JP2008224581A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2008224581A5 JP2008224581A5 JP2007066480A JP2007066480A JP2008224581A5 JP 2008224581 A5 JP2008224581 A5 JP 2008224581A5 JP 2007066480 A JP2007066480 A JP 2007066480A JP 2007066480 A JP2007066480 A JP 2007066480A JP 2008224581 A5 JP2008224581 A5 JP 2008224581A5
- Authority
- JP
- Japan
- Prior art keywords
- axis
- gas sensor
- gas
- piezoelectric vibrating
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007809 chemical reaction catalyst Substances 0.000 claims 5
- 230000005284 excitation Effects 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 230000010355 oscillation Effects 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007066480A JP2008224581A (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007066480A JP2008224581A (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008224581A JP2008224581A (ja) | 2008-09-25 |
| JP2008224581A5 true JP2008224581A5 (https=) | 2010-05-13 |
Family
ID=39843374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007066480A Pending JP2008224581A (ja) | 2007-03-15 | 2007-03-15 | ガスセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008224581A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6726844B2 (ja) | 2015-04-13 | 2020-07-22 | パナソニックIpマネジメント株式会社 | 駆動回路、物理量センサ及び電子機器 |
| DE112016004203T5 (de) | 2015-09-16 | 2018-06-07 | Koa Corporation | Wasserstoffsensor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60171440A (ja) * | 1984-02-16 | 1985-09-04 | Fuji Electric Corp Res & Dev Ltd | ガスセンサ− |
| JP3087971B2 (ja) * | 1991-03-05 | 2000-09-18 | フィガロ技研株式会社 | 接触燃焼式ガスセンサ |
| JPH06123689A (ja) * | 1992-10-09 | 1994-05-06 | Omron Corp | 匂い物質測定用センサ |
| JP4210205B2 (ja) * | 2003-11-25 | 2009-01-14 | 株式会社アルバック | セル及びこれを備えるバイオセンサー装置並びに測定方法 |
| JP4852283B2 (ja) * | 2005-09-01 | 2012-01-11 | 敏嗣 植田 | ガスセンサ |
-
2007
- 2007-03-15 JP JP2007066480A patent/JP2008224581A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010028610A5 (https=) | ||
| JP2012114495A5 (https=) | ||
| JP2012114496A5 (https=) | ||
| JP2011004035A5 (https=) | ||
| JP2013149124A (ja) | 力覚提示振動体および力覚提示振動体アレイ | |
| CN106842729B (zh) | 石墨烯电极制备方法及液晶显示面板 | |
| JP5765087B2 (ja) | 屈曲振動片、その製造方法及び電子機器 | |
| JP2008224581A5 (https=) | ||
| JP2012160996A5 (https=) | ||
| JP2008224582A5 (https=) | ||
| JP2011228980A5 (https=) | ||
| JP2005227215A (ja) | 角速度センサおよびその設計方法 | |
| CN103221777B (zh) | 惯性力传感器 | |
| JP2007036656A5 (https=) | ||
| JP5208373B2 (ja) | 慣性力センサ | |
| TW201143281A (en) | Vibrating piece substrate and tuning-fork vibrating piece | |
| JP2010103459A (ja) | 圧電素子及び、前記圧電素子を備えた物理量センサ | |
| JP2010181179A (ja) | 角速度検出装置 | |
| JP4535502B2 (ja) | 物質検出素子 | |
| JP2010200334A5 (https=) | ||
| JPWO2015075908A1 (ja) | 角速度センサ素子およびそれを用いた角速度センサ | |
| JP2013162266A5 (https=) | ||
| JP2008199570A5 (https=) | ||
| JP2012015696A5 (https=) | ||
| JP2008283529A5 (https=) |