JP2008224581A - ガスセンサ - Google Patents

ガスセンサ Download PDF

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Publication number
JP2008224581A
JP2008224581A JP2007066480A JP2007066480A JP2008224581A JP 2008224581 A JP2008224581 A JP 2008224581A JP 2007066480 A JP2007066480 A JP 2007066480A JP 2007066480 A JP2007066480 A JP 2007066480A JP 2008224581 A JP2008224581 A JP 2008224581A
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JP
Japan
Prior art keywords
vibrating piece
gas
hydrogen
axis
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007066480A
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English (en)
Japanese (ja)
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JP2008224581A5 (https=
Inventor
Toshitsugu Ueda
敏嗣 植田
Masako Tanaka
雅子 田中
Takashi Yamazaki
隆 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Waseda University
Miyazaki Epson Corp
Original Assignee
Seiko Epson Corp
Waseda University
Epson Toyocom Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Waseda University, Epson Toyocom Corp filed Critical Seiko Epson Corp
Priority to JP2007066480A priority Critical patent/JP2008224581A/ja
Publication of JP2008224581A publication Critical patent/JP2008224581A/ja
Publication of JP2008224581A5 publication Critical patent/JP2008224581A5/ja
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2007066480A 2007-03-15 2007-03-15 ガスセンサ Pending JP2008224581A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007066480A JP2008224581A (ja) 2007-03-15 2007-03-15 ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007066480A JP2008224581A (ja) 2007-03-15 2007-03-15 ガスセンサ

Publications (2)

Publication Number Publication Date
JP2008224581A true JP2008224581A (ja) 2008-09-25
JP2008224581A5 JP2008224581A5 (https=) 2010-05-13

Family

ID=39843374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007066480A Pending JP2008224581A (ja) 2007-03-15 2007-03-15 ガスセンサ

Country Status (1)

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JP (1) JP2008224581A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112016004203T5 (de) 2015-09-16 2018-06-07 Koa Corporation Wasserstoffsensor
US10848159B2 (en) 2015-04-13 2020-11-24 Panasonic Intellectual Property Management Co., Ltd. Drive circuit, physical quantity sensor, and electronic device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171440A (ja) * 1984-02-16 1985-09-04 Fuji Electric Corp Res & Dev Ltd ガスセンサ−
JPH04278437A (ja) * 1991-03-05 1992-10-05 Figaro Eng Inc 接触燃焼式ガスセンサ
JPH06123689A (ja) * 1992-10-09 1994-05-06 Omron Corp 匂い物質測定用センサ
JP2005156289A (ja) * 2003-11-25 2005-06-16 Ulvac Japan Ltd セル、振動子及びこれらを備えるバイオセンサー装置並びに測定方法
JP2007064866A (ja) * 2005-09-01 2007-03-15 Toshitsugu Ueda ガスセンサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171440A (ja) * 1984-02-16 1985-09-04 Fuji Electric Corp Res & Dev Ltd ガスセンサ−
JPH04278437A (ja) * 1991-03-05 1992-10-05 Figaro Eng Inc 接触燃焼式ガスセンサ
JPH06123689A (ja) * 1992-10-09 1994-05-06 Omron Corp 匂い物質測定用センサ
JP2005156289A (ja) * 2003-11-25 2005-06-16 Ulvac Japan Ltd セル、振動子及びこれらを備えるバイオセンサー装置並びに測定方法
JP2007064866A (ja) * 2005-09-01 2007-03-15 Toshitsugu Ueda ガスセンサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10848159B2 (en) 2015-04-13 2020-11-24 Panasonic Intellectual Property Management Co., Ltd. Drive circuit, physical quantity sensor, and electronic device
DE112016004203T5 (de) 2015-09-16 2018-06-07 Koa Corporation Wasserstoffsensor
US10690606B2 (en) 2015-09-16 2020-06-23 Koa Corporation Hydrogen sensor

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