05-28 | 2011-12-01 | 株式会社エバテック | 光起電力素子の製造方法及び光起電力素子 |
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