JP2008283529A5 - - Google Patents
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- Publication number
- JP2008283529A5 JP2008283529A5 JP2007126716A JP2007126716A JP2008283529A5 JP 2008283529 A5 JP2008283529 A5 JP 2008283529A5 JP 2007126716 A JP2007126716 A JP 2007126716A JP 2007126716 A JP2007126716 A JP 2007126716A JP 2008283529 A5 JP2008283529 A5 JP 2008283529A5
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- layer
- fork vibrator
- piezoelectric layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000006104 solid solution Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007126716A JP2008283529A (ja) | 2007-05-11 | 2007-05-11 | 音叉振動子および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007126716A JP2008283529A (ja) | 2007-05-11 | 2007-05-11 | 音叉振動子および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008283529A JP2008283529A (ja) | 2008-11-20 |
| JP2008283529A5 true JP2008283529A5 (https=) | 2010-06-17 |
Family
ID=40143963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007126716A Withdrawn JP2008283529A (ja) | 2007-05-11 | 2007-05-11 | 音叉振動子および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008283529A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114761143B (zh) * | 2019-11-25 | 2023-07-21 | 株式会社村田制作所 | 压电装置 |
-
2007
- 2007-05-11 JP JP2007126716A patent/JP2008283529A/ja not_active Withdrawn
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