JP2008306180A - 膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置 - Google Patents

膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置 Download PDF

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Publication number
JP2008306180A
JP2008306180A JP2008132105A JP2008132105A JP2008306180A JP 2008306180 A JP2008306180 A JP 2008306180A JP 2008132105 A JP2008132105 A JP 2008132105A JP 2008132105 A JP2008132105 A JP 2008132105A JP 2008306180 A JP2008306180 A JP 2008306180A
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Japan
Prior art keywords
substrate
polishing
edge
backing plate
film
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Pending
Application number
JP2008132105A
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English (en)
Japanese (ja)
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JP2008306180A5 (enExample
Inventor
Zhenhua Zhang
ザング ゼンフア
Paul D Butterfield
ディー． バターフィールド ポール
Shou-Sung Chang
チャン ショウ−スン
Eashwer Kollata
コラタ イーシュワー
Sen-Hou Ko
コ セン−ホウ
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Applied Materials Inc
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Applied Materials Inc
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Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2008306180A publication Critical patent/JP2008306180A/ja
Publication of JP2008306180A5 publication Critical patent/JP2008306180A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2008132105A 2007-05-21 2008-05-20 膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置 Pending JP2008306180A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93934307P 2007-05-21 2007-05-21

Publications (2)

Publication Number Publication Date
JP2008306180A true JP2008306180A (ja) 2008-12-18
JP2008306180A5 JP2008306180A5 (enExample) 2011-06-23

Family

ID=40072855

Family Applications (1)

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JP2008132105A Pending JP2008306180A (ja) 2007-05-21 2008-05-20 膜の基板斜面及び縁部の研磨プロファイルを制御する方法及び装置

Country Status (3)

Country Link
US (1) US20080293336A1 (enExample)
JP (1) JP2008306180A (enExample)
TW (1) TW200908123A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011161625A (ja) * 2010-01-15 2011-08-25 Ebara Corp 研磨装置、研磨方法、研磨具を押圧する押圧部材
WO2021044735A1 (ja) * 2019-09-03 2021-03-11 株式会社荏原製作所 研磨装置

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TW200908124A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a bevel polishing head with an efficient tape routing arrangement
JP2008284684A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 研磨アームを使用して基板の縁部を研磨する方法及び装置
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
US20080293333A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for controlling the size of an edge exclusion zone of a substrate
US20080293337A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for polishing a notch of a substrate by substrate vibration
JP2008306179A (ja) * 2007-05-21 2008-12-18 Applied Materials Inc バッキングパッドを使用して基板の両面の縁部から膜及び薄片を除去する方法及び装置
US20080291448A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for finding a substrate notch center
JP2009004765A (ja) * 2007-05-21 2009-01-08 Applied Materials Inc 基板研磨のためにローリングバッキングパッドを使用する方法及び装置
JP2009119537A (ja) * 2007-11-12 2009-06-04 Toshiba Corp 基板処理方法及び基板処理装置
JP5393039B2 (ja) * 2008-03-06 2014-01-22 株式会社荏原製作所 研磨装置
TW201002472A (en) * 2008-04-21 2010-01-16 Applied Materials Inc Apparatus and methods for using a polishing tape cassette
US20100105290A1 (en) * 2008-10-24 2010-04-29 Applied Materials, Inc. Methods and apparatus for indicating a polishing tape end
JP2011224680A (ja) * 2010-04-16 2011-11-10 Ebara Corp 研磨方法及び研磨装置
US8968537B2 (en) 2011-02-09 2015-03-03 Applied Materials, Inc. PVD sputtering target with a protected backing plate
JP5886602B2 (ja) 2011-03-25 2016-03-16 株式会社荏原製作所 研磨装置および研磨方法
US9457447B2 (en) 2011-03-28 2016-10-04 Ebara Corporation Polishing apparatus and polishing method
JP6223873B2 (ja) * 2014-03-14 2017-11-01 株式会社荏原製作所 研磨装置及び研磨方法
EP3567139B1 (en) 2018-05-11 2021-04-07 SiCrystal GmbH Chamfered silicon carbide substrate and method of chamfering
EP3567138B1 (en) 2018-05-11 2020-03-25 SiCrystal GmbH Chamfered silicon carbide substrate and method of chamfering

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JP2004241434A (ja) * 2003-02-03 2004-08-26 Ebara Corp 基板処理装置

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JP2008036783A (ja) * 2006-08-08 2008-02-21 Sony Corp 研磨方法および研磨装置
JP2008306179A (ja) * 2007-05-21 2008-12-18 Applied Materials Inc バッキングパッドを使用して基板の両面の縁部から膜及び薄片を除去する方法及び装置
US20080293333A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for controlling the size of an edge exclusion zone of a substrate
TW200908124A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for using a bevel polishing head with an efficient tape routing arrangement
JP2008284684A (ja) * 2007-05-21 2008-11-27 Applied Materials Inc 研磨アームを使用して基板の縁部を研磨する方法及び装置
JP2008290233A (ja) * 2007-05-21 2008-12-04 Applied Materials Inc 半導体製造における基板斜面及び縁部の研磨用の高性能及び低価格の研磨テープのための方法及び装置
US20080293337A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for polishing a notch of a substrate by substrate vibration
US20080293329A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for identifying a substrate edge profile and adjusting the processing of the substrate according to the identified edge profile
US20080291448A1 (en) * 2007-05-21 2008-11-27 Applied Materials, Inc. Methods and apparatus for finding a substrate notch center
JP2009004765A (ja) * 2007-05-21 2009-01-08 Applied Materials Inc 基板研磨のためにローリングバッキングパッドを使用する方法及び装置
TW200908125A (en) * 2007-05-21 2009-02-16 Applied Materials Inc Methods and apparatus for polishing a notch of a substrate using a polishing pad

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2004241434A (ja) * 2003-02-03 2004-08-26 Ebara Corp 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011161625A (ja) * 2010-01-15 2011-08-25 Ebara Corp 研磨装置、研磨方法、研磨具を押圧する押圧部材
WO2021044735A1 (ja) * 2019-09-03 2021-03-11 株式会社荏原製作所 研磨装置

Also Published As

Publication number Publication date
TW200908123A (en) 2009-02-16
US20080293336A1 (en) 2008-11-27

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